CN110085996A - A kind of Meta Materials wave absorbing device and its manufacturing method based on strontium titanates dielectric layer - Google Patents
A kind of Meta Materials wave absorbing device and its manufacturing method based on strontium titanates dielectric layer Download PDFInfo
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- CN110085996A CN110085996A CN201910344109.XA CN201910344109A CN110085996A CN 110085996 A CN110085996 A CN 110085996A CN 201910344109 A CN201910344109 A CN 201910344109A CN 110085996 A CN110085996 A CN 110085996A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q15/00—Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
- H01Q15/0006—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices
- H01Q15/0086—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices having materials with a synthesized negative refractive index, e.g. metamaterials or left-handed materials
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q17/00—Devices for absorbing waves radiated from an antenna; Combinations of such devices with active antenna elements or systems
- H01Q17/007—Devices for absorbing waves radiated from an antenna; Combinations of such devices with active antenna elements or systems with means for controlling the absorption
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K9/00—Screening of apparatus or components against electric or magnetic fields
- H05K9/0073—Shielding materials
- H05K9/0081—Electromagnetic shielding materials, e.g. EMI, RFI shielding
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- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
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- Aerials With Secondary Devices (AREA)
- Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
Abstract
The invention discloses a kind of Meta Materials wave absorbing device and its manufacturing method based on strontium titanates dielectric layer, which includes fabric, middle dielectric layer and top layer resonance structure.Fabric includes at least one layer of metallic film, and middle dielectric layer is fixed on fabric.Top layer resonance structure is fixed on middle dielectric layer, and top layer resonance structure includes the multiple metal resonance structures being arranged in array.Multiple metal resonance structures are each attached to middle dielectric layer far from the same end face of fabric.Metallic film and metal resonance structure are made by copper, and middle dielectric layer is by SrTiO3Material is made.The present invention is by SrTiO3Middle dielectric layer of the material as Meta Materials wave absorbing device, it can realize that the active for inhaling wave frequency rate and suction intensity of wave is adjusted by changing ambient temperature, and then further open up the application field of Meta Materials wave absorbing device, and effective control of the realization to incident electromagnetic wave in Terahertz frequency range, promote the development and application of Terahertz science and technology.
Description
Technical field
The present invention relates to a kind of Meta Materials wave absorbing devices of wave absorbing device technical field, more particularly to one kind to be based on strontium titanates medium
The Meta Materials wave absorbing device of layer, further relates to the manufacturing method of the Meta Materials wave absorbing device based on strontium titanates dielectric layer.
Background technique
Wave absorbing device usually has lesser physical size, and can have specific absorbability in target frequency domain, in recent years
The various civilian, military fields such as electromagnetic interference, electromagnetism stealth are prevented to be widely used in.In military field, suction can be used
Coating of the wave device as weaponry, the ability for making weapon possess electromagnetism stealth, other side can not detect our people by weapon
Member, can obtain first chance in war, can also be used to the RCS for reducing all kinds of flying units such as guided missile.Wave absorbing device is specifically being given birth to
Application in work is mainly reflected in the suction wave application that most of electronic product needs to prevent electromagnetic interference in the process of work, small
The wave absorbing device of type can with this kind of demand of effective solution health care, medical treatment etc., while it also have in communication field it is more next
More applications.
Under normal circumstances, after the structure and size of Meta Materials wave absorbing device and material etc. determine, microwave absorbing property (absorption peak
Frequency inhales wavestrip is wide, inhales intensity of wave etc.) just determine.Thus in order to better meet actual demand, there is an urgent need to design resonance
Frequency inhales the tunable Meta Materials wave absorbing devices such as intensity of wave, bandwidth, not only can realize specific aim to the electromagnetic wave of specific frequency
Inhale wave, but also can the suction wave amplitude to electromagnetic field control, to realize to the switching function of electromagnetic field.But it is logical
The size for changing resonance structure unit and material etc. are crossed, the tuning of Meta Materials wave absorbing device microwave absorbing property may be implemented, but it is this
The tuning methods of passive type have significant limitation in practical applications, are not able to satisfy the needs actually tuned.
Summary of the invention
Problem in view of the prior art, the present invention provide a kind of Meta Materials wave absorbing device and its system based on strontium titanates dielectric layer
Method is made, existing wave absorbing device is solved and be not able to satisfy actively using having limitation by the tuning methods of passive type
The needs of problems of tuning.
