CN208285621U - A kind of vacuum tank generated for plasma - Google Patents
A kind of vacuum tank generated for plasma Download PDFInfo
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- CN208285621U CN208285621U CN201820953166.9U CN201820953166U CN208285621U CN 208285621 U CN208285621 U CN 208285621U CN 201820953166 U CN201820953166 U CN 201820953166U CN 208285621 U CN208285621 U CN 208285621U
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- vacuum tank
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Abstract
The utility model discloses a kind of vacuum tanks generated for plasma, are related to vacuum tank technical field, can solve the problems, such as that existing vacuum tank causes provisional attachment installation inconvenient because being difficult to realize the interim adjustment of adapter tube relative position.The vacuum tank includes being mutually butted to surround the first shell of vacuum chamber and second shell, the non-center position of the first shell and the second shell is equipped with the adapter tube being connected to the vacuum chamber, first flange is equipped with the place of docking of the second shell in the first shell, second flange is equipped with the place of docking of the first shell in the second shell, multiple first connecting portions are evenly arranged with along its circumferential direction in the first flange, the second connecting portion equal with the first connecting portion quantity is evenly arranged in the second flange along its circumferential direction, each first connecting portion can be connect with any one of second connecting portion.The utility model is used for the generation of plasma.
Description
Technical field
The utility model relates to vacuum tank technical field more particularly to a kind of vacuum appearances generated for plasma
Device.
Background technique
Vacuum tank is for providing the container of subatmospheric environment, being widely used in semiconductors manufacture, plated film and waiting
The fields such as gas ions physics scientific experiment.Metal or nonmetallic materials production can be used in vacuum tank, and uses certain sealing
Structure is sealed, in addition to meeting vacuum level requirements, also need as needed using different material realize heatproof, isolation magnetic field,
Insulation etc. requires.
For larger-size vacuum tank, the interface position being typically designed is determined, that is, uses non-provisional mode, therefore connect
The relative position that pipe is installed rear each adapter tube is fixed immediately, and can not be changed, it is difficult to realize the interim of adapter tube relative position
Adjustment causes provisional attachment installation inconvenient.
Utility model content
The embodiments of the present invention provide a kind of vacuum tank generated for plasma, can solve existing vacuum and hold
The problem that device causes provisional attachment installation inconvenient because being difficult to realize the interim adjustment of adapter tube relative position.
In order to achieve the above objectives, the embodiments of the present invention adopt the following technical scheme that
A kind of vacuum tank generated for plasma surrounds the first shell and the of vacuum chamber including being mutually butted
The non-center position of two shells, first shell and second shell is equipped with the adapter tube that is connected to vacuum chamber, with second in first shell
It is equipped with first flange at the docking of shell, is equipped with second flange in second shell with the place of docking of first shell, in first flange
Multiple first connecting portions are evenly arranged with along its circumferential direction, are evenly arranged with and first connecting portion quantity in second flange along its circumferential direction
Equal second connecting portion, each first connecting portion can be connect with any one second connecting portion.
Optionally, first connecting portion and second connecting portion are bolt hole, and first connecting portion and second connecting portion pass through spiral shell
It tethers and connects.
Optionally, it is sealed between first flange and second flange by sealing ring.
Optionally, first flange is female flange, and second flange is convex flange, and sealing ring is located at first flange and second
In the seal groove that the knife-edge positions of flange surround.
Optionally, flexible material of the sealing ring by fusing point higher than 300 DEG C makes.
Optionally, the section of sealing ring is circle, and diameter is 2mm~3mm.
Optionally, the side of first flange and/or second flange is equipped with threaded hole, along the week of first flange and second flange
To threaded hole is arranged in a staggered manner with first connecting portion or second connecting portion.
Optionally, annular groove is equipped in first flange and second flange.
Optionally, the center of first shell and second shell is equipped with the adapter tube being connected to vacuum chamber, first shell
On multiple adapter tubes there are different sizes, multiple adapter tubes in second shell have different sizes.
