CN203940717U - A kind of dry silicon chip isopropyl alcohol drying device - Google Patents
A kind of dry silicon chip isopropyl alcohol drying device Download PDFInfo
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- CN203940717U CN203940717U CN201420268737.7U CN201420268737U CN203940717U CN 203940717 U CN203940717 U CN 203940717U CN 201420268737 U CN201420268737 U CN 201420268737U CN 203940717 U CN203940717 U CN 203940717U
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- isopropyl alcohol
- jet pipe
- silicon chip
- double
- drying device
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Abstract
A kind of dry silicon chip isopropyl alcohol drying device, is applicable to semi-conducting material production technical field.Silicon chip after cleaning is hung onto quartzy cylinder (1) bottom of dry cavity by mechanical arm, steam cavity (4) produces methanol vapor, arrive in quartzy cylinder (1) by Pipeline transport, eject the methanol vapor of high atomisation through double-deck jet pipe (3), utilize the characteristic of isopropyl alcohol low surface tension, replace the moisture film of silicon chip surface, and then the nitrogen of nitrogen heater (13) heating is sprayed by double-deck jet pipe (3), isopropyl alcohol to silicon chip surface is dried, and finally obtains the silicon chip of bone dry.The utility model processing technology is simple, and fitting operation is convenient, and security performance is good, can effectively solve existing isopropyl alcohol drier and easily cause silicon chip underdry, part water mark to remain in the problem of silicon chip surface, has improved qualification rate and the operating efficiency of product.
Description
Technical field
The utility model belongs to semi-conducting material production technical field, relates generally to a kind of dry silicon chip isopropyl alcohol drying device.
Background technology
Silicon chip its surface in process of manufacture is subject to serious pollution, and one of the surface cleanliness of polished silicon slice mass parameter that to be product the most key must be removed particle, metal ion and organic pollution through wet-cleaning, is then dried.After Wafer Cleaning, surface can attach water membrane, and because isopropyl alcohol has lower surface tension, isopropyl alcohol drying process is to utilize this characteristic of isopropyl alcohol to reduce the surface tension of moisture film, thereby reaches drying purpose.Isopropyl alcohol drying process is divided into two stages, and the first step is the process of methanol vapor displacement, stripping silicon chip surface moisture film, and second step uses hot nitrogen to dry up the isopropyl alcohol of staying silicon chip surface, makes silicon chip bone dry.And its jet pipe of isopropyl alcohol drier using is at present individual layer, methanol vapor directly sprays from the tapping of jet pipe, methanol vapor atomizing effect is poor, be difficult at silicon chip surface homogeneous condensation, make whole silicon chip surface upper surface tension distribution inhomogeneous, after first step finishes, still there is part moisture film not to be substituted, finally remain in silicon chip surface with the form of water mark.In addition, steam cavity is used for producing and storing methanol vapor, and it is an airtight container, and the methanol vapor of being detained in a large amount of nitrogen and steam cavity wherein mixes, cause moisture film to have little time completely just to be covered and dried up by nitrogen by isopropyl alcohol at dry first step, on silicon chip, leave washmarking.Above-mentioned two defects have had a strong impact on qualification rate and the operating efficiency of product.
Utility model content
In view of existing problem in prior art, the utility model designs and discloses a kind of dry silicon chip isopropyl alcohol drying device, in this device, be double-decker by methanol vapor Nozzle Design, special nozzle structure has improved the atomizing effect of methanol vapor ejection, the methanol vapor particle diameter forming is trickleer, can cover silicon chip surface comprehensively, thoroughly peel off moisture film; Nitrogen discharge device of design and installation on steam cavity, leaves washmarking thereby avoid moisture film to be dried up evaporation by nitrogen too early, easily causes the problem of silicon chip underdry to solve existing isopropyl alcohol drier.
