CN208986176U - Antenna packages structure - Google Patents

Antenna packages structure Download PDF

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Publication number
CN208986176U
CN208986176U CN201822019599.XU CN201822019599U CN208986176U CN 208986176 U CN208986176 U CN 208986176U CN 201822019599 U CN201822019599 U CN 201822019599U CN 208986176 U CN208986176 U CN 208986176U
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feed line
antenna
metal
wire netting
layer
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CN201822019599.XU
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Chinese (zh)
Inventor
陈彦亨
林正忠
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SJ Semiconductor Jiangyin Corp
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SJ Semiconductor Jiangyin Corp
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Abstract

The utility model provides a kind of antenna packages structure, and the antenna packages structure is in formation feed line and feed line wire netting on re-wiring layer;Feed line is electrically connected with re-wiring layer, and feed line includes at least two;Feed line wire netting is between any two feed line;Encapsulated layer covers feed line and feed line wire netting, and the top surface of encapsulated layer appears feed line and feed line wire netting;Metal antenna is located on encapsulated layer, and metal antenna is electrically connected with feed line;Metal antenna fence is located on encapsulated layer, and metal antenna fence is in contact with feed line wire netting, and metal antenna fence is between any two metal antenna.The utility model effectively obstructs antenna under the premise of not increasing the area of antenna packages, increases the isolation of antenna;And the antenna packages with stacked antenna structure for stacking setting can be formed, there is high efficiency and high conformability.

