CN208767269U - A kind of silicon wafer transport device - Google Patents
A kind of silicon wafer transport device Download PDFInfo
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- CN208767269U CN208767269U CN201821205104.6U CN201821205104U CN208767269U CN 208767269 U CN208767269 U CN 208767269U CN 201821205104 U CN201821205104 U CN 201821205104U CN 208767269 U CN208767269 U CN 208767269U
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- silicon wafer
- transport device
- limit mechanism
- air blowing
- blowing component
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 128
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 128
- 239000010703 silicon Substances 0.000 title claims abstract description 128
- 238000007664 blowing Methods 0.000 claims abstract description 31
- 238000001514 detection method Methods 0.000 claims abstract description 11
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 238000005516 engineering process Methods 0.000 abstract description 2
- 235000012431 wafers Nutrition 0.000 description 101
- 230000032258 transport Effects 0.000 description 30
- 238000000034 method Methods 0.000 description 8
- 230000005540 biological transmission Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 230000002045 lasting effect Effects 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model relates to a kind of silicon wafer transport devices, belong to solar cell manufacturing technology field, which includes Transport Desk, for silicon wafer to be delivered in position-limit mechanism；Air blowing component, the corresponding position-limit mechanism, can blow afloat the silicon wafer reached in the position-limit mechanism；Detection components are able to detect the position of silicon wafer on the Transport Desk；And controller, the air blowing component and detection components are connected, and the air blowing component start and stop can be controlled.Silicon wafer can be sent into position-limit mechanism by the Transport Desk in the utility model, air blowing component blows afloat the silicon wafer being located in position-limit mechanism, and it is suspended in position-limit mechanism, at this point, having gap between the lower section and position-limit mechanism of silicon wafer, so that another silicon wafer is inserted into gap, it realizes and is inserted into two panels or multi-disc silicon wafer in position-limit mechanism, production efficiency is improved, meanwhile, save manpower.
Description
Technical field
The utility model relates to solar cell manufacturing technology field more particularly to a kind of silicon wafer transport devices.
Background technique
In the processing of silicon wafer, in order to meet different application demands, often need to silicon wafer carrying out various chemistry
Processing, with popularizing for automated production, silicon wafer can generally be transported to each processing stations by assembly line, and in order to improve life
Efficiency is produced, some processing workshop sections, which need a silicon wafer being put into another silicon wafer bottom, to be stacked, so as to following process, transport
Or storage.In the prior art, the stacking of silicon wafer generally by manpower realize, it is not only time-consuming and laborious, stack low efficiency, be unfavorable for producing
It is industry, at high cost, and be easy to lead to wafer contamination or breakage because of misoperation.Therefore, a kind of novel silicon wafer biography is needed
Defeated device solves the above problems.
Utility model content
The purpose of this utility model is that propose a kind of silicon wafer transport device, it can be easily in silicon wafer storage device interpolation
Enter two panels or multi-disc silicon wafer, improves the efficiency of loading of silicon wafer.
For this purpose, the utility model uses following technical scheme:
A kind of silicon wafer transport device, comprising:
Transport Desk, for silicon wafer to be delivered in position-limit mechanism；
Air blowing component, the corresponding position-limit mechanism, can blow afloat the silicon wafer reached in the position-limit mechanism；
Detection components are able to detect the position of silicon wafer on the Transport Desk；And
Controller connects the air blowing component and detection components, and can control the air blowing component start and stop.As preferred
Technical solution, air blowing component include multiple gas holes, and the detection components include sensor.
As optimal technical scheme, two sides that the gas hole is located at the sensor or the gas hole are along the biography
Sensor it is circumferentially distributed.
As optimal technical scheme, the sensor and the gas hole are set gradually along the transporting direction of the silicon wafer.
As optimal technical scheme, the air blowing component further includes air duct and the air blower that connect with the air duct, described
Air duct is connected to the gas hole.
As optimal technical scheme, solenoid valve is provided on the air duct.
As optimal technical scheme, the Transport Desk includes telescopic platform and body, and the telescopic platform can be relative to described
Body carries out linear expansion along silicon wafer transporting direction, and the transfer assembly for transmitting silicon wafer is provided on the telescopic platform.