Optionally, circumferentially it is uniformly arranged that there are two hanging rings in first flange and/or second flange along itself.
The vacuum tank provided by the embodiment of the utility model generated for plasma, due to including being mutually butted to enclose
At the first shell and second shell of vacuum chamber, the non-center position of first shell and second shell is equipped with to be connected to vacuum chamber
It takes over, is equipped with first flange with the place of docking of second shell in first shell, is set in second shell with the place of docking of first shell
There is a second flange, is evenly arranged with multiple first connecting portions along its circumferential direction in first flange, it is circumferential uniform along it in second flange
It is provided with the second connecting portion equal with first connecting portion quantity, each first connecting portion can be with any one second connecting portion
Connection, therefore the first connecting portion and second connecting portion to link together originally can be first dismantled, then along first flange and second
The circumferential direction of flange relatively rotates first shell and second shell, again by multiple first connecting portions and multiple second after rotation
Interconnecting piece connects one to one, and the interim adjustment of the adapter tube relative position in first shell and second shell can be realized, thus
Facilitate the installation of provisional attachment.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only
It is some embodiments of the utility model, for those of ordinary skill in the art, in the premise not made the creative labor
Under, it is also possible to obtain other drawings based on these drawings.
Fig. 1 is the schematic diagram for the vacuum tank that the utility model embodiment is generated for plasma；
Fig. 2 is the top view of Fig. 1；
Fig. 3 is the cross-sectional view of Fig. 1；
Fig. 4 is the portion the M enlarged drawing of Fig. 3；
Fig. 5 is the portion the N enlarged drawing of Fig. 4.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describing, it is clear that described embodiment is only one section of point of embodiment of the utility model, rather than full section
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
In the description of the present invention, it should be understood that term " center ", "upper", "lower", "front", "rear",
The orientation or positional relationship of the instructions such as "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outside" is based on attached drawing institute
The orientation or positional relationship shown, is merely for convenience of describing the present invention and simplifying the description, rather than indication or suggestion is signified
Device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore should not be understood as to this is practical
Novel limitation.
Term " first ", " second " be used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance or
Implicitly indicate the quantity of indicated technical characteristic." first " is defined as a result, the feature of " second " can be expressed or imply
Ground includes one or more of the features.In the description of the present invention, unless otherwise indicated, the meaning of " plurality " is two
It is a or more than two.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " is pacified
Dress ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally
Connection；It can be directly connected, the connection inside two elements can also be can be indirectly connected through an intermediary.For
For those skilled in the art, the concrete meaning of above-mentioned term in the present invention can be understood with concrete condition.
Fig. 1 to Fig. 5 is a specific embodiment of the vacuum tank that the utility model embodiment is generated for plasma,
The vacuum tank includes being mutually butted to surround the first shell 1 of vacuum chamber A and second shell 2, first shell 1 and second shell
2 non-center position is equipped with the adapter tube 3 being connected to vacuum chamber A, and the is equipped with the place of docking of second shell 2 in first shell 1
One flange 4 is equipped with second flange 5 in second shell 2 with the place of docking of first shell 1, circumferentially uniformly sets in first flange 4 along it
It is equipped with multiple first connecting portions 6, is evenly arranged with second equal with 6 quantity of first connecting portion along its circumferential direction in second flange 5
Interconnecting piece 7, each first connecting portion 6 can be connect with any one second connecting portion 7.
The vacuum tank provided by the embodiment of the utility model generated for plasma, due to including being mutually butted to enclose
At the first shell 1 and second shell 2 of vacuum chamber A, the non-center position of first shell 1 and second shell 2 is equipped with and vacuum
The adapter tube 3 of chamber A connection, is equipped with first flange 4 in first shell 1 with the place of docking of second shell 2, with first in second shell 2
It is equipped with second flange 5 at the docking of shell 1, is evenly arranged with multiple first connecting portions 6 along its circumferential direction in first flange 4, second
The second connecting portion 7 equal with 6 quantity of first connecting portion is evenly arranged on flange 5 along its circumferential direction, each first connecting portion 6 is
It can be connect with any one second connecting portion 7, therefore can first dismantle the first connecting portion 6 to link together originally and the second connection
Portion 7, then the circumferential direction along first flange 4 and second flange 5 relatively rotates first shell 1 and second shell 2, after rotation
Multiple first connecting portions 6 and multiple second connecting portions 7 are connected one to one again, first shell 1 and second shell 2 can be realized
On 3 relative position of adapter tube interim adjustment, to facilitate the installation of provisional attachment.
