CN209056607U - A kind of electromagnetism Meta Materials wave absorbing device based on vanadium dioxide phase transformation regulation - Google Patents
A kind of electromagnetism Meta Materials wave absorbing device based on vanadium dioxide phase transformation regulation Download PDFInfo
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- CN209056607U CN209056607U CN201821278319.0U CN201821278319U CN209056607U CN 209056607 U CN209056607 U CN 209056607U CN 201821278319 U CN201821278319 U CN 201821278319U CN 209056607 U CN209056607 U CN 209056607U
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Abstract
The utility model discloses a kind of electromagnetism Meta Materials wave absorbing device based on vanadium dioxide phase transformation regulation, including underlying metal reflecting plate, have above the metallic reflection plate combined by two media substrate and Two-component stack gradually made of 9 layers of structural unit.The utility model introduces vanadium dioxide resonant element in wave absorbing device, using the phase-change characteristic of vanadium dioxide, changes the conductivity of vanadium dioxide by the variation of ambient temperature, to realize the dynamic tuning for wave absorbing device bandwidth of operation and frequency point.
Description
Technical field
The utility model relates to THz devices technical fields, are based particularly on the super material of electromagnetism of vanadium dioxide phase transformation regulation
Expect wave absorbing device.
Background technique
Electromagnetism Meta Materials are the artificial composite structure or material for the extraordinary physical property that there are some conventional materials not have,
The interesting phenomenons such as " invisible clothes ", " perfection " imaging, negative refraction can be generated.It the advantage is that the electromagnetic attributes of material can lead to
The size, structure and distribution form of cellular construction are overregulated to realize.Electromagnetism Meta Materials wave absorbing device suffers from extensively in every field
General application.It is the key condition of war victory in the existence of military field, weaponry, improves weapon Stealth Fighter, reduces
It is the most effectual way for improving fighting efficiency that it, which is detected probability,.In civil field, nowadays electromagnetic pollution is got worse, not only right
Electronic equipment is interfered and is damaged, and also will affect the health of people.But the wave absorbing device of traditional material inhales electromagnetic wave
The form of receipts belongs to Passive intake, lacks adaptability and tunability, it is difficult to meet actual needs.Therefore, how to electromagnetic wave
Characteristic, which carries out regulation, becomes the emphasis of every field research.Introducing phase-change material can be changed by changing external environment condition
The electromagnetic parameter characteristic of certain material, to realize the control to Meta Materials wave absorbing device.Vanadium dioxide has room temperature phase-change feature, phase
Temperature is 68 DEG C, and during insulator is to metal, conductivity is increased rapidly, and the mutation of conductivity is reversible,
Based on this characteristic, tunable electromagnetism Meta Materials wave absorbing device can be produced by the integrated of Meta Materials and vanadium dioxide.
Summary of the invention
Technical problem to be solved in the utility model is overcome the deficiencies in the prior art and provides a based on titanium dioxide
The electromagnetism Meta Materials wave absorbing device of vanadium phase transformation regulation, medium, the metallic state of vanadium dioxide resonant element are converted by external temperature control,
To achieve the purpose that wave absorbing device specific frequency area range internal absorption factor regulation.
The utility model uses following technical scheme to solve above-mentioned technical problem:
According to the utility model proposes a kind of electromagnetism Meta Materials wave absorbing device based on vanadium dioxide phase transformation regulation, including bottom
Layer metallic reflection plate, have above the metallic reflection plate combined by two media substrate and Two-component stack gradually and
At 9 layers of structural unit.
As the scheme that advanced optimizes of the utility model, first layer is SiO to 9 layers of structural unit from bottom to up2It is situated between
Matter substrate, the second layer, the 4th layer, layer 6 and the 8th layer are Y2O3Medium substrate, third layer be metal resonant element, the 5th
Layer, layer 7, the 9th layer be vanadium dioxide resonant element.
Further, state there are two types of the vanadium dioxide resonant elements, low-temperature condition (<68 DEG C) and the condition of high temperature (>=
68℃)。
When being in low-temperature condition, (<68 DEG C) show as dielectric property, and when being in the condition of high temperature, (>=68 DEG C) are shown as
Metallic character.
