CN209466508U - A kind of high stable clamping device in silicon chip working process - Google Patents
A kind of high stable clamping device in silicon chip working process Download PDFInfo
- Publication number
- CN209466508U CN209466508U CN201821493935.8U CN201821493935U CN209466508U CN 209466508 U CN209466508 U CN 209466508U CN 201821493935 U CN201821493935 U CN 201821493935U CN 209466508 U CN209466508 U CN 209466508U
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- China
- Prior art keywords
- rod
- drive sleeve
- silicon chip
- lower platen
- clamping device
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model provides the high stable clamping device in a kind of silicon chip working process, including lifting cylinder, piston is fitted in lifting cylinder, drive sleeve is fitted in the middle part of piston, the middle part of drive sleeve is equipped with drive rod, the top and bottom of drive rod are connected separately with top board and lower platen, upper spring is equipped between top board and drive sleeve, lower spring is equipped between lower platen and drive sleeve, support rod is equipped in the middle part of the bottom surface of lower platen, the lower end of support rod is equipped with pumping sucker, the bottom surface of lower platen is symmetrically arranged with two push rods, push rod lower end is connected with swing rod, connecting rod is also rotatably connected on swing rod, the upper end of connecting rod is rotatably connected to fixed link.Compared with prior art, not only can stable holding silicon wafer the utility model has the beneficial effects that: overall structure is novel, moreover it is possible to prevent due to aid dynamics it is excessive caused by silicon wafer damage the case where, wide market.
Description
Technical field
The present invention relates to the high stables in silicon chip process technology field more particularly to a kind of silicon chip working process to clamp dress
It sets.
Background technique
Chip made of silicon wafer is famous " miraculous foresight ", there is surprising operational capability.No matter how Fu Za mathematics
Problem, physical problem and engineering problem, the workload also no matter calculated have it is much, as long as staff pass through computer keyboard handle
Problem tells it, and assigns the thinking and instruction solved a problem, and computer can tell you answer in a very short period of time.No matter silicon
The thickness of piece, crystal silicon photovoltaic cell manufacture commercial city propose high requirement to the quality of silicon wafer.Silicon wafer cannot have surface damage
Hurt (blind crack, the scroll saw marking), pattern defect (bending, concave-convex, became uneven) will minimize, to additional back-end processing as thrown
The requirement of light etc. will be also preferably minimized.Currently, in silicon wafer process of manufacture, shortage can with stable holding silicon wafer and simultaneously not
The clamping device of silicon wafer can be damaged.
Summary of the invention
To solve the above problems, the invention discloses the high stable clamping devices in a kind of silicon chip working process, in stabilization
While clamping silicon wafer, it can prevent silicon wafer from damaging.
In order to reach the goals above, the invention provides the following technical scheme:
A kind of high stable clamping device in silicon chip working process, is arranged in the end of mechanical arm, it is characterised in that: including
Lifting cylinder, the barrel-shaped structure that the lifting cylinder is vertically arranged, lower ending opening are coupled in the lifting cylinder
There is piston, is fitted with drive sleeve in the middle part of the piston, the middle part of the drive sleeve is opened up along the axis direction of lifting cylinder
There is through-hole, drive rod is fitted in the through-hole, the drive rod runs through drive sleeve, and the upper end and lower end are connected separately with
Horizontally disposed top board and lower platen, the top board and lower platen, which can slide up and down, is arranged in the inner cavity of lifting cylinder
In, upper spring is equipped between the top board and drive sleeve, the upper spring is set in outside drive rod, and its upper and lower ends is distinguished
It offsets with top board bottom and transmission set upper side, lower spring is equipped between the lower platen and drive sleeve, the lower spring
Upper and lower ends respectively with offset at the top of drive sleeve lower end and lower platen, be equipped in the middle part of the bottom surface of the lower platen and to be vertically arranged
Support rod, the lower end of the support rod be fitted with pumping sucker, and the bottom surface of the lower platen is also symmetrically arranged with two and is vertically arranged
The upper end of push rod, the push rod is fixedly connected with lower platen, and lower end is connected with swing rod, one end of the swing rod and the lower end of push rod
Rotation connection, the other end are equipped with the clamp column being vertically arranged, are also rotatably connected to connecting rod, the lower end of the connecting rod and pendulum on swing rod
Bar rotation connection, upper end are rotatably connected to fixed link, and one end of the fixed link and the upper end of connecting rod are rotatablely connected, the other end with
The outer wall of lifting cylinder is fixedly connected, and the lower end inside of the clamp column is equipped with grip block, is offered on the inside of the grip block
Arc groove.
Further, the inner cavity lower end of the lifting cylinder is equipped with stop collar.
Further, the stop collar is rubber stop collar.
