CN209328849U - Base board defect detecting device and filming equipment - Google Patents
Base board defect detecting device and filming equipment Download PDFInfo
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- CN209328849U CN209328849U CN201822017937.6U CN201822017937U CN209328849U CN 209328849 U CN209328849 U CN 209328849U CN 201822017937 U CN201822017937 U CN 201822017937U CN 209328849 U CN209328849 U CN 209328849U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model relates to technical field of solar batteries, more particularly, to a kind of base board defect detecting device and filming equipment.Base board defect detecting device includes the first detection device, second detection device, conveying device and mobile device；Conveying device drives substrate from first end to second end；First detection device detects the defect on the substrate side parallel with conveying direction in first end；Mobile device is connect with second detection device；Second detection device detects the defect on the substrate side vertical with conveying direction.The utility model passes through in the first detection device of the two sides of conveying device, in the first end and second end of conveying device, second detection device is set, two the first detection devices and two second detection devices cooperate jointly, complete the detection to four sides of substrate, ensure that defective substrate will not enter subsequent processing, ensure that normal operation.
Description
Technical field
The utility model relates to technical field of solar batteries, more particularly, to a kind of base board defect detecting device and plated film
Equipment.
Background technique
Coating process is the important link during manufacture of solar cells.Currently, when one of technique of glass substrate the past
Into the transmit process between coating process it is possible that glass edge or corner generate arrisdefect because of collision or fall piece greatly
Situation, after such glass enters coating machine, there is a high likelihood that generate fragment in coating process, and coating machine
It clears up fragment operating difficulties and the time is long, influence production efficiency.
Utility model content
The purpose of this utility model is to provide a kind of base board defect detecting device and filming equipments, to solve the prior art
Present in the technical issues of substrate not being detected in coating process.
Base board defect detecting device provided by the utility model, which is characterized in that including the first detection device, the second detection
Device, conveying device and mobile device；
The conveying device is for driving substrate to be transported to second end from first end；
First detection device is arranged in the first end, for detecting the substrate side parallel with conveying direction
On defect；
The mobile device is connect with the second detection device, for driving the second detection device perpendicular to institute
State the other end for being moved to the conveying device on the direction of conveying direction from one end of the conveying device；
The second detection device, for detecting the defect on the substrate side vertical with conveying direction.
Further, the base board defect detecting device further includes positioning device, and the positioning device is used for described defeated
The substrate on device is sent to be positioned.
Further, the positioning device includes position detecting device and device for aligning；
The position detecting device is for detecting position of the substrate in the conveying device；
The device for aligning is connect with the position detecting device signal, for the substrate in the conveying device
Carry out aligning.
Further, the device for aligning includes longitudinal apparatus for correcting and lateral apparatus for correcting, longitudinal correction
Device is used on the direction for being parallel to the conveying direction carry out substrate aligning, and the transverse direction apparatus for correcting is used for
Aligning is carried out to the substrate on the direction vertical with the conveying direction.
Further, longitudinal apparatus for correcting includes left side positioning device and right positioner device；
The left side positioning device and the right positioner device are separately positioned on the opposite sides of the conveying device, use
In on the conveying direction to substrate progress aligning.
Further, the left side positioning device includes multiple locating wheels along conveying direction setting, the right side
Positioning device includes multiple locating wheels along conveying direction setting.
Further, the lateral apparatus for correcting includes prelocalization device and post-positioning device；
The output end of the conveying device is arranged in the prelocalization device, and the post-positioning device is arranged in the conveying
The supply side of device, the prelocalization device and the post-positioning device are for right on the direction vertical with the conveying direction
The substrate carries out aligning.
Further, the prelocalization device includes along the multiple of the vertical direction setting of the conveying device direction of feed
Locating wheel；
The post-positioning device includes multiple locating wheels along the vertical direction setting of the conveying device direction of feed.
Further, the base board defect detecting device further includes moving-out device；
The moving-out device is connect with first detection device and the second detection device signal, for described the
When one detection device or the second detection device detect substrate existing defects, which is moved up from the conveying device
Out.