Further, SiO2Medium substrate side length is 70 μm, with a thickness of 2 μm, second layer Y2O3Medium substrate side length is 70 μ
M, with a thickness of 1.8 μm, the 4th layer, layer 6, the 8th layer of Y2O3The side length of medium substrate successively successively decrease 0.7 μm, thickness successively successively decreases
0.018μm。
Further, metal resonant element is identical with the shape of vanadium dioxide resonant element and size is different, layer 5 two
The dimension scale of vanadium oxide resonant element and metal resonant element is 0.99:1, and layer 7 vanadium dioxide resonant element and metal are humorous
The dimension scale of vibration unit is 0.98:1, and the 9th layer of vanadium dioxide resonant element and the dimension scale of metal resonant element are
0.97:1。
Further, the metal resonant element is by snakelike resonant element and four positive square annular resonance units and one
A square resonant element is composed.The line width and wire spacing of the snakelike resonant element are 2 μm, and square annular is humorous
The line width of vibration unit is 0.2 μm, and wire spacing is 3.8 μm, and the side length of square resonant element is 20 μm, with a thickness of 1 μm.
Further, the material of the underlying metal reflecting plate and metal resonant element is gold, the thickness of metallic reflection plate
It is 0.1 μm.
The utility model compared with the prior art by using the above technical solution, has following technical effect that
(1) the utility model is to pass through extraneous temperature control pair based on the electromagnetism Meta Materials wave absorbing device of vanadium dioxide phase transformation regulation
The state of vanadium dioxide resonant element is regulated and controled, and makes it can in the absorptivity of the specific frequency area range of terahertz wave band
It adjusts, when electromagnetic wave incident, tunable absorption spectrum is obtained by temperature regulation.
(2) the utility model can realize the absorption to terahertz electromagnetic wave under lesser physical size, have popular
Easy processing, can temperature regulation, the features such as flexible design, functional.
Detailed description of the invention
Fig. 1 is metal resonant element structural schematic diagram.
Fig. 2 is metal resonant element structural schematic diagram.
Fig. 3 is electromagnetism Meta Materials wave absorbing device array (3 × 3) the structure chart front view regulated and controled based on vanadium dioxide phase transformation.
Fig. 4 is the electromagnetism Meta Materials wave absorbing device perspective view regulated and controled based on vanadium dioxide phase transformation.
Fig. 5 is the electromagnetism Meta Materials wave absorbing device side view regulated and controled based on vanadium dioxide phase transformation.
Fig. 6 is the electromagnetism Meta Materials wave absorbing device that is regulated and controled based on vanadium dioxide phase transformation in TE mode electromagnetic wave vertical incidence
High temperature absorption curve.
Fig. 7 is the electromagnetism Meta Materials wave absorbing device that is regulated and controled based on vanadium dioxide phase transformation in TE mode electromagnetic wave vertical incidence
Low temperature absorption curve.
Appended drawing reference is explained: 1,2,3-vanadium dioxide resonant element, 4-metal resonant elements, 6-metallic reflection plates,
5-medium, 1,7,8,9,10-medium 2.
Specific embodiment
The technical solution of the utility model is described in further detail with reference to the accompanying drawing
A kind of electromagnetism Meta Materials wave absorbing device based on vanadium dioxide phase transformation regulation that the present embodiment proposes, can pass through outside
Temperature control mode regulates and controls the state of vanadium dioxide resonant element, to reach in terahertz wave band specific frequency area range
The adjustable purpose of absorptivity, the wave absorbing device are formed by structural unit periodic arrangement.Its structural unit includes that underlying metal is anti-
Penetrate plate 6, medium substrate 5,7,8,9,10, metal resonant element 4 and vanadium dioxide resonant element 1,2,3.
Resonant element is made of metal and vanadium dioxide respectively, is had dielectric layer to separate between each resonant element, is passed through the external world
The state of temperature control vanadium dioxide resonant element 1,2,3.Under low-temperature condition, vanadium dioxide resonant element shows medium spy
Property, when high temperature, show as metallic character.
5 material of medium substrate is SiO2, 7,8,9,10 material of medium substrate is Y2O3。
The metallic reflection plate 6 and metal resonant element 4, material are gold.
