CN208634793U - The collection device of triethyl-gallium - Google Patents
The collection device of triethyl-gallium Download PDFInfo
- Publication number
- CN208634793U CN208634793U CN201820695844.6U CN201820695844U CN208634793U CN 208634793 U CN208634793 U CN 208634793U CN 201820695844 U CN201820695844 U CN 201820695844U CN 208634793 U CN208634793 U CN 208634793U
- Authority
- CN
- China
- Prior art keywords
- triethyl
- gallium
- cold
- branch
- trap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Abstract
The utility model relates to the collection devices of triethyl-gallium, triethyl-gallium container filling, collection storage tank, the first cold-trap and the second cold-trap are sequentially ingressed into main line, the front end that triethyl-gallium container filling is connected to main line by connecting branch, collect storage tank, the first cold-trap and the second cold-trap respectively by forward to branch with go out to branch to connect main line, triethyl-gallium container filling, collection storage tank, the first cold-trap and the second cold-trap respectively connect tail gas pipe-line system, vacuum line system is connected to the rear end of main line, and nitrogen pipeline system connects main line；Triethyl-gallium container filling and nitrogen pipeline system are placed in heating system.By triethyl-gallium remaining in triethyl-gallium container filling through vacuum collecting into collection storage tank and cold-trap, triethyl-gallium container filling and vacuum system pipeline are heated by heating system in replacement process, by vacuum collecting, triethyl-gallium spontaneous combustion risk and the influence to environment are avoided.
Description
Technical field
The utility model relates to a kind of collection devices of triethyl-gallium, and in particular to Metalorganic chemical vapor deposition
(MOCVD) in after the use of triethyl-gallium storage container internal surplus recovery processing.
Background technique
Currently, triethyl-gallium is stored in steel cylinder in Metalorganic chemical vapor deposition (MOCVD), steel cylinder after use
Residue is inside had, triethyl-gallium belongs to pyrophoric chemicals, and it is directly discarded to generate safety problem, and cause damages to environment, lead to
Garbage collection can be recycled by crossing vacuum recycling, while eliminate the influence to environment.
The source MO have very active chemical property, it is extremely sensitive to air and steam, in air can moment spontaneous combustion, meet
High-explosive then occurs for water.Therefore, the recycling in the source MO is needed closed and without O2, without H2It is carried out in the environment of O.
Utility model content
The purpose of the utility model is to overcome the shortcomings of the prior art, provide a kind of collection device of triethyl-gallium.
The purpose of this utility model is achieved through the following technical solutions:
Comprising triethyl-gallium container filling, collect storage tank, the first cold-trap, the second cold-trap, vacuum line system and nitrogen
Pipe-line system, the triethyl-gallium container filling, collection storage tank, the first cold-trap and the second cold-trap are sequentially ingressed into main line, described
The front end that triethyl-gallium container filling is connected to main line by connecting branch, the collection storage tank, the first cold-trap and second are cold
Trap respectively by forward to branch with go out to branch connect main line, the triethyl-gallium container filling, collection storage tank, first
Cold-trap and the second cold-trap respectively connect tail gas pipe-line system, and the vacuum line system is connected to the rear end of main line, institute
State nitrogen pipeline system connection main line；The triethyl-gallium container filling and nitrogen pipeline system are placed in heating system.
Further, the collection device of above-mentioned triethyl-gallium, wherein first cold-trap and the second cold-trap are placed in liquid nitrogen
In Dewar tank.
Further, the collection device of above-mentioned triethyl-gallium, wherein the triethyl-gallium container filling and collection storage tank
Between main line be equipped with valve.
Further, the collection device of above-mentioned triethyl-gallium, wherein it is described collect storage tank forward to branch with go out to branch
Main line between road is equipped with valve.
Further, the collection device of above-mentioned triethyl-gallium, wherein first cold-trap forward to branch with go out to branch
Main line between road is equipped with valve.
Further, the collection device of above-mentioned triethyl-gallium, wherein second cold-trap forward to branch with go out to branch
Main line between road is equipped with valve.
Further, the collection device of above-mentioned triethyl-gallium, wherein the access point of the nitrogen pipeline system, which is located at, to be received
Collect storage tank forward to branch and go out on the main line between branch.
Further, the collection device of above-mentioned triethyl-gallium, wherein the connection branch of triethyl-gallium container filling and
The connecting line of its tail gas pipe-line system is equipped with valve.
Further, the collection device of above-mentioned triethyl-gallium, wherein collect storage tank forward to branch and go out to branch with
And its connecting line of tail gas pipe-line system is equipped with valve.
Further, the collection device of above-mentioned triethyl-gallium, wherein the first cold-trap forward to branch and go out to branch with
And its connecting line of tail gas pipe-line system is equipped with valve.