The utility model additionally provides a kind of filming equipment comprising plating membrane cavity and base board defect described in any of the above embodiments
Detection device, the base board defect detecting device is set to the input terminal of the plating membrane cavity, for that will pass through the base board defect
Flawless substrate is delivered to the plating membrane cavity after detection device detection.
Base board defect detecting device and filming equipment provided by the utility model, by the two sides of conveying device setting the
Second detection device, two the first detection devices and two are arranged in the first end and second end of conveying device in one detection device
Second detection device cooperates jointly, completes the detection to four sides of substrate, it is ensured that defective substrate will not be made to enter next
Process ensure that normal operation.
Detailed description of the invention
It, below will be right in order to illustrate more clearly of specific embodiment of the present invention or technical solution in the prior art
Specific embodiment or attached drawing needed to be used in the description of the prior art are briefly described, it should be apparent that, it is described below
In attached drawing be that some embodiments of the utility model are not paying creativeness for those of ordinary skill in the art
Under the premise of labour, it is also possible to obtain other drawings based on these drawings.
Fig. 1 is the schematic diagram of base board defect detecting device provided by the embodiment of the utility model；
Fig. 2 is base board defect detecting device provided by the embodiment of the utility model；
Fig. 3 is base board defect detecting device provided by the embodiment of the utility model；
Fig. 4 is the flow chart of method of testing substrate provided by the embodiment of the utility model.
Appended drawing reference:
1: the first belt；2: substrate；3: the first locating wheels；4: the second locating wheels；5: the first detection devices；6: the second detections
Device；7: the five locating wheels；8: the second belts；9: the seven locating wheels；10: coating machine；11: the eight locating wheels；12: the six positioning
Wheel；13: the four locating wheels；14: third locating wheel；15: rack gear；16: gear；17: swing rod；18: motor shaft.
Specific embodiment
The technical solution of the utility model is clearly and completely described below in conjunction with attached drawing, it is clear that described
Embodiment is the utility model a part of the embodiment, instead of all the embodiments.Based on the embodiments of the present invention, originally
Field those of ordinary skill every other embodiment obtained without making creative work belongs to practical
Novel protected range.
It is in the description of the present invention, it should be noted that term " center ", "upper", "lower", "left", "right", " perpendicular
Directly ", the orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" is to be based on the orientation or positional relationship shown in the drawings, and is only
For ease of description the utility model and simplify description, rather than the device or element of indication or suggestion meaning must have it is specific
Orientation, be constructed and operated in a specific orientation, therefore should not be understood as limiting the present invention.
In addition, term " first ", " second ", " third " are used for description purposes only, it is not understood to indicate or imply phase
To importance.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " is pacified
Dress ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally
Connection；It can be mechanical connection, be also possible to be electrically connected；Can be directly connected, can also indirectly connected through an intermediary,
It can be the connection inside two elements.For the ordinary skill in the art, above-mentioned art can be understood with concrete condition
The concrete meaning of language in the present invention.
As shown in attached drawing 1- Fig. 3, the utility model provides a kind of substrate detection apparatus, including the first detection device 5,
Two detection devices 6, conveying device and mobile device；Conveying device is for driving substrate 2 to be transported to second end B from first end A；The
One detection device 5 is arranged in first end A, for detecting the defect on the side parallel with conveying direction x of substrate 2；Mobile device
It is connect with second detection device 6, for driving second detection device 6 in the direction perpendicular to the conveying direction x, from conveying
The side of device is moved to the other side of conveying device, and second detection device 6 is vertical with conveying direction x for detecting substrate 2
Defect on side.
For purposes of illustration only, in the present invention, as shown in Figure 1, conveying direction is denoted as the direction x, it is vertical with conveying direction
Direction be denoted as the direction y.
When in use, first substrate 2 is placed on a conveyor, drives substrate 2 to move in the x-direction by conveying device,
The second end B of conveying device is moved to from the first end A of conveying device.In the present embodiment, conveying device is Belt Conveying.Tool
Body, conveying device includes the second belt 8, and the first detection device 5 is two, and two the first detection devices 5 are all set in second
The input terminal of belt 8, and two the first detection devices 5 are located at the two sides of the first belt 8 on the direction y.
