CN209296208U - A kind of monocrystalline silicon differential pressure pick-up with symmetrical structure - Google Patents
A kind of monocrystalline silicon differential pressure pick-up with symmetrical structure Download PDFInfo
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- CN209296208U CN209296208U CN201921150804.4U CN201921150804U CN209296208U CN 209296208 U CN209296208 U CN 209296208U CN 201921150804 U CN201921150804 U CN 201921150804U CN 209296208 U CN209296208 U CN 209296208U
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- pedestal
- pipeline
- differential pressure
- symmetrical structure
- monocrystalline silicon
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Abstract
The utility model discloses a kind of monocrystalline silicon differential pressure pick-up with symmetrical structure, belongs to sensitive components technical field.A kind of monocrystalline silicon differential pressure pick-up with symmetrical structure, including sintering pedestal, silicon single crystal wafer, core body seat, core pipeline, pedestal, pedestal pipeline, center diaphragm, central lumen, isolation diaphragm, isolation chamber；The core pipeline, pedestal pipeline, central lumen, separate cavities are respectively provided with filling liquid in room；The core pipeline is symmetrically distributed relative to silicon single crystal wafer, and the pedestal pipeline, central lumen, isolation chamber are axisymmetricly distributed relative to center diaphragm, and filling liquid is equal in the chamber.The utility model has the advantages that filling liquid is equal in 1. chamber, and sensor temperature drift is small, good combination property；2. circuit design is succinct, easy to process, at low cost.
Description
Technical field
The utility model relates to sensitive components technical field, specially a kind of monocrystalline silicon differential pressure with symmetrical structure is passed
Sensor.
Background technique
Existing monocrystalline silicon differential pressure pick-up generally includes chip, sensor positive pressure chamber, sensor negative pressure cavity, positive pressure chamber oil
Road, negative pressure cavity oil circuit, center diaphragm, case interface etc. have a problem in that 1. internal structure is asymmetric, positive/negative-pressure oil circuit oil
Measure it is unequal, be equivalent to chip apply positive pressure/negative pressure, and then influence sensor temperature drift performance；2. positive/negative-pressure oil circuit designs
Complexity, processing cost are high.In view of the above-mentioned problems, my company develops a kind of monocrystalline silicon differential pressure pick-up with symmetrical structure.
Summary of the invention
For disadvantages mentioned above existing in the prior art, the utility model is directed to a kind of monocrystalline with symmetrical structure
Silicon differential pressure pick-up, to overcome the shortcomings of the prior art.
To achieve the goals above, the utility model adopts the technical scheme that
A kind of monocrystalline silicon differential pressure pick-up with symmetrical structure, including sintering pedestal, silicon single crystal wafer, core body seat, core
Body pipeline, pedestal, pedestal pipeline, center diaphragm, central lumen, isolation diaphragm, isolation chamber；The core pipeline, pedestal tube
Road, central lumen, separate cavities are respectively provided with filling liquid in room；It is characterized in that, the pedestal pipeline, central lumen, isolation chamber
It is axisymmetricly distributed relative to center diaphragm, filling liquid is equal in the chamber.
Preferably, being provided with steel ball, jackscrew in the pedestal, the steel ball, jackscrew are for sealing oil-filled hole.
Preferably, the center diaphragm, isolation diaphragm include metallic membrane.
Preferably, the filling liquid includes silicone oil.
Compared with prior art, the utility model has the beneficial effects that since the base construction of sensor axisymmetricly divides
Cloth, 1. filling liquid is equal in chamber, and sensor temperature drift is small, good combination property；2. circuit design is succinct, easy to process, at
This is low.
Detailed description of the invention
Fig. 1 be the utility model proposes a kind of monocrystalline silicon differential pressure pick-up schematic diagram with symmetrical structure.
In figure: 1- is sintered pedestal, 2- silicon single crystal wafer, 3- core body seat, 4- core pipeline, 5- pedestal, 6- pedestal pipeline, 7-
Center diaphragm, 8- central lumen, 9- isolation diaphragm, 10- isolation chamber, 11- filling liquid, 12- steel ball, 13- jackscrew, 14- are oil-filled
Hole.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.
A kind of monocrystalline silicon differential pressure pick-up of symmetrical structure, including sintering pedestal 1, silicon single crystal wafer 2, core body seat 3, core
Pipeline 4, pedestal 5, pedestal pipeline 6, center diaphragm 7, central lumen 8, isolation diaphragm 9, isolation chamber 10；The core pipeline 4,
Pedestal pipeline 6, central lumen 8, isolation chamber 10 in be respectively provided with filling liquid 11；
It is characterized in that, the pedestal pipeline 6, central lumen 8, isolation chamber 10 relative to center diaphragm 7 axisymmetricly
It is distributed, filling liquid 11 is equal in the chamber.
