CN209147825U - A kind of laser facula and echo tracking monitoring device - Google Patents
A kind of laser facula and echo tracking monitoring device Download PDFInfo
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- CN209147825U CN209147825U CN201821851017.8U CN201821851017U CN209147825U CN 209147825 U CN209147825 U CN 209147825U CN 201821851017 U CN201821851017 U CN 201821851017U CN 209147825 U CN209147825 U CN 209147825U
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Abstract
The utility model discloses a kind of laser facula and echo tracking monitoring devices, including optical laying unit, four-quadrant photoelectric detection unit, CCD imaging detection unit, synchronization signal trigger circuit and Data Fusion display unit；Synchronization signal trigger circuit obtains the output electric signal of four-quadrant photo detector and generates synchronous triggering signal, it triggers CCD processing circuit and obtains light spot image, while triggering four-quadrant processing circuit and obtaining facula mass center coordinate, pulse peak power and frequency coded signal；Data Fusion display unit will be shown after light spot image, facula mass center coordinate, pulse peak power and frequency coding data fusion.The utility model solves semi-active laser guidance weapon system the technical issues of shooting range measurment carries out all referring to mark closed loop monitoring Laser emission and received laser parameter, provides a kind of convenient and efficient effective method for the laser irradiation and target seeker tracking performance of comprehensive accurate evaluation semi-active laser guidance weapon.
Description
Technical field
The utility model belongs to range test testing field, relates generally to a kind of semi-active laser guidance weapon system target range
Test training system and laser facula and echo tracking monitoring device.
Background technique
Semi-active laser guidance weapon system is the primary armament system of laser precision strike, by ground or airborne in
The included laser illuminator of guided weapon platform irradiates target of attack, and the laser seeker exploring laser light echo-signal of weapon is laggard
Row attack.Since the weapon is applied in open environment, the optical systems such as target seeker, laser illuminator are easy by atmosphere rapids
The disturbing influences such as stream, air index variation, therefore need to establish the training test macro of complete set in target range, to laser irradiation
Hot spot, target seeker tracking laser echo signal, atmospheric perturbation influence carry out comprehensive monitoring, the simulation for operational flowchart
Training, combatant select training to the opportunity of transmitting atmospheric window, and to laser irradiation, sounding, arm discharge etc.
The reliability (technical capability) of procedure links is tested examination, to improve the hit probability of guided weapon system.
United States Patent (USP) US6288383B1 (Laser spot locating device and system) proposes use
Charge transfer device (CCD) carries out Detection location to laser facula, while providing synchronization with laser diode exploring laser light for CCD
Signal obtains stable high signal-to-noise ratio image by adjacent two frames subtraction technique, but the device cannot obtain institute's exploring laser light letter
Number tracking and positioning information and relevant laser parameter data, the shadow that atmospheric environment generates laser pulse delivery can not be provided
The information such as sound, it is difficult to meet the requirement of range test training.
Utility model content
The technical problems to be solved in the utility model is to overcome the shortcomings of the prior art, is that target range laser half is actively made
It leads weapon test training and a kind of laser facula and echo tracking monitoring device is provided.The device uses four-quadrant photo detector mould
Intend weapon guidance header signal, laser irradiation is testing the laser pulse hot spot image on target plate, reflection in energy synchronization gain test
The shadow that the positioning of echo coordinates of targets, the peak power of signal, coding frequency, target reflectivity characteristics, atmospheric environment transmit laser
The characterisitic parameters such as sound, meet semi-active laser guidance weapon range test training requirement.
The technical solution of the utility model is as follows:
A kind of laser facula and echo tracking monitoring device, including optical laying unit, four-quadrant photoelectric detection unit,
CCD imaging detection unit, synchronization signal trigger circuit and Data Fusion display unit；Laser illuminator issues repetition pulse
On laser to test target plate, optical laying unit by diffusing reflection echo hot spot be imaged to four-quadrant photoelectric detection unit and CCD at
As probe unit；Four-quadrant photoelectric detection unit includes four-quadrant photo detector and four-quadrant processing circuit, CCD imaging detection
Unit includes CCD imaging detector and CCD processing circuit；The output of synchronization signal trigger circuit acquisition four-quadrant photo detector
Electric signal simultaneously generates synchronous triggering signal, and triggering CCD processing circuit obtains light spot image, while triggering four-quadrant processing circuit and obtaining
Obtain facula mass center coordinate, pulse peak power and frequency coded signal；Data Fusion display unit is by light spot image, hot spot
It is shown after center-of-mass coordinate, pulse peak power and frequency coding data fusion.