Description

Antenna packages structure
Technical field
The utility model belongs to technical field of semiconductor encapsulation, is related to a kind of antenna packages structure.
Background technique
With the increase of universal and people's demand of high-tech electronic product, especially for the mobile demand of cooperation, Most high-tech electronic product both increases the function of wireless telecommunications.It is interfered with each other however, can exist between antenna and antenna Phenomenon, therefore must have isolation between antenna and antenna.The isolation of antenna refers to an antenna transmitting signal, by another The isolation of the ratio of a antenna received signal and the transmitting antenna signal, antenna depends on radiation pattern, antenna Space length, antenna gain.In order to reduce the interference between antenna to the greatest extent, in the braking measure taken, usual way is just It is to increase space isolation, to increase the distance in space.
Antenna packages (AiP) are that antenna and integrated chip are realized system-level nothing in encapsulation based on encapsulating material and technique A special kind of skill of line function.AiP technology has complied with the trend of silicon-based semiconductor process integration raising, is system-level wireless chip Provide good antenna solutions, thus the deep favor by vast chip and encapsulation manufacturer.For AiP, currently in order to The interference between antenna and antenna is avoided, the inhibition jamming countermeasure generallyd use is solved by increasing the spacing of antenna, but It will increase the area of antenna packages using this method, also electronic product can be made to occupy biggish area accordingly, this and people The electronic product of the miniaturization, portable pursued is disagreed.
In consideration of it, a kind of novel antenna packages structure is provided, under the premise of not increasing the area of antenna packages, to The isolation for increasing antenna is necessary.
Utility model content
In view of the foregoing deficiencies of prior art, the purpose of this utility model is to provide a kind of antenna packages structure, For increasing the isolation of antenna under the premise of not increasing the area of antenna packages.
In order to achieve the above objects and other related objects, the utility model provides a kind of antenna packages structure, the antenna Encapsulating structure includes:
Re-wiring layer;
Feed line, the feed line are located on the re-wiring layer, and the feed line is electrically connected with the re-wiring layer It connects;The feed line includes at least two;
Feed line wire netting, the feed line wire netting are located on the re-wiring layer, and feed line gold Belong to fence to be located between feed line described in any two;
Encapsulated layer, the encapsulated layer cover the feed line and the feed line wire netting, and the top of the encapsulated layer Face appears the feed line and the feed line wire netting;
Metal antenna, the metal antenna are located on the encapsulated layer, and the metal antenna is electrically connected with the feed line;
Metal antenna fence, the metal antenna fence are located on the encapsulated layer, the metal antenna fence with it is described Feed line wire netting is in contact, and the metal antenna fence is located between metal antenna described in any two.
Optionally, the feed line wire netting includes one of metal wire and metal frame or combination.
Optionally, the plan view shape of the metal antenna fence includes annular.
It optionally, include the N layer antenna structure of stacking, wherein N >=2 on the re-wiring layer.
Optionally, the feed line wire netting includes one of gold thread, silver wire, copper wire and aluminum steel or combination;It is described Feed line includes one of gold thread, silver wire, copper wire and aluminum steel or combination.
Optionally, the range of the line footpath of the feed line includes 1mil~10mil.
Optionally, the range of the height of the feed line includes 25 μm~1500 μm.
Optionally, the encapsulated layer includes one of polyimide layer, layer of silica gel and epoxy resin layer or combination.
As described above, the antenna packages structure of the utility model passes through under the premise of not increasing the area of antenna packages Feed line wire netting between any two feed line and the metal antenna grid between any two metal antenna Column effectively obstructs antenna, increases the isolation of antenna;And the antenna envelope with stacked antenna structure for stacking setting can be formed Dress has high efficiency and high conformability.
Detailed description of the invention
Fig. 1 is shown as the flow diagram of the antenna packages method in the utility model.
Fig. 2 is shown as the overlooking structure diagram of the antenna packages structure in embodiment one.
The structural schematic diagram that each step of antenna packages method that Fig. 3~Fig. 8 is shown as in embodiment one is presented, wherein Fig. 8 is also illustrated as the schematic diagram of the section structure in Fig. 2 along A-A '.
Fig. 9 is shown as the schematic diagram of the section structure in Fig. 2 along B-B '.
Figure 10 is shown as the overlooking structure diagram of the antenna packages structure in embodiment two.
The structural schematic diagram that each step of antenna packages method that Figure 11~Figure 16 is shown as in embodiment two is presented, In, Figure 16 is also illustrated as the schematic diagram of the section structure in Figure 10 along C-C '.
Figure 17 is shown as the schematic diagram of the section structure in Figure 10 along D-D '.
Component label instructions
101,201 support substrate
102,202 separating layer
103,203 re-wiring layer
113,213 dielectric layer
123,223 metal wiring layer
114,214,134 metal link block
124,224 feed line
234 adhesives
144,244 feed line wire netting
154,254 encapsulated layer
164,264 metal antenna
174,274 metal antenna fence
Specific embodiment