The production method of the electromagnetism Meta Materials wave absorbing device based on vanadium dioxide phase transformation regulation, the wave absorbing device is for entering
The electromagnetic wave penetrated is polarization sensitive, and when electromagnetic wave vertical incidence, the difference of assimilation effect is due to two under high temperature, low-temperature condition
Vanadium oxide resonant element at high temperature (>=68 DEG C) presentation metallic characters, at low temperature caused by (<68 DEG C) presentation dielectric properties.
Two states compare, and when the condition of high temperature (>=68 DEG C), the assimilation effect of the wave absorbing device is more preferable.
The reflecting plate of the wave absorbing device, the reflecting plate used in different frequency range is different, such as in the available full gold of microwave band reflecting surface
Belong to plate, such as copper, aluminium；And in Terahertz and light wave with super band, multilayer dielectricity reflecting plate can be used in reflecting plate, and (such as photon is brilliant
Body) or artificial structure's array with reflection characteristic.
The wave absorbing device, medium substrate can also be the artificial synthesized medium with specific feature, such as be matched by solution
Gel-type (flexibility) medium that the method for ratio obtains, then combined with flexible base board and can be used for conformal realization wideband absorption.
The Meta Materials wave absorbing device based on vanadium dioxide phase transformation regulation can be realized preferable absorbing property simultaneously, lead to
The mode for crossing temperature control realizes the tunable of absorption frequency.
A electromagnetism Meta Materials wave absorbing device based on vanadium dioxide phase transformation regulation, by several resonant element periodic arrangements
At.Its structural unit is as shown in figure 4, bottom is complete metal plate, for being totally reflected, thickness h1It is 0.1 μm, medium substrate 5
Side length p is 70 μm, thickness h2It is 2 μm, 10 side length p of medium substrate is 70 μm, thickness h3It is 1.8 μm.The side of medium substrate 9,8,7
Long p1、p2、p3Respectively 69.3 μm, 68.6 μm, 67.9 μm, thickness h5、h6、h7Respectively 1.782 μm, 1.764 μm, 1.746 μ
m.Metal and vanadium dioxide resonant element are all by the resonant element of serpentine and four positive square annular resonance units and one
Square resonant element is composed, and shape is identical and size is different.As shown in Figure 1, in the metal resonant element, snakelike knot
The outer side length a of structure is 66 μm, and line width and wire spacing b are 2 μm, and gap g is that the line width c of 10 μm of resonant rings is 0.2 μm, interannular
Distance e is 3.8 μm, as shown in Fig. 2, from outside to inside, the outer side length d of first resonant ring is 60.2 μm, interior side length f is 59.8 μ
M, the outer side length i of second resonant ring are 56.4 μm, and interior side length j is 56 μm, and the outer side length k of third resonant ring is 52.6 μm,
Interior side length l is 52.2 μm, and the outer side length n of the 4th resonant ring is 48.8 μm, and interior side length o is 48.4 μm, square resonant element
Side length m be 20 μm, thickness h4It is 1 μm.The dimension scale of vanadium dioxide resonant element 3 and metal resonant element is 0.99:
1, vanadium dioxide resonant element 2 and the dimension scale of metal resonant element are 0.98:1, and vanadium dioxide resonant element 1 and metal are humorous
The dimension scale of vibration unit is 0.97:1.Design parameter is shown in Table 1.