In above-mentioned laser facula and echo tracking monitoring device, the synchronization signal trigger circuit includes adder and touching
Device is sent out, after four road electric signals of four-quadrant photo detector output enter adder, one superimposed voltage signal of output is extremely
Trigger carries out shaping, and the pulse after shaping triggers CCD processing circuit and four-quadrant processing circuit as synchronous triggering signal.
In above-mentioned laser facula and echo tracking monitoring device, optical laying unit includes being disposed side by side on four-quadrant photoelectricity
The four-quadrant camera lens and CCD camera lens of detector and CCD imaging detector front end, the light of the four-quadrant camera lens and CCD camera lens
Axis is parallel.
In above-mentioned laser facula and echo tracking monitoring device, the optical laying unit includes simple lens and sets thereafter
The semi-permeable and semi-reflecting mirror set, focus on light beam pass through semi-permeable and semi-reflecting mirror, are divided into two beam of reflected light and transmitted light；It is a branch of to be imaged to four
Quadrant photodetector, another beam are imaged into CCD imaging detector.
In above-mentioned laser facula and echo tracking monitoring device, in Data Fusion display unit facula mass center coordinate with
Crosshair and light spot image are shown in same display interface.
In above-mentioned laser facula and echo tracking monitoring device, set before four-quadrant photo detector and CCD imaging detector
It is equipped with the narrow band filter Wavelength matched with laser illuminator.
In above-mentioned laser facula and echo tracking monitoring device, Data Fusion display unit is provided with parameter regulation mould
Block realizes the output signal digital averaging of the adjusting of the CCD imaging detector time of integration and four-quadrant photo detector.
In above-mentioned laser facula and echo tracking monitoring device, the four-quadrant photo detector sensitivity member is
InGaAs, PIN or APD detector, the speed of response are ns grades.
In above-mentioned laser facula and echo tracking monitoring device, the output repetition rate of laser illuminator and the frame frequency of CCD
It is tens of Hz.
The advantageous effects that the utility model has are as follows:
1, the utility model integrates two kinds of Laser Detection Techniques of four-quadrant photodetection and CCD imaging detection,
Since the guidance system of semi-active laser guidance is the corresponding return laser beam tracking signal of a laser irradiation spot signal, therefore
Using four-quadrant photo detector come the echo tracking parameter of simulated weapons laser seeker, realize that time and spatial synchronization close
Connection, respectively for data obtained together with image co-registration, completion refers to the laser eyepiece of laser guided weapon to two kinds of sensors
The comprehensive seamless data monitoring for showing device and target seeker transmitting and received laser parameter is comprehensive accurate evaluation laser half
The laser irradiation and target seeker tracking performance of active quidance weapon provide a kind of convenient and efficient effective method.
2, the utility model is tracked using four-quadrant photo detector come the return laser beam of simulated weapons laser seeker special
Property parameter, obtain diffusing reflection echo facula mass center coordinate, signal peak power, coding frequency, target reflectivity characteristics, big compression ring
The characterisitic parameters such as the influence that laser is transmitted in border, echo tracking characteristic and raising Weapon Combat ability for thoroughly evaluating weapon
There is impetus.
3, the utility model measures the diffusing reflection hot spot of target using the CCD imaging detector of tens of Hz frame frequencies, and uses
The four-quadrant photo detector receives echo-signal of ns grades of fast-responses, and each laser pulse hot spot is provided relative to laser imaging
The position of hot spot is shown on a display screen, the amplitude shaken around spot center by " ten " symbol with " ten " sign format
In evaluation, atmospheric environment and then reflects target seeker tracking signal and reality to the influence degree of laser pulse delivery at this time with frequency
The extent of deviation of border target, the evaluation for operation person's atmospheric emission window selection operation training and to MISSILE LAUNCHING opportunity should
Training mode can be carried out in empty, reduce test training cost.
