CN209452455U - A kind of plummer and base plate cleaning device - Google Patents

Abstract

The utility model discloses a kind of plummer and base plate cleaning devices, are related to plummer structure-design technique field, invent to solve the problems, such as to be easy the more dust granule of deposition on plummer in the related technology and not allowing easy-clear.The plummer, including fixed frame, driving device and it is multiple be in prism-shaped supporting table, each supporting table is horizontally disposed, and it is rotatably connected with the fixed frame, incline of the center of rotation axis of each supporting table each parallel to the supporting table, the driving device enables the side of multiple supporting tables to be in the same plane, for driving each supporting table to rotate around respective center of rotation axis to form loading end.The utility model can be used for the cleaning of substrate etc..

Description

A kind of plummer and base plate cleaning device

Technical field

The utility model relates to plummer structure-design technique fields more particularly to a kind of plummer and base-plate cleaning to fill It sets.

Background technique

In the manufacturing process of display panel, the cleaning to substrate is one of important process, and base-plate cleaning is mainly pair The particle of substrate surface is removed, and guarantees the cleaning of substrate surface, to advantageously reduce display panel in subsequent handling Particle (particle) undesirable probability of occurrence.Wherein, the cleaning of substrate is carried out on base plate cleaning device, and plummer is One important component of base plate cleaning device, when base-plate cleaning, need to place a substrate on plummer, and plummer is designed Whether the quality of production of elimination effect and display panel is rationally directly related to.

The plummer of one of the relevant technologies base plate cleaning device is the construction of integral planar formula, which is cleaning When device does not work, the particles such as dust in air are easy to fall on the loading end of plummer, cause to sink on loading end The more dust of product not only increases the workload of removing in this way, and the dust deposited does not allow easy-clear to be thoroughly easy to make At the residual of dust granule；When cleaning device work, remaining dust granule is contacted with the bottom surface of substrate on loading end It is easy to scratch substrate, or extruding occurs during removing and be easy to cause substrate breaking (Crack) with substrate；In addition, After substrate removing finishes, remaining dust is also easy to attachment on the bottom surface of the substrate on loading end, and enters with substrate To next process, being easy to cause subsequent handling to occur, Particle is bad, affects the yield of subsequent handling.

Utility model content

The utility model embodiment provides a kind of baseplate carrier and base plate cleaning device, for solving holding in the related technology The problem of being easy the more dust granule of deposition on microscope carrier and not allowing easy-clear.

In order to achieve the above objectives, in a first aspect, the utility model embodiment provides a kind of plummer, fixed frame, driving Device and it is multiple be in prism-shaped supporting table, each supporting table is horizontally disposed, and can with the fixed frame Rotation connection, each parallel to the incline of the supporting table, the driving device is used for for the center of rotation axis of each supporting table It drives each supporting table to rotate around respective center of rotation axis, so that the side of multiple supporting tables is located at same In plane, to form loading end.

Further, the shape of each supporting table is in regular prism shape, and in the rotation of each supporting table The distance of loading end described in mandrel line-spacing is equal；Wherein, the geometric centre axes of the supporting table are the rotation of the supporting table Turn central axis.

Further, multiple supporting tables are separated by arrangement along a horizontal direction.

Further, for the supporting table on the outermost side, each of described supporting table is all provided on the side There is contraposition thimble, the contraposition thimble is used to adjust the placement location of carried object.

It further, further include gas passage；For each supporting table, opened on each side of the supporting table Equipped with the adsorption hole for adsorbing carried object, the adsorption hole on each side can pass through the gas passage and vacuum System is connected.

Further, the gas passage includes main line and multiple branches, and the main line is connected with the vacuum system Logical, the first end of each branch is connected with the main line, second end with the adsorption hole on the corresponding side It is connected.

It further, further include multiple control valves, each control valve is all set in the corresponding branch road.

Further, the driving device includes motor and transmission mechanism, and the motor can pass through the transmission mechanism Multiple supporting tables are driven to rotate synchronously around respective center of rotation axis.