| Parameter | a | b | c | d | e |
| It is worth (μm) | 66 | 2 | 0.2 | 60.2 | 3.8 |
| Parameter | f | g | i | j | k |
| It is worth (μm) | 59.8 | 10 | 56.4 | 56 | 52.6 |
| Parameter | l | m | n | o | p |
| It is worth (μm) | 52.2 | 20 | 48.8 | 48.4 | 70 |
| Parameter | p1 | p2 | p3 | h1 | h2 |
| It is worth (μm) | 69.3 | 68.6 | 67.9 | 0.1 | 2 |
| Parameter | h3 | h4 | h5 | h6 | h7 |
| It is worth (μm) | 1.8 | 1 | 1.782 | 1.764 | 1.746 |
Table 1
As shown in Figure 6,7, it is absorption curve that the wave absorbing device works at different temperatures, since the wave absorbing device is for incidence
Electromagnetic wave be polarization sensitive, the absorption curve of following two temperature is the absorption curve obtained under TE mode, when work
Electromagnetic wave is incident along the direction-z.Indicate that reflectivity, T (ω) indicate by absorptivity formula A (ω)=1-R (ω)-T (ω), R (ω)
Transmissivity is since bottom is complete metal reflecting plate, so T (ω)=0, therefore A (ω)=1-R (ω).Fig. 6 is under the condition of high temperature
The absorption curve of (>=68 DEG C) wave absorbing device, in frequency 2.71THz to 3.35THz range, the absorptivity of the wave absorbing device is 90%
More than, absorption peak is respectively 93.0% and 97.5%, is located at 2.77THz and 3.18THz.Fig. 7 is under low-temperature condition
The absorption curve of (< 68 DEG C) wave absorbing device, in frequency 3.36THz to 3.57THz range the absorptivity of the wave absorbing device 90% with
On, absorption peak is respectively 91.6%, 99.6%, 99.9%, 99.7% and 99.6%, be located at 1.27THz,
3.40THz, 3.52THz, 3.68THz and 4.09THz.Comparing two states can be seen that under the condition of high temperature (>=68 DEG C) suction
The wide band absorption in particular frequency range may be implemented in wave device, and (< 68 DEG C) wave absorbing device can only realize multiple lists under low-temperature condition
The absorption of frequency point.Therefore, we can select working condition according to actual needs, by external temperature control, realize to the suction wave
The regulation of device working frequency.
After particular design (temperature control), the working frequency of the utility model can cover entire THz wave
Section.Main absorb all is that the resonant element being made of vanadium dioxide causes, and can be realized under lesser physical size to lower
The absorption of frequency electromagnetic, the utility model have popular easy processing, can temperature regulation, the features such as flexible design, functional.
The basic principles and main features and advantage of the utility model have been shown and described above.Those skilled in the art
It should be appreciated that the utility model is not limited by above-mentioned specific embodiment, the description in above-mentioned specific embodiment and specification is only
It is in order to further illustrate the principles of the present invention, on the premise of not departing from the spirit and scope of the utility model, this is practical
Novel to will also have various changes and improvements, these various changes and improvements fall within the scope of the claimed invention.This reality
With novel claimed range by claims and its equivalent thereof.
Claims (6)
1. a kind of electromagnetism Meta Materials wave absorbing device based on vanadium dioxide phase transformation regulation, it is characterised in that: reflected including underlying metal
Plate, have above the metallic reflection plate combine by two media substrate and Two-component stack gradually made of 9 layers tie
Structure unit；First layer is SiO to 9 layers of structural unit from bottom to up2Medium substrate, the second layer, the 4th layer, layer 6 and the 8th
Layer is Y2O3Medium substrate, third layer be metal resonant element, layer 5, layer 7, the 9th layer be vanadium dioxide resonance list
Member.
2. the electromagnetism Meta Materials wave absorbing device according to claim 1 based on vanadium dioxide phase transformation regulation, it is characterised in that: institute
State SiO2Medium substrate side length is 70 μm, with a thickness of 2 μm, second layer Y2O3Medium substrate side length is 70 μm, with a thickness of 1.8 μm, the
Four layers, layer 6, the 8th layer of Y2O3The side length of medium substrate successively successively decrease 0.7 μm, thickness successively successively decreases 0.018 μm.
3. the electromagnetism Meta Materials wave absorbing device according to claim 1 based on vanadium dioxide phase transformation regulation, it is characterised in that: institute
State that metal resonant element is identical with the shape of vanadium dioxide resonant element and size is different；Layer 5 vanadium dioxide resonant element with
The dimension scale of metal resonant element is 0.99:1, the dimension scale of layer 7 vanadium dioxide resonant element and metal resonant element
For 0.98:1, the dimension scale of the 9th layer of vanadium dioxide resonant element and metal resonant element is 0.97:1.
4. the electromagnetism Meta Materials wave absorbing device according to claim 1 based on vanadium dioxide phase transformation regulation, it is characterised in that: institute
Vanadium dioxide resonant element is stated there are two types of state, when low-temperature condition<68 DEG C with the condition of high temperature>=68 DEG C；
When being in low-temperature condition, dielectric property is shown as, when being in the condition of high temperature, shows as metallic character.