For achieving the above object, the concrete technical scheme that the utility model is taked is: a kind of dry silicon chip isopropyl alcohol drying device is to be mainly made up of quartzy cylinder, quartzy cylinder top head, double-deck jet pipe, steam cavity, isopropyl alcohol heater, liquid level sensor, nitrogen discharge valve, isopropyl alcohol drain valve, Pressure gauge, methanol vapor supply valve, triple valve, isopropyl alcohol supply valve, nitrogen heater, waste liquid gas collecting chamber; Wherein, the dry cavity of isopropyl alcohol drying device is made up of quartzy cylinder, quartzy cylinder top head and double-deck jet pipe, two double-deck jet pipes are arranged on quartzy cylinder internal upper part both sides, double-deck jet pipe is by fine quartz jet pipe together with rubble English jet pipe coaxial package, and fine quartz jet pipe and rubble English jet pipe can be adjusted angle each other by rotation; Two double-deck jet pipe front end sleeves have the tetrafluoro cap with sealing ring, and the rear end of two double-deck jet pipes is connected with methanol vapor supply valve and triple valve by pipeline; After quartz cylinder top head can slide into quartzy cylinder top along guide rail, upper cover is closed in decline, and the bottom centre position of quartzy cylinder is connected to a pipeline being connected with waste liquid gas collecting chamber; Form steam generation cavity by steam cavity, isopropyl alcohol heater, liquid level sensor, nitrogen discharge valve, isopropyl alcohol drain valve, Pressure gauge, methanol vapor supply valve, triple valve, isopropyl alcohol supply valve, nitrogen heater, steam cavity is the heating container of a sealing, in steam cavity outer wall one side, liquid level sensor is installed; Isopropyl alcohol heater is arranged on the bottom of steam cavity, on steam cavity outer wall opposite side, is communicated with respectively by two pipelines that nitrogen discharge valve and isopropyl alcohol drain valve are housed with waste liquid gas collecting chamber, and Pressure gauge is arranged on the top of nitrogen discharge valve pipeline; Isopropyl alcohol enters in steam cavity by isopropyl alcohol supply valve upper pipeline, and nitrogen heater is connected with steam cavity by the pipeline that triple valve is housed.The dry silicon chip isopropyl alcohol drying device of described one, wherein on the fine quartz jet pipe tube wall of double-deck jet pipe, be processed with two rows of openings, according to the throughput requirements of processing two box silicon chips each arid cycle, every rows of openings quantity is 68, and between two rows of openings, angle is 180 degree; The dry silicon chip isopropyl alcohol drying device of described one, is wherein processed with a rows of openings on the rubble English jet pipe tube wall of double-deck jet pipe, and position of opening conforms to fine quartz jet pipe the number of openings with quantity; The dry silicon chip isopropyl alcohol drying device of described one, wherein fine quartz jet pipe perforate aperture is 1.0 millimeters, rubble English jet pipe perforate aperture is 1.2 millimeters; The dry silicon chip isopropyl alcohol drying device of described one, wherein the perforate angle on perforate and the rubble English jet pipe tube wall on the fine quartz jet pipe tube wall of double-deck jet pipe is 90 degree; The dry silicon chip isopropyl alcohol drying device of described one, wherein keeps when double-deck jet pipe installation the position of opening level on the rubble English jet pipe tube wall of two jet pipes relative.
One described in the utility model is dried silicon chip isopropyl alcohol drying device, processing technology is simple, fitting operation is convenient, can effectively solve the poor and moisture film of methanol vapor atomizing effect in the problem that is replaced the underdry that front evaporator causes by isopropyl alcohol completely, improve the qualification rate of product, reduce production costs, increase work efficiency.
Brief description of the drawings
Fig. 1 is the utility model structural representation;
Fig. 2 is the double-deck jet pipe schematic diagram of the utility model.
In figure: 1, quartzy cylinder, 2, quartzy cylinder top head, 3, double-deck jet pipe, 4, steam cavity, 5, isopropyl alcohol heater, 6, liquid level sensor, 7, nitrogen discharge valve, 8, isopropyl alcohol drain valve, 9, Pressure gauge, 10, methanol vapor supply valve, 11, triple valve, 12, isopropyl alcohol supply valve, 13, nitrogen heater, 14, waste liquid gas collecting chamber.