It is existing, in order to reduce the interference between antenna, also has to use and add metal isolation net between antenna and antenna The mode shielded.The utility model uses the principle of metal isolation, and metal isolation is introduced into antenna packages technique, Under the premise of the area for not increasing antenna packages, to increase the isolation of antenna.
Illustrate the embodiments of the present invention below by way of specific specific example, those skilled in the art can be by this theory Content disclosed by bright book understands other advantages and effect of the utility model easily.The utility model can also be by addition Different specific embodiments are embodied or practiced, and the various details in this specification can also be based on different viewpoints and answer With carrying out various modifications or alterations under the spirit without departing from the utility model.
Please refer to Fig. 1~Figure 17.It should be noted that diagram provided in the present embodiment only illustrates this in a schematic way The basic conception of utility model is only shown with related component in the utility model rather than when according to actual implementation in schema then Component count, shape and size are drawn, when actual implementation kenel, quantity and the ratio of each component can arbitrarily change for one kind Become, and its assembly layout kenel may also be increasingly complex.
Embodiment one
Such as Fig. 1, the present embodiment provides a kind of antenna packages methods, under the premise of not increasing the area of antenna packages, lead to Cross the feed line wire netting between any two feed line and the metal antenna between any two metal antenna Fence effectively obstructs antenna, increases the isolation of antenna.
Such as Fig. 2, it is shown as the overlooking structure diagram of the antenna packages structure in the present embodiment, the antenna packages structure In include 4 metal antennas 164 and the metal antenna fence 174 between the metal antenna 164, in another embodiment In, the number of the metal antenna 164 can also be 2,3 etc., herein with no restriction.
In the present embodiment, the feed line wire netting 144 uses metal wire, forms the shape being intervally arranged, to surround Feed line 124, the specific number of the feed line wire netting 144, herein with no restriction.In another embodiment, the feedback The surrounded shape of wire metal fence 144 may also include the annular of closure, and the annular includes circular rings, Q-RING, three square rings Deng herein with no restriction.In the present embodiment, the plan view shape of the metal antenna fence 174 includes annular, i.e., using closure Annular, to surround the metal antenna 164, the annular includes circular rings, Q-RING, three square rings etc., herein with no restriction.? In another embodiment, the shape being intervally arranged is can also be used in the metal antenna fence 174, herein with no restriction.To pass through The feed line wire netting 144 and the metal antenna fence 174 have under the premise of not increasing the area of antenna packages The barrier antenna of effect, increases the isolation of antenna.
Specifically, illustrating the structural representation that each step of antenna packages method is presented in the present embodiment such as Fig. 3~Fig. 8 Figure.
Such as Fig. 3, support substrate 101 is provided first, forms separating layer 102 in Yu Suoshu support substrate 101.
Specifically, the support substrate 101 includes substrate of glass, metallic substrates, semiconductor base, polymeric substrates and pottery One of porcelain substrate, the separating layer 102 include LTHC photothermal transformation layer.The support substrate 101 is preferably substrate of glass, The separating layer 102 is preferably LTHC photothermal transformation layer.Cost is relatively low for the substrate of glass, and is easy to be formed on its surface described LTHC photothermal transformation layer, and the difficulty of the separating technology of the subsequent LTHC photothermal transformation layer can be reduced, as being based on laser to institute It states LTHC photothermal transformation layer to be heated, so that being separated from the LTHC photothermal transformation layer.
Such as Fig. 4, re-wiring layer 103 is formed in Yu Suoshu separating layer 102, the re-wiring layer 103 includes dielectric layer 113 and metal wiring layer 123.
Specifically, the material of the dielectric layer 113 includes epoxy resin, silica gel, PI, PBO, BCB, silica, phosphorus silicon glass The combination of one or more of glass and fluorine-containing glass;The material of the metal wiring layer 123 includes copper, aluminium, nickel, gold, silver And one or more of titanium combination.The re-wiring layer 103 is made the following steps are included: using physical vapour deposition (PVD) Technique or chemical vapor deposition process form the dielectric layer 113 in 102 surface of separating layer, and to the dielectric layer 113 It performs etching to form the patterned dielectric layer 113;Using physical gas-phase deposition, chemical vapor deposition process, vapor deposition Technique, sputtering technology, electroplating technology or chemical plating process form the metal in patterned 113 surface of dielectric layer Wiring layer 123, and the metal wiring layer 123 is performed etching to form the patterned metal wiring layer 123.The medium The material of layer 113 and the metal wiring layer 123, the number of plies and distribution pattern, are selected according to specific needs, are not made herein Limitation.
Such as Fig. 5~Fig. 7, antenna structure is formed on Yu Suoshu re-wiring layer 103, the antenna structure includes the feed Line 124, the feed line wire netting 144, encapsulated layer 154, the metal antenna 164 and the metal antenna fence 174.
Such as Fig. 5, form the feed line 124 on Yu Suoshu re-wiring layer 103, the feed line 124 with it is described again Wiring layer 103 is electrically connected;The feed line 124 includes at least two;And it is golden in forming feed line on the re-wiring layer 103 Belong to fence 144, the feed line wire netting 144 is located between feed line 124 described in any two.