As optimal technical scheme, the transfer assembly is located at the opposite two sides of the telescopic platform, the transfer assembly
Conveyer belt including driving wheel, driven wheel and the connection driving wheel and the driven wheel, the driving wheel and the driven wheel
The both ends of the telescopic platform are respectively arranged at, the driving wheel is connected with driving part.
As optimal technical scheme, the driving part is motor.
As optimal technical scheme, the two opposite Slideslips of the telescopic platform are provided with side plate, the gas hole setting
In on the upper surface of the side plate.
The utility model has the beneficial effects that silicon wafer can be sent into position-limit mechanism by the Transport Desk in the utility model, blow
Component blows afloat the previous silicon wafer being located in position-limit mechanism, and is suspended in position-limit mechanism, at this point, the bottom surface of the silicon wafer and limit
Between mechanism have gap, consequently facilitating latter silicon wafer insertion gap in, and then realize in position-limit mechanism be inserted into two panels or
The purpose of multi-disc silicon wafer, improves production efficiency, saves manpower.In addition, silicon wafer transport device provided by the utility model
Structure is simple, reduces production cost.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the silicon wafer transport device of embodiment one；
Fig. 2 is the schematic diagram of silicon wafer transporting apparatus transports silicon wafer provided by the utility model；
Fig. 3 is the structural schematic diagram for the silicon wafer transport device that embodiment two provides；
Fig. 4 is the structural schematic diagram for the silicon wafer transport device that embodiment three provides；
Fig. 5 is another structural schematic diagram for the silicon wafer transport device that embodiment three provides.
In figure:
10, body；20, the gaily decorated basket；201, card slot；30, silicon wafer；40, side plate；
1, telescopic platform；11, air blowing component；12, gas hole；13, transfer assembly；14, sensor；
111, air duct；112, air blower；
131, driving wheel；132, driven wheel；133, conveyer belt.
Specific embodiment
In order to enable those skilled in the art to better understand the technical solutions of the present invention, with reference to the accompanying drawing and pass through
Specific embodiment further illustrates the technical solution of the utility model.
Embodiment one
A kind of silicon wafer transport device is present embodiments provided, as depicted in figs. 1 and 2, which includes transport
Platform, air blowing component 11, detection components and controller.Wherein, Transport Desk is for silicon wafer 30 to be delivered in position-limit mechanism, air blowing group
The corresponding position-limit mechanism of part 11, can blow afloat the silicon wafer 30 reached in the position-limit mechanism, detection components include sensor
14, sensor 14 is used to detect the position of silicon wafer 30 on the Transport Desk, and controller connects the air blowing component 11 and detection group
Part, and 11 start and stop of air blowing component can be controlled.
Above-mentioned position-limit mechanism is set in the storage device of silicon wafer 30, and storage device can be that can carry silicon wafer 30
The gaily decorated basket 20, Carrier box or bearing box etc., storage device can be with vertical and or horizontal movements, to realize lasting storage；Position-limit mechanism
It can be set to include card slot 201 that the limited post being set on the gaily decorated basket 20 and the latch being set on limited post are formed；Limit
Position mechanism may be arranged as including being set to Carrier box/case side plate and the projection piece being set on side plate such as latch is formed
Card slot 201.Form of position-limit mechanism is not construed as limiting at this.The subsequent position-limit mechanism mentioned is in the present embodiment to be set to flower
For card slot 201 on the limited post of basket 20.
Specifically, Transport Desk includes telescopic platform 1 and body 10, which can transport relative to body 10 along silicon wafer 30
Defeated direction carries out linear expansion, and the present embodiment is not construed as limiting the stretch mode of telescopic platform 1.In the present embodiment, by silicon wafer 30 from
One end far from the gaily decorated basket 20 is transported to the transporting direction that the direction definition close to one end of the gaily decorated basket 20 is silicon wafer 30, referring in Fig. 1
Direction shown in arrow.