4, the utility model is based on four-quadrant photo detector signal and generates synchronization signal, while triggering CCD imaging detection
Device and four-quadrant photo detector carry out parameter measurement, it is ensured that four-quadrant photo detector and CCD imaging detector data and
The frame synchronization of image, and ensure that each laser pulse signal can be detected, and obtained by four-quadrant photo detector
Pulse code sequence and pulse number judge CCD imaging detector with the presence or absence of frame losing phenomenon, while when ccd detector integrates
Between length it is adjustable, the output signal of four-quadrant photo detector can carry out digital averaging according to duration, and measurement result stabilization can
It leans on, the degree of automation is strong, can meet the measurement request under different conditions.
5, the four-quadrant photo detector of the utility model uses the scheme that first four tunnels export shaping pulse again of summing, really
The reliability of triggering has been protected, while the peak power of the laser pulse signal of four-quadrant photodetection output has accurately been marked
It is fixed, to determine the actual strength of laser signal, provided for decaying and MISSILE LAUNCHING of the analysis laser signal in propagation in atmosphere
Foundation.
Detailed description of the invention
Fig. 1 is the utility model laser facula and echo tracking monitoring device operation principle schematic diagram；
Fig. 2 is the generation of the utility model synchronous triggering signal and operation principle schematic diagram；
Fig. 3 is the utility model data and image co-registration display schematic diagram；
Fig. 4 is the optical laying unit schematic illustration of the utility model double-barrel structure；
Fig. 5 is the optical laying unit schematic illustration of the utility model monotubular structure；
Fig. 6 is the utility model arm discharge window training system composition schematic diagram.
Appended drawing reference is as follows: 1-laser facula and echo tracking monitoring device；2-semi-active laser guidance weapon platforms；
3-test target plates；4-transmitting light beams；5-echo reflection light beams；6-four-quadrant photo detectors, 7-CCD imaging detectors；
8-synchronization signal trigger circuits；9-Data Fusion display units；10-accuse center；31-hot spots；32-optics are taken aim at
Quasi- unit；33-laser illuminators；35-semi-permeable and semi-reflecting mirrors；36-CCD camera lenses；37-four-quadrant camera lenses；38-simple lenses；
40-four-quadrant hot spots；41-adders；42-triggers；50-display interfaces；51-target plate images；52-light spot images；
53-facula mass center coordinates；54-parameter display areas；55-spot centers；61-CCD processing circuits；71-four-quadrants processing electricity
Road；
Specific embodiment
With reference to the accompanying drawing and preferred embodiment is described in further detail the utility model.
As depicted in figs. 1 and 2, the laser facula of the utility model and echo tracking monitoring device include optical laying unit
32, be arranged in optical laying unit rear end four-quadrant photoelectric detection unit and CCD imaging detection unit and synchronization signal touching
Power Generation Road 8 and Data Fusion display unit 9.
Laser illuminator 33 issues on recurrent frequency pulse laser to test target plate 3, and optical laying unit 32 is by diffusing reflection echo
Hot spot is imaged to four-quadrant photoelectric detection unit and CCD imaging detection unit；Wherein the output laser of laser illuminator 33 is frequency
The repetition narrow-pulse laser of tens Hz of rate, the tens of ns of pulsewidth.
Four-quadrant photoelectric detection unit includes four-quadrant photo detector 7 and four-quadrant processing circuit 71.Optical laying list
Member 32 receives the laser pulse signal of test target plate reflection, is converged on focal plane by filtering and focusing, four-quadrant light
Electric explorer 7 is located near the focal plane of optical laying unit 32, and the laser pulse signal being incident on photosurface is converted into
Electric impulse signal divides tetra- tunnel A, B, C, D to export.Wherein four-quadrant processing circuit 71 mainly include conventional Simulation scale-up circuit,
Peak holding comparison circuit and data acquisition and signal processing circuit, four road photoelectric pulse signals by Simulation scale-up circuit and
After peak holding comparison circuit carries out pulse broadening, into data acquisition and signal processing circuit.Data acquisition and signal processing
Circuit carries out calculation process to the signal that peak holding comparison circuit provides, and obtains and swashs on 7 photosurface of four-quadrant photo detector
Light spot center relative to coordinate position X, Y numerical value of optical axis O point, laser pulse signal encode frequency, laser pulse leakage code and
The parameter values such as laser pulse peaks power.Peak power parameter foundation can trace to the source etalon optical power meter to received laser arteries and veins
It rushes peak power to be demarcated, to provide the actual strength value of laser signal.