Further, the collection device of above-mentioned triethyl-gallium, wherein the second cold-trap forward to branch and go out to branch with
And its connecting line of tail gas pipe-line system is equipped with valve.
The utility model has significant advantages and beneficial effects compared with prior art, embodies in the following areas:
Triethyl-gallium remaining in triethyl-gallium container filling is collected by vacuum collecting to collecting in storage tank and cold-trap
Storage tank collects a large amount of remaining triethyl-galliums in triethyl-gallium container filling, and cold-trap is collected a small amount of residual in the environment of immersing in liquid nitrogen
Triethyl-gallium is stayed, triethyl-gallium container filling and vacuum system pipeline are heated by heating system in replacement process, tail gas
It is discharged by tail gas pipe-line system.By vacuum collecting, triethyl-gallium spontaneous combustion risk can be reduced, waste can be reduced to ring
The influence in border, while waste can be recycled, save production cost.It is convenient, safe to collect operation, while can be suitably used for various
The container of different size, the container of especially larger specification, effectively shortens working hours, and significantly improves triethyl-gallium and collects effect
Rate.
Detailed description of the invention
Fig. 1: the structural schematic diagram of the utility model.
Specific embodiment
For a clearer understanding of the technical features, objectives and effects of the utility model, existing be described in detail specifically
Embodiment.
As shown in Figure 1, the collection device of triethyl-gallium, comprising triethyl-gallium container filling 101, collects storage tank 102, first
Cold-trap 103, the second cold-trap 104, vacuum line system 106 and nitrogen pipeline system 105, triethyl-gallium container filling 101 are received
Collection storage tank 102, the first cold-trap 103 and the second cold-trap 104 are sequentially ingressed into main line, and triethyl-gallium container filling 101 passes through connection
Branch is connected to the front end of main line, collects storage tank 102, the first cold-trap 103 and the second cold-trap 104 respectively by forward to branch
Road with go out to branch connect main line, triethyl-gallium container filling 101, collection storage tank 102, the first cold-trap 103 and the second cold-trap
104 respectively connect tail gas pipe-line system, and vacuum line system 106 is connected to the rear end of main line, nitrogen pipeline system 105
Connect main line.Triethyl-gallium container filling and nitrogen pipeline system are placed in heating system.Baking oven 100 can be used to triethyl group
Gallium container filling 101 is heated.
Wherein, triethyl-gallium container filling 101 and the main line collected between storage tank 102 are equipped with valve.
Collect storage tank 102 forward to branch and go out to the main line between branch be equipped with valve.
First cold-trap 103 forward to branch and go out to the main line between branch be equipped with valve.
Second cold-trap 104 forward to branch and go out to the main line between branch be equipped with valve.
The access point of nitrogen pipeline system 105 forward to branch and goes out to the main line between branch positioned at collection storage tank
On, the connecting line of nitrogen pipeline system 105 is equipped with valve.
The connection branch of triethyl-gallium container filling 101 and the connecting line of its offgas duct road system are equipped with valve.
Collect storage tank 102 forward to branch and go out to branch and the connecting line of its offgas duct road system to be equipped with valve
Door.
First cold-trap 103 forward to branch and go out to branch and the connecting line of its offgas duct road system to be equipped with valve
Door.
Second cold-trap 104 forward to branch and go out to branch and the connecting line of its offgas duct road system to be equipped with valve
Door.
The air in device is discharged for vacuum line system, tail gas pipe-line system, nitrogen pipeline system, can will make in container
It is collected with remaining triethyl-gallium.
It is vacuum-treated by vacuum line system to storage tank 102 is collected, by collecting the vacuum of storage tank 102 for three second
Triethyl-gallium in base gallium container filling 101, which is transferred to, collects storage tank 102, reuses vacuum line system for remaining triethyl group
Gallium is collected into the cold-trap of sub-cooled.Since triethyl-gallium boiling point is higher (142.6 DEG C), heating system need to be used to filling appearance
Device and vacuum system pipeline are heated.
Triethyl-gallium boiling point is 142.6 DEG C under one atmospheric pressure, and in the environment of 101.3~0kPa, boiling point is gradually decreased,
Triethyl-gallium is caused constantly to vaporize, its fusing point is -82.3 DEG C under an atmospheric pressure, will under low temperature (- 90~-200 DEG C) environment
Triethyl-gallium is collected into cold-trap, in the process by the displacement of nitrogen system and the transfer of vacuum system by triethyl-gallium in container
Displacement is clean, clean to replace atmosphere, can carry out multiple displacement by nitrogen system and vacuum system, need in replacement process
Container filling and vacuum system pipeline are heated using heating system.