Above-mentioned telescopic platform 1 can extend into the gaily decorated basket 20 and silicon wafer 30 be transmitted in the card slot 201 of the gaily decorated basket 20.Specifically,
Transfer assembly 13 is provided in the present embodiment on telescopic platform 1, transfer assembly 13 is located at the opposite sides of telescopic platform 1, is used for silicon
Piece 30 is sent in the card slot 201 of the gaily decorated basket 20.In the present embodiment, the transfer assembly 13 includes driving wheel 131, driven wheel 132
And the conveyer belt 133 of the connection driving wheel 131 and the driven wheel 132,132 edge of the driving wheel 131 and the driven wheel
The transporting direction of silicon wafer or the setting of opposite direction interval and the both ends for being respectively arranged at the telescopic platform 1, wherein the driving wheel
131 are connected with driving part, and driving part drives conveyer belt 133 thereon by driving driving wheel 131 and driven wheel 132
Silicon wafer 30 is mobile, until silicon wafer 30 is transferred in card slot 201.Wherein, above-mentioned driving part is motor, and driving part and control
Device electrical connection processed, is acted to control transfer assembly 13 by controller.
Above-mentioned air blowing component 11 includes air duct 111 and the air blower 112 for being connected to 111 both ends of air duct and blows
Stomata 12, gas hole 12 are arranged through telescopic platform 1.The air-flow that air blower 112 generates is blown out by air duct 111 from gas hole 12.
Wherein, it being provided with solenoid valve on the air duct 111, solenoid valve is electrically connected with the controller, and controller is opened and closed by control solenoid valve,
To control the on-off in air duct 111, to realize the control for blowing afloat the time to silicon wafer 30.
The gas hole 12 be it is a plurality of, be provided with two rows of gas holes 12 in the present embodiment, two rows of gas holes 12 distinguish position
In the two sides of sensor 14.Wherein, every row's gas hole 12 includes multiple gas holes 12, thus enable 30 uniform force of silicon wafer,
It is steady to rise, it avoids interfering between the silicon wafer 30 risen and the silicon wafer 30 that will be inserted into.In other embodiments, it blows
It hole 12 can also be along the circumferentially distributed of sensor 14.Gas hole 12 can be two rows and be located at the nearly gaily decorated basket of sensor 14 as a result,
20 side of 20 sides and the remote gaily decorated basket, gas hole 12 are also possible to surround the setting of sensor 14, can guarantee 30 uniform force of silicon wafer, and
It is steady to rise.
The gas hole 12 and sensor 14 are all set on telescopic platform 1 in the present embodiment.It blows in other embodiments
Stomata 12 can be fixed at certain position and (can be not provided in telescopic platform 1) by the fixation in air duct 111, and sensor 14 can also
Be detached from telescopic platform 1 setting, such as suspend or positioned at the side of telescopic platform 1.Wherein, sensor 14 can be position sensor,
It may be other kinds of sensor, the present embodiment is not construed as limiting this.Preferably, in the present embodiment, when telescopic platform 1 is stretched
When entering in the gaily decorated basket 20, gas hole 12 and sensor 14 are respectively positioned in the gaily decorated basket 20.It senses in the sensor 14 in preceding transmission
When first silicon wafer 30 passes through, the first silicon wafer 30 being introduced into the card slot 201 is blown afloat and is suspended in by the air blowing component 11
The second silicon wafer for forming gap in the card slot 201, between the bottom and card slot 201 of the first silicon wafer 30 to transmit after being contained in
30.It senses in the sensor 14 when the second silicon wafer 30 of rear transmission passes through, the air blowing component 11 stops blowing, at this time
First silicon wafer 30 and the second silicon wafer 30 at least partly overlap.
When card slot 201 provided in this embodiment can only accommodate two silicon wafers 30, the transportational process of silicon wafer transport device is as follows:
Detect that sensor 14 is passed the information on to controller after the warp of the first silicon wafer 30 of preceding transmission by sensor 14, this
When, controller controls solenoid valve and opens, so that air blower 112 blows to gas hole 12, arrived first in card slot
The lower section for opening silicon wafer 30 forms airflow layer, is suspended in it in card slot 201；When sensor 14 detect after transmission the second silicon
When piece 30 passes through, sensor 14 sends a signal to controller, and controller controls solenoid valve and closes, thus the stopping pair of air blower 112
Gas hole 12 is blown, so that first silicon wafer 30 is fallen on the second silicon wafer 30.At this point, at least part between two silicon wafers 30
Overlapping, that is to say, that the second silicon wafer 30 has been at least partially inserted into card slot 201.Later, transfer assembly 13 continue transmission under,
The continuation of second silicon wafer 30 is transported forward, until it is completely overlapped with the first silicon wafer 30, so far realize stacking for two silicon wafers 30.