It is connected specifically, the bottom of the feed line 124 may also include cross-sectional area greater than the metal of the feed line 124 Block 114 is electrically stablized to increase the contact area between the feed line 124 and the metal wiring layer 123 with improving Property;The bottom of the feed line wire netting 144 may also include the metal that cross-sectional area is greater than the feed line wire netting 144 Link block 134, to increase the contact area between the feed line wire netting 144 and the metal wiring layer 123, to mention High connective stability.
As the further embodiment of the embodiment, the feed line 124 includes in gold thread, silver wire, copper wire and aluminum steel A kind of or combination;The further feed line 124 may also include one of principal column, silver-colored column, copper post and aluminium column or combination.
Specifically, copper wire can be used in the feed line 124, by bonding wire craft, such as hot pressing bonding wire craft, ultrasonic wire welding One of technique and thermosonic bonding wire craft or combination preparation, the method for forming the feed line 124 may also include electricity One of plating, chemical plating and Reflow Soldering or combination.The type and preparation method of the feed line 124 can be selected as needed It selects, herein with no restriction.
As the further embodiment of the embodiment, the range of the line footpath of the feed line 124 includes 1mil~10mil, Such as 2mil, 6mil;The range of the height of the feed line 124 includes 25 μm~1500 μm, and such as 100 μm, 500 μm, 1000 μm Deng being selected according to specific needs, herein with no restriction.
As the further embodiment of the embodiment, the feed line wire netting 144 uses phase with the feed line 124 Same material;The step of forming feed line wire netting 144 include it is synchronous with the feed line 124, forming the feedback Before electric wire 124 and one of after forming the feed line 124.
Specifically, the feed line wire netting 144 can also be used including one of gold thread, silver wire, copper wire and aluminum steel Or combination;Or including one of principal column, silver-colored column, copper post and aluminium column or combination.In the present embodiment, the feed line wire netting 144 use identical material using metal wire and the feed line wire netting 144 and the feed line 124, so as to simplification Process complexity completes the production of the feed line wire netting 144, the feed while preparing feed line 124 The difference of line wire netting 144 and the feed line 124 is that the feed line wire netting 144 is used as isolated material, It is not used to the transmission of signal.Certain feed line wire netting 144 can also select other materials as needed, not make herein Limitation.The method for forming the feed line wire netting 144 includes one of bonding wire, plating, chemical plating and Reflow Soldering or group It closes, specifically with the feed line 124, details are not described herein again.
Such as Fig. 6, the feed line 124 and the feed line wire netting 144, and the envelope are covered using encapsulated layer 154 The top surface of dress layer 154 appears the feed line 124 and the feed line wire netting 144.
As the further embodiment of the embodiment, the material of the encapsulated layer 154 includes polyimides, silica gel and epoxy One of resin or combination.
Specifically, the method for forming the encapsulated layer 154 includes compression forming, Transfer molding, fluid-tight molding, vacuum One of lamination and spin coating.After forming the encapsulated layer 154, the method that grinding or polishing can be used acts on the envelope The upper surface of layer 154 is filled, to provide the smooth encapsulated layer 154, improves product quality.
Such as Fig. 7,154 surface of Yu Suoshu encapsulated layer forms metal antenna 164, the metal antenna 164 and the feed line 124 electrical connections;Metal antenna fence 174, the metal antenna fence 174 and the feedback are formed in 154 surface of encapsulated layer Wire metal fence 144 is in contact, and the metal antenna fence 174 is located between metal antenna 164 described in any two, from And formed include the feed line 124, the feed line wire netting 144, the encapsulated layer 154, the metal antenna 164 and The antenna structure of the metal antenna fence 174.
As the further embodiment of the embodiment, the metal antenna fence 174 uses phase with the metal antenna 164 Same material;The step of forming metal antenna fence 174 include it is synchronous with the metal antenna 164, forming the gold Before belonging to antenna 164 and one of after forming the metal antenna 164.
Specifically, the method for forming the metal antenna 164 includes physical gas-phase deposition, chemical vapor deposition work One of skill, evaporation process, sputtering technology, electroplating technology or chemical plating process.Form the side of the metal antenna fence 174 Method is the same as the metal antenna 164.In the present embodiment, the metal antenna fence 174 is with the metal antenna 164 using identical Material completes the metal antenna fence 174 while preparing metal antenna 164 so as to simplify process complexity Production, the metal antenna fence 174 is used as 164 isolated material of metal antenna, is not used to the transmission of signal.Certainly The metal antenna fence 174 can also select other materials as needed, herein with no restriction.In the present embodiment, the metal Antenna fence 174 is connected with each other, and closed annular is formed, to surround the metal antenna 164, in another embodiment, the gold Belonging to antenna fence 174 can also be intervally arranged, to surround the metal antenna 164, herein with no restriction.
It may include the N layer antenna of stacking as the further embodiment of the embodiment, on the re-wiring layer 103 Structure, wherein N >=2, to further increase the integrated level and integration performance of the antenna packages structure, the N is desirable such as 3,4,5 Deng herein with no restriction.