Wherein X=(VA+VB-VC-VD)/(VA+VB+VC+VD)
Y=(VA+VD-VB-VC)/(VA+VB+VC+VD)
VA、VB、VC、VDThe output voltage signal of respectively four quadrants.
Wherein four-quadrant photo detector 7 is made of InGaAs, PIN or APD photodetector, and the speed of response reaches ns
Grade.
CCD imaging detection unit includes CCD imaging detector 6 and CCD processing circuit 61, and wherein CCD processing circuit 61 is adopted
Image Acquisition and storage are carried out with external trigger operating mode, usually corresponds to each laser pulse triggering once, frame frequency is tens of Hz
To hundred Hz, match with the pulse frequency of laser.Optical laying unit 32 receives the laser pulse signal of test target plate reflection, leads to
It crosses filtering and focusing to be converged in positioned on its focal plane on the photosurface of ccd detector 6, to test target plate laser reflection point
It is imaged.Synchronization signal trigger circuit 8 obtains the output electric signal of four-quadrant photo detector 7 and generates synchronous triggering letter
Number, triggering CCD processing circuit 61 obtains light spot image 52, while triggering four-quadrant processing circuit 71 and obtaining facula mass center coordinate
53, pulse peak power and frequency coded signal.This synchronous triggering mode is that ccd detector 6 provides Image Acquisition pressure together
Signal is walked, can be detected with each laser pulse for guaranteeing that semi-active laser guidance weapon 2 emits, and is formed and stable is swashed
Light light spot image.
The narrowband Wavelength matched with laser illuminator 33 is provided with before four-quadrant photo detector 7 and CCD imaging detector 6
Optical filter makes laser signal is without hindrance to be incident to measuring system, and inhibits bias light incident, improves four-quadrant photo detector 7
With the signal-to-noise ratio of CCD imaging detector 6, enhance infant laser signal detection ability.
Since laser signal will receive the influence of atmospheric environment in transmission process, four-quadrant photo detector 7 is focused on
Laser spot position on photosurface can be with atmospheric perturbation, so that the pulse laser peak work that each quadrant of A, B, C, D receives
Rate intensity changes at random, leads to also changing therewith per electrical signal amplitude all the way for output.As shown in Fig. 2, synchronization signal triggering electricity
Road 8 includes adder 41 and trigger 42, the four road electric signals of tetra- quadrants of A, B, C, D that four-quadrant photo detector 7 exports
Into adder 41 be superimposed after obtain a higher magnitude pulse signal, then output voltage signal to trigger 42 carry out it is whole
Shape, the pulse after shaping is as synchronous triggering signal, and all the way as the external trigger source of CCD, another way is sent to four-quadrant processing electricity
It triggers four-quadrant photo detector 7 and works asynchronously with ccd detector 6 in road 71, it is ensured that each laser pulse can be detected.
The time of integration width of ccd detector 6 controls to adjust, under the premise of guaranteeing that laser pulse signal is all detected, control
The time for exposure of bias light can get the suitable representation of laser facula of contrast and experiment target plate background image, so that CCD detection
The image that device 6 exports has suitable signal-to-noise ratio.
As shown in figure 3, Data Fusion display unit 9 is by light spot image 52, facula mass center coordinate 53, peak value of pulse function
It is shown after rate and frequency coding data fusion.In Fig. 3, target plate image 51 is shown in the display interface 50 of display, CCD is visited
Survey the light spot image 52 that device 6 is shot and the facula mass center coordinate 53 that four-quadrant photoelectric detection unit detects and for showing
Show the parameter display area 54 of pulse peak power and frequency coded signal etc., wherein CCD light spot image 52 is in target plate image 51
Inside, mass center spot center 55 indicate, while facula mass center coordinate 53 is used and indicated with crosshair symbol.By atmosphere
The influence of transmission, crosshair symbol possibly are present at " ten " word gone out apart from the closer position of spot center 55, line drawing strictly according to the facts
Symbol；" ten " character number apart from 55 remote position of spot center, drawn such as the dotted line in figure may also be appeared in.
Data Fusion display unit 9 is by the utility model laser facula and the image sum number of echo tracking monitoring device
All fusion is shown word signal on same display, the main laser facula and back provided including CCD imaging detection unit
Scape image, four-quadrant photoelectric detection unit provide laser spot position " ten " character number, laser code frequency, laser leakage code and
Laser pulse peaks power.