Further, the center of rotation axis of multiple supporting tables is parallel；The transmission mechanism is synchronous belt Transmission mechanism, the synchronous belt drive mechanism include synchronous belt, multiple transmission shafts and multiple gears, and each transmission shaft is equal It is rotatably set on the fixed frame, each transmission shaft is fixedly connected with the corresponding supporting table, and each The central axis of the transmission shaft is conllinear with the center of rotation axis of the corresponding supporting table；Each gear is fixed It is sheathed on the corresponding transmission shaft, and be meshed with the synchronous belt；The motor is fixed on the fixed frame, and The output shaft of the motor is connect with transmission shaft driven described in one of them.

Second aspect, the utility model embodiment provides a kind of base plate cleaning device, including described in first aspect Plummer.

Plummer machine base plate cleaning device provided by the embodiment of the utility model, since each supporting table can with fixed frame Rotation connection, and driving device makes multiple supporting tables for driving each supporting table to rotate around respective center of rotation axis Side can be in the same plane, to form loading end, in this way, before each substrate is placed on loading end, driving dress Setting can drive each supporting table to rotate, and each supporting table is during around the rotation of respective center of rotation axis, side The dust granule deposited on face can be fallen under gravity, so as to greatly reduce the dust on supporting table side Deposition can not only reduce the workload that supporting table side supernatant removes dust, and be easier the ash on supporting table side Dirt is removed clean.

Detailed description of the invention

In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only It is some embodiments of the utility model, for those of ordinary skill in the art, in the premise not made the creative labor Under, it is also possible to obtain other drawings based on these drawings.

Fig. 1 is the structural schematic diagram of the base plate cleaning device in the utility model embodiment；

Fig. 2 is the top view of the plummer of the base plate cleaning device in the utility model embodiment；

Fig. 3 is the cross section view of A-A in Fig. 2.

Specific embodiment

The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work Every other embodiment obtained, fall within the protection scope of the utility model.

In the description of the present invention, it should be understood that term " center ", "upper", "lower", "front", "rear", The orientation or positional relationship of the instructions such as "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outside" is based on attached drawing institute The orientation or positional relationship shown, is merely for convenience of describing the present invention and simplifying the description, rather than indication or suggestion is signified Device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore should not be understood as to this is practical Novel limitation.

Term " first ", " second " be used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance or Implicitly indicate the quantity of indicated technical characteristic." first " is defined as a result, the feature of " second " can be expressed or imply Ground includes one or more of the features.In the description of the present invention, unless otherwise indicated, the meaning of " plurality " is two It is a or more than two.

In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " is pacified Dress ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally Connection；It can be directly connected, the connection inside two elements can also be can be indirectly connected through an intermediary.For For those skilled in the art, the concrete meaning of above-mentioned term in the present invention can be understood with concrete condition.

In a first aspect, the utility model embodiment provides a kind of plummer, as depicted in figs. 1 and 2, including fixed frame 1, Driving device 2 and it is multiple be in prism-shaped supporting table 3, each supporting table 3 is horizontally disposed, and can with fixed frame 1 Rotation connection, the center of rotation axis of each supporting table 3 is each parallel to the incline of the supporting table 3, and driving device 2 is for driving often A supporting table 3 is rotated around respective center of rotation axis, so that the side of multiple supporting tables 3 is in the same plane, with shape At loading end 7.

Wherein, the shape of supporting table 3 not only can be triangular prism (as shown in Figure 1), be also possible to quadrangular, pentagonal prism, Hexagonal prisms etc., are not specifically limited herein；The shape of supporting table 3 not only can be right prism (as shown in Figure 1), or tiltedly Prism is also not specifically limited herein；The number of supporting table 3 can be 5,4 etc., and having can be according to the size of substrate 400 Setting, is also not specifically limited herein.

In base plate cleaning device work, as shown in Figure 1, driving device 2 drives each supporting table 3 in respective rotation The rotation of mandrel line, makes a side of each supporting table 3 go to top, to form the loading end 7 for being used to support substrate 400, so A substrate 400 is placed on the loading end 7 that multiple supporting tables 3 are formed afterwards, cleaning head, which works, carries out the surface of the substrate 400 It removes, after removing, which separates with loading end 7；Then, driving device 2 drives each supporting table 3 around respective Center of rotation axis rotate certain angle, make another side of each supporting table 3 go to top, to form loading end 7, Then, next substrate 400 is placed into the cleaning that next step is carried out in multiple supporting tables 3, is back and forth gone down with this, until substrate is clear Cleaning device work terminates.