And so on, in other embodiments, when the card slot 201 of offer can accommodate multiple silicon wafers 30, silicon wafer transport dress
Set in the stacking storage for realizing multiple silicon wafers 30, process stacked to two panels silicon wafer 30 it is similar, the difference is that, in this process
In, it has been overlapped the silicon wafer 30 being placed in card slot 201 and has regarded the first silicon wafer 30 as, it has all been overlapped placement by air blowing component 11
Silicon wafer 30 in card slot 201 is at least partly blown afloat, convenient for the entrance of latter silicon wafer 30.
It should be noted that the present embodiment is not construed as limiting preset duration and air blowing air-flow size, can according to need into
Row adjustment.
Embodiment two
A kind of silicon wafer transport device is present embodiments provided, as shown in figure 3, the silicon wafer transport device and embodiment one are not
Same to be, sensor 14 is different from the setting relative position of gas hole 12.Wherein, the sensor 14 divides with the gas hole 12
It is casually arranged with and sets, and set gradually along the transporting direction of silicon wafer 30.Wherein, silicon wafer 30 is transported to from one end far from the gaily decorated basket 20 close
The direction definition of one end of the gaily decorated basket 20 is the transporting direction of silicon wafer 30, referring to direction shown in arrow in Fig. 3.
The transportational process of silicon wafer transport device provided in this embodiment is as follows:
First silicon wafer 30 is sent in the gaily decorated basket 20 by transfer assembly 13, and transfer assembly 13 continues to transmit second silicon wafer 30,
Until the second silicon wafer 30 passes through sensor 14, trigger sensor 14, at this point, controller control air blowing component 11 starts to blow,
The lower section of first silicon wafer 30 forms airflow layer, is suspended in it in card slot 201, makes between 30 bottom of the first silicon wafer and card slot 201
Gap is formed, then the second silicon wafer 30 is sent in above-mentioned gap by transfer assembly 13, and silicon wafer 30 can be realized in this way in card
Stacking in slot 201.The above process is the process that card slot 201 is inserted into two silicon wafers 30, if a card slot 201 be inserted into it is multiple
Silicon wafer 30, similar with above-mentioned steps, details are not described herein.
It should be noted that controller controls opening time and the throughput of solenoid valve when air blowing component 11 is dried
Size be it is default, the present embodiment is not construed as limiting preset duration and air blowing air-flow size, can according to need and is adjusted.
In short, silicon wafer 30 can be sent into position-limit mechanism by the Transport Desk of the utility model, i.e., the card slot 201 on the gaily decorated basket 20
Interior, air blowing component 11 blows afloat the silicon wafer 30 being located in position-limit mechanism, and is suspended in position-limit mechanism, at this point, 30 bottom of silicon wafer
There is gap between position-limit mechanism, consequently facilitating another silicon wafer 30 is inserted into gap, to realize insertion two in position-limit mechanism
Piece or multi-disc silicon wafer 30 improve production efficiency, save manpower.In addition, the structure of silicon wafer transport device provided in this embodiment
Simply, production cost is reduced.
Embodiment three
A kind of silicon wafer transport device is present embodiments provided, as shown in Figure 4 and Figure 5, silicon wafer transport provided in this embodiment
Device and the difference of embodiment two are: two Slideslips of telescopic platform 1 are provided with side plate 40, and gas hole 12 is set to the side plate
On 40 upper surface, gas hole 12 is set on side plate 40 by the present embodiment, enables gas hole 12 mobile with side plate 40,
So as to adjust 12 position of gas hole according to the actual situation.Gas hole 12 and sensor 14 in the present embodiment is with respect to position
Setting can be identical with embodiment one, can also be identical as in embodiment two.
Other structures in the present embodiment are identical with embodiment two, and this is no longer going to repeat them.
Note that have been shown and described above the utility model basic principles and main features and the utility model it is excellent
Point.It should be understood by those skilled in the art that the utility model is not limited to the embodiments described above, above embodiment and say
Only illustrate the principles of the present invention described in bright book, on the premise of not departing from the spirit and scope of the utility model, this
Utility model will also have various changes and improvements, and these various changes and improvements fall within the scope of the claimed invention,
The claimed range of the utility model is defined by the appending claims and its equivalent thereof.