When concrete application, the system after pipeline connection is hunted leak using helium mass spectrometer leak detector, can be carried out after qualified in next step
Operation.
First cold-trap 103 and the second cold-trap 104 are placed in immersing in liquid nitrogen environment, it is ensured that the first cold-trap 103 and second is cold
104 temperature of trap is lower than -90 DEG C；Air in device is replaced, it is ensured that without air；
Be vacuum-treated by 106 pairs of collection storage tanks 102 of vacuum line system, make to collect pressure of storage tank reach 10~
50kPa collects the triethyl-gallium in triethyl-gallium container filling 101 using the vacuum collected in storage tank 102, collects storage tank pressure
Power is vacuum-treated again after reaching 60~90kPa, repeatedly after operation repeatedly, it is ensured that a large amount of in triethyl-gallium container filling
After triethyl-gallium collection is transferred in collection storage tank, the branch of storage tank is collected in cutting；It is cold to first by vacuum line system again
Trap and the second cold-trap are vacuum-treated, and remaining a small amount of triethyl-gallium is passed through vacuum collecting by the first cold-trap and the second cold-trap
It is transferred in the first cold-trap and the second cold-trap of low temperature, the first cold-trap and the second condenser temperature are below -90 DEG C in operating process；
Triethyl-gallium container filling and vacuum system pipeline are heated by heating system, controlled at 60~75
DEG C, after pressure reaches 0~15kPa in triethyl-gallium container filling 101, triethyl-gallium is filled by nitrogen pipeline system 105
Packaging container 101 is inflated to 100~130kPa, carries out being evacuated to 0~15kPa again, so repeats repeatedly, by triethyl-gallium
Triethyl-gallium displacement in container filling 101 is clean；
After triethyl-gallium container filling 101 is inflated to 100~130kPa after displacement is clean, valve, triethyl-gallium are closed
Container filling 101 is detachable；
Realize by triethyl-gallium remaining in triethyl-gallium container filling 101 by vacuum collecting to collect storage tank 102 with
And first in cold-trap 103 and the second cold-trap 104, collect storage tank 102 collect in triethyl-gallium container filling 101 a large amount of remaining three
Ethyl gallium, the first cold-trap 103 and the second cold-trap 104 collect a small amount of residual triethyl-gallium in the environment of immersing in liquid nitrogen, transposed
Triethyl-gallium container filling and vacuum system pipeline are heated by heating system in journey, tail gas by tail gas pipe-line system into
Row discharge.
Working continuously for triethyl-gallium collection can be carried out by repeating the above steps.
In conclusion triethyl-gallium remaining in triethyl-gallium container filling is passed through vacuum collecting to receipts by the utility model
Collect in storage tank and cold-trap, collect a large amount of remaining triethyl-galliums in storage tank collection triethyl-gallium container filling, cold-trap is soaked in liquid nitrogen
It is collected in the environment of bubble and remains triethyl-gallium on a small quantity, by heating system to triethyl-gallium container filling and vacuum system in replacement process
Road under the overall leadership is heated, and tail gas is discharged by tail gas pipe-line system.By vacuum collecting, triethyl-gallium spontaneous combustion wind can be reduced
Danger, can reduce influence of the waste to environment, while can recycle waste, save production cost.It collects and operates convenient, peace
Entirely, while it can be suitably used for the containers of various different sizes, the container of especially larger specification is effectively shortened working hours, and is shown
It writes and improves triethyl-gallium collection efficiency.
Suitable for boiling point in 70~200 DEG C, collection of the fusing point in -90~-30 DEG C of spontaneous combustion ignition control compound, chemicals boiling
Point is higher, and the temperature that need to be heated to container is higher.
It should be understood that above description is merely a prefered embodiment of the utility model, it is not limited to practical
Novel interest field；Above description simultaneously, should can be illustrated and implement for the special personage of correlative technology field, therefore its
It should be included in claim without departing from the lower equivalent change or modification completed of the revealed spirit of the utility model
In.
Claims (9)
1. the collection device of triethyl-gallium, it is characterised in that: comprising triethyl-gallium container filling, collect storage tank, the first cold-trap, the
Two cold-traps, vacuum line system and nitrogen pipeline system, the triethyl-gallium container filling, collect storage tank, the first cold-trap and
Second cold-trap is sequentially ingressed into main line, the front end that the triethyl-gallium container filling is connected to main line by connecting branch, institute
State collect storage tank, the first cold-trap and the second cold-trap respectively by forward to branch with go out to branch to connect main line, described three
Ethyl gallium container filling, collection storage tank, the first cold-trap and the second cold-trap respectively connect tail gas pipe-line system, the vacuum tube
Road system is connected to the rear end of main line, and the nitrogen pipeline system connects main line；The triethyl-gallium container filling and nitrogen
Air pipe system is placed in heating system.