Plummer provided by the embodiment of the utility model, since each supporting table 3 is rotatably connected with fixed frame 1, and And driving device 2 enables the side of multiple supporting tables 3 for driving each supporting table 3 to rotate around respective center of rotation axis Enough it is in the same plane, to form loading end 7, in this way, before each substrate 400 is placed on loading end 7, driving device 2 Each supporting table 3 can be driven to rotate, each supporting table 3 is during around the rotation of respective center of rotation axis, side The dust granule deposited on face can be fallen under gravity, so as to greatly reduce the ash on 3 side of supporting table Dirt deposition can not only reduce the workload that 3 side supernatant of supporting table removes dust, and being easier will be on 3 side of supporting table Dust remove it is clean, then after substrate 400 is placed on the side of multiple supporting tables 3, in the removing to 400 surface of substrate During, so that it may greatly reduce 400 scuffing of substrate, the sliver etc. caused by dust is in contact with the bottom surface of substrate 400 It is bad, and to substrate 400 removing finish after, so that it may the quantity for greatly reducing 400 bottom surface adhesive dust particle of substrate, from And reduce substrate 400 and occur the undesirable probability of Particle in subsequent handling, advantageously ensure that the yield of subsequent handling.

In the plummer, the shape of supporting table 3 is not unique, for example, as shown in Figure 1, the shape of each supporting table 3 can To be in regular prism shape, and the distance h of the Pivot axle line-spacing loading end 7 of each supporting table 3 is equal；Wherein, it supports The geometric centre axes of platform 3 are the center of rotation axis of supporting table 3.In addition, the shape of each supporting table 3 can also in it is non-just The center of rotation axis of prism-shaped, the geometric parameter of each supporting table 3 supporting table 3 all the same and all is coplanar；Wherein, The center of gravity line of supporting table 3 is the center of rotation axis of supporting table 3, and the center of gravity line of supporting table 3 is two end faces by supporting table 3 The axis of center of gravity.Shape compared to each supporting table 3 is in the embodiment of non-regular prism shape, and the shape of each supporting table 3 is in The embodiment of regular prism shape, since the distance of each side of the Pivot axle line-spacing supporting table 3 of supporting table 3 is equal, this The more convenient side for making multiple supporting tables 3 of sample is easier to be in the same plane, and the driving device 2 made drives multiple supporting tables The mode of 3 rotations is more flexible, for example 3 turns of θ of a supporting table can be driven with driving device 2, drives another supporting table 3 Turning 2 θ, (when the shape of supporting table 3 is in non-regular prism shape, the distance due to each side away from center of rotation axis is different, in this way The same side of each supporting table 3 is needed to be supported substrate 400, that is, driving device 2 is driving each supporting table 3 Rotating angle must be identical, just can guarantee that the side of multiple supporting tables 3 is in the same plane).

In the plummer, the arrangement mode of multiple supporting tables 3 is not also unique, for example, as shown in Fig. 2, multiple supporting tables 3 Arrangement can be separated by along a horizontal direction (such as X-direction shown in Fig. 2).In addition, multiple supporting tables 3 can also a little centered on Radial arrangement, supporting table 3 are equipped with lift supporting rod, and lift supporting rod can be gone up and down in vertical direction, to facilitate machinery Hand 300 extend into the lower section of substrate 400 to pick and place substrate 400.It is more compared to the embodiment of the radial arrangement of multiple supporting tables 3 For a supporting table 3 along the embodiment that a horizontal direction is separated by arrangement, two neighboring supporting table 3 has gap, such conveying robot The manipulator 300 (fork) of people is just easy to extend into pick-and-place substrate 400 in two neighboring 3 gap of supporting table, greatly facilitates The lower section that manipulator 300 extend into substrate 400 picks and places substrate 400, goes up and down then just no setting is required on each side of supporting table 3 Support rod can realize that manipulator 300 picks and places substrate 400, enormously simplify the structure of supporting table 3, reduce supporting table 3 and go out The probability of existing failure, to advantageously reduce the maintenance cost of supporting table 3；Simultaneously as the different setting lifting supports of supporting table 3 Bar can thus be easy damage caused by substrate 400, such as Electro-static Driven Comb to avoid the electrostatic accumulated on lift supporting rod On damaged substrate 400 circuit (in supporting table 3 if setting lift supporting rod, during the work time, due to lift supporting rod with The friction of substrate 400 generates electrostatic charge, and electrostatic charge is caused to accumulate in the end of lift supporting rod).