It is right using the first detection device 5 when substrate 2 enters the second belt 8 and conveys in the x-direction on the second belt 8
Two sides on the direction x of substrate 2 are detected, and after substrate 2 is completely on the second belt 8, stop the second belt 8
Mobile, mobile device drives second detection device 6 to start to detect the two sides in the direction y of substrate 2.
In the present embodiment, the first detection device 5 is two, and two the first detection devices 5 are arranged at first end A, and two
A first detection device 5 is separately positioned on the both ends of the second belt 8 in y-direction.When substrate 2 enters second from first end A
Belt 8 and when being transported to second end B by conveying device, the first detection device 5 starts the two sides parallel with the direction x to substrate 2
It carries out defects detection and records.
In the present embodiment, second detection device 6 is two, and two second detection devices 6 are arranged in conveying device in the direction x
On opposite end, and the same side of conveying device is set, the distance between two second detection devices 6 are greater than substrate 2 and exist
It can complete the detection on opposite sides side on the direction y to substrate 2.
It should be pointed out that in the present embodiment, conveying device is Belt Conveying, but its to be not limited solely to belt defeated
It send, can also be other conveying devices, chain conveys such as can also be, that is to say, that as long as can be realized to substrate 2
Conveying transport.
Specifically, in the present embodiment, the structure of mobile device there are many kinds of set-up mode, can be using gear,
The move mode of rack gear is also possible to using chain-type movement etc., as long as can pass through mobile device drives second detection device 6
It moves in y-direction.
It may also be noted that in the present embodiment, the side for being first parallel to the direction x to substrate 2 is detected, then to base
It is detected the side that plate 2 is parallel to the direction y.In other embodiments, it is also possible to the side for being first parallel to the direction y to basic 2
While being detected, then the side for being parallel to the direction x to substrate 2 is detected.That is, can root to the detection ordering of substrate
It is adjusted according to factors such as actual environments.
For the detection accuracy for guaranteeing the first detection device 5 and second detection device 6, further, substrate detection apparatus
It is also provided with positioning device, positioning device is used to position the position for the substrate 2 being located in conveying device, to guarantee first
Detection device 5 and second detection device 6 can normally detect substrate 2.By the setting of positioning device, so that substrate 2
It can be finally reached predetermined position according to desired trajectory during traveling, and then guarantee the first detection device 5 and the second inspection
Survey the detection accuracy and validity of device 6.
There are many kinds of the set-up modes of positioning device, and in the present embodiment, positioning device includes position detecting device and position
Set apparatus for correcting；Position detecting device is for judging the position of substrate 2 on a conveyor；Device for aligning and position detection
The connection of device signal, is corrected for the position to the substrate 2 in conveying device.
Specifically, left and right either side or the top of conveying device is arranged in position detecting device, as long as can fill to conveying
The substrate 2 set carries out position monitoring.
It should be pointed out that position detecting device can be setting one, it is also possible to be arranged multiple.Pass through multiple positions
The setting of detection device can detect any position of substrate 2, in order in time to its position on a conveyor
It is corrected.
Specifically, position detecting device and the first detection device 5, second detection device 6 and device for aligning signal connect
It connects.
As shown in Figure 1, position detecting device can be entered in substrate 2 is separately positioned on the first end A of conveying device
When between two the first detection devices 5 of the left and right sides, the signal that will test passes to the first detection device 5, makes the first inspection
After surveying the signal that device 5 receives position detecting device, starts the two sides being parallel on the direction x to substrate 2 and carry out defect inspection
It surveys；When position detecting device detects that substrate 2 reaches between two second detection devices 6, signal is passed into conveying device,
So that conveying device is stopped conveying, while signal is passed into mobile device and second detection device 6, mobile device is made to drive second
Detection device 6 is moved along the direction x perpendicular to substrate 2, and second detection device 6 starts to carry out the two sides in the direction y of substrate 2
Defects detection.
When position detecting device detects that substrate 2 fails to normally enter between two the first detection devices 5, or fail just
When often entering between two second detection devices 6, device for aligning starting carries out aligning to substrate 2, makes it into
To designated position, the side of substrate 2 is detected convenient for the first detection device 5 or second detection device 6.