The present invention is implemented with the following technical solutions: the Meta Materials wave absorbing device based on strontium titanates dielectric layer comprising:
Fabric comprising at least one layer of metallic film；
Middle dielectric layer is fixed on fabric；Middle dielectric layer is overlapped with two end faces that fabric is connected；
And
Top layer resonance structure, is fixed on middle dielectric layer；
It is characterized in that, top layer resonance structure includes the multiple metal resonance structures being arranged in array；Multiple metal resonance
Structure is each attached to middle dielectric layer far from the same end face of fabric, and each metal resonance structure is in cross；
The metallic film and metal resonance structure are made by copper, and middle dielectric layer is by SrTiO3Material is made.
As a further improvement of the foregoing solution, fabric and middle dielectric layer are in rectangle, the thickness of middle dielectric layer
Degree is greater than the thickness of fabric.
Further, multiple metal resonance structure equidistantly distributeds, the opposite end of each metal resonance structure is in
Between dielectric layer length direction or width direction setting.
As a further improvement of the foregoing solution, four ends of each metal resonance structure are all the same, and are located at same
On a circumference one.
Further, the distance between each metal resonance structure opposite end is 50um, each metal resonance structure end
The width in portion is 10um.
Still further, fabric with a thickness of 0.3um, middle dielectric layer with a thickness of 2um, metal resonance structure
With a thickness of 0.3um.
As a further improvement of the foregoing solution, multiple metal resonance structures are arranged in square matrices, and adjacent two
The distance between metal resonance structure is 65um.
As a further improvement of the foregoing solution, the Terahertz Meta Materials wave absorbing device further include:
Temperature conditioning unit is used to adjust the temperature of middle dielectric layer.
As a further improvement of the foregoing solution, the Terahertz Meta Materials wave absorbing device is applied to concealed device, Terahertz
In one or more devices of imaging device, terahertz detection device, electromagnetic wave detection and regulation device and solar battery.
The present invention also provides a kind of manufacturing methods of Meta Materials wave absorbing device based on strontium titanates dielectric layer, are used to manufacture
Above-mentioned any Meta Materials wave absorbing device based on strontium titanates dielectric layer comprising following steps:
According to the shape of fabric, on base material cutting depth not less than fabric, middle dielectric layer and
The locating slot of the sum of the thickness of top layer resonance structure；
Since the bottom of the locating slot, at least one layer of metallic film is plated, and after metallic film sizing, Xiang Suoshu
The SrTiO being in a liquid state is poured into locating slot3Material, to form solid middle dielectric layer；
Mark the multiple localization regions being arranged in array on middle dielectric layer, multiple localization regions respectively with multiple metals
Resonance structure is corresponding；
First successively multiple metal resonance structures are fixed on corresponding multiple localization regions, then to fabric, centre
Dielectric layer and top layer resonance structure carry out aging process.
Compared to existing wave absorbing device, the Meta Materials wave absorbing device and its manufacturing method of the invention based on strontium titanates dielectric layer
It has the advantages that
1, the Meta Materials wave absorbing device of the invention based on strontium titanates dielectric layer, the opposite dielectric of in-between dielectric layer material are normal
Several and dielectric loss angle tangent has a tunning effect to the suctions wave frequency rate and suction intensity of wave of Meta Materials wave absorbing device, therefore can be with
Realize that suction wave frequency rate or suction intensity of wave are actively adjustable, to further open up the application field of Meta Materials wave absorbing device.The present invention will
SrTiO3Middle dielectric layer of the material as Meta Materials wave absorbing device can pass through the master of realization frequency when change ambient temperature
Effective control to incident electromagnetic wave is realized in dynamic tuning in Terahertz frequency range, promote Terahertz science and technology development and
Using.
2, when environment temperature is increased to 400K from 200K, the real part of the dielectric constant of middle dielectric layer is gradually reduced, and is made
The centre frequency for obtaining the suction wave frequency band of Meta Materials wave absorbing device moves to from 2.44THz from 1.62THz, and the frequency shift (FS) for inhaling wave frequency band reaches
820GHz is arrived, to can actively regulate the suction wave frequency rate of wave absorbing device by adjusting temperature.When environment temperature is increased from 200K
When to 400K, the loss angle tangent of middle dielectric layer is gradually increased, thus causes to inhale corresponding suction wave at wave frequency mid-band frequency
Rate rises to 98.4% from 95.3%, to pass through the suction intensity of wave for adjusting the adjustable wave absorbing device of temperature.