Such as Fig. 8, the separating layer 102 and the support substrate 101 are removed, antenna packages structure edge described in Fig. 2 is formed The schematic diagram of the section structure of A-A '.Specifically, can be heated based on laser to the LTHC photothermal transformation layer, described in separation Re-wiring layer 103 and the LTHC photothermal transformation layer.Further to show the antenna packages structure, also shown in Fig. 9 The schematic diagram of the section structure of the antenna packages structure in Fig. 2 along B-B '.
Embodiment two
Such as Figure 10, it is shown as the overlooking structure diagram of the antenna packages structure in embodiment two, the antenna packages knot It include 4 metal antennas 264 and the metal antenna fence 274 between the metal antenna 264 in structure, in another embodiment In, the number of the metal antenna 264 can also be 2,3 etc., herein with no restriction.
The present embodiment only difference is that with embodiment one: the feed line wire netting 244 uses metal frame, and makes The step of standby feed line wire netting 244, is different with embodiment one, further to expand the antenna packages structure Using.
In the present embodiment, the feed line wire netting 244 forms the annular of closure, to surround feed line 224, the ring Shape includes circular rings, Q-RING, three square rings etc., herein with no restriction, in another embodiment, the feed line wire netting 244 shapes surrounded may also include the shape being intervally arranged, herein with no restriction.The metal antenna fence 274 is used and is closed The annular of conjunction is to surround the metal antenna 264, and in another embodiment, the metal antenna fence 274 can also form interval The shape of arrangement, to surround the metal antenna 264, herein with no restriction.To by the feed line wire netting 244 and The metal antenna fence 274 effectively obstructs antenna under the premise of not increasing the area of antenna packages, increases antenna Isolation.
Specifically, as Figure 16 is shown as the schematic diagram of the section structure in Figure 10 along C-C ';Figure 17 is shown as in Figure 10 along D- The schematic diagram of the section structure of D '.The antenna packages structure includes:
Re-wiring layer 203;
Feed line 224, the feed line 224 are located on the re-wiring layer 203, the feed line 224 with it is described heavy New route layer 203 is electrically connected;The feed line 224 includes at least two;
Feed line wire netting 244, the feed line wire netting 244 are located on the re-wiring layer 203, and described Feed line wire netting 244 is located between feed line 224 described in any two;
Encapsulated layer 254, the encapsulated layer 254 cover the feed line 224 and the feed line wire netting 244, and institute The top surface for stating encapsulated layer 254 appears the feed line 224 and the feed line wire netting 244;
Metal antenna 264, the metal antenna 264 are located on the encapsulated layer 254, the metal antenna 264 with it is described Feed line 224 is electrically connected;
Metal antenna fence 274, the metal antenna fence 274 are located on the encapsulated layer 254, the metal antenna grid Column 274 is in contact with the feed line wire netting 244, and the metal antenna fence 274 is located at metal described in any two Between antenna 264.
Such as Figure 11~Figure 16, the structural schematic diagram that each step of antenna packages method is presented in the present embodiment is illustrated.
Specifically, the material of the metal frame can be selected in golden metal frame, silver metal frame, copper metal frame and aluminum metal frame A kind of or combination, the step of forming the metal frame, is included in form the feed line 224 before and forming the feed line One of after 224.The step of preferably forming the metal frame is after forming the feed line 224, to avoid in shape When at the metal frame, the re-wiring layer 203 is polluted, so as to enhance product performance.Form the metal frame Method include Reflow Soldering, the Reflow Soldering include on the re-wiring layer 203 formation adhesive 234, described adhesive 234 include one of tin solder, silver solder and gold-tin eutectic solder or combination.The plan view shape that the metal frame is formed includes Annular, to surround the feed line 224, in another embodiment, the feed line 224 can also form the shape being intervally arranged, To surround the feed line 224, herein with no restriction.
As the further embodiment of the embodiment, the feed line wire netting 244 may also include the metal wire and The combination of the metal frame.
Specifically, the feed line wire netting 244 can be used in the metal wire and the present embodiment in embodiment one The metal frame combination, details are not described herein again for the selection of specific material.The method of preparation, which can be used, prepares the metal wire Prior to the metal frame, to improve the connective stability of the metal wire Yu the re-wiring layer 203.
In conclusion the antenna packages structure of the utility model passes through under the premise of not increasing the area of antenna packages Feed line wire netting between any two feed line and the metal antenna grid between any two metal antenna Column effectively obstructs antenna, increases the isolation of antenna;And the antenna envelope with stacked antenna structure for stacking setting can be formed Dress has high efficiency and high conformability.So the utility model effectively overcomes various shortcoming in the prior art and has height Value of industrial utilization.
The above embodiments are only illustrative of the principle and efficacy of the utility model, and not for limitation, this is practical new Type.Any person skilled in the art can all carry out above-described embodiment under the spirit and scope without prejudice to the utility model Modifications and changes.Therefore, such as those of ordinary skill in the art without departing from the revealed essence of the utility model All equivalent modifications or change completed under mind and technical idea, should be covered by the claim of the utility model.

