CN208187654U - A kind of vacuum cavity KF flange leakage detector - Google Patents
A kind of vacuum cavity KF flange leakage detector Download PDFInfo
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- CN208187654U CN208187654U CN201820516293.2U CN201820516293U CN208187654U CN 208187654 U CN208187654 U CN 208187654U CN 201820516293 U CN201820516293 U CN 201820516293U CN 208187654 U CN208187654 U CN 208187654U
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- flange
- leak
- mass spectrometer
- detector
- helium mass
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Abstract
The utility model discloses a kind of vacuum cavity KF flange leakage detector, including KF blind plate, KF hoop component, adapter flange, bellows and helium mass spectrometer leak detector, the inside of the KF blind plate and KF flange, which is formed, blocks cooperation, adapter flange is connected by KF hoop component with the outside of KF flange, and one end of bellows is connected with adapter flange, the other end is connected with helium mass spectrometer leak detector；It will be blocked on the inside of the KF flange for having leak source suspicion with KF blind plate, form individual sealing space, KF hoop component, adapter flange and bellows connection helium mass spectrometer leak detector are passed sequentially through on the outside of KF flange, it is hunted leak using helium mass spectrometer leak detector, to be excluded to KF flange with the presence or absence of leak source, it hunts leak high-efficient, at low cost, improves the qualification rate once hunted leak, reduce repeatability leak detection work.
Description
Technical field
The utility model relates to Low emissivity magnetron sputtering plating glass manufacturing apparatus technical field, specifically a kind of vacuum chambers
Body KF flange leakage detector.
Background technique
It is the vacuum tank of a sealing that Low emissivity magnetron sputtering plating glass equipment, which requires its cavity, is had on cavity body structure
Many KF pipe connecting flanges are welded, flange size plurality of specifications has KF16, KF25, KF40 etc..These KF flanges are mainly used for vacuum
The installation of equipment ancillary equipment, such as this sky penetration piece, cooling copper bar, auxiliary leak detection.
And several or more KF flange weldings are locally had on vacuum cavity in same panel region, it is vacuumized integrally
Under state, if one of KF flange there are problem, is difficult, which the KF flange determined be in the region is problematic, this is set
Standby vacuum leak hunting brings very big puzzlement and unnecessary workload.
Utility model content
The purpose of this utility model is to provide a kind of vacuum cavity KF flange leakage detector, which can be to KF flange
It individually hunts leak, improves the first-time qualification rate of equipment leak detection.
The technical scheme adopted by the utility model to solve the technical problem is as follows:
A kind of vacuum cavity KF flange leakage detector, including KF blind plate, KF hoop component, adapter flange, bellows and helium
The inside of mass-spectrometer leak detector, the KF blind plate and KF flange, which is formed, blocks cooperation, and adapter flange passes through KF hoop component and KF method
Blue outside is connected, and one end of bellows is connected with adapter flange, the other end is connected with helium mass spectrometer leak detector.
The utility model has the beneficial effects that being formed being blocked on the inside of the KF flange for having leak source suspicion with KF blind plate independent
Sealing space, pass sequentially through KF hoop component, adapter flange and bellows connection helium mass spectrometer leak detector on the outside of KF flange, utilize
Helium mass spectrometer leak detector is hunted leak, to exclude to KF flange with the presence or absence of leak source, is hunted leak high-efficient, at low cost, is improved
The qualification rate once hunted leak reduces repeatability leak detection work.
Detailed description of the invention
The present invention will be further described with reference to the accompanying drawings and examples:
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the partial enlargement diagram of Fig. 1；
Fig. 3 is the use schematic diagram of the utility model.
Specific embodiment
In conjunction with shown in Fig. 1 and Fig. 2, the utility model provides a kind of vacuum cavity KF flange leakage detector, including KF blind plate
1, KF hoop component 2, adapter flange 3, bellows 4 and helium mass spectrometer leak detector 5, KF flange 7 are installed on vacuum cavity 6, KF blind plate 1
It is formed with the inside of KF flange 7 and blocks cooperation, the usual manners such as O-ring and vacuum grease can be used and blocked；Adapter flange 3
It is connected by KF hoop component 2 with the outside of KF flange 7, KF hoop component 2 is made of conventional KF clip with sealing ring, ripple
One end of pipe 4 is connected with adapter flange 3, the other end is connected with helium mass spectrometer leak detector 5.
As shown in connection with fig. 3, it will be blocked on the inside of the KF flange 7 for having leak source suspicion with KF blind plate 1, it is empty to form individually sealing
Between, KF hoop component 2, adapter flange 3 are passed sequentially through on the outside of KF flange 7 with bellows 4 and connect helium mass spectrometer leak detector 5, utilize helium
Mass-spectrometer leak detector 5 is hunted leak, and the pump housing specifically carried using helium mass spectrometer leak detector 5 itself is to the sealing space for blocking formation
It is vacuumized, 7 surrounding of KF flange is sprayed with probe gas helium with spray gun 8, the leak rate of observation helium mass spectrometer leak detector 5 becomes
Change, to judge KF flange 7 with the presence or absence of leak source, to be excluded to KF flange with the presence or absence of leak source, hunt leak it is high-efficient, at
This is low, improves the qualification rate once hunted leak, and reduces repeatability leak detection work.
The above descriptions are merely preferred embodiments of the present invention, not makees in any form to the utility model
Limitation；Anyone skilled in the art, it is all available in the case where not departing from technical solutions of the utility model ambit
The methods and technical content of the disclosure above makes many possible changes and modifications to technical solutions of the utility model, or is revised as
The equivalent embodiment of equivalent variations.Therefore, all contents without departing from technical solutions of the utility model, according to the utility model
Technical spirit any simple modification, equivalent replacement, equivalence changes and modification made to the above embodiment are still fallen within practical
In the range of the protection of new technique scheme.
Claims (1)
1. a kind of vacuum cavity KF flange leakage detector, which is characterized in that including KF blind plate, KF hoop component, adapter flange, wave
The inside of line pipe and helium mass spectrometer leak detector, the KF blind plate and KF flange, which is formed, blocks cooperation, and adapter flange passes through KF clip group
Part is connected with the outside of KF flange, and one end of bellows is connected with adapter flange, the other end is connected with helium mass spectrometer leak detector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820516293.2U CN208187654U (en) | 2018-04-12 | 2018-04-12 | A kind of vacuum cavity KF flange leakage detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820516293.2U CN208187654U (en) | 2018-04-12 | 2018-04-12 | A kind of vacuum cavity KF flange leakage detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208187654U true CN208187654U (en) | 2018-12-04 |
Family
ID=64436783
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820516293.2U Active CN208187654U (en) | 2018-04-12 | 2018-04-12 | A kind of vacuum cavity KF flange leakage detector |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208187654U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111458081A (en) * | 2019-01-22 | 2020-07-28 | 西安高压电器研究院有限责任公司 | Dynamic helium mass spectrum leak detection airtightness test method and device for GI L bus |
| CN114397067A (en) * | 2021-12-29 | 2022-04-26 | 中国原子能科学研究院 | Leak detection device and leak detection method |
-
2018
- 2018-04-12 CN CN201820516293.2U patent/CN208187654U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111458081A (en) * | 2019-01-22 | 2020-07-28 | 西安高压电器研究院有限责任公司 | Dynamic helium mass spectrum leak detection airtightness test method and device for GI L bus |
| CN114397067A (en) * | 2021-12-29 | 2022-04-26 | 中国原子能科学研究院 | Leak detection device and leak detection method |
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