In multiple supporting tables 3 along the embodiment that a horizontal direction is separated by arrangement, the center of rotation axis of multiple supporting tables 3 Positional relationship it is also not unique, for example, as depicted in figs. 1 and 2, the center of rotation axis of multiple supporting tables 3 can be parallel. In addition, the center of rotation axis of two adjacent supporting tables 3 at an acute angle can also be arranged.Compared to two adjacent supporting tables 3 The embodiment of center of rotation axis setting at an acute angle, the parallel embodiment of the center of rotation axis of multiple supporting tables 3 is more The setting for facilitating driving device 2 may be implemented the multiple supporting tables 3 of a motor driven and rotate, greatly reduces the number of motor, Not only reduce occupied space, facilitates driving, but also the totle drilling cost of the plummer can be reduced.

As shown in Fig. 2, be directed to supporting table 3 on the outermost side, that is, supporting table 3a and supporting table 3b, supporting table 3a and Contraposition thimble 4 is equipped on each side of supporting table 3b, contraposition thimble 4 is used to adjust the placement location of substrate 400.By setting Set contraposition thimble 4, in this way after substrate 400 is placed in supporting table 3, contraposition thimble 4 can position to substrate 400 into Row fine tuning, is properly placed on substrate 400 in scheduled region, to facilitate the progress of 400 cleaning step of substrate.

As shown in Fig. 2, contraposition thimble 4 includes the first sub- thimble 41, the second sub- thimble 42 and the sub- thimble 43 of third, the first son Thimble 41, the second sub- thimble 42, the sub- thimble 43 of third are all set on each side of supporting table 3a, supporting table 3b, and point Wei Yu not be at the edges at two ends of side, the first sub- thimble 41, the second sub- thimble 42 are respectively connected with first movement driving device, and first Mobile drive deivce can drive the first sub- thimble 41, the second sub- thimble 42 along first direction Y (namely supporting table 3a or support The extending direction of the center of rotation axis of platform 3b) it is mobile；The sub- thimble 43 of third is connected with the second mobile drive deivce, and second is mobile Driving device can drive the sub- thimble 43 of third, and X (is namely parallel to loading end 7 and hangs down with first direction Y phase in a second direction Straight direction) it is mobile.In this way, after substrate 400 is placed in supporting table 3, the first sub- thimble 41, the second sub- thimble 42 can be with Substrate 400 is clamped, and finely tunes the position of the Y in a first direction of substrate 400 under the driving of first movement driving device；Supporting table The sub- thimble 43 of third on 3a, supporting table 3b can clamp substrate 400, and finely tune under the driving of the second mobile drive deivce Substrate 400 is in the position of second direction X.

Wherein, first movement driving device and the second mobile drive deivce can be minitype cylinder.

After substrate 400 is placed in supporting table 3, substrate 400 shifts in order to prevent, as shown in figure 3, the carrying Platform further includes gas passage 5；For each supporting table 3, offer on each side of supporting table 3 for sorbing substrate 400 Adsorption hole 31, the adsorption hole 31 on each side can be connected by gas passage 5 with vacuum system.In this way in substrate After 400 are placed in supporting table 3, vacuum system is opened, and adsorption hole 31 can generate suction and firmly be adsorbed on substrate 400 In supporting table 3, to prevent substrate 400 from shifting, to guarantee going on smoothly for 400 cleaning step of subsequent substrate.