Claims (8)

1. a kind of antenna packages structure, which is characterized in that the antenna packages structure includes:
Re-wiring layer;
Feed line, the feed line are located on the re-wiring layer, and the feed line is electrically connected with the re-wiring layer;Institute Feed line is stated including at least two;
Feed line wire netting, the feed line wire netting is located on the re-wiring layer, and the feed line metal gate Field is between the feed line described in any two;
Encapsulated layer, the encapsulated layer covers the feed line and the feed line wire netting, and the top surface of the encapsulated layer is aobvious Reveal the feed line and the feed line wire netting;
Metal antenna, the metal antenna are located on the encapsulated layer, and the metal antenna is electrically connected with the feed line;
Metal antenna fence, the metal antenna fence are located on the encapsulated layer, the metal antenna fence and the feed Line wire netting is in contact, and the metal antenna fence is located between metal antenna described in any two.
2. antenna packages structure according to claim 1, it is characterised in that: the feed line wire netting includes metal wire And one of metal frame or combination.
3. antenna packages structure according to claim 1, it is characterised in that: the plan view shape packet of the metal antenna fence Include annular.
4. antenna packages structure according to claim 1, it is characterised in that: include the N of stacking on the re-wiring layer Layer antenna structure, wherein N >=2.
5. antenna packages structure according to claim 1, it is characterised in that: the feed line wire netting include gold thread, One of silver wire, copper wire and aluminum steel or combination;The feed line includes one of gold thread, silver wire, copper wire and aluminum steel or group It closes.
6. antenna packages structure according to claim 1, it is characterised in that: the range of the line footpath of the feed line includes 1mil~10mil.
7. antenna packages structure according to claim 1, it is characterised in that: the range of the height of the feed line includes 25 μm~1500 μm.
8. antenna packages structure according to claim 1, it is characterised in that: the encapsulated layer includes polyimide layer, silicon One of glue-line and epoxy resin layer or combination.
CN201822019599.XU 2018-12-03 2018-12-03 Antenna packages structure Active CN208986176U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110544825A (en) * 2019-08-02 2019-12-06 上海阿莱德实业股份有限公司 integrated antenna and production process thereof
CN111261999A (en) * 2018-12-03 2020-06-09 中芯长电半导体(江阴)有限公司 Antenna packaging structure and packaging method
CN111276800A (en) * 2020-02-04 2020-06-12 Oppo广东移动通信有限公司 Dual-frequency millimeter wave antenna module and electronic equipment

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111261999A (en) * 2018-12-03 2020-06-09 中芯长电半导体(江阴)有限公司 Antenna packaging structure and packaging method
CN111261999B (en) * 2018-12-03 2024-02-23 盛合晶微半导体(江阴)有限公司 Antenna packaging structure and packaging method
CN110544825A (en) * 2019-08-02 2019-12-06 上海阿莱德实业股份有限公司 integrated antenna and production process thereof
CN111276800A (en) * 2020-02-04 2020-06-12 Oppo广东移动通信有限公司 Dual-frequency millimeter wave antenna module and electronic equipment
CN111276800B (en) * 2020-02-04 2021-10-22 Oppo广东移动通信有限公司 Dual-frequency millimeter wave antenna module and electronic equipment

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Address after: No.78 Changshan Avenue, Jiangyin City, Wuxi City, Jiangsu Province (place of business: No.9 Dongsheng West Road, Jiangyin City)

Patentee after: Shenghejing micro semiconductor (Jiangyin) Co.,Ltd.

Address before: No.78 Changshan Avenue, Jiangyin City, Wuxi City, Jiangsu Province

Patentee before: SJ Semiconductor (Jiangyin) Corp.