CN209142816U - A kind of vacuum tank - Google Patents
A kind of vacuum tank Download PDFInfo
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- CN209142816U CN209142816U CN201821875388.XU CN201821875388U CN209142816U CN 209142816 U CN209142816 U CN 209142816U CN 201821875388 U CN201821875388 U CN 201821875388U CN 209142816 U CN209142816 U CN 209142816U
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- support plate
- nonmetallic
- flange disk
- vacuum
- vacuum tank
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Abstract
The utility model discloses a kind of vacuum tanks, are related to technical field of vacuum equipment, invent to be easily broken when solving the problems, such as nonmetallic vacuum tank stress in the prior art.A kind of vacuum tank of the utility model, including nonmetallic vacuum cavity, the nonmetallic vacuum cavity is equipped with opening, it further include support plate and multiple support rods, the support plate is mounted on the opening and the support plate is equipped with the aspirating hole with the open communication, and multiple support rod intervals are wound around the periphery of the nonmetallic vacuum cavity and connect with the support plate.
Description
Technical field
The utility model relates to technical field of vacuum more particularly to a kind of vacuum tanks.
Background technique
Vacuum tank is a kind of for providing the container of subatmospheric lower environment, be widely used in semiconductors manufacture, plated film,
The fields such as plasma physics scientific experiment.
Currently, metal or nonmetallic production can be used in vacuum tank, it can be according to the heatproof of operating condition, isolation magnetic field, insulation etc.
It is required that specific choice suitable material.When vacuum tank be used for pilot plasma when, need vacuum tank externally-applied magnetic field,
Radio frequency or microwave etc., canister can stop the transmitting of electromagnetic wave, therefore need to be tested using nonmetallic vessel, but be non-gold
Belong to vacuum tank and generally use the materials such as quartz, glass, when this material stress is easily broken.
Utility model content
The embodiments of the present invention provide a kind of vacuum tank, to solve nonmetallic vacuum tank stress in the prior art
When the problem of being easily broken.
In order to achieve the above objectives, the embodiments of the present invention adopt the following technical scheme that
A kind of vacuum tank, including nonmetallic vacuum cavity, nonmetallic vacuum cavity are equipped with opening, further include support plate
With multiple support rods, support plate is mounted on opening and support plate and is equipped with aspirating hole with open communication, between multiple support rods
It connect every the periphery for being wound around nonmetallic vacuum cavity and with support plate.
Optionally, further include first flange disk and multiple bolts, the position of the mounting hole of first flange disk is corresponded in support plate
It sets and offers multiple first connecting holes, the opening of nonmetallic vacuum cavity is equipped with second flange disk, and bolt is successively arranged in the
One connecting hole, the mounting hole of first flange disk, second flange disk mounting hole in.
It optionally, further include elastic sealing element, elastic sealing element is installed on first flange disk and nonmetallic vacuum cavity
Between second flange disk.
It optionally, further include support ring, first flange disk is equipped with counterbore close to the side of nonmetallic vacuum cavity, and part is propped up
Pushing out ring is located in counterbore, and the outer edge of support ring is equipped with groove, and elastic sealing element is installed in groove.
Optionally, further include fastener, multiple limit holes are offered on first flange disk, correspond to limit hole in support plate
Position offers multiple second connecting holes, and fastener passes through the second connecting hole and connect with limit hole.
It optionally, further include adapter flange, adapter flange is installed on the inner hole edge of first flange disk and adapter flange position
In side of the first flange disk far from nonmetallic vacuum cavity, the outer diameter of adapter flange is less than the diameter of the aspirating hole of support plate.
Optionally, lifting eye is offered in support plate.
Optionally, lifting eye is circular hole or slotted hole.
Optionally, nonmetallic vacuum cavity is glass evacuated cavity.
Optionally, the outer edge of support plate is circumferentially spaced offers multiple third connecting holes, support rod and support plate
Third connecting hole is threadedly coupled.
Optionally, there are two the openings of nonmetallic vacuum cavity, each opening is equipped with a support plate, two supports
Multiple third connecting holes on plate correspond, and the both ends of support rod connect with the third connecting hole in two support plates respectively
It connects.