Specifically, in the present embodiment, position detecting device is range sensor.
I.e. when substrate 2 drives mobile to second end from first end by conveyer belt, the distance in front of range sensor changes,
So that range sensor obtains the signal that substrate 2 reaches, and signal is passed into the first detection device 5 or second detection device 6,
So that the first detection device 5 or second detection device 6 start to detect substrate 2.
To guarantee the accuracy that judge 2 position of substrate, in the present embodiment, range sensor provided with multiple so that
In conveying device conveying substrate 2, the position of substrate 2 can be monitored in real time.
In the present embodiment, device for aligning includes longitudinal apparatus for correcting, and longitudinal apparatus for correcting is for right in the x direction
Substrate 2 is corrected, and makes it during traveling, and the problem of deviateing direction of travel will not occur.
Specifically, longitudinal apparatus for correcting includes left side positioning device and right positioner device；Left side positioning device and right side
Positioning device is separately positioned on the opposite sides of conveying device, for correcting in the x direction to substrate 2.More specifically, left
Side positioning device includes the first locating wheel 3 and the second locating wheel 4 being arranged in the x-direction；Right positioner device includes setting in the x-direction
The third locating wheel 14 and the 4th locating wheel 13 set.
Substrate 2 is determined using the first locating wheel 3, the second locating wheel 4, third locating wheel 14 and the 4th locating wheel 13
When position, it can be first by the first locating wheel 3, the second locating wheel 4, third locating wheel 14 and the 4th locating wheel 13 the two of conveyer belt
Side is fixed, and the first locating wheel 3 and third locating wheel 14 are oppositely arranged, and spacing is the width of substrate 2,4 He of the second locating wheel
4th locating wheel 13 is oppositely arranged, and spacing is the width of substrate 2.
In order to avoid substrate 2 cannot normally enter between the first locating wheel 3 and third locating wheel 14, the second locating wheel 4
And the 4th between locating wheel 13, the first locating wheel 3, the second locating wheel 4, third locating wheel 14 and the 4th locating wheel 13 can be set
It is set to castor, i.e. the first locating wheel 3, the second locating wheel 4, third locating wheel 14 and the 4th locating wheel 13 can be in y-direction
It is mobile.Specifically, the width that the distance between the first locating wheel 3 and third locating wheel 14 are greater than substrate 2 can be set first, so
Afterwards when position sensor detects that substrate 2 enters between the first locating wheel 3 and third locating wheel 14, pass through sliding equipment band
Dynamic first locating wheel 3 and third locating wheel 14 are close to the side of substrate 2, and the contact aside with substrate 2, realize in substrate 2
The direction x on substrate 2 is corrected.Similarly, when substrate 2 continues on, enters the second locating wheel 4 and the 4th locating wheel 13
Between when, sliding equipment drives the second locating wheel 4 and the 4th locating wheel 13 close to the side of substrate 2, and the side with substrate 2
The lasting correction to substrate 2 is realized in contact.
There are many kinds of the set-up modes of sliding equipment, as shown in Fig. 2, can be the knot using gear 16, the cooperation of rack gear 15
Structure, i.e., when needing to correct substrate 2, motor driven gear 16 is rotated, and then with carry-over bar 15 to the side close to substrate 2
To movement, it is further driven to that the first locating wheel 3 of 15 end of rack gear, the second locating wheel 4, third locating wheel 14 or the 4th is arranged in
Locating wheel 13 is want mobile close to the direction of substrate 2.When the first locating wheel 3, the second locating wheel 4, third locating wheel 14 and the 4th are fixed
After position wheel 13 offsets with the side of substrate 2 simultaneously, the correction to the direction x of substrate 2 is completed.
When the direction x correction after, rotate backward motor so that gear 16 invert, be further driven to the first locating wheel 3,
Second locating wheel 4, third locating wheel 14 or the 4th locating wheel 13 leave substrate 2, enable the normal conveying substrate of conveying device
2。
Similarly, first right before carrying out defects detection to substrate 2 in y-direction after the direction the x defects detection of substrate 2
The position of side on the direction y of substrate 2 is corrected, to guarantee accuracy that second detection device 6 detects substrate 2.