Theoretically, in the case where atmosphere does not disturb, the laser facula position of four-quadrant photoelectric detection unit offer
The representation of laser facula center that setting " ten " word symbol center should provide with CCD imaging detection unit is overlapped, but due to laser pulse
By atmosphere environment impact in transmission process, and the time response of the two is different, and the four-quadrant photoelectric detection unit response time is
Ns grades and the frame frequency of CCD imaging detection unit are tens Hz, thus the detection result of four-quadrant photo detector can reflect it is instantaneous big
Influence of the gas to facula mass center, and hot spot when CCD imaging detection unit can only obtain the Atmosphere changes of a Relative steady-state,
There is " ten " word character position randomized jitter phenomenon near hot spot in, jerk value size represents atmospheric environment pair
The influence degree of laser pulse delivery.Test training in by comparing " ten " character number position and spot center 5 between away from
From, it can judge the situation of atmosphere at this time, selects arm discharge atmospheric window, the two is closer or position essentially coincides
When, illustrate atmospheric effect it is smaller be preferable launch window at this time；Otherwise the two deviates larger, even " ten " character number position
It has been in the region other than target plate image 51, then has illustrated this moment not being arm discharge window, once transmitting, it is possible to because of atmosphere
It disturbs larger and is unable to pinpointing.In device debugging, Data Fusion display unit 9 can also beat to " ten " word
Value carries out mathematic(al) mean, to obtain stable laser spot position.
Fig. 4 and Fig. 5 gives the optical laying unit 32 of two kinds of structures.Fig. 4 is double-barrel structure, including is disposed side by side on four
The four-quadrant camera lens 37 and CCD camera lens 36 of 6 front end of quadrant photodetector 7 and CCD imaging detector, wherein four-quadrant camera lens 37
Parallel with the optical axis of CCD camera lens 36, two lens barrels are closely laid, and for the distant object except several km, the two can be approximately
Coaxially, it is ensured that the consistency that hot spot is imaged in two sets of units.Two sets of optical systems are using identical optical field of view and installing
Detection optical path is accurately coaxially debugged in journey, the upper spatial coherence set of target plate is tested to laser irradiation to meet.
Fig. 5 is monotubular structure, and optical laying unit 32 includes simple lens 38 and the semi-permeable and semi-reflecting mirror 35 being arranged thereafter, single
38 focus on light beam of lens is divided into two beam of two beam reflected lights and transmitted light, a branch of imaging to four-quadrant after semi-permeable and semi-reflecting mirror 35
Photodetector 7 is limited, another beam is imaged into CCD imaging detector 6, ensures that hot spot was imaged in two sets of measuring units
Consistency.
Fig. 6 is the utility model arm discharge window training system composition schematic diagram, in Fig. 1 laser facula and echo tracking
On the basis of monitoring device, semi-active laser guidance weapon platform 2 and charge center 10 are increased, is provided on weapon platform sharp
Device 33 is shone in flash ranging.When training, combatant selects corresponding opportunity according to conventional launch window, by accusing the record hair of center 10
Instruction is penetrated, while firing order is assigned the laser facula, background image, " ten " word at moment by Data Fusion display unit 9
Character position coordinate, laser code frequency, the laser leakage parameters such as code and laser pulse peaks power are transmitted to charge center, pass through
Whether above-mentioned parameter examines launching time suitable, provides a kind of training device of non-live shell situation for launching crew, and puts down
When launching crew need a large amount of throw-off practices that could accumulate to obtain enough experiences the selection of launch time window.Furthermore this reality
Inspection in the case of can be also used for live shell with novel laser facula and echo tracking monitoring device to MISSILE LAUNCHING link, one
Denier is not hit target, and laser irradiation link, transmitting link or live shell explosive ring can be analyzed by this monitoring device
The problem of section, provides a kind of practical measuring means for throw-off practice.