The embodiment of first connecting portion 6 and second connecting portion 7 is more, such as first connecting portion 6 can be to buckle, and second
Interconnecting piece 7 can be card slot, and buckle is clamped with card slot cooperation, and the preferred first connecting portion 6 of the present embodiment and second connecting portion 7 are equal
For bolt hole, first connecting portion 6 is connect with second connecting portion 7 by bolt (not shown), compares clamping, the present embodiment
Connection type connection is more firm, can promote the integrally-built stability of vacuum tank.
It referring to Fig. 3 to Fig. 5, is sealed between first flange 4 and second flange 5 by sealing ring 8, to guarantee that vacuum tank is full
Sufficient vacuum level requirements.
Specifically, first flange 4 is female flange (face docked with second flange 5 is concave surface), second flange 5 is convex surface
Flange (face docked with first flange 4 is convex surface), sealing ring 8 is located at first flange 4 and the knife-edge positions X of second flange 5 (is cut
Face is triangle) in the seal groove B that surrounds, sealing ring 8 deforms under the squeezing action of seal groove B inner surface, to realize close
Sealing ring 8, thus can be limited in seal groove B by envelope, to keep the position of sealing ring 8 more stable, and then ensure that sealing effect
Fruit.
Sealing ring 8 fails under the high temperature conditions in order to prevent, and the preferred sealing ring 8 of the present embodiment is higher than 300 DEG C by fusing point
Flexible material production, such as the soft metals such as oxygen-free copper, gold, silver or rubber, polytetrafluoroethylene (PTFE) etc. are nonmetallic.
The section of sealing ring 8 is preferably circular, and diameter is 2mm~3mm, and not only sealing effect is good in this way, easy to process,
And moderate dimensions, to save material while guaranteeing sealing effect.
Referring to Fig.1, the side C of first flange 4 and/or second flange 5 is equipped with threaded hole 9, connects for attachment, threaded hole
9 can for one or more, when multiple can along respective flange be arranged circumferentially or nonuniform mutation operator, preferably specification be M4~
M8, along the circumferential direction of first flange 4 and second flange 5, threaded hole 9 and first connecting portion 6 or second connecting portion 7 are arranged in a staggered manner (i.e.
Threaded hole 9 and first connecting portion 6, second connecting portion 7 are arranged at the circumferential different location of first flange 4), to avoid with first
Interconnecting piece 6 and second connecting portion 7 are interfered.
Referring to Fig. 4, it is equipped with annular groove 10 in first flange 4 and second flange 5, can prevent from generating when welding in this way and split
Line.
Further, the center of first shell 1 and second shell 2 also is provided with the adapter tube 3 being connected to vacuum chamber A, the
Multiple adapter tubes 3 on one shell 1 have different sizes, and multiple adapter tubes 3 in second shell 2 have different sizes, thus
Various sizes of attachment is installed in first shell 1 and second shell 2, to increase the scope of application of vacuum tank.
Each adapter tube 3 is towards the center of vacuum chamber A, and end is equipped with third flange 11, third flange 11 be used for
The unit (such as temperature measurement unit, optical measurement, neutron counting measuring unit etc.) accessed outside other needs is connected with right
It is fixed.Third flange 11 on the adapter tube 3 of 2 center of first shell 1 and second shell, it is equal on the D of side
It equipped with threaded hole 9, is used for attachment and connects, threaded hole 9 can be one or more, can be along the circumferential equal of third flange 11 when multiple
Even arrangement or nonuniform mutation operator, preferably specification are M4~M8.
In order to install lifting rope or suspension hook in 2 assembly and disassembly of first shell 1 and second shell, referring to Fig. 2, the present embodiment
It is circumferentially uniformly arranged along itself there are two hanging ring 12 in middle first flange 4 and/or second flange 5, the centre bore of hanging ring 12 is preferred
For M6~M16, different specifications can be selected according to vacuum tank and the weight of attachment.
First shell 1 and second shell 2 are both preferably hemispherical, so that 2 shape phase of first shell 1 and second shell
It is same and equal in magnitude, it is on the one hand easy to process, on the other hand make the structure of vacuum chamber A body more regular.First shell 1 and second
The internal diameter of shell 2 can select in 200mm to 2000mm, and wall thickness can be calculated according to bore size and be obtained, preferably 2mm~20mm,
The preferred stainless steel of material, can also be used organic glass, nylon etc..
Above description is only a specific implementation of the present invention, but the protection scope of the utility model is not limited to
In this, anyone skilled in the art within the technical scope disclosed by the utility model, can readily occur in variation
Or replacement, it should be covered within the scope of the utility model.Therefore, the protection scope of the utility model should be with the power
Subject to the protection scope that benefit requires.
Claims (10)
1. a kind of vacuum tank generated for plasma, which is characterized in that surround the of vacuum chamber including being mutually butted
The non-center position of one shell and second shell, the first shell and the second shell is equipped with and is connected to the vacuum chamber
Adapter tube, is equipped with first flange in the first shell with the place of docking of the second shell, with described the in the second shell
It is equipped with second flange at the docking of one shell, is evenly arranged with multiple first connecting portions, institute along its circumferential direction in the first flange
It states and is evenly arranged with the second connecting portion equal with the first connecting portion quantity in second flange along its circumferential direction, each described
One interconnecting piece can be connect with any one of second connecting portion.
2. vacuum tank according to claim 1, which is characterized in that the first connecting portion and the second connecting portion are equal
For bolt hole, the first connecting portion and the second connecting portion are bolted.
3. vacuum tank according to claim 1, which is characterized in that lead between the first flange and the second flange
Cross sealing ring sealing.
4. vacuum tank according to claim 3, which is characterized in that the first flange be female flange, described second
Flange is convex flange, and the sealing ring is located at the seal groove that the knife-edge positions of the first flange and the second flange surround
It is interior.
5. vacuum tank according to claim 3, which is characterized in that the sealing ring is higher than 300 DEG C of flexibility by fusing point
Material production.
6. vacuum tank according to claim 4, which is characterized in that the section of the sealing ring is circle, and diameter is
2mm~3mm.
7. vacuum tank according to claim 1, which is characterized in that the first flange and/or the second flange
Side is equipped with threaded hole, along the circumferential direction of the first flange and the second flange, the threaded hole and the first connecting portion
Or the second connecting portion is arranged in a staggered manner.
8. vacuum tank according to claim 1, which is characterized in that be all provided in the first flange and the second flange
There is annular groove.
9. vacuum tank according to claim 1, which is characterized in that the center of the first shell and the second shell
Position is equipped with the adapter tube being connected to the vacuum chamber, and multiple adapter tubes in the first shell have different sizes, institute
The multiple adapter tubes stated in second shell have different sizes.
10. vacuum tank according to claim 1, which is characterized in that in the first flange and/or the second flange
Hanging ring there are two being circumferentially uniformly arranged along itself.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820953166.9U CN208285621U (en) | 2018-06-20 | 2018-06-20 | A kind of vacuum tank generated for plasma |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820953166.9U CN208285621U (en) | 2018-06-20 | 2018-06-20 | A kind of vacuum tank generated for plasma |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208285621U true CN208285621U (en) | 2018-12-25 |
Family
ID=64699209
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820953166.9U Active CN208285621U (en) | 2018-06-20 | 2018-06-20 | A kind of vacuum tank generated for plasma |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208285621U (en) |
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2018
- 2018-06-20 CN CN201820953166.9U patent/CN208285621U/en active Active
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