Wherein, the structure composition of gas passage 5 is not also unique, for example, as shown in figure 3, gas passage 5 may include main line 51 and multiple branches 52, main line 51 be connected with vacuum system, the first end of each branch 52 is connected with main line 51, second End is connected with the adsorption hole 31 on corresponding side.In addition, gas passage 5 also may include multiple subchannels, every height The one end in channel is directly connected to the adsorption hole 31 on corresponding side, and the other end is directly connected to vacuum system.Compared to gas Channel 5 includes the embodiment of multiple subchannels, and gas passage 5 includes the embodiment on main line 51 and multiple branches 52, each side On adsorption hole 31 need to realize to be connected to main line 51 and can realize and be connected to vacuum system, gas can be substantially reduced in this way The total length in body channel 5 advantageously reduces the setup cost of gas passage 5.

The working condition of the adsorption hole 31 on each side in supporting table 3 is controlled for convenience, as shown in figure 3, The plummer further includes multiple control valves 6, and each control valve 6 is all set on corresponding branch 52.In this way when substrate 400 is placed When on a of side, the control valve 6 on branch 52 being connected to adsorption hole 31 on a of side is opened, the control valve on other branches 52 6 close, and the adsorption hole 31 on other sides can be prevented to be connected to the destruction to vacuum degree with main line 51, in this way so as to significantly Improve it is in running order under adsorption hole 31 (such as adsorption hole 31 on a of side) to the suction of substrate 400 so that substrate 400 Fixed is stronger.

In the plummer, the structure composition of driving device 2 is not also unique, for example, as shown in Fig. 2, driving device 2 can be with Including motor 21 and transmission mechanism 22, motor 21 can drive multiple supporting tables 3 in respective rotation by transmission mechanism 22 The rotation of mandrel line locking.In addition, driving device 2 may include multiple motors 21, each motor 21 drives corresponding supporting table 3 Rotate about central axis rotation.Compared to the embodiment that driving device 2 includes multiple motors 21, driving device 2 includes motor 21 With the embodiment of transmission mechanism 22, the rotation that can be respectively driven to avoid multiple motors 21 caused by supporting table 3 rotates is asynchronous The problem of, it can guarantee that the side of multiple supporting tables 3 is in the same plane very well in this way, guarantee substrate 400 and each support Platform comes into full contact with.

It include motor 21 and transmission mechanism 22 in driving device 2, and the center of rotation axis of multiple supporting tables 3 is equal In capable embodiment, the type of transmission mechanism 22 is not also unique, for example, as shown in Fig. 2, transmission mechanism 22 can pass for synchronous belt Motivation structure, synchronous belt drive mechanism include synchronous belt 221, multiple transmission shafts 222 and multiple gears 223, each transmission shaft 222 It is rotatably set on fixed frame 1, each transmission shaft 222 is fixedly connected with corresponding supporting table 3, and each transmission shaft 222 central axis is conllinear with the center of rotation axis of corresponding supporting table 3；The equal fixing sleeve of each gear 223, which is set to, to be corresponded to Transmission shaft 222 on, and be meshed with synchronous belt 221；Motor 21 is fixed on fixed frame 1, and the output shaft of motor 21 with One of transmission shaft 222 is sequentially connected.In addition, transmission mechanism 22 can be chain-drive mechanism, chain-drive mechanism is specifically set The setting that may refer to above-mentioned synchronous belt drive mechanism is set, synchronous belt 221 is replaced with into transmission chain, gear 223 is replaced with into chain Wheel, other settings and the setting of above-mentioned synchronous belt drive mechanism are consistent.Compared to chain-drive mechanism, synchronous belt drive mechanism Transmission accuracy is higher, and the synchronism that multiple supporting tables 3 can be made to rotate is more preferable.

Plummer provided by the embodiment of the utility model, is used not only in base plate cleaning device, and it is other right to can be used for In the relatively high device of dust removal requirement；The plummer can be used not only for carrying the substrate 400 for making display panel, such as Array substrate, underlay substrate etc. can be used for carrying the relatively high carried object of other pairs of dust removal requirements, such as circuit board.

Second aspect, the utility model embodiment provide a kind of base plate cleaning device, as shown in Figure 1, including first party Plummer 100 described in face.

Due in plummer 100 and first aspect included in base plate cleaning device provided by the embodiment of the utility model The plummer 100 is identical, so also solving identical technical problem, has reached identical technical effect.