Claims (9)
1. a kind of laser facula and echo tracking monitoring device, it is characterised in that: including optical laying unit (32), four-quadrant light
Electric probe unit, CCD imaging detection unit, synchronization signal trigger circuit (8) and Data Fusion display unit (9)；
Laser illuminator (33) issues recurrent frequency pulse laser to testing on target plate (3), and optical laying unit (32) returns diffusing reflection
Glistening light of waves spot is imaged to four-quadrant photoelectric detection unit and CCD imaging detection unit；
Four-quadrant photoelectric detection unit includes four-quadrant photo detector (7) and four-quadrant processing circuit (71), CCD imaging detection
Unit includes CCD imaging detector (6) and CCD processing circuit (61)；
Synchronization signal trigger circuit (8) obtains the output electric signal of four-quadrant photo detector (7) and generates synchronous triggering signal,
It triggers CCD processing circuit (61) and obtains light spot image (52), while triggering four-quadrant processing circuit (71) and obtaining facula mass center seat
Mark (53), pulse peak power and frequency coded signal；
Data Fusion display unit (9) is by light spot image (52), facula mass center coordinate (53), pulse peak power and frequency
It is shown after coded data fusion.
2. laser facula according to claim 1 and echo tracking monitoring device, it is characterised in that: the synchronization signal
Trigger circuit (8) includes adder (41) and trigger (42), and four road electric signals of four-quadrant photo detector (7) output enter
After adder (41), one superimposed voltage signal of output to trigger (42) carries out shaping, and the pulse after shaping is as same
Walk trigger signal triggering CCD processing circuit (61) and four-quadrant processing circuit (71).
3. laser facula according to claim 1 and echo tracking monitoring device, it is characterised in that: the optical laying
Unit (32) includes the four-quadrant camera lens for being disposed side by side on four-quadrant photo detector (7) and CCD imaging detector (6) front end
(37) and CCD camera lens (36), the four-quadrant camera lens (37) are parallel with the optical axis of CCD camera lens (36).
4. laser facula according to claim 1 and echo tracking monitoring device, it is characterised in that: the optical laying
Unit (32) includes simple lens (38) and the semi-permeable and semi-reflecting mirror (35) being arranged thereafter, and focus on light beam passes through semi-permeable and semi-reflecting mirror
(35), it is divided into two beam of reflected light and transmitted light；To four-quadrant photo detector (7), another beam is imaged to CCD and is imaged for a branch of imaging
In detector (6).
5. laser facula according to claim 1 and echo tracking monitoring device, it is characterised in that: Data Fusion is aobvious
Show that facula mass center coordinate (53) is shown in same display interface (50) in unit (9) with crosshair and light spot image (52).
6. laser facula according to claim 1 and echo tracking monitoring device, it is characterised in that: four-quadrant photodetection
It is provided with before device (7) and CCD imaging detector (6) and laser illuminator (33) Wavelength matched narrow band filter.
7. laser facula according to claim 1 and echo tracking monitoring device, it is characterised in that: Data Fusion is aobvious
Show that unit (9) is provided with parameter adjustment module, realizes that CCD imaging detector (6) time of integration is adjusted and four-quadrant photoelectricity is visited
Survey the output signal digital averaging of device (7).
8. laser facula according to claim 1 and echo tracking monitoring device, it is characterised in that: the four-quadrant light
The sensitive member of electric explorer (7) is InGaAs, PIN or APD detector, and the speed of response is ns grades.
9. laser facula according to claim 1 and echo tracking monitoring device, it is characterised in that: laser illuminator (33)
Output repetition rate and the frame frequency of CCD be tens of Hz.
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| CN201821851017.8U CN209147825U (en) | 2018-11-12 | 2018-11-12 | A kind of laser facula and echo tracking monitoring device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109373816A (en) * | 2018-11-12 | 2019-02-22 | 宋兵 | A kind of laser facula and echo tracking monitoring device |
| CN111158011A (en) * | 2020-01-06 | 2020-05-15 | 航天金鹏科技装备（北京）有限公司 | Pulse laser spot comprehensive test system and spot test method |
| WO2024060929A1 (en) * | 2022-09-22 | 2024-03-28 | 上海精测半导体技术有限公司 | Photoacoustic measuring device and film thickness measuring method |
-
2018
- 2018-11-12 CN CN201821851017.8U patent/CN209147825U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109373816A (en) * | 2018-11-12 | 2019-02-22 | 宋兵 | A kind of laser facula and echo tracking monitoring device |
| CN111158011A (en) * | 2020-01-06 | 2020-05-15 | 航天金鹏科技装备（北京）有限公司 | Pulse laser spot comprehensive test system and spot test method |
| WO2024060929A1 (en) * | 2022-09-22 | 2024-03-28 | 上海精测半导体技术有限公司 | Photoacoustic measuring device and film thickness measuring method |
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