2. the collection device of triethyl-gallium according to claim 1, it is characterised in that: first cold-trap and the second cold-trap
It is placed in Dewar container for liquefied nitrogen tank.
3. the collection device of triethyl-gallium according to claim 1, it is characterised in that: the triethyl-gallium container filling with
The main line collected between storage tank is equipped with valve.
4. the collection device of triethyl-gallium according to claim 1, it is characterised in that: it is described collect storage tank forward to branch
Valve is equipped with going out to the main line between branch.
5. the collection device of triethyl-gallium according to claim 1, it is characterised in that: first cold-trap forward to branch
Valve is equipped with going out to the main line between branch.
6. the collection device of triethyl-gallium according to claim 1, it is characterised in that: second cold-trap forward to branch
Valve is equipped with going out to the main line between branch.
7. the collection device of triethyl-gallium according to claim 1, it is characterised in that: the access of the nitrogen pipeline system
Point forward to branch and goes out on the main line between branch positioned at collection storage tank.
8. the collection device of triethyl-gallium according to claim 1, it is characterised in that: the connection of triethyl-gallium container filling
Branch and the connecting line of its offgas duct road system are equipped with valve.
9. the collection device of triethyl-gallium according to claim 1, it is characterised in that: collect storage tank forward to branch and go out
Valve is equipped with to branch and the connecting line of its offgas duct road system；First cold-trap forward to branch and go out to branch and
The connecting line of its tail gas pipe-line system is equipped with valve；Second cold-trap forward to branch and go out to branch and its offgas duct road
The connecting line of system is equipped with valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820695844.6U CN208634793U (en) | 2018-05-10 | 2018-05-10 | The collection device of triethyl-gallium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820695844.6U CN208634793U (en) | 2018-05-10 | 2018-05-10 | The collection device of triethyl-gallium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208634793U true CN208634793U (en) | 2019-03-22 |
Family
ID=65733148
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820695844.6U Active CN208634793U (en) | 2018-05-10 | 2018-05-10 | The collection device of triethyl-gallium |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208634793U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108644612A (en) * | 2018-05-10 | 2018-10-12 | 江苏南大光电材料股份有限公司 | The collection device and its method of triethyl-gallium |
-
2018
- 2018-05-10 CN CN201820695844.6U patent/CN208634793U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108644612A (en) * | 2018-05-10 | 2018-10-12 | 江苏南大光电材料股份有限公司 | The collection device and its method of triethyl-gallium |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN208634793U (en) | The collection device of triethyl-gallium | |
| CN101995181A (en) | Quantitative charging apparatus and method of solid alkali metal working mediums | |
| CN205483676U (en) | Saline minerals trace water vacuum extraction device | |
| CN208135100U (en) | The collection device of trimethyl gallium | |
| CN108644612A (en) | The collection device and its method of triethyl-gallium | |
| CN205035309U (en) | Trimethyl -gallium tail gas processing apparatus and preparation system | |
| CN103738909A (en) | Working substance filling and recycling device and method for organic Rankine cycle waste heat generator set | |
| CN103901068A (en) | Method for monitoring steam turbine low-pressure cylinder exhaust steam enthalpy value online | |
| CN206523358U (en) | A kind of extraction element of free water tritium | |
| CN203507779U (en) | Byproduct gas recycling system | |
| CN108506733A (en) | Material bulking device | |
| CN205035461U (en) | Residual material recovery unit | |
| CN202657937U (en) | Heat pipe vacuum liquid filling and degassing equipment | |
| CN202584751U (en) | Sodium removal device for sodium-cooled fast reactor fuel component | |
| CN108408261A (en) | The collection device and its method of trimethyl gallium | |
| CN203408490U (en) | Vacuumizing pipeline gas essential oil recovery device | |
| CN203421488U (en) | Low-temperature liquid filling and gas recovery device | |
| CN208170003U (en) | Material bulking device | |
| CN102620451B (en) | Method for producing heat pipe type full-glass-vacuum tube through boiling exhaust technology | |
| CN203940717U (en) | A kind of dry silicon chip isopropyl alcohol drying device | |
| CN204602164U (en) | A kind of dipping still | |
| CN208268771U (en) | A kind of Dewar tank fills and device for recovering tail gas | |
| CN209317079U (en) | A kind of petroleum vapor recovery oil liquid collection device | |
| CN208703574U (en) | High-purity ammon steel cylinder/tank car raffinate batch processing system | |
| CN104976080A (en) | Method of converting solar energy to mechanical energy |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |