CN209183944U

CN209183944U - A kind of N-type laser resonator for radio-frequency carbone dioxide laser

Info

Publication number: CN209183944U
Application number: CN201920045861.XU
Authority: CN
Inventors: 唐友清
Original assignee: Morning Of Nanjing Ruiteng Crystal Laser Technology Co Ltd
Current assignee: Morning Of Nanjing Ruiteng Crystal Laser Technology Co Ltd
Priority date: 2019-01-11
Filing date: 2019-01-11
Publication date: 2019-07-30
Anticipated expiration: 2029-01-11

Abstract

The utility model discloses a kind of N-type laser resonators for radio-frequency carbone dioxide laser, including resonant cavity ontology (1), front end-plate (2), end plate (3), inductance mechanism (4), positive electrode plate (5) and negative electrode plate (7), intracavity bottom setting and resonant cavity ontology (1) integrally formed negative electrode plate (7) of the resonant cavity, positive electrode plate (5) and inductance mechanism (4) is successively arranged in parallel in the top of negative electrode plate (7), inductance mechanism (4) is connected to form LC oscillating circuit with positive electrode plate (5) and negative electrode plate (7) respectively, N-type optical path guiding mechanism (6) is equipped between positive electrode plate (5) and negative electrode plate (7), section in N-type optical path guiding mechanism (6) be circular bending in the optical path guiding groove of N shape end respectively with front end-plate (2) It is corresponding with the corresponding eyeglass on end plate (3).The utility model has the advantages of simple structure, good airproof performance, the laser beam quality of output are good.

Description

A kind of N-type laser resonator for radio-frequency carbone dioxide laser

Technical field

The utility model relates to laser technology field, specifically a kind of structure is simple, assembly is easy, performance is stable N-type laser resonator for radio-frequency carbone dioxide laser.

Background technique

Generally by positive electrode plate, negative electrode plate and connection positive-negative electrode plate in the resonant cavity of radio-frequency carbone dioxide laser Several inductance coils constitute LC oscillating circuit, positive electrode plate and negative electrode plate are two pieces of plate electrodes, after opening laser, Laser working gas between positive-negative electrode plate occurs glow discharge by excitation and produces laser, and laser constantly shakes in oscillating circuit It swings amplification finally to go out laser output mirror piece and be output to outside laser resonator, section for export resonant cavity by laser shaping optical path Face is that the beam shaping of rectangle is round light beam, is subsequently used for laser machining, since the laser beam of plate electrode excitation is rectangle, So the laser resonator using plate electrode will generally be matched with complicated optical path apparatus for shaping, increase equipment at This, and it is also more complex by the manufacturing process that several inductance coils connect positive electrode plate and negative electrode plate, it is humorous to increase laser The assembly difficulty of vibration chamber.

Summary of the invention

The purpose of this utility model is in view of the problems of the existing technology, to provide that a kind of structure is simple, assembly is easy, property The stable N-type laser resonator for radio-frequency carbone dioxide laser of energy；The laser resonator is by adding the guidance of N-type optical path Mechanism makes laser resonator directly export the circular light beam in section, does not need complicated optical path apparatus for shaping to rectangular light beam Shaping is carried out, while replacing several inductance coils with integrally formed inductance mechanism, reduces assembly difficulty, the prior art is solved and deposits The problem of.

The purpose of this utility model solves by the following technical programs:

A kind of N-type laser resonator for radio-frequency carbone dioxide laser, including resonant cavity ontology, front end-plate, rear end Plate, inductance mechanism, positive electrode plate and negative electrode plate, resonant cavity ontology, front end-plate, end plate combination constitute a closed resonance Chamber, it is characterised in that: intracavity bottom setting and the integrally formed negative electrode plate of resonant cavity ontology, the negative electrode plate of the resonant cavity Top be successively arranged in parallel positive electrode plate and inductance mechanism, inductance mechanism is connected with positive electrode plate and negative electrode plate structure respectively At LC oscillating circuit, between the positive electrode plate and negative electrode plate be equipped with the two N-type optical path guiding mechanism disposed in parallel, Section in N-type optical path guiding mechanism be circular optical path guiding groove end respectively to the corresponding mirror on front end-plate and end plate Piece is corresponding.

Connecting column in the inductance mechanism is vertically connected with positive electrode plate, and the end of the inductive rack in inductance mechanism Portion passes through circlip respectively and is connected with front end-plate and end plate, and inductance mechanism is enabled to pass through resonant cavity ontology and negative electrode plate phase Connection.

The inductance mechanism includes inductive rack, plate-like inductance coil and connecting column, and inductive rack is equipped with and inductance The identical plate-like inductance coil of backing thickness, two inductive racks with plate-like inductance coil be set side by side i.e. constitute inductance mechanism and Two plate-like inductance coils of arbitrary neighborhood in inductance mechanism adhere to different inductive racks separately；The upper end of the connecting column with it is corresponding The center of plate-like inductance coil be connected, i.e. the center of each plate-like inductance coil have the connecting column extended downwardly with Positive electrode plate is connected.

The inductive rack and plate-like inductance coil are integrally formed；The plate-like inductance coil is conductive material by introversion Gradually open coiling composition in the same plane in the direction of the clock outside；Between constituting between the conductive material of same plate-like inductance coil Gap is identical and gap width is identical as the thickness of the conductive material.

Installation laser output mirror microscope base and anti-for installing laser is respectively provided on the thickness direction of the front end-plate Penetrate the through hole of mirror microscope base, the side of laser output mirror microscope base and laser mirror microscope base pass through respectively corresponding sheet metal with It is all equipped at the eyeglass installation end of the inner wall connection of corresponding through hole, laser output mirror microscope base and laser mirror microscope base corresponding The eyeglass installation end of pressure cap and laser output mirror microscope base and laser mirror microscope base is embedded in the inner cavity of corresponding pressure cap, so that swashing Light output mirror eyeglass is fixed on laser output mirror microscope base and laser mirror eyeglass is fixed on laser mirror microscope base.

The sheet metal is respectively adjacent to the eyeglass installation end of corresponding laser output mirror microscope base and laser mirror microscope base Setting, and sheet metal with a thickness of 0.6mm~0.9mm.

It is respectively equipped on the front end-plate along the radially uniform of corresponding laser output mirror microscope base and laser mirror microscope base The bolt hole of distribution adjusts bolt and is threadedly coupled with bolt hole respectively by corresponding laser output mirror microscope base and laser mirror mirror Seat is limited in the through hole on front end-plate；The adjusting bolt respectively corresponds setting in corresponding laser output mirror microscope base and swashs The tail end of light reflection mirror microscope base is can limit the position of laser output mirror microscope base and laser mirror microscope base and to adjust laser defeated The angle of appearance microscope base and laser mirror microscope base.

The central axes of the laser output mirror microscope base laser parallel and described with the horizontal line on the plate thickness direction of front end is anti- It penetrates the central axes of mirror microscope base and the horizontal line on the plate thickness direction of front end constitutes the angle that degree is 4 °~7 °.

The first reflection of installation reflecting mirror eyeglass is respectively provided in through hole on the thickness direction of the end plate The side of microscope base and the second mirror unit, the first mirror unit and the second mirror unit passes through corresponding sheet metal respectively and passes through The inner wall of perforation connects, and pressure cap 5 is respectively equipped at the eyeglass installation end of the first mirror unit and the second mirror unit and first is anti- The eyeglass installation end for penetrating microscope base and the second mirror unit is all embedded in the inner cavity of pressure cap 5, so that reflecting optics are fixed on On one mirror unit and the second mirror unit.

The sheet metal is respectively adjacent to corresponding first mirror unit and the eyeglass installation end of the second mirror unit is set Set, and sheet metal with a thickness of 0.6mm~0.9mm.

The spiral shell of the radially uniform distribution along the first mirror unit and the second mirror unit is respectively equipped on the end plate Keyhole, adjusting bolt is threadedly coupled with bolt hole is respectively limited to the first mirror unit and the second mirror unit on end plate In through hole；The adjusting bolt respectively corresponds the tail end that the first mirror unit and the second mirror unit is arranged in can limit The position of fixed first mirror unit and the second mirror unit and the angle for adjusting the first mirror unit and the second mirror unit.

It is 2 °~4 ° that the central axes of first mirror unit and the horizontal line on the plate thickness direction of rear end, which constitute degree, Horizontal line on the central axes of angle and the second mirror unit and rear end plate thickness direction also constitutes the angle that degree is 2 °~4 °.

The pressure cap is that cylindric and pressure cap one end is respectively equipped with the edge to extend internally and outwardly extending edge, The edge to extend internally is used to corresponding eyeglass being fixed on corresponding microscope base and outwardly extending edge is used for tearing open for pressure cap It unloads.

The N-type optical path guiding mechanism is equipped with optical path groove A, optical path groove B and optical path groove C in N shape arrangement, Wherein optical path groove A is parallel with a long side on N-type optical path guiding mechanism ontology and closes on the long side, and the one of optical path groove B End originate in one end of optical path groove A and its other end to the diagonally opposing corner end of N-type optical path guiding mechanism ontology to extend to optical path recessed One end of slot C, optical path groove C is parallel with another long side on N-type optical path guiding mechanism ontology and closes on the long side；Wherein light One end that road groove A and optical path groove B cross is the first joint laser reflection port and the first joint laser reflection port It is correspondingly arranged with the first mirror unit on end plate, one end that optical path groove C and optical path groove B cross is swashed for the second joint Light reflector port and the second joint laser reflection port is correspondingly arranged with the laser mirror microscope base on front end-plate, optical path groove The other end of A is laser output mouth and laser output mouth is correspondingly arranged with the laser output mirror microscope base on front end-plate, optical path The other end of groove C is opening laser reflection port and opening laser reflection port is corresponding with the second mirror unit on end plate Setting.

The folder between angle and optical path groove B and optical path groove C between the optical path groove A and optical path groove B Angle is 3 °~6 ° and the diameter of optical path groove A, optical path groove B and optical path groove C are 2.5mm~3.5mm.

Resonant cavity ontology, front end-plate and the end plate all uses same metal material to be made, in front end-plate and rear end Plate face is equipped with the sealed groove that a circle is filled with metallic sealing material to the side of resonant cavity ontology, respectively will by fastener Front end-plate and end plate and the fixed seal connection of resonant cavity ontology then constitute resonant cavity；It is equipped on the outer wall of resonant cavity along vertical Direction several cooling fins disposed in parallel, cooling fin and this body by integral forming of resonant cavity.

The utility model has the following advantages compared with prior art:

The utility model constructs LC oscillation electricity by the ingenious connection between positive electrode plate, negative electrode plate and inductance mechanism Road, while constructing section by the N shape guiding groove in N-type optical path guiding mechanism is circular resonant optical path channel, produces resonance Raw original laser beam is circular laser beam, does not need to obtain using complicated optical path complete machine mechanism good accurate sharp For light beam for laser machining, the optical path guiding groove of the more single linear of N shape optical path guiding groove of equal length is more efficient, can generate The effective optical path length of laser generation is longer, therefore can export more powerful laser；The structure of the laser resonator is simple, scattered Hot good, good airproof performance, the laser beam quality of output are good, therefore are suitable for promoting.

Detailed description of the invention

Attached drawing 1 is the shaft side figure of the N-type laser resonator of the utility model；

Attached drawing 2 is that the N-type laser resonator of the utility model faces cross section structure figure；

Attached drawing 3 is the front end-plate sectional view of the N-type laser resonator of the utility model；

Attached drawing 4 is the front end-plate sectional view of the N-type laser resonator of the utility model；

Attached drawing 5 is the end plate sectional view of the N-type laser resonator of the utility model；

Attached drawing 6 is the pressure cap structure chart of the N-type laser resonator of the utility model；

Attached drawing 7 is the inductance mechanism and positive electrode plate combination assumption diagram of the N-type laser resonator of the utility model；

Attached drawing 8 is the structural schematic diagram of the inductance mechanism of the N-type laser resonator of the utility model；

Attached drawing 9 is the structural schematic diagram of the N-type optical path guiding mechanism of the N-type laser resonator of the utility model.

Wherein: 1-resonant cavity ontology；11-cooling fins；2-front end-plates；21-through holes；22-laser output mirror mirrors Seat；23-laser mirror microscope bases；24-bolts hole；25-pressure caps；3-end plates；31-the first mirror unit；32-the second Mirror unit；4-inductance mechanisms；41-inductive racks；42-plate-like inductance coils；43-connecting columns；5-positive electrode plates；6— N-type optical path guiding mechanism；61-optical path groove A；62-optical path groove B；63-optical path groove C；64-the first crosses dot laser Reflector port；65-the second joint laser reflection port；66-laser output mouths 66；67-opening laser reflection ports； 68-positioning through hole；7-negative electrode plates.

Specific embodiment

The utility model is further described with embodiment with reference to the accompanying drawing.

As shown in figs 1-9: a kind of N-type laser resonator for radio-frequency carbone dioxide laser, including resonant cavity ontology 1, front end-plate 2, end plate 3, inductance mechanism 4, positive electrode plate 5 and negative electrode plate 7, resonant cavity ontology 1, front end-plate 2, end plate 3 Combination constitutes a closed resonant cavity, and wherein resonant cavity ontology 1, front end-plate 2 and end plate 3 all use same metal material system At being equipped with the sealing that a circle is filled with metallic sealing material towards the side of resonant cavity ontology 1 in front end-plate 2 and end plate 3 Front end-plate 2 and end plate 3 and 1 fixed seal connection of resonant cavity ontology are then constituted resonant cavity respectively by fastener by groove；? The outer wall of resonant cavity is equipped with several cooling fins 11 disposed in parallel along the vertical direction, 1 one of cooling fin 11 and resonant cavity ontology Molding；Intracavity bottom setting and the integrally formed negative electrode plate 7 of resonant cavity ontology 1 in resonant cavity, the top of negative electrode plate 7 according to Secondary that positive electrode plate 5 and inductance mechanism 4 is arranged in parallel, the connecting column 43 in inductance mechanism 4 is vertically connected with positive electrode plate 5, and The end of inductive rack 41 in inductance mechanism 4 passes through circlip respectively and is connected with front end-plate 2 and end plate 3, so that inductance mechanism 4 It can be connected by resonant cavity ontology 1 with negative electrode plate 7, inductance mechanism 4 is connected with positive electrode plate 5 and negative electrode plate 7 respectively It connects and constitutes LC oscillating circuit；It is equipped with and the two N-type optical path vectoring aircraft disposed in parallel between positive electrode plate 5 and negative electrode plate 7 Structure 6, the section in N-type optical path guiding mechanism 6 are the end of circular optical path guiding groove respectively and on front end-plate 2 and end plate 3 Corresponding eyeglass it is corresponding.The carbon dioxide laser working gas of certain air pressure is filled in above-mentioned resonant cavity, in resonant cavity Inside cavity positive electrode plate 5 and negative electrode plate 7 are arranged in parallel, inductance mechanism 4 respectively by connecting column 43 and front and back end plate with just Electrode plate 5 and negative electrode plate 7 connect and compose LC oscillating circuit, and N-type optical path is provided between positive electrode plate 5 and negative electrode plate 7 and is drawn Mechanism 6 is led, N-type optical path guiding mechanism 6 is equipped with the optical path guiding groove in N shape, has been filled with carbon dioxide laser work gas Body opens laser, and for positive electrode plate 5 to 7 high-frequency discharge of negative electrode plate, the gas in excitating optical path guiding groove generates laser, swashs Light roundtrip between two pieces of eyeglasses of front end-plate 2 and one piece of eyeglass of end plate 3 constantly amplifies, when laser power is more than to swash Laser can be output to outside laser resonator by laser output mirror when the output threshold value in light output border, and becoming can be used for laser and add The laser beam of work, because the section of the optical path guiding groove in N-type optical path guiding mechanism 6 is circle, therefore the laser beam exported is also Circle, circular laser beam are most easy for laser machining, only need to be successively by that can form power density after collimating mirror and focus lamp The precise laser beam high, focus is stable and spot diameter is small, can be used for high-precision laser processing.