Further, the grip block is rubber grip block.
Further, the upper spring is identical as lower spring.
Compared with prior art, it is novel that the beneficial effects of the present invention are: overall structures, not only can stable holding silicon wafer,
Can also prevent due to aid dynamics it is excessive caused by silicon wafer damage the case where, wide market；When clamping silicon wafer,
First by piston motion to bottom, two clamp columns are opened at this time, so that the middle part of pumping sucker suction silicon wafer, then passes through
Piston upwards are controlled, so that pumping sucker drives silicon wafer to move up, at the same time, two clamp columns inwardly clamp silicon chip edge,
To ensure that the stability of clamping；By using upper spring and lower spring, so that sucker is evacuated when contacting and adsorbing silicon wafer,
Can flexible contact silicon chip surface, and two clamp columns are when clamping silicon chip edge, can flexible clamping silicon chip edge, drop to the greatest extent
The spoilage of low silicon wafer aid process.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the high stable clamping device in a kind of silicon chip working process of the present invention.
Reference signs list:
1- lifting cylinder, 2- piston, 3- drive sleeve, 4- drive rod, 5- top board, 6- lower platen, 7- upper spring, bullet under 8-
Spring, 9- support rod, 10- pumping sucker, 11- push rod, 12- swing rod, 13- clamp column, 14- connecting rod, 15- fixed link, 16- grip block,
17- stop collar, 18- silicon wafer.
Specific embodiment
With reference to the accompanying drawings and detailed description, the present invention is furture elucidated, it should be understood that following specific embodiments are only
For illustrating the present invention rather than limiting the scope of the invention.It should be noted that word " preceding " used in the following description,
" rear ", "left", "right", "up" and "down" refer to that the direction in attached drawing, word "inner" and "outside" refer respectively to direction or remote
Direction from geometric center of specific component.
As shown, the high stable clamping device in a kind of silicon chip working process, is arranged in the end of mechanical arm, including rise
Sending down abnormally ascending cylinder 1, the barrel-shaped structure that lifting cylinder 1 is vertically arranged, lower ending opening are fitted with piston in lifting cylinder 1
2, drive sleeve 3 is fitted in the middle part of piston 2, and the middle part of drive sleeve 3 offers through-hole along the axis direction of lifting cylinder 1, leads to
Drive rod 4 is fitted in hole, drive rod 4 runs through drive sleeve, and the upper end and lower end are connected separately with horizontally disposed upper pressure
Plate 5 and lower platen 6, top board 5 and lower platen 6, which can slide up and down, to be arranged in the inner cavity of lifting cylinder 1,5 He of top board
Upper spring 7 is equipped between drive sleeve 3, upper spring 7 is set in outside drive rod 4, and its upper and lower ends respectively with 5 bottom of top board with
And 3 upper end of drive sleeve offsets, between lower platen 6 and drive sleeve 3 be equipped with lower spring 8, the upper and lower ends of lower spring 8 respectively with transmission
It covers and offsets at the top of 3 lower ends and lower platen 6, the support rod 9 being vertically arranged is equipped in the middle part of the bottom surface of lower platen 6, the lower end of support rod 9 is matched
Conjunction is equipped with pumping sucker 10, and the bottom surface of lower platen 6 is also symmetrically arranged with two push rods 11 being vertically arranged, and the upper end of push rod 11 is under
Pressing plate 6 is fixedly connected, and lower end is connected with swing rod 12, and one end of swing rod 12 and the lower end of push rod 11 are rotatablely connected, and the other end is equipped with
The clamp column 13 being vertically arranged also is rotatably connected to connecting rod 14 on swing rod 12, and the lower end of connecting rod 14 and swing rod 12 are rotatablely connected, on
End is rotatably connected to fixed link 15, and one end of fixed link 15 and the upper end of connecting rod 14 are rotatablely connected, the other end and lifting cylinder 1
Outer wall is fixedly connected, and the lower end inside of clamp column 13 is equipped with grip block 16, and the inside of grip block 16 offers arc groove.
For the present invention when clamping silicon wafer 18, control piston 2 first moves to bottom, and two clamp columns 13 are opened at this time, makes
It must be evacuated the middle part that sucker 10 adsorbs silicon wafer 18, then moved upwards by controlling piston 2, so that pumping sucker 10 drives silicon wafer
18 move up, and at the same time, two clamp columns 13 inwardly clamp 18 edge of silicon wafer, to ensure that the stability of clamping；By using
Upper spring 7 and lower spring 8 so that pumping sucker 10 is when contacting and adsorbing silicon wafer 18, can 18 surface of flexible contact silicon wafer, and two
Clamp column 13 when clamping 18 edge of silicon wafer, can 18 edge of flexible clamping silicon wafer, reduce silicon wafer 18 to the greatest extent and accommodated
The spoilage of journey.