In the present embodiment, device for aligning further includes lateral apparatus for correcting, and lateral apparatus for correcting is in y-direction
Aligning is carried out to substrate 2.
Specifically, lateral apparatus for correcting includes prelocalization device and post-positioning device；The setting of prelocalization device is filled in conveying
The supply side of conveying device is arranged in the output end set, post-positioning device, and lateral apparatus for correcting is used to stop conveying in substrate 2
Afterwards, aligning is carried out to substrate 2 in y-direction.
More specifically, prelocalization device includes the 5th locating wheel 7 and the 6th locating wheel 12 being arranged in the y-direction；After position
Device includes the 7th locating wheel 9 and the 8th locating wheel 11 being arranged in the y-direction.
In the present embodiment, as shown in figure 3, the 5th locating wheel 7, the 6th locating wheel 12, the 7th locating wheel 9 and the 8th positioning
11 in the initial state, the 5th locating wheel 7 and the 6th locating wheel 12 are arranged in the top of the first end A of conveying device to wheel, and the 7th
The top of the second end B of conveying device is arranged in locating wheel 9 and the 8th locating wheel 11, when needing the position to the direction y of substrate 2
When accuracy is corrected, motor rotation drives the swing rod 17 being arranged on motor shaft 18 to rotate around motor shaft 18, and then drives and set
Set 11 turns of the 5th locating wheel 7, the 6th locating wheel 12, the 7th locating wheel 9 or the 8th locating wheel in the side of 17 other end of swing rod
It is dynamic, it is turned on the side wall of substrate 2, substrate 2 is compressed, and then complete the positioning to substrate 2；It completes to substrate
After positioning on 2 direction y, motor reversal drives the 5th locating wheel 7, the 6th locating wheel 12, the 7th locating wheel 9 or the 8th fixed
Position wheel 11 opposite directions rotation, so that the 5th locating wheel 7, the 6th locating wheel 12, the 7th locating wheel 9 and the 8th locating wheel 11 leave base
The side of plate 2 avoids influencing detection of the second detection device 6 to substrate 2.
In another embodiment of the utility model, further, substrate detection apparatus further includes moving-out device；It removes
Device is connect with the first detection device 5 and 6 signal of second detection device, in the first detection device 5 or second detection device 6
When detecting that substrate 2 is defective, which is removed from conveying device.
That is, scarce by moving-out device having of can detected the first detection device 5 or second detection device 6
Sunken substrate 2 is removed from conveying device in time, is avoided the defective substrate 2 detected from entering subsequent processing, is such as avoided
Defective substrate 2 enters in coating machine 10.
By the cooperation of moving-out device and the first detection device 5, second detection device 6, manual operation can be reduced, and mention
The high accuracy rate of operation, avoids manually-operated fault rate, while also improving detection efficiency and conveying to coating machine 10
The efficiency of substrate 2.
Specifically, in the present embodiment, moving-out device is absorption mechanical arm.Absorption sucker is evacuated by air pump,
Make to adsorb sucker and form negative pressure, defective substrate 2 is sucked up from conveyor belt, then mobile absorption sucker, by substrate 2 from
It is removed above conveyor belt, it is to be processed to be sent to designated position etc..
It should be pointed out that in the present embodiment, moving-out device is absorption mechanical arm, but it is not limited solely to this
Kind set-up mode, can also be other structures, can also such as be moved linearly by stepper motor lead-screw, screw rod end
Substrate 2 is ejected from conveyor belt, completes the removal etc. to substrate 2, that is to say, that as long as the structure setting energy of moving-out device
It is enough to remove substrate 2 from conveyor belt.
In another embodiment of the utility model, the first detection device 5 is range sensor or infrared sensor.
The detection mode of first detection device 5 can be to be detected using range sensor, that is, passes through range sensor
The distance between substrate 2 changes to judge whether substrate 2 has defect, when range sensor detects substrate 2 and apart from biography
When the distance between sensor becomes larger, judge that the position of substrate 2 has defect.