Detailed description of the invention
Fig. 1 is the top view of the Meta Materials wave absorbing device based on strontium titanates dielectric layer of the embodiment of the present invention 1；
Fig. 2 is the side view of a structural unit of the wave absorbing device in Fig. 1；
Fig. 3 is the side view of the wave absorbing device in Fig. 1；
Fig. 4 is the SrTiO filled in metal resonance structure in the top layer resonance structure of the wave absorbing device in Fig. 13Material is answered
The corresponding curve diagram being worth between the real part of dielectric constant and ambient temperature and incident wave frequency rate；
Fig. 5 is the SrTiO filled in metal resonance structure in the top layer resonance structure of the wave absorbing device in Fig. 13Material is answered
The corresponding curve diagram being worth between the imaginary part of dielectric constant and ambient temperature and incident wave frequency rate；
Fig. 6 is the SrTiO filled in metal resonance structure in the top layer resonance structure of the wave absorbing device in Fig. 13The damage of material
Consume the corresponding curve diagram between angle tangent and ambient temperature and incident wave frequency rate；
Fig. 7 is suction curve line chart of the wave absorbing device when environment temperature is 300K in Fig. 1；
Fig. 8 is suction curve line chart of the wave absorbing device in varying environment temperature in Fig. 1.
Symbol description:
1 fabric, 3 top layer resonance structure
2 middle dielectric layer, 5 metal resonance structure
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that described herein, specific examples are only used to explain the present invention, not
For limiting the present invention.
Embodiment 1
Fig. 1, Fig. 2 and Fig. 3 are please referred to, a kind of Meta Materials suction wave based on strontium titanates dielectric layer is present embodiments provided
Device comprising fabric 1, middle dielectric layer 2 and top layer resonance structure 3.The wave absorbing device of the present embodiment is applied to stealthy dress
It sets, one kind or more of terahertz imaging device, terahertz detection device, electromagnetic wave detection and regulation device and solar battery
In kind device, it can be applied in the plurality of devices or device that other needs tune.
Fabric 1 includes at least one layer of metallic film, and metallic film is continuous film.Metallic film is by conductivity
It is 5.8 × 107The copper of S/m is made, and thickness can be greater than skin depth of the electromagnetic wave in the metal.In the present embodiment,
The thickness h m of fabric 1 is 0.3um, and is in rectangle.Fabric 1 can be stacked by multiple layer metal film
At the size of length and width can be set according to the actual needs, can expand the application range of wave absorbing device.
Middle dielectric layer 2 is fixed on fabric 1, and two end faces that middle dielectric layer 2 is connected with fabric 1
It is overlapped.In the present embodiment, middle dielectric layer 2 is also in rectangle, and thickness is greater than the thickness of fabric 1, and intermediate Jie
The thickness h d of matter layer 2 is 2um.Wherein, middle dielectric layer 2 is by SrTiO3(i.e. strontium titanates) material is made.The phase of middle dielectric layer 2
It can be round or regular polygon to two sides, can be configured according to actual design requirement, and middle dielectric layer 2
Whole outer profile can be bulk, specially prism-shaped, and can be stacked by multilayer dielectricity, and can also be integrally formed knot
Structure.
Top layer resonance structure 3 is fixed on middle dielectric layer 2.Top layer resonance structure 3 includes multiple metal resonance structures 5,
And multiple metal resonance structures 5 are arranged in array.Multiple metal resonance structures 5 are each attached to middle dielectric layer 2 far from bottom
On the same end face of structure 1, and it is in the same plane.Metal resonance structure 5 is 5.8 × 10 by conductivity7The copper of S/m
, and be in cross.In the present embodiment, part where defining metal resonance structure 5 is a structure of wave absorbing device
Unit.Multiple 5 equidistantly distributeds of metal resonance structure, the opposite end of each metal resonance structure 5 is along middle dielectric layer 2
Length direction or width direction setting.Also, four ends of each metal resonance structure 5 are all the same, and are located at same
On circumference one.The distance between each 5 opposite end of metal resonance structure L1 is 50um, each 5 end of metal resonance structure
Width W1 is 10um, and the thickness h s of metal resonance structure 5 is 0.3um.Wherein, multiple metal resonance structures 5 are arranged in square
Matrix, and the distance between two adjacent metal resonance structures 5 are defined as the structural unit period, and structural unit period P
For 65um.