Vacuum tank provided by the embodiment of the utility model, the nonmetallic vacuum cavity including being equipped with opening, nonmetallic
Support plate is arranged in the opening of vacuum cavity, which is equipped with the aspirating hole with open communication, and support plate can be in not shadow
Under conditions of sound vacuum tank is connected to other equipment, the structural strength of opening is improved；And in nonmetallic vacuum cavity
The outer multiple support rods of weekly interval winding, multiple support rods are connect with support plate, and multiple support rods can protect nonmetallic vacuum cavity
Outer side surface, reduce external device (ED) directly hit nonmetallic vacuum cavity, to avoid nonmetallic vacuum cavity due to stress
It is broken.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only
It is some embodiments of the utility model, for those of ordinary skill in the art, in the premise not made the creative labor
Under, it is also possible to obtain other drawings based on these drawings.
Fig. 1 is the three dimensional structure diagram of vacuum tank in the utility model embodiment；
Fig. 2 is the main view of vacuum tank in the utility model embodiment；
Fig. 3 is the explosive view of vacuum tank in the utility model embodiment；
Fig. 4 is the structural schematic diagram of the nonmetallic vacuum cavity of vacuum tank in the utility model embodiment；
Fig. 5 is the structural schematic diagram of the support plate of vacuum tank in the utility model embodiment；
Fig. 6 is one of the partial schematic diagram of vacuum tank in the utility model embodiment；
Fig. 7 is two of the partial schematic diagram of vacuum tank in the utility model embodiment；
Fig. 8 is the adapter flange of vacuum tank and the assembling schematic diagram of first flange in the utility model embodiment；
Fig. 9 is the adapter flange of vacuum tank and the side view of first flange in the utility model embodiment；
Figure 10 is the adapter flange of vacuum tank and the main view of first flange in the utility model embodiment.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
In the description of the present invention, it should be understood that term " center ", "upper", "lower", "front", "rear",
The orientation or positional relationship of the instructions such as "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outside" is based on attached drawing institute
The orientation or positional relationship shown, is merely for convenience of describing the present invention and simplifying the description, rather than indication or suggestion is signified
Device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore should not be understood as to this is practical
Novel limitation.
Referring to Fig.1~4, the utility model embodiment vacuum tank includes nonmetallic vacuum cavity 1, nonmetallic vacuum cavity
1 is equipped with opening 101, further includes support plate 2 and multiple support rods 3, and support plate 2 is mounted at opening 101 and in support plate 2
Equipped with the aspirating hole 201 being connected to opening 101, multiple support rods 3 are spaced the periphery for being wound around nonmetallic vacuum cavity 1 and more
A support rod 3 is connect with support plate 2.
Vacuum tank provided by the embodiment of the utility model, the nonmetallic vacuum cavity 1 including being equipped with opening 101, non-
Support plate 2 is set at the opening 101 of metal vacuum cavity 1, which is equipped with the aspirating hole 201 being connected to opening 101,
Support plate 2 can improve the structural strength at opening 101 under conditions of not influencing vacuum tank and being connected to other equipment；And
And in the multiple support rods 3 of outer weekly interval winding of nonmetallic vacuum cavity 1, and support rod 3 is connect with support plate 2, multiple supports
Bar 3 can protect the outer side surface of nonmetallic vacuum cavity 1, reduce external device (ED) and directly hit nonmetallic vacuum cavity 1.Therefore,
The utility model embodiment can reduce nonmetallic vacuum cavity and be crushed because of stress.
Optionally, there are many connection types of support plate 2 and nonmetallic vacuum cavity 1, such as support plate 2 and nonmetallic vacuum
Cavity 1 bonds, or is connected by bolt 5.As in some embodiments, vacuum tank further includes first flange disk 4 and multiple spiral shells
Bolt 5, the position of mounting hole that first flange disk 4 is corresponded in support plate 2 offer multiple first connecting holes 21, nonmetallic vacuum cavity
Second flange disk 11 is equipped at 1 opening 101, above-mentioned bolt 5 is successively arranged in the peace of the first connecting hole 21, first flange disk 4
In the mounting hole for filling hole and second flange disk 11, as shown in Fig. 1~5, support plate 2 is connect with nonmetallic vacuum cavity 1,
Attachment force is relatively reliable.