5. the electromagnetism Meta Materials wave absorbing device according to claim 1 based on vanadium dioxide phase transformation regulation, it is characterised in that: institute
The metal resonant element stated is by snakelike resonant element and four positive square annular resonance units and a square resonant element group
It closes, the line width and wire spacing of the snakelike resonant element are 2 μm, and the line width of positive square annular resonance unit is 0.2 μ
M, wire spacing are 3.8 μm, and the side length of square resonant element is 20 μm, with a thickness of 1 μm.
6. the electromagnetism Meta Materials wave absorbing device according to claim 1 based on vanadium dioxide phase transformation regulation, it is characterised in that: institute
The material of the underlying metal reflecting plate and metal resonant element stated be gold, the metallic reflection plate with a thickness of 0.1 μm.
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| CN110767968A (en) * | 2019-10-24 | 2020-02-07 | 中国计量大学 | Single-band and three-band switchable filter based on vanadium dioxide phase change metamaterial |
| CN110908017A (en) * | 2019-11-30 | 2020-03-24 | 华南理工大学 | Tunable band-stop filter based on photonic crystal |
| CN111525277A (en) * | 2020-04-24 | 2020-08-11 | 太原理工大学 | Broadband adjustable wave absorber with vanadium dioxide metamaterial loaded on dielectric layer |
| CN111910154A (en) * | 2020-07-29 | 2020-11-10 | 华中科技大学 | Dynamic frequency selection surface structure and preparation method thereof |
| CN112003024A (en) * | 2020-07-13 | 2020-11-27 | 清华大学 | Temperature-controlled two-dimensional omnidirectional metal-medium composite stealth device and manufacturing method thereof |
| CN112713412A (en) * | 2020-12-21 | 2021-04-27 | 桂林电子科技大学 | Metamaterial wave absorber based on micro-hotplate accurate temperature control system |
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| CN110767968A (en) * | 2019-10-24 | 2020-02-07 | 中国计量大学 | Single-band and three-band switchable filter based on vanadium dioxide phase change metamaterial |
| CN110767968B (en) * | 2019-10-24 | 2021-06-04 | 中国计量大学 | Single-band and three-band switchable filter based on vanadium dioxide phase change metamaterial |
| CN110908017A (en) * | 2019-11-30 | 2020-03-24 | 华南理工大学 | Tunable band-stop filter based on photonic crystal |
| WO2021103335A1 (en) * | 2019-11-30 | 2021-06-03 | 华南理工大学 | Photonic crystal-based tunable band stop filter |
| CN110908017B (en) * | 2019-11-30 | 2022-03-25 | 华南理工大学 | Tunable band-stop filter based on photonic crystal |
| CN111525277A (en) * | 2020-04-24 | 2020-08-11 | 太原理工大学 | Broadband adjustable wave absorber with vanadium dioxide metamaterial loaded on dielectric layer |
| CN112003024A (en) * | 2020-07-13 | 2020-11-27 | 清华大学 | Temperature-controlled two-dimensional omnidirectional metal-medium composite stealth device and manufacturing method thereof |
| CN111910154A (en) * | 2020-07-29 | 2020-11-10 | 华中科技大学 | Dynamic frequency selection surface structure and preparation method thereof |
| CN112713412A (en) * | 2020-12-21 | 2021-04-27 | 桂林电子科技大学 | Metamaterial wave absorber based on micro-hotplate accurate temperature control system |
| CN114865327A (en) * | 2022-04-22 | 2022-08-05 | 电子科技大学 | Attenuator composed of resonant ring array |
| CN114865327B (en) * | 2022-04-22 | 2024-01-26 | 电子科技大学 | Attenuator formed by resonant ring array |
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Assignee: NANJING ORIENT INFORMATION TECHNOLOGY Co.,Ltd. Assignor: NANJING University OF POSTS AND TELECOMMUNICATIONS Contract record no.: X2020980007078 Denomination of utility model: An electromagnetic metamaterial absorber based on phase transition control of vanadium dioxide Granted publication date: 20190702 License type: Common License Record date: 20201026 |
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