It should be pointed out that the detection mode of the first detection device 5 can be and be detected using range sensor, it can also
Being detected using infrared sensor, it can also be and detected using image comparison detection device.
When the first detection device 5 is image comparison detection device, image comparison detection device includes camera and image
Comparison device；Camera is connect with image comparison device, for the substrate image of shooting to be conveyed to image comparison device, and by
Image comparison device compares the image that camera is shot with the complete base map of substrate 2.
That is, shooting substrate 2 by camera by the base map of storage integrated substrate 2 in image comparison device
Live-pictures compare photo and base map, and when comparing consistent, substrate 2 is complete, and when comparing inconsistent, substrate 2, which has, to be lacked
It falls into.
In this application, substrate 2 is specially sheet glass.
The utility model additionally provides a kind of filming equipment comprising plating membrane cavity and base board defect described in any of the above embodiments
Detection device, the base board defect detecting device is set to the input terminal of the plating membrane cavity, for that will pass through the base board defect
Flawless substrate is delivered to the plating membrane cavity after detection device detection, and then ensure that the intracavitary substrate zero defect of plated film, keeps away
Exempt from filming equipment to defect substrate film coating, improves plating membrane efficiency.
As shown in figure 4, the utility model is using aforesaid substrate detection device progress substrate detection, the specific method is as follows:
I.e. during substrate 2 conveys, defects detection first is carried out to the two sides in the direction x of substrate 2, when to substrate 2
The direction x on two sides detection when finishing, stop substrate 2 and convey, defects detection is carried out to the two sides in the direction y of substrate 2.
That is, during the entire process of being detected to substrate 2, first to the left and right sides on the direction x of substrate 2 into
Row detection, then the other two sides of substrate 2 are detected, and then realize the complete detection to substrate 2, avoid defective base
Plate 2 enters in coating machine 10.
During substrate 2 conveys, need first to correct substrate 2 on the direction x of substrate 2, then carry out substrate 2
The direction x on defects detection, and then can guarantee the accuracy of substrate 2 when being detected, avoid the occurrence of detection error.
Similarly, it when detecting the two sides on the progress of substrate 2 direction y, needs first to rectify the position of substrate 2
Just, to guarantee the accuracy detected.That is, first being carried out to substrate 2 after detection finishes the two sides in the direction x of substrate 2
Aligning positioning, is detected in the two sides in the direction y to substrate 2 later.After the x angle detecting of substrate 2 carries out,
Monitoring position is carried out to substrate 2, convenient for carrying out the positioning and detection in the direction y to substrate 2.The mode detected to substrate 2 is
Image comparison method.After detecting that substrate 2 is defective in any direction, substrate 2 is removed from conveying device by moving-out device.
Substrate detection apparatus, filming equipment and glass detection method provided by the utility model, by conveying device
The first detection device 5 is arranged in two sides, and second detection device 6, two first inspections are arranged in the first end and second end of conveying device
It surveys device 5 and two second detection devices 6 cooperates jointly, complete the detection to four sides of substrate 2, it is ensured that will not make defective
Substrate 2 enter subsequent processing, ensure that normal operation.
Finally, it should be noted that the above various embodiments is only to illustrate the technical solution of the utility model, rather than it is limited
System；Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should
Understand: it is still possible to modify the technical solutions described in the foregoing embodiments, or to some or all of
Technical characteristic is equivalently replaced；And these are modified or replaceed, it does not separate the essence of the corresponding technical solution, and this is practical new
The range of each embodiment technical solution of type.
In addition, it will be appreciated by those of skill in the art that although some embodiments in this include institute in other embodiments
Including certain features rather than other feature, but the combination of the feature of different embodiment means to be in the utility model
Within the scope of and form different embodiments.For example, embodiment claimed is appointed in claims above
Meaning one of can in any combination mode come using.The information disclosed in the background technology section is intended only to deepen to this
The understanding of the general background technology of utility model, and be not construed as recognizing or implying in any form that information composition has been
The prior art known in those skilled in the art.