Claims (10)
1. a kind of silicon wafer transport device characterized by comprising
Transport Desk, for silicon wafer (30) to be delivered in position-limit mechanism；
Air blowing component (11), the corresponding position-limit mechanism, can blow afloat the silicon wafer (30) reached in the position-limit mechanism；
Detection components are able to detect the position of silicon wafer (30) on the Transport Desk；And
Controller connects the air blowing component (11) and detection components, and controls air blowing component (11) start and stop.
2. silicon wafer transport device according to claim 1, which is characterized in that the air blowing component (11) includes multiple air blowings
Hole (12), the detection components include sensor (14).
3. silicon wafer transport device according to claim 2, which is characterized in that the gas hole (12) is located at the sensor
(14) two sides or the gas hole (12) are along the circumferentially distributed of the sensor (14).
4. silicon wafer transport device according to claim 2, which is characterized in that the sensor (14) and the gas hole
(12) transporting direction along the silicon wafer (30) is set gradually.
5. silicon wafer transport device according to claim 2, which is characterized in that the air blowing component (11) further includes air duct
(111) and with the air duct (111) air blower (112) connecting, the air duct (111) are connected to the gas hole (12).
6. silicon wafer transport device according to claim 5, which is characterized in that be provided with solenoid valve on the air duct (111).
7. silicon wafer transport device according to claim 2, which is characterized in that the Transport Desk includes telescopic platform (1) and machine
Body (10), the telescopic platform (1) can carry out linear expansion along silicon wafer (30) transporting direction relative to the body (10), described
The transfer assembly (13) for transmitting silicon wafer (30) is provided on telescopic platform (1).
8. silicon wafer transport device according to claim 7, which is characterized in that the transfer assembly (13) is located at described flexible
The opposite two sides of platform (1), the transfer assembly (13) include driving wheel (131), driven wheel (132) and the connection driving wheel
(131) it is respectively set with the conveyer belt (133) of the driven wheel (132), the driving wheel (131) and the driven wheel (132)
In the both ends of the telescopic platform (1), the driving wheel (131) is connected with driving part.
9. silicon wafer transport device according to claim 8, which is characterized in that the driving part is motor.
10. silicon wafer transport device according to claim 7, which is characterized in that the two opposite sideslips of the telescopic platform (1)
Dynamic to be provided with side plate (40), the gas hole (12) is set on the upper surface of the side plate (40).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821205104.6U CN208767269U (en) | 2018-07-27 | 2018-07-27 | A kind of silicon wafer transport device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821205104.6U CN208767269U (en) | 2018-07-27 | 2018-07-27 | A kind of silicon wafer transport device |
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| Publication Number | Publication Date |
|---|---|
| CN208767269U true CN208767269U (en) | 2019-04-19 |
Family
ID=66130773
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821205104.6U Active CN208767269U (en) | 2018-07-27 | 2018-07-27 | A kind of silicon wafer transport device |
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| Country | Link |
|---|---|
| CN (1) | CN208767269U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113394305A (en) * | 2021-06-18 | 2021-09-14 | 中国华能集团清洁能源技术研究院有限公司 | Single-side texturing method for crystalline silicon battery |
| CN115069585A (en) * | 2022-08-22 | 2022-09-20 | 无锡京运通科技有限公司 | Sorting feeding table fragment removing device for monocrystalline silicon preparation |
-
2018
- 2018-07-27 CN CN201821205104.6U patent/CN208767269U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113394305A (en) * | 2021-06-18 | 2021-09-14 | 中国华能集团清洁能源技术研究院有限公司 | Single-side texturing method for crystalline silicon battery |
| CN115069585A (en) * | 2022-08-22 | 2022-09-20 | 无锡京运通科技有限公司 | Sorting feeding table fragment removing device for monocrystalline silicon preparation |
| CN115069585B (en) * | 2022-08-22 | 2022-10-25 | 无锡京运通科技有限公司 | Sorting feeding table fragment removing device for monocrystalline silicon preparation |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: No. 199, deer mountain road, Suzhou high tech Zone, Jiangsu Province Patentee after: CSI Cells Co.,Ltd. Patentee after: Atlas sunshine Power Group Co.,Ltd. Address before: No. 199, deer mountain road, Suzhou high tech Zone, Jiangsu Province Patentee before: CSI Cells Co.,Ltd. Patentee before: CSI SOLAR POWER GROUP Co.,Ltd. |
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| CP01 | Change in the name or title of a patent holder |