In the structure basis of above-mentioned laser resonator, inductance mechanism 4 includes integrally formed inductive rack 41 and plate-like Inductance coil 42 and connecting column 43, inductive rack 41 are equipped with plate-like inductance coil 42 identical with 41 thickness of inductive rack, Plate-like inductance coil 42 is that conductive material gradually opens coiling composition in the same plane in the direction of the clock from inside to outside, is constituted same Gap between the conductive material of plate-like inductance coil 42 is identical and gap width is identical as the thickness of the conductive material；Two tep reels Two disks of arbitrary neighborhood constituted in inductance mechanism 4 and inductance mechanism 4 are set side by side in the inductive rack 41 of shape inductance coil 42 Shape inductance coil 42 adheres to different inductive racks 41 separately；The center phase of the upper end of connecting column 43 and corresponding plate-like inductance coil 42 Connection, i.e. the center of each plate-like inductance coil 42 has the connecting column extended downwardly 43 to be connected with positive electrode plate 5.

Installation laser output mirror microscope base 22 and anti-for installing laser is respectively provided on the thickness direction of front end-plate 2 Penetrate the through hole 21 of mirror microscope base 23, the side of laser output mirror microscope base 22 and laser mirror microscope base 23 passes through corresponding gold respectively Belong to thin slice to connect with the inner wall of corresponding through hole 21, sheet metal is respectively adjacent to corresponding laser output mirror microscope base 22 and laser reflection The eyeglass installation end of mirror microscope base 23 is arranged, and sheet metal with a thickness of 0.6mm~0.9mm；Meanwhile on front end-plate 2 respectively Equipped with the bolt hole 24 along corresponding laser output mirror microscope base 22 and the radially uniform distribution of laser mirror microscope base 23, bolt is adjusted Corresponding laser output mirror microscope base 22 and laser mirror microscope base 23 are limited to front end-plate 2 respectively with the threaded connection of bolt hole 24 On through hole 21 in；The adjusting bolt, which respectively corresponds, to be arranged in corresponding laser output mirror microscope base 22 and laser mirror mirror The tail end of seat 23 is can limit the position of laser output mirror microscope base 22 and laser mirror microscope base 23 and adjust laser output mirror On the angle of microscope base 22 and laser mirror microscope base 23, the central axes of laser output mirror microscope base 22 and 2 thickness direction of front end-plate Horizontal line is parallel and the central axes of the laser mirror microscope base 23 constitute degree with the horizontal line on 2 thickness direction of front end-plate and are 4 °~7 ° of angle；Corresponding pressure cap is all equipped at the eyeglass installation end of laser output mirror microscope base 22 and laser mirror microscope base 23 25 and the eyeglass installation end of laser output mirror microscope base 22 and laser mirror microscope base 23 be embedded in the inner cavity of corresponding pressure cap 25, should Pressure cap 25 is that cylindric and pressure cap 25 one end is respectively equipped with the edge to extend internally and outwardly extending edge, is extended internally Edge is used to corresponding eyeglass being fixed on corresponding microscope base and outwardly extending edge is used for the disassembly of pressure cap 25, so that Laser output mirror eyeglass is fixed on laser output mirror microscope base 22 and laser mirror eyeglass is fixed on laser mirror mirror On seat 23.

The first reflection of installation reflecting mirror eyeglass is respectively provided in the through hole 21 on the thickness direction of end plate 3 The side of microscope base 31 and the second mirror unit 32, the first mirror unit 31 and the second mirror unit 32 passes through corresponding metal respectively Thin slice is connect with the inner wall of through hole 21, and sheet metal is respectively adjacent to corresponding first mirror unit 31 and the second mirror unit 32 Eyeglass installation end setting, and sheet metal with a thickness of 0.6mm~0.9mm；It is respectively equipped on end plate 3 along the first reflection The bolt hole 24 of the radially uniform distribution of microscope base 31 and the second mirror unit 32 adjusts bolt with bolt hole 24 and is threadedly coupled difference First mirror unit 31 and the second mirror unit 32 are limited in the through hole 21 on end plate 3；The adjusting bolt point It is not correspondingly arranged at the tail end of the first mirror unit 31 and the second mirror unit 32 the first mirror unit 31 and can be limited The position of two-mirror seat 32 and the angle for adjusting the first mirror unit 31 and the second mirror unit 32, the first mirror unit 31 Horizontal line on central axes and 3 thickness direction of end plate constitutes the axis of angle and the second mirror unit 32 that degree is 2 °~4 ° Horizontal line on line and 3 thickness direction of end plate also constitutes the angle that degree is 2 °~4 °；First mirror unit 31 and second is anti- It penetrates and is respectively equipped with pressure cap 25 and the eyeglass of the first mirror unit 31 and the second mirror unit 32 peace at the eyeglass installation end of microscope base 32 Dress end is all embedded in the inner cavity of pressure cap 25, and pressure cap 25 is that cylindric and pressure cap 25 one end is respectively equipped with the edge to extend internally With outwardly extending edge, the edge to extend internally is for being fixed on corresponding microscope base for corresponding eyeglass and extending outwardly Edge be used for pressure cap 25 disassembly so that reflecting optics are fixed on the first mirror unit 31 and the second mirror unit 32.

Optical path groove A61, optical path groove B62 and the optical path groove in N shape arrangement are equipped in N-type optical path guiding mechanism 6 C63, wherein optical path groove A61 is parallel with a long side on 6 ontology of N-type optical path guiding mechanism and closes on the long side, and optical path is recessed One end of slot B62 originates in one end of optical path groove A61 and its other end is to the diagonally opposing corner end of 6 ontology of N-type optical path guiding mechanism Extend to one end of optical path groove C63, optical path groove C63 it is parallel with another long side on 6 ontology of N-type optical path guiding mechanism and Close on the long side；Between angle and optical path groove B62 between optical path groove A61 and optical path groove B62 and optical path groove C63 Angle be 3 °~6 ° and the diameter of optical path groove A61, optical path groove B62 and optical path groove C63 are 2.5mm~3.5mm. One end that wherein optical path groove A61 and optical path groove B62 cross is the first joint laser reflection port 64 and the first joint Laser reflection port 64 is correspondingly arranged with the first mirror unit 31 on end plate 3, and optical path groove C63 and optical path groove B62 are handed over One end of remittance is the second joint laser reflection port 65 and the second joint laser reflection port 65 and the laser on front end-plate 2 Reflecting mirror microscope base 23 is correspondingly arranged, and the other end of optical path groove A61 is laser output mouth 66 and laser output mouth 66 is with before Laser output mirror microscope base 22 on end plate 2 is correspondingly arranged, and the other end of optical path groove C63 is opening laser reflection port 67 and opens Mouth laser reflection port 67 is correspondingly arranged with the second mirror unit 32 on end plate 3.

It is described in detail to come further below by all parts to N-type laser resonator provided by the utility model Show technical solution of the present invention.

As shown in Figs. 1-2, a kind of N-type laser resonator for radio-frequency carbone dioxide laser, including resonant cavity ontology 1, front end-plate 2, end plate 3, inductance mechanism 4, positive electrode plate 5, N-type optical path guiding mechanism 6 and negative electrode plate 7.Resonant cavity ontology 1 For the rectangle cavity of inner hollow both ends open, front end-plate 2 and end plate 3 are separately mounted to 1 both ends of resonant cavity ontology, make it Constitute a closed cavity, as resonant cavity, inductance mechanism 4, positive electrode plate 5, N-type optical path guiding mechanism 6 and negative electrode plate 7 It is arranged in parallel in intra resonant cavity.Resonant cavity ontology 1 in above structure is made of metal material, and outer wall has along the vertical direction Several cooling fins 11 disposed in parallel, cooling fin 11 and resonant cavity ontology 1 are integrally formed；Front end-plate 2 and end plate 3 by with it is humorous Metal material as vibration chamber ontology 1 is made, and has a circle close in the side of front end-plate 2 and end plate 3 towards resonant cavity ontology 1 Seal groove, metallic sealing material filled in sealed groove, then by fastener respectively by front end-plate 2 and end plate 3 with it is humorous Vibration 1 fixed seal connection of chamber ontology, constitutes resonant cavity, and the carbon dioxide laser work gas of certain pressure is filled in resonant cavity Body.

As shown in Fig. 3-4,6, be provided on front end-plate 2 with the integrally formed laser output mirror microscope base 22 of front end-plate 2 and swash Light reflection mirror microscope base 23, laser output mirror microscope base 22 are that cylindric and centre has a through-hole to export for laser, reflecting mirror microscope base 23 be cylindrical body, and in its end face, installation is used for the reflecting mirror eyeglass of reflection laser；Laser output mirror microscope base 22 and laser mirror Microscope base 23 is respectively set in the through hole 21 for penetrating 2 ontology of front end-plate in a thickness direction, and laser output mirror microscope base 22 is with before It is connected by sheet metal between 2 ontology of end plate and between 2 ontology of laser mirror microscope base 23 and front end-plate, sheet metal The eyeglass installation end for being located proximate to microscope base；There are multiple bolts hole 24 in 2 ontology of front end-plate simultaneously, these bolts hole 24 are along right The radial distribution for answering microscope base is finely adjusted the direction of corresponding microscope base for being inserted into adjusting bolt；Pressure cap 25 is by corresponding eyeglass It is fixedly mounted on the eyeglass installation end of corresponding microscope base, pressure cap 25 is set on microscope base and is fitted close with microscope base.

As seen in figs. 5-6, be provided on end plate 3 with 3 integrally formed two reflecting mirror microscope bases of end plate, respectively First mirror unit 31 and the second mirror unit 32, two microscope bases are cylindrical body, the first mirror unit 31 and the second reflecting mirror Seat 32 is respectively set in the through hole 21 for penetrating 3 ontology of end plate in a thickness direction, the inner wall of through hole 21 and corresponding There are sheet metal connection, the eyeglass installation end for being located proximate to corresponding microscope base of sheet metal between microscope base.In 3 ontology of end plate There are four bolt hole 24, these bolts hole 24 adjust bolt to anti-for being inserted into along the radially uniform distribution of reflecting mirror microscope base 31 The direction for penetrating mirror microscope base 31 is finely adjusted.Pressure cap 25 is set in the eyeglass installation end of reflecting mirror microscope base 31 and for fixing eyeglass On reflecting mirror microscope base 31.

As shown in Fig. 2,7-8, inductance mechanism 4 includes inductive rack 41, plate-like inductance coil 42 and connecting column 43, in inductance Bracket 41 is equipped with plate-like inductance coil 42 identical with 41 thickness of inductive rack, and plate-like inductance coil 42 is conductive material by interior It gradually opens coiling in the same plane in the direction of the clock outward to constitute, between the conductive material for constituting same plate-like inductance coil 42 Gap it is identical and gap width is identical as the thickness of the conductive material；Two inductive racks 41 with plate-like inductance coil 42 are arranged side by side The two plate-like inductance coils 42 of arbitrary neighborhood constituted in inductance mechanism 4 and inductance mechanism 4 are set and adhere to different inductance branch separately Frame；Inductive rack 41 and plate-like inductance coil 42 are integrally formed.Positive electrode plate 5 is arranged in parallel in 4 lower section of inductance mechanism, positive electrode Plate 5 is connected with inductance mechanism 4 by multiple connecting columns 43, has one to extend downwardly at the center of each plate-like inductance coil 42 Connecting column 43, the lower end of connecting column 43 is fixedly connected with positive electrode plate 5；Negative electrode plate 7 is in the interior bottom of chamber of resonant cavity ontology 1 Portion is simultaneously integrally formed with resonant cavity ontology 1, and four ports of two inductive racks 41 of inductance mechanism 4 pass through circlip with before respectively End plate 2 is connected with end plate 3, so that inductance mechanism 4 is connected with the cavity inner wall of resonant cavity respectively by front end-plate 2, end plate 3 It connects, because resonant cavity ontology 1 and negative electrode plate 7 are integrally formed, therefore inductance mechanism 4 is also connect with negative electrode plate 7；Therefore inductance mechanism 4 are connect with positive electrode plate 5, are connect simultaneously also by resonant cavity ontology 1 with negative electrode plate 7 by connecting column 43, thus construct one A LC oscillating circuit connected and composed by inductance mechanism 4, positive electrode plate 5 and negative electrode plate 7, the starting of oscillation for carbon dioxide laser And amplification.

As shown in figure 9, N-type optical path guiding mechanism 6 is arranged in parallel between positive electrode plate 5 and negative electrode plate 7, there is optical path recessed The one side of slot is close to negative electrode plate 6.N-type optical path guiding mechanism 6 is one block of rectangular ceramic plate, there is three in the setting of N shape thereon Optical path groove: optical path groove A61, optical path groove B62 and optical path groove C63, wherein optical path groove A61 and optical path groove C63 points It is not closed on two long sides of ceramic wafer, and parallel with two long sides, one end of optical path groove B62 originates in optical path groove One end of A61 and its other end extend to the diagonally opposing corner end of ceramic wafer finally to intersect with one end of optical path groove C63, optical path groove Angle between A61 and optical path groove B62 be 3 °~6 ° and the diameter of optical path groove A61 and optical path groove B62 be 2.5mm~ 3.5mm.One end that wherein optical path groove A61 and optical path groove B62 cross is the first joint laser reflection port 64, and optical path is recessed One end that slot C63 and optical path groove B62 cross is the second joint laser reflection port 65, and the optical path groove A61 other end is sharp The other end of optical output port 66 and optical path groove C63 are opening laser reflection port 67；First joint laser reflection port 64 are correspondingly arranged with the first mirror unit 31 on end plate 3, the laser output mouth 66 on optical path groove A61 and front end-plate 2 On laser output mirror microscope base 23 be correspondingly arranged, the second joint laser reflection port 65 and the laser mirror on front end-plate 2 Microscope base 22 is correspondingly arranged, and the opening laser reflection port 67 on optical path groove C63 and the second mirror unit 32 on end plate 3 are right It should be arranged.Laser output mirror piece is provided on laser output mirror microscope base 23, in laser mirror microscope base 22, the first mirror unit 31, laser reflection eyeglass is provided on the second mirror unit 32, laser output mirror piece and laser reflection eyeglass pass through pressure cap 25 are set on respective microscope base.In addition two positioning through hole for assembling positioning are equipped in N-type optical path guiding mechanism 6 68。

The utility model constructs LC vibration by the ingenious connection between positive electrode plate 5, negative electrode plate 7 and inductance mechanism 4 Circuit is swung, while constructing section by the N shape guiding groove in N-type optical path guiding mechanism 6 is circular resonant optical path channel, is made humorous The original laser beam that vibration generates is circular laser beam, does not need that good essence can be obtained using complicated optical path reshaping device Close laser beam is for laser machining, and the optical path guiding groove of the more single linear of N shape optical path guiding groove of equal length is more efficient, energy The effective optical path length for generating laser generation is longer, therefore can export more powerful laser；The structure letter of the laser resonator It is single, thermal diffusivity is good, good airproof performance, the laser beam quality of output are good, therefore be suitable for promoting.

Above embodiments are only to illustrate the technical idea of the utility model, and the protection model of the utility model cannot be limited with this Enclose, it is all according to the utility model proposes technical idea, any changes made on the basis of the technical scheme each falls within this reality Within the scope of novel protected；The technology that the utility model is not directed to can be realized by the prior art.

Claims

1. a kind of N-type laser resonator for radio-frequency carbone dioxide laser, including resonant cavity ontology (1), front end-plate (2), End plate (3), inductance mechanism (4), positive electrode plate (5) and negative electrode plate (7), resonant cavity ontology (1), front end-plate (2), end plate (3) combination constitutes a closed resonant cavity, it is characterised in that: intracavity bottom setting and resonant cavity ontology (1) of the resonant cavity Positive electrode plate (5) and inductance mechanism (4) is successively arranged in parallel in integrally formed negative electrode plate (7), the top of negative electrode plate (7), Inductance mechanism (4) is connected to form LC oscillating circuit, the positive electrode plate with positive electrode plate (5) and negative electrode plate (7) respectively (5) it is equipped with and the two N-type optical path guiding mechanism (6) disposed in parallel, N-type optical path guiding mechanism (6) between negative electrode plate (7) On section be it is circular bending in N shape optical path guiding groove end it is corresponding on front end-plate (2) and end plate (3) respectively Eyeglass is corresponding.

2. the N-type laser resonator according to claim 1 for radio-frequency carbone dioxide laser, it is characterised in that: institute The connecting column (43) stated in inductance mechanism (4) is vertically connected with positive electrode plate (5), and the inductive rack in inductance mechanism (4) (41) end passes through circlip respectively and is connected with front end-plate (2) and end plate (3), so that inductance mechanism (4) can pass through resonance Chamber ontology (1) is connected with negative electrode plate (7).

3. the N-type laser resonator according to claim 1 or 2 for radio-frequency carbone dioxide laser, it is characterised in that: The inductance mechanism (4) includes inductive rack (41), plate-like inductance coil (42) and connecting column (43), on inductive rack (41) Equipped with plate-like inductance coil (42) identical with inductive rack (41) thickness, two inductive racks with plate-like inductance coil (42) (41) the two plate-like inductance coils (42) of arbitrary neighborhood point constituted in inductance mechanism (4) and inductance mechanism (4) are set side by side Belong to different inductive racks (41)；The upper end of the connecting column (43) is connected with the center of corresponding plate-like inductance coil (42) It connects, i.e. the center of each plate-like inductance coil (42) has the connecting column extended downwardly (43) to be connected with positive electrode plate (5).

4. the N-type laser resonator according to claim 3 for radio-frequency carbone dioxide laser, it is characterised in that: institute The inductive rack (41) and plate-like inductance coil (42) stated are integrally formed；The plate-like inductance coil (42) is conductive material by interior Gradually open coiling composition in the same plane in the direction of the clock outward；Constitute same plate-like inductance coil (42) conductive material it Between gap it is identical and gap width is identical as the thickness of the conductive material.

5. the N-type laser resonator according to claim 1 for radio-frequency carbone dioxide laser, it is characterised in that: institute It states and is respectively provided with installation laser output mirror microscope base (22) on the thickness direction of front end-plate (2) and for installing laser mirror The side of the through hole (21) of microscope base (23), laser output mirror microscope base (22) and laser mirror microscope base (23) passes through accordingly respectively The inner wall of sheet metal and corresponding through hole (21) connect, laser output mirror microscope base (22) and laser mirror microscope base (23) The mirror of corresponding pressure cap (25) and laser output mirror microscope base (22) and laser mirror microscope base (23) is all equipped at eyeglass installation end Piece installation end is embedded in the inner cavity of corresponding pressure cap (25), so that laser output mirror eyeglass is fixed on laser output mirror microscope base (22) on and laser mirror eyeglass is fixed on laser mirror microscope base (23).

6. the N-type laser resonator according to claim 5 for radio-frequency carbone dioxide laser, it is characterised in that: institute The sheet metal stated is respectively adjacent to corresponding laser output mirror microscope base (22) and the eyeglass installation end of laser mirror microscope base (23) is set Set, and sheet metal with a thickness of 0.6mm~0.9mm.

7. the N-type laser resonator according to claim 5 for radio-frequency carbone dioxide laser, it is characterised in that: institute It is respectively equipped on the front end-plate (2) stated along the radially uniform of corresponding laser output mirror microscope base (22) and laser mirror microscope base (23) The bolt hole (24) of distribution, adjust bolt and bolt hole (24) threaded connection respectively by corresponding laser output mirror microscope base (22) and Laser mirror microscope base (23) is limited to the through hole (21) on front end-plate (2) Nei；The adjusting bolt respectively corresponds setting In the tail end of corresponding laser output mirror microscope base (22) and laser mirror microscope base (23) laser output mirror microscope base can be limited (22) and the position of laser mirror microscope base (23) and laser output mirror microscope base (22) and laser mirror microscope base (23) are adjusted Angle.

8. being used for the N-type laser resonator of radio-frequency carbone dioxide laser according to claim 5 or 7, it is characterised in that: The central axes of the laser output mirror microscope base (22) laser reflection parallel and described with the horizontal line on front end-plate (2) thickness direction The central axes of mirror microscope base (23) and the horizontal line on front end-plate (2) thickness direction constitute the angle that degree is 4 °~7 °.

9. the N-type laser resonator according to claim 1 for radio-frequency carbone dioxide laser, it is characterised in that: institute State the first mirror unit that installation reflecting mirror eyeglass is respectively provided in the through hole (21) on the thickness direction of end plate (3) (31) and the second mirror unit (32), the side of the first mirror unit (31) and the second mirror unit (32) passes through corresponding respectively Sheet metal is connect with the inner wall of through hole (21), the eyeglass installation end of the first mirror unit (31) and the second mirror unit (32) Place is respectively equipped with pressure cap (25) and the eyeglass installation end of the first mirror unit (31) and the second mirror unit (32) is all embedded in pressure In the inner cavity of cap (25), so that reflecting optics are fixed on the first mirror unit (31) and the second mirror unit (32).

10. the N-type laser resonator according to claim 9 for radio-frequency carbone dioxide laser, it is characterised in that: institute The sheet metal stated is respectively adjacent to the eyeglass installation end setting of corresponding first mirror unit (31) and the second mirror unit (32), And sheet metal with a thickness of 0.6mm~0.9mm.

11. the N-type laser resonator according to claim 9 for radio-frequency carbone dioxide laser, it is characterised in that: institute The spiral shell of the radially uniform distribution along the first mirror unit (31) and the second mirror unit (32) is respectively equipped on the end plate (3) stated Keyhole (24) adjusts bolt and is threadedly coupled the first mirror unit (31) and the second mirror unit (32) with bolt hole (24) respectively It is limited to the through hole (21) on end plate (3) Nei；The adjusting bolt, which respectively corresponds, to be arranged in the first mirror unit (31) Tail end with the second mirror unit (32) is can limit the position of the first mirror unit (31) and the second mirror unit (32) simultaneously Adjust the angle of the first mirror unit (31) and the second mirror unit (32).

12. being used for the N-type laser resonator of radio-frequency carbone dioxide laser according to claim 9 or 11, feature exists In: it is 2 °~4 ° that the horizontal line on the central axes of first mirror unit (31) and end plate (3) thickness direction, which constitutes degree, Angle and the second mirror unit (32) central axes and end plate (3) thickness direction on horizontal line also constitute degree be 2 °~ 4 ° of angle.

13. being used for the N-type laser resonator of radio-frequency carbone dioxide laser according to claim 5 or 9, feature exists In: the pressure cap (25) is that cylindric and pressure cap (25) one end is respectively equipped with the edge to extend internally and outwardly extending side Edge, the edge to extend internally is used to corresponding eyeglass being fixed on corresponding microscope base and outwardly extending edge is used for pressure cap (25) disassembly.

14. the N-type laser resonator according to claim 1 for radio-frequency carbone dioxide laser, it is characterised in that: institute The N-type optical path guiding mechanism (6) stated is equipped with the optical path groove A(61 in N shape arrangement), optical path groove B(62) and optical path groove C (63), wherein optical path groove A(61) it is parallel with a long side on N-type optical path guiding mechanism (6) ontology and close on the long side, light Road groove B(62) one end originate in optical path groove A(61) one end and its other end to N-type optical path guiding mechanism (6) ontology Diagonally opposing corner end extend to optical path groove C(63) one end, optical path groove C(63) with N-type optical path guiding mechanism (6) ontology on Another long side is parallel and closes on the long side；Wherein optical path groove A(61) and optical path groove B(62) one end for crossing is first to hand over The first mirror unit on meeting point laser reflection port (64) and the first joint laser reflection port (64) and end plate (3) (31) it is correspondingly arranged, optical path groove C(63) it with the one end that crosses optical path groove B(62) is the second joint laser reflection port (65) and the second joint laser reflection port (65) is correspondingly arranged with the laser mirror microscope base (23) on front end-plate (2), light Road groove A(61) the other end be laser output mouth (66) and laser output mouth (66) and the laser on front end-plate (2) it is defeated Appearance microscope base (22) is correspondingly arranged, optical path groove C(63) the other end be opening laser reflection port (67) and opening laser it is anti- Port (67) is penetrated to be correspondingly arranged with the second mirror unit (32) on end plate (3).

15. the N-type laser resonator according to claim 14 for radio-frequency carbone dioxide laser, it is characterised in that: The optical path groove A(61) and optical path groove B(62) between angle and optical path groove B(62) and optical path groove C(63) Between angle be 3 °~6 ° and optical path groove A(61), optical path groove B(62) and optical path groove C(63) diameter be 2.5mm~3.5mm.

16. the N-type laser resonator according to claim 1 for radio-frequency carbone dioxide laser, it is characterised in that: institute Resonant cavity ontology (1), front end-plate (2) and the end plate (3) stated all are made of same metal material, front end-plate (2) and after End plate (3) is equipped with the sealed groove that a circle is filled with metallic sealing material towards the side of resonant cavity ontology (1), passes through fastening Front end-plate (2) and end plate (3) and resonant cavity ontology (1) fixed seal connection are then constituted resonant cavity respectively by part；In resonant cavity Outer wall be equipped with several cooling fins (11) disposed in parallel along the vertical direction, cooling fin (11) and resonant cavity ontology (1) one Molding.