In the present embodiment, the inner cavity lower end of lifting cylinder 1 is equipped with stop collar 17, and stop collar 17 is rubber stop collar.
In the present embodiment, grip block 16 is rubber grip block.
In the present embodiment, upper spring 7 is identical as lower spring 8.
The technical means disclosed in the embodiments of the present invention is not limited only to technological means disclosed in above embodiment, further includes
Technical solution consisting of any combination of the above technical features.It should be pointed out that for those skilled in the art
For, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications are also considered as
Protection scope of the present invention.
Claims (5)
1. the high stable clamping device in a kind of silicon chip working process, is arranged in the end of mechanical arm, it is characterised in that: including rising
Sending down abnormally ascending cylinder (1), the barrel-shaped structure that the lifting cylinder (1) is vertically arranged, lower ending opening, the lifting cylinder (1) are interior
It is fitted with piston (2), is fitted with drive sleeve (3) in the middle part of the piston (2), the middle part of the drive sleeve (3) is along liter
The axis direction of sending down abnormally ascending cylinder (1) offers through-hole, is fitted in the through-hole drive rod (4), and the drive rod (4) is run through
Drive sleeve, the upper end and lower end are connected separately with horizontally disposed top board (5) and lower platen (6), the top board (5) and under
Pressing plate (6), which can slide up and down, to be arranged in the inner cavity of lifting cylinder (1), is set between the top board (5) and drive sleeve (3)
Have upper spring (7), the upper spring (7) is set in drive rod (4) outside, and its upper and lower ends respectively with top board (5) bottom with
And drive sleeve (3) upper end offsets, and is equipped with lower spring (8) between the lower platen (6) and drive sleeve (3), the lower spring (8)
Upper and lower ends offset at the top of drive sleeve (3) lower end and lower platen (6) respectively, are equipped in the middle part of the bottom surface of the lower platen (6)
The support rod (9) being vertically arranged, the lower end of the support rod (9) are fitted with pumping sucker (10), the bottom surface of the lower platen (6)
Two push rods (11) being vertically arranged also are symmetrically arranged with, the upper end of the push rod (11) is fixedly connected with lower platen (6), lower end connection
Have swing rod (12), one end of the swing rod (12) and the lower end of push rod (11) are rotatablely connected, and the other end is equipped with the folder being vertically arranged
It holds column (13), is also rotatably connected on swing rod (12) connecting rod (14), the lower end and swing rod (12) of the connecting rod (14) are rotatablely connected,
Upper end is rotatably connected to fixed link (15), and one end of the fixed link (15) and the upper end of connecting rod (14) are rotatablely connected, the other end
It is fixedly connected with the outer wall of lifting cylinder (1), the lower end inside of the clamp column (13) is equipped with grip block (16), the grip block
(16) arc groove is offered on the inside of.
2. the high stable clamping device in a kind of silicon chip working process according to claim 1, it is characterised in that: the liter
The inner cavity lower end of sending down abnormally ascending cylinder (1) is equipped with stop collar (17).
3. the high stable clamping device in a kind of silicon chip working process according to claim 2, it is characterised in that: the limit
Position ring (17) is rubber stop collar.
4. the high stable clamping device in a kind of silicon chip working process according to claim 1, it is characterised in that: the folder
Holding block (16) is rubber grip block.
5. the high stable clamping device in a kind of silicon chip working process according to claim 1, it is characterised in that: on described
Spring (7) is identical as lower spring (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821493935.8U CN209466508U (en) | 2018-09-13 | 2018-09-13 | A kind of high stable clamping device in silicon chip working process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821493935.8U CN209466508U (en) | 2018-09-13 | 2018-09-13 | A kind of high stable clamping device in silicon chip working process |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209466508U true CN209466508U (en) | 2019-10-08 |
Family
ID=68085880
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821493935.8U Expired - Fee Related CN209466508U (en) | 2018-09-13 | 2018-09-13 | A kind of high stable clamping device in silicon chip working process |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209466508U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115429087A (en) * | 2022-08-18 | 2022-12-06 | 苏州科技城医院 | Auxiliary protective clothing-taking-off robot and system with same |
-
2018
- 2018-09-13 CN CN201821493935.8U patent/CN209466508U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115429087A (en) * | 2022-08-18 | 2022-12-06 | 苏州科技城医院 | Auxiliary protective clothing-taking-off robot and system with same |
| CN115429087B (en) * | 2022-08-18 | 2024-08-27 | 苏州科技城医院 | Auxiliary protective clothing removing robot and system with robot |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20191008 Termination date: 20200913 |