Claims (10)
1. a kind of base board defect detecting device, which is characterized in that including the first detection device, second detection device, conveying device
And mobile device；
The conveying device is for driving substrate to be transported to second end from first end；
First detection device is arranged in the first end, for detecting on the substrate side parallel with conveying direction
Defect；
The mobile device is connect with the second detection device, for driving the second detection device perpendicular to described defeated
Send the other end for being moved to the conveying device on the direction in direction from one end of the conveying device；
The second detection device, for detecting the defect on the substrate side vertical with conveying direction.
2. base board defect detecting device according to claim 1, which is characterized in that the base board defect detecting device also wraps
Positioning device is included, the positioning device is for positioning the substrate in the conveying device.
3. base board defect detecting device according to claim 2, which is characterized in that the positioning device includes position detection
Device and device for aligning；
The position detecting device is for detecting position of the substrate in the conveying device；
The device for aligning is connect with the position detecting device signal, for carrying out to the substrate in the conveying device
Aligning.
4. base board defect detecting device according to claim 3, which is characterized in that the device for aligning includes longitudinal
Apparatus for correcting and lateral apparatus for correcting, the longitudinal direction apparatus for correcting are used on the direction parallel with the conveying direction to substrate
Aligning is carried out, the transverse direction apparatus for correcting is used to carry out position to the substrate on the direction vertical with the conveying direction
Set correction.
5. base board defect detecting device according to claim 4, which is characterized in that the longitudinal direction apparatus for correcting includes left side
Positioning device and right positioner device；
The left side positioning device and the right positioner device are separately positioned on the opposite sides of the conveying device, are used for
Aligning is carried out to the substrate on the conveying direction.
6. base board defect detecting device according to claim 5, which is characterized in that the left side positioning device includes along institute
Multiple locating wheels of conveying direction setting are stated, the right positioner device includes multiple positioning along conveying direction setting
Wheel.
7. base board defect detecting device according to claim 4, which is characterized in that the transverse direction apparatus for correcting includes preceding fixed
Position device and post-positioning device；
The output end of the conveying device is arranged in the prelocalization device, and the post-positioning device is arranged in the conveying device
Supply side, the prelocalization device and the post-positioning device are used on the direction vertical with the conveying direction to described
Substrate carries out aligning.
8. base board defect detecting device according to claim 7, which is characterized in that the prelocalization device includes along described
Multiple locating wheels of the vertical direction setting of conveying device direction of feed；
The post-positioning device includes multiple locating wheels along the vertical direction setting of the conveying device direction of feed.
9. base board defect detecting device according to claim 1, which is characterized in that the base board defect detecting device also wraps
Include moving-out device；
The moving-out device is connect with first detection device and the second detection device signal, in first inspection
When survey device or the second detection device detect substrate existing defects, which is removed from the conveying device.
10. a kind of filming equipment, which is characterized in that including plating membrane cavity and base board defect as described in any one of claim 1 to 9
Detection device, the base board defect detecting device is set to the input terminal of the plating membrane cavity, for that will pass through the base board defect
Flawless substrate is delivered to the plating membrane cavity after detection device detection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822017937.6U CN209328849U (en) | 2018-11-29 | 2018-11-29 | Base board defect detecting device and filming equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822017937.6U CN209328849U (en) | 2018-11-29 | 2018-11-29 | Base board defect detecting device and filming equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209328849U true CN209328849U (en) | 2019-08-30 |
Family
ID=67712571
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822017937.6U Active CN209328849U (en) | 2018-11-29 | 2018-11-29 | Base board defect detecting device and filming equipment |
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| Country | Link |
|---|---|
| CN (1) | CN209328849U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114227440A (en) * | 2021-12-23 | 2022-03-25 | 青岛融合光电科技有限公司 | Automatic adjusting device and adjusting method for feed amount for grinding carrier plate glass |
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2018
- 2018-11-29 CN CN201822017937.6U patent/CN209328849U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114227440A (en) * | 2021-12-23 | 2022-03-25 | 青岛融合光电科技有限公司 | Automatic adjusting device and adjusting method for feed amount for grinding carrier plate glass |
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