It is made it should be understood that glass material can be used in the second flange disk 11 of above-mentioned nonmetallic vacuum cavity 1, second
Ring flange 11 with a thickness of 10mm~30mm.Also, the diameter of the first connecting hole 21 on first flange disk 4 is outer than bolt 5
The big 1mm of diameter.Organic glass, stainless steel, aluminium or copper product production can be used in support plate 2, it is preferable that support plate 2 uses stainless steel
Production.In addition, the Thickness range of support plate 2 is 5mm~20mm, as support plate 2 with a thickness of 5mm, 10mm, 15mm,
20mm。
In view of nonmetallic vacuum cavity 1 under some worst hot cases in use, nonmetallic vacuum cavity 1 can occur centainly
Expansion, and squeeze first flange disk 4, the two rigid contact is easy to produce slight crack.Therefore, the utility model embodiment is consolidated
Determining structure further includes elastic sealing element 6, which is installed on the second of first flange disk 4 and nonmetallic vacuum cavity 1
Between ring flange 11, as shown in figs. 6-7.When nonmetallic vacuum cavity 1 expands, nonmetallic vacuum cavity 1 squeezes elasticity
Sealing element 6, making elastic sealing element 6, deformation occurs, absorbs the deflection of nonmetallic vacuum cavity 1, to avoid nonmetallic vacuum
Cavity 1 generates slight crack due to dilatancy and the generation rigid contact of first flange disk 4；And elastic sealing element 6 can be by the first method
Clearance seal between blue disk 4 and second flange disk 11 guarantees the vacuum degree of nonmetallic vacuum cavity 1.
Optionally, the settable installation groove on first flange disk 4 or second flange disk 11, by the elastic sealing element of part
6 are installed in the installation groove；Or in some embodiments, vacuum tank further includes support ring 7, outside above-mentioned support ring 7
Edge is equipped with groove, which is installed in groove, and in first flange disk 4 close to nonmetallic vacuum cavity 1
Side is equipped with counterbore 41, and part support ring 7 is located in counterbore 41, as shown in Figure 7.
Specifically, above-mentioned elastic sealing element 6 is elastic seal ring, and support ring 7 is mounted on first flange disk 4 and second flange
Between disk 11, elastic seal ring can seal the annular gap between first flange disk 4 and second flange disk 11, and can inhale
Receive the swell increment of nonmetallic vacuum cavity 1.
It is to be noted that the diameter of first flange disk 4 is 150~200mm, the section of the elastic seal ring be it is round,
Rectangle or ellipse, when the section of elastic seal ring is round, the diameter of elastic seal ring is 1mm~7mm, preferably 5mm,
Elastic seal ring preferentially selects high-temperature-resistant flexible material, such as rubber, polytetrafluoroethylene (PTFE)；And aluminium, stainless can be used in support ring 7
The metal materials such as steel, molybdenum select stainless steel material production.
Further, above-mentioned vacuum tank further includes fastener 8, and multiple limit holes 42 are offered on first flange disk 4, branch
Multiple second connecting holes 22 are offered on fagging 2, multiple second connecting holes 22 are corresponding with the position of multiple limit holes 42, above-mentioned tight
Firmware 8 may pass through the second connecting hole 22 and connect with limit hole 42.Specifically, above-mentioned fastener 8 is bolt or screw, limit hole 42
For blind hole, the aperture of limit hole 42 is greater than 0.5~1mm of diameter of fastener 8, facilitates installation, as shown in Figure 7.
It, can be close by the opening 101 of nonmetallic vacuum cavity 1 and first flange disk 4, support ring 7, elasticity when being assembled
Sealing 6 and support plate 2 connect, but fastener 8 and bolt 5 are not tightened, certain to reserving between support plate 2 and vacuum tank
Shrinkage (such as 2~6mm), then nonmetallic vacuum cavity 1 is vacuumized, sealing ring can act on axial shrinkage in vacuum pressure
(shrinkage is about 2~6mm) tightens after the completion of vacuumizing, then by fastener 8 and bolt 5, to realize whole fixation.
Further, in some embodiments, which further includes adapter flange 9, which is installed on
The inner hole edge and adapter flange 9 of one ring flange 4 are located at side of the first flange disk 4 far from nonmetallic vacuum cavity 1, switching
The outer diameter of flange 9 is less than the diameter of the aspirating hole 201 of support plate 2, as shown in Fig. 6~10.In assembling, support plate 2 and first
Ring flange 4 is against and adapter flange 9 is located in the aspirating hole 201 of support plate 2 or supports with 201 hole wall of aspirating hole of support plate 2
It leans on, adapter flange 9 being connected and fixed convenient for nonmetallic vacuum cavity 1 and other equipment.
It should be understood that metal material production, such as stainless steel can be used in above-mentioned first flange disk 4 and adapter flange 9.
First flange disk 4 and adapter flange 9 can be directly integrally formed, or be connected using welding manner.The internal diameter of first flange disk 4 can be with
The internal diameter of adapter flange 9 is equal, and the value range of the internal diameter of first flange disk 4 is 150~400mm.
For the ease of the movement of nonmetallic vacuum cavity 1, is opened up in support plate 2 and be also provided with lifting eye 23, in movement
When, entire nonmetallic vacuum cavity 1 can be carried by lifting appliance, it is time saving and energy saving.
Optionally, above-mentioned lifting eye 23 can be circular hole, square hole or slotted hole (i.e. kidney slot), the lifting eye 23 in Fig. 5
For slotted hole.Optionally, what lifting eye 23 cannot open up is too big, influences the structural strength of support plate 2；Lifting eye 23 can not be opened
If it is too small, mismatched with the suspension hooks of various lifting appliances, limitation application.Therefore, lifting eye 23 in the utility model embodiment
Diameter between 8mm~20mm, such as 8mm, 12mm, 16mm, 20mm.
Optionally, there are many connection types of support rod 3 and support plate 2, such as by support rod 3 and support plate 2 using welding
Mode connects or the circumferentially spaced multiple third connecting holes 24 of setting of the outer edge of support plate 2, support rod 3 and support plate 2
Third connecting hole 24 is threadedly coupled, as shown in Fig. 1~5.The utility model embodiment use the latter scheme, facilitate maintenance and more
It changes.Specifically, it is threaded, is fixed the both ends of support rod 3 by nut and gasket, and carry out in the end of support rod 3
Position adjustment.The diameter of above-mentioned third connecting hole 24 is 0.5~1mm bigger than the diameter of support rod 3, support rod 3 using stainless steel or
Nylon material production, preferably stainless steel, the nominal diameter of support rod 3 preferably 16~30mm.
In addition, other mounting holes are also provided in support plate 2, the installation for other interim parts.Above-mentioned fastener 8
Head and the nut cooperated with bolt 5 are all made of hex bolts, and stainless steel or nylon can be used in making material, preferably
For nylon material, the nominal diameter of fastener 8 and nut is 8~16mm.
There are many shapes of vacuum tank, and nonmetallic vacuum cavity 1 can be cylinder tube shape, as shown in figure 4, nonmetallic vacuum
Cavity 1 can be glass evacuated cavity, such as be made of quartz glass or borate glass material.Cylindrical tube it is nonmetallic true
The internal diameter of cavity body 1 is between 100mm~500mm, preferably 300mm, and the wall thickness of nonmetallic vacuum cavity 1 is 2mm~10mm.
Vacuum cavity nonmetallic for tubulose, there are two the openings 101 of nonmetallic vacuum cavity 1, at each opening 101
Be equipped with a support plate 2, multiple third connecting holes 24 in two support plates 2 correspond, the both ends of support rod 3 respectively with
Third connecting hole 24 in two support plates 2 connects, as shown in figures 1-4.Also, two openings of nonmetallic vacuum cavity 1
The installation hole number on second flange disk 11 at 101 is identical, and position is corresponding.