Fig. 4, Fig. 5 and Fig. 6 are please referred to, shows SrTiO in figure3The real part Re (ε) of the complex value dielectric constant of material, void
Dependence between portion Im (ε) and loss angle tangent tg δ=Im (ε)/Re (ε) and ambient temperature and the frequency of incident THz wave is closed
System.SrTiO3The real and imaginary parts of complex value dielectric constant are not only related with the frequency of incident electromagnetic wave, can also be with ambient temperature
Variation and change, therefore, by change ambient temperature can realize to SrTiO3The regulation of complex value dielectric constant, Jin Ershi
Existing SrTiO3Tuning to the electromagnetic response characteristic of incident THz wave.
Referring to Fig. 7, T=300K in figure, it is shown that the suction of Meta Materials wave absorbing device when environment temperature is t=27 DEG C (room temperature)
The situation of change of wave profile.It can be seen from figure 7 that the Meta Materials wave absorbing device of the present embodiment produces one at 2.07THz
The absorption band that wave rate is 96.5% is inhaled, the half-wave peak width FWHM of the absorption band is 200GHz, and opposite FWHM is 9.7%.
Referring to Fig. 8, the Meta Materials wave absorbing device of the present embodiment inhales wave frequency band this Figure illustrates when ambient temperature changes
Position and the situation of change for inhaling intensity of wave.During ambient temperature changes to 400K from 200K, in the Meta Materials wave absorbing device
Between dielectric layer 2 complex value dielectric constant real part Re (ε) or relative dielectric constant εrVariation can directly result in wave absorbing device inhale wave
The offset of frequency, and the imaginary part Im (ε) of the complex value dielectric constant of middle dielectric layer 2 or loss angle tangent tg δ=Im (ε)/Re (ε)
Variation can the suction wave rate to Meta Materials wave absorbing device have a direct impact.
When ambient temperature is T=200K, which forms a suction at 1.62THz (centre frequency)
The suction wave frequency band that wave rate is 95.3%, when ambient temperature rises to room temperature, i.e. T=300K, what which generated
The centre frequency for inhaling wave frequency band moves to 2.07THz, and corresponding suction wave rate is 96.5%, and when environment temperature continues to rise to T=
When 400K, the centre frequency for inhaling wave frequency band continues to move at 2.44THz, corresponding suction wave rate is to high frequency direction movement
98.4%.When environment temperature is increased to 400K from 200K, the real part of the dielectric constant of SrTiO3 dielectric layer is gradually reduced, thus
The centre frequency for causing Meta Materials wave absorbing device to inhale wave frequency band moves to from 2.44THz from 1.62THz, and the frequency shift (FS) for inhaling wave frequency band reaches
820GHz is arrived.Environment temperature from 200K be increased to 400K and Meta Materials wave absorbing device inhale the centre frequency of wave frequency band from
During 1.62THz moves to 2.44THz, the loss angle tangent of middle dielectric layer 2 is gradually increased, thus causes to inhale in wave frequency band
Corresponding suction wave rate rises to 98.4% from 95.3% at frequency of heart.Therefore, the suction wave frequency rate of the Meta Materials wave absorbing device with
The real part of the dielectric constant of SrTiO3 dielectric layer inversely, and its corresponding suction intensity of wave and dielectric layer loss angle tangent at
Direct ratio can inhale wave frequency rate to the microwave absorbing property of Meta Materials wave absorbing device and inhale wave in this way by changing the temperature of external environment
Intensity is effectively tuned.
In conclusion compared to existing wave absorbing device, the Meta Materials wave absorbing device based on strontium titanates dielectric layer of the present embodiment
It has the advantage that
1, the Meta Materials wave absorbing device of the invention based on strontium titanates dielectric layer, in-between 2 material therefor of dielectric layer it is opposite
Dielectric constant and dielectric loss angle tangent have tunning effect to the suction wave frequency rate and suction intensity of wave of Meta Materials wave absorbing device, because
This may be implemented to inhale wave frequency rate or suction intensity of wave is actively adjustable, and then further opens up the application field of Meta Materials wave absorbing device, makes
It can preferably adapt to answering under a variety of different conditions such as THz imaging, THz detection, biological detection, stealthy and solar battery
With.The present invention is by SrTiO3Middle dielectric layer 2 of the material as Meta Materials wave absorbing device, can by change ambient temperature when
The active tuning for realizing frequency, realizes effective control to incident electromagnetic wave in Terahertz frequency range, promote Terahertz science with
The development and application of technology.