Steel ball 12, jackscrew 13 are provided in the pedestal 5, the steel ball 12, jackscrew 13 are for sealing oil-filled hole 14.
The center diaphragm 7, isolation diaphragm 9 include metallic membrane.
The filling liquid 11 includes silicone oil.
The preferable specific embodiment of the above, only the utility model, but the protection scope of the utility model is not
It is confined to this, anyone skilled in the art is within the technical scope disclosed by the utility model, practical according to this
Novel technical solution and its utility model design are subject to equivalent substitution or change, should all cover the protection model in the utility model
Within enclosing.
Claims (4)
1. a kind of monocrystalline silicon differential pressure pick-up with symmetrical structure, including sintering pedestal (1), silicon single crystal wafer (2), core body seat
(3), core pipeline (4), pedestal (5), pedestal pipeline (6), center diaphragm (7), central lumen (8), isolation diaphragm (9), isolation
Chamber (10)；The core pipeline (4), pedestal pipeline (6), central lumen (8), isolation chamber (10) in be respectively provided with filling liquid
(11)；
It is characterized in that, the pedestal pipeline (6), central lumen (8), isolation chamber (10) are in axis relative to center diaphragm (7)
Symmetrical, filling liquid (11) is equal in the chamber.
2. a kind of monocrystalline silicon differential pressure pick-up with symmetrical structure according to claim 1, which is characterized in that the pedestal
(5) steel ball (12), jackscrew (13) are provided in, the steel ball (12), jackscrew (13) are for sealing oil-filled hole (14).
3. a kind of monocrystalline silicon differential pressure pick-up with symmetrical structure according to claim 1, which is characterized in that the center
Diaphragm (7), isolation diaphragm (9) include metallic membrane.
4. a kind of monocrystalline silicon differential pressure pick-up with symmetrical structure according to claim 1, which is characterized in that the filling
Liquid (11) includes silicone oil.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921150804.4U CN209296208U (en) | 2019-07-22 | 2019-07-22 | A kind of monocrystalline silicon differential pressure pick-up with symmetrical structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921150804.4U CN209296208U (en) | 2019-07-22 | 2019-07-22 | A kind of monocrystalline silicon differential pressure pick-up with symmetrical structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209296208U true CN209296208U (en) | 2019-08-23 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201921150804.4U Active CN209296208U (en) | 2019-07-22 | 2019-07-22 | A kind of monocrystalline silicon differential pressure pick-up with symmetrical structure |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109870266A (en) * | 2017-12-04 | 2019-06-11 | 南京沃天科技有限公司 | A kind of dual chip differential pressure core |
| CN112345158A (en) * | 2021-01-07 | 2021-02-09 | 南京精准传感科技有限公司 | Differential pressure sensing method of high-static-pressure monocrystalline silicon differential pressure sensor |
| CN112729666A (en) * | 2020-12-25 | 2021-04-30 | 上海艾靳智能科技有限公司 | High-stability monocrystalline silicon differential pressure sensor |
| CN114777993A (en) * | 2022-04-15 | 2022-07-22 | 苏州森斯缔夫传感科技有限公司 | High-overload monocrystalline silicon differential pressure sensor |
-
2019
- 2019-07-22 CN CN201921150804.4U patent/CN209296208U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109870266A (en) * | 2017-12-04 | 2019-06-11 | 南京沃天科技有限公司 | A kind of dual chip differential pressure core |
| CN112729666A (en) * | 2020-12-25 | 2021-04-30 | 上海艾靳智能科技有限公司 | High-stability monocrystalline silicon differential pressure sensor |
| CN112345158A (en) * | 2021-01-07 | 2021-02-09 | 南京精准传感科技有限公司 | Differential pressure sensing method of high-static-pressure monocrystalline silicon differential pressure sensor |
| CN114777993A (en) * | 2022-04-15 | 2022-07-22 | 苏州森斯缔夫传感科技有限公司 | High-overload monocrystalline silicon differential pressure sensor |
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Address after: No.5 Wenying Road, Binjiang Development Zone, Jiangning District, Nanjing City, Jiangsu Province Patentee after: Nanjing wotian Technology Co.,Ltd. Address before: No.5 Wenying Road, Binjiang Development Zone, Jiangning District, Nanjing City, Jiangsu Province Patentee before: NANJING WOTIAN TECHNOLOGY Co.,Ltd. |