Above description is only a specific implementation of the present invention, but the protection scope of the utility model is not limited to
In this, anyone skilled in the art within the technical scope disclosed by the utility model, can readily occur in variation
Or replacement, it should be covered within the scope of the utility model.Therefore, the protection scope of the utility model should be with the power
Subject to the protection scope that benefit requires.
Claims (10)
1. a kind of vacuum tank, including nonmetallic vacuum cavity, the nonmetallic vacuum cavity is equipped with opening, and feature exists
In further including support plate and multiple support rods, the support plate is mounted on the opening and the support plate is equipped with and institute
State the aspirating hole of open communication, multiple support rod intervals be wound around the periphery of the nonmetallic vacuum cavity and with it is described
Support plate connection.
2. vacuum tank according to claim 1, which is characterized in that it further include first flange disk and multiple bolts, it is described
The position that the mounting hole of the first flange disk is corresponded in support plate offers multiple first connecting holes, the nonmetallic vacuum chamber
The opening of body is equipped with second flange disk, and the bolt is successively arranged in the peace of first connecting hole, the first flange disk
Fill hole, the second flange disk mounting hole in.
3. vacuum tank according to claim 2, which is characterized in that it further include elastic sealing element, the elastic sealing element
It is installed between the first flange disk and the second flange disk of the nonmetallic vacuum cavity.
4. vacuum tank according to claim 3, which is characterized in that further include support ring, the first flange disk is close
The side of the nonmetallic vacuum cavity is equipped with counterbore, and the part support ring is located in the counterbore, outside the support ring
Edge is equipped with groove, and the elastic sealing element is installed in the groove.
5. vacuum tank according to claim 2, which is characterized in that further include fastener, opened on the first flange disk
Equipped with multiple limit holes, the position that the limit hole is corresponded in the support plate offers multiple second connecting holes, the fastening
Part passes through second connecting hole and connect with the limit hole.
6. vacuum tank according to claim 3, which is characterized in that it further include adapter flange, the adapter flange installation
In the first flange disk inner hole edge and the adapter flange be located at the first flange disk far from the nonmetallic vacuum
The side of cavity, the outer diameter of the adapter flange are less than the diameter of the aspirating hole of the support plate.
7. vacuum tank according to claim 1, which is characterized in that offer lifting eye in the support plate.
8. vacuum tank according to claim 1, which is characterized in that the nonmetallic vacuum cavity is glass evacuated chamber
Body.
9. vacuum tank according to claim 1, which is characterized in that the outer edge of the support plate is circumferentially spaced to be opened up
There are multiple third connecting holes, the support rod is threadedly coupled with the third connecting hole of the support plate.
10. vacuum tank according to claim 9, which is characterized in that there are two the openings of the nonmetallic vacuum cavity,
Each opening is equipped with the support plate, and multiple third connecting holes in two support plates correspond,
And the both ends of the support rod are connect with the third connecting hole in two support plates respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821875388.XU CN209142816U (en) | 2018-11-14 | 2018-11-14 | A kind of vacuum tank |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821875388.XU CN209142816U (en) | 2018-11-14 | 2018-11-14 | A kind of vacuum tank |
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| Publication Number | Publication Date |
|---|---|
| CN209142816U true CN209142816U (en) | 2019-07-23 |
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ID=67285757
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821875388.XU Active CN209142816U (en) | 2018-11-14 | 2018-11-14 | A kind of vacuum tank |
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| CN (1) | CN209142816U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114751092A (en) * | 2022-05-20 | 2022-07-15 | 中国原子能科学研究院 | Supporting device arranged in vacuum device, vacuum device and vacuum system |
-
2018
- 2018-11-14 CN CN201821875388.XU patent/CN209142816U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114751092A (en) * | 2022-05-20 | 2022-07-15 | 中国原子能科学研究院 | Supporting device arranged in vacuum device, vacuum device and vacuum system |
| CN114751092B (en) * | 2022-05-20 | 2023-03-10 | 中国原子能科学研究院 | Supporting device arranged in vacuum device, vacuum device and vacuum system |
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