2, when environment temperature is increased to 400K from 200K, the real part of the dielectric constant of middle dielectric layer 2 is gradually reduced, and is made
The centre frequency for obtaining the suction wave frequency band of Meta Materials wave absorbing device moves to from 2.44THz from 1.62THz, and the frequency shift (FS) for inhaling wave frequency band reaches
820GHz is arrived, to can actively regulate the suction wave frequency rate of wave absorbing device by adjusting temperature.When environment temperature is increased from 200K
When to 400K, the loss angle tangent of middle dielectric layer 2 is gradually increased, thus causes to inhale corresponding suction wave at wave frequency mid-band frequency
Rate rises to 98.4% from 95.3%, to pass through the suction intensity of wave for adjusting the adjustable wave absorbing device of temperature.
3, for SrTiO3For material, environment temperature is higher, and the real part of corresponding dielectric constant is smaller, and medium damages
It is bigger to consume angle tangent.The real part of the dielectric constant of the suction wave frequency rate and middle dielectric layer 2 of Meta Materials wave absorbing device inversely, and
Its corresponding suction intensity of wave is directly proportional to dielectric layer loss angle tangent, can be to Meta Materials by changing the temperature of external environment
The microwave absorbing property of wave absorbing device, which inhales wave frequency rate and inhales intensity of wave, effectively to be tuned.
Embodiment 2
A kind of Meta Materials wave absorbing device based on strontium titanates dielectric layer is present embodiments provided, on the basis of embodiment 1
Increase temperature conditioning unit.Temperature conditioning unit is used to adjust the temperature of middle dielectric layer 2, specially heats up to middle dielectric layer 2
And cooling.In this way, temperature control list can be passed through when the suction wave frequency band or suction intensity of wave for needing to adjust wave absorbing device in practical application
Member adjusts temperature locating for middle dielectric layer 2, makes SrTiO3The environment temperature of material changes, to change the suction of wave absorbing device
Wave frequency band inhales intensity of wave.Thus, when the wave absorbing device of other devices or equipment the present embodiment, the equipment or equipment only need to control
Temperature conditioning unit processed can realize that wave absorbing device inhales wave frequency band or inhales the automation adjusting of intensity of wave, convenient and efficient.
Embodiment 3
The manufacturing method for present embodiments providing a kind of Meta Materials wave absorbing device based on strontium titanates dielectric layer, is used to manufacture
The Meta Materials wave absorbing device based on strontium titanates dielectric layer in embodiment 1 or embodiment 2, manufacturing method the following steps are included:
1, according to the shape of fabric 1, cutting depth is not less than fabric 1, middle dielectric layer 2 on base material
And the locating slot of the sum of thickness of top layer resonance structure 3；
2, since the bottom of locating slot, at least one layer of metallic film is plated, and after metallic film sizing, to locating slot
Inside pour into the SrTiO being in a liquid state3Material, to form solid middle dielectric layer 2；
3, mark the multiple localization regions being arranged in array on middle dielectric layer 2, multiple localization regions respectively with it is multiple
Metal resonance structure 5 is corresponding；
4, first successively multiple metal resonance structures 5 are fixed on corresponding multiple localization regions, then to fabric 1,
Middle dielectric layer 2 and top layer resonance structure 3 carry out aging process.
Embodiment 4
Present embodiments provide a kind of suction wave patch comprising patch and be uniformly arranged on multiple on the same face of patch
Inhale wave part.Patch can be used flexible material and be made, and in order to be pasted onto various structures, and inhale wave part using in embodiment 1
Meta Materials wave absorbing device based on strontium titanates dielectric layer.Wherein, fabric 1 is fixed on patch.What needs to be explained here is that this
This suction wave patch that embodiment provides can be used as the product of an entirety and be applied, and can be attached to various devices or equipment
Surface or inside can be attached on the various military equipments of military field with electromagnetic wave absorption, can be also attached in electronic product,
To prevent electromagnetic interference.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Made any modifications, equivalent replacements, and improvements etc., should all be included in the protection scope of the present invention within mind and principle.