Wherein, the type of the cleaning of base plate cleaning device is not specifically limited, for example the base plate cleaning device can lead to Cross jet, the mode of air-breathing carrys out particle on cleaning base plate 400, specific as follows: as shown in Figure 1, the base plate cleaning device also wraps Cleaning head 200 is included, cleaning head 200 is located at the top of plummer 100, and can be mobile relative to plummer 100 in the horizontal direction, cleaning There is puff prot and air entry, when the surface to substrate 400 is cleaned, puff prot is sprayed to substrate 400 on first 200 Clean gas, air entry air-breathing, so as to be removed well to the particle on 400 surface of substrate.

In order to improve cleaning efficiency, supersonic generator is additionally provided on cleaning head 200, supersonic generator issues ultrasound Wave, ultrasonic wave can drive the clean gas sprayed from puff prot to form subtle reflux, thus the foreign matter for adhering to 400 surface of substrate Particle takes away 400 surface of substrate by air-flow rapidly while being removed by ultrasound, to improve the clear of the base plate cleaning device Wash efficiency.

In the description of this specification, particular features, structures, materials, or characteristics can be real in any one or more Applying can be combined in any suitable manner in example or example.

More than, only specific embodiment of the present utility model, but protection scope of the utility model is not limited thereto, Anyone skilled in the art within the technical scope disclosed by the utility model, can readily occur in variation or replace It changes, should be covered within the scope of the utility model.Therefore, the protection scope of the utility model should be with claim Subject to protection scope.

Claims (10)

1. a kind of plummer, which is characterized in that including fixed frame, driving device and it is multiple be in prism-shaped supporting table, often A supporting table is horizontally disposed, and is rotatably connected with the fixed frame, the rotation center of each supporting table Axis is each parallel to the incline of the supporting table, and the driving device is for driving each supporting table around respective rotation center Axis rotation, enables the side of multiple supporting tables to be in the same plane, to form loading end.

2. plummer according to claim 1, which is characterized in that the shape of each supporting table is in regular prism shape, And the distance of loading end described in the Pivot axle line-spacing of each supporting table is equal；Wherein, the supporting table is several What central axis is the center of rotation axis of the supporting table.

3. plummer according to claim 1, which is characterized in that multiple supporting tables are separated by row along a horizontal direction Cloth.

4. plummer according to claim 3, which is characterized in that be directed to the supporting table on the outermost side, the branch Contraposition thimble is equipped on each of the support platform side, the contraposition thimble is used to adjust the placement location of carried object.

5. plummer according to any one of claims 1 to 4, which is characterized in that further include gas passage；For each The supporting table offers the adsorption hole for adsorbing carried object, each side on each side of the supporting table Adsorption hole on face can be connected by the gas passage with vacuum system.

6. plummer according to claim 5, which is characterized in that the gas passage includes main line and multiple branches, institute Main line is stated to be connected with the vacuum system, the first end of each branch is connected with the main line, second end with Adsorption hole on the corresponding side is connected.

7. plummer according to claim 6, which is characterized in that further include multiple control valves, each control valve is equal It is set to the corresponding branch road.

8. plummer according to any one of claims 1 to 4, which is characterized in that the driving device include motor and Transmission mechanism, the motor can drive multiple supporting tables same around respective center of rotation axis by the transmission mechanism Step rotation.

9. plummer according to claim 8, which is characterized in that the center of rotation axis of multiple supporting tables is equal Row；The transmission mechanism is synchronous belt drive mechanism, and the synchronous belt drive mechanism includes synchronous belt, multiple transmission shafts and more A gear, each transmission shaft are rotatably set on the fixed frame, each transmission shaft with it is corresponding described Supporting table is fixedly connected, and the central axis of each transmission shaft with the center of rotation axis of the corresponding supporting table Collinearly；Each equal fixing sleeve of the gear is set on the corresponding transmission shaft, and is meshed with the synchronous belt；The electricity Machine is fixed on the fixed frame, and the output shaft of the motor is connect with transmission shaft driven described in one of them.

10. a kind of base plate cleaning device, which is characterized in that including plummer according to any one of claims 1 to 9.