Claims (10)
1. a kind of Meta Materials wave absorbing device based on strontium titanates dielectric layer comprising:
Fabric (1) comprising at least one layer of metallic film；
Middle dielectric layer (2) is fixed on fabric (1)；Be connected with fabric (1) two of middle dielectric layer (2)
End face is overlapped；And
Top layer resonance structure (3) is fixed on middle dielectric layer (2)；
It is characterized in that, top layer resonance structure (3) includes the multiple metal resonance structures (5) being arranged in array；Multiple metals are humorous
Vibration structure (5) is each attached on the same end face of middle dielectric layer (2) separate fabric (1), each metal resonance structure (5)
In cross；
The metallic film and metal resonance structure (5) are made by copper, and middle dielectric layer (2) is by SrTiO3Material is made.
2. as described in claim 1 based on the Meta Materials wave absorbing device of strontium titanates dielectric layer, which is characterized in that fabric (1)
It is in rectangle with middle dielectric layer (2), the thickness of middle dielectric layer (2) is greater than the thickness of fabric (1).
3. as claimed in claim 2 based on the Meta Materials wave absorbing device of strontium titanates dielectric layer, which is characterized in that multiple metal resonance
Structure (5) equidistantly distributed, the opposite end of each metal resonance structure (5) along middle dielectric layer (2) length direction or
Width direction setting.
4. as described in claim 1 based on the Meta Materials wave absorbing device of strontium titanates dielectric layer, which is characterized in that each metal resonance
Four ends of structure (5) are all the same, and are located on the same circumference one.
5. as claimed in claim 4 based on the Meta Materials wave absorbing device of strontium titanates dielectric layer, which is characterized in that each metal resonance
The distance between structure (5) opposite end is 50um, and the width of each metal resonance structure (5) end is 10um.
6. as claimed in claim 5 based on the Meta Materials wave absorbing device of strontium titanates dielectric layer, which is characterized in that fabric (1)
With a thickness of 0.3um, middle dielectric layer (2) with a thickness of 2um, metal resonance structure (5) with a thickness of 0.3um.
7. as described in claim 1 based on the Meta Materials wave absorbing device of strontium titanates dielectric layer, which is characterized in that multiple metal resonance
Structure (5) is arranged in square matrices, and the distance between two adjacent metal resonance structures (5) are 65um.
8. as described in claim 1 based on the Meta Materials wave absorbing device of strontium titanates dielectric layer, which is characterized in that the Terahertz is super
Material wave absorbing device further include:
Temperature conditioning unit is used to adjust the temperature of middle dielectric layer (2).
9. as described in claim 1 based on the Meta Materials wave absorbing device of strontium titanates dielectric layer, which is characterized in that the Terahertz is super
Material wave absorbing device be applied to concealed device, terahertz imaging device, terahertz detection device, electromagnetic wave detection and regulation device with
And in one or more devices of solar battery.
10. a kind of manufacturing method of the Meta Materials wave absorbing device based on strontium titanates dielectric layer, is used to manufacture as in claim 1-9
Based on the Meta Materials wave absorbing device of strontium titanates dielectric layer described in any one, which is characterized in that itself the following steps are included:
According to the shape of fabric (1), cutting depth is not less than fabric (1), middle dielectric layer (2) on base material
And the locating slot of the sum of thickness of top layer resonance structure (3)；
Since the bottom of the locating slot, at least one layer of metallic film is plated, and after metallic film sizing, to the positioning
The SrTiO being in a liquid state is poured into slot3Material, to form solid middle dielectric layer (2)；
Mark the multiple localization regions being arranged in array on middle dielectric layer (2), multiple localization regions respectively with multiple metals
Resonance structure (5) is corresponding；
First successively multiple metal resonance structures (5) are fixed on corresponding multiple localization regions, then to fabric (1), in
Between dielectric layer (2) and top layer resonance structure (3) carry out aging process.
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| CN112886261A (en) * | 2021-01-12 | 2021-06-01 | 之江实验室 | Adjustable multi-angle terahertz wave beam splitter and method thereof |
| CN113809547A (en) * | 2021-10-12 | 2021-12-17 | 西安电子科技大学芜湖研究院 | Frequency-adjustable super-surface wave absorber based on shape memory material |
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| CN115536400A (en) * | 2022-09-09 | 2022-12-30 | 汕头大学 | Ceramic wave-absorbing material and preparation method and application thereof |
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