Detailed description of the invention
Provide embodiment of the present utility model below in conjunction with accompanying drawing as follows: as shown in Figure 1 and Figure 2, one described in the utility model is dried silicon chip isopropyl alcohol drying device, is to be mainly made up of quartzy cylinder 1, quartzy cylinder top head 2, double-deck jet pipe 3, steam cavity 4, isopropyl alcohol heater 5, liquid level sensor 6, nitrogen discharge valve 7, isopropyl alcohol drain valve 8, Pressure gauge 9, methanol vapor supply valve 10, triple valve 11, isopropyl alcohol supply valve 12, nitrogen heater 13, waste liquid gas collecting chamber 14.Wherein be made up of the dry cavity of isopropyl alcohol drying device quartzy cylinder 1, quartzy cylinder top head 2 and double-deck jet pipe 3, two double-deck jet pipes 3 are arranged on respectively quartzy cylinder 1 internal upper part both sides; Double-deck jet pipe 3 is by fine quartz jet pipe together with rubble English jet pipe coaxial package, and fine quartz jet pipe and rubble English jet pipe can be adjusted angle each other by rotation.On the fine quartz jet pipe tube wall of double-deck jet pipe 3, be processed with two rows of openings, between two rows of openings, angle is 180 degree.On the rubble English jet pipe tube wall of double-deck jet pipe 3, be processed with a rows of openings, perforate on the fine quartz jet pipe tube wall of double-deck jet pipe 3 and the groups of openings clamping angle on rubble English jet pipe tube wall are 90 degree, for realizing best methanol vapor atomizing effect, fine quartz jet pipe perforate aperture is 1.0 millimeters, and rubble English jet pipe perforate aperture is 1.2 millimeters.When installation, keep the position of opening level on the rubble English jet pipe tube wall of two double-deck jet pipes 3 relative.Two double-deck jet pipe 3 front end sleeves have the tetrafluoro cap with sealing ring.The rear end of double-deck jet pipe 3 is connected with methanol vapor supply valve 10 and triple valve 11 by pipeline, quartz cylinder top head 2 can along guide rail slide into quartzy cylinder 1 top decline close upper cover, the bottom centre position of quartzy cylinder 1 is connected with waste liquid gas collecting chamber 14 by pipeline.
Formed the steam generation cavity of isopropyl alcohol drying device by steam cavity 4, isopropyl alcohol heater 5, liquid level sensor 6, nitrogen discharge valve 7, isopropyl alcohol drain valve 8, Pressure gauge 9, methanol vapor supply valve 10, triple valve 11, isopropyl alcohol supply valve 12, nitrogen heater 13.Steam cavity 4 is heating containers of a sealing, steam cavity 4 outer wall one sides are provided with liquid level sensor 6, isopropyl alcohol heater 5 is contained in the bottom of steam cavity 4, on steam cavity 4 outer wall opposite sides, is communicated with respectively by two pipelines that nitrogen discharge valve 7 and isopropyl alcohol drain valve 8 are housed with waste liquid gas collecting chamber 14.Pressure gauge 9 is contained in nitrogen and enters the top of valve 7 pipelines, and isopropyl alcohol enters in steam cavity 4 by isopropyl alcohol supply valve 12, and nitrogen heater 13 is connected with the quartzy cylinder 1 in dry cavity with steam cavity 4 by the pipeline that triple valve 11 is housed.When silicon chip is cleaned and is dried, be loaded in film magazine, after cleaning completes, place it in the bottom of drying chamber quartz cylinder 1 by mechanical arm clamping film magazine, close quartzy cylinder top head 2, open methanol vapor supply valve 10, methanol vapor is carried from steam cavity 4 and is entered double-deck jet pipe 3 by nitrogen, methanol vapor is introduced into the fine quartz jet pipe of double-deck jet pipe 3, enters the rubble English jet pipe of double-deck jet pipe 3 by inner tube perforate ejection again, the perforate ejection from outer tube again after convolution within the outer tube.Interior the latter half of steam cavity 4 in steam generation cavity stores isopropyl alcohol, adds thermogenetic methanol vapor and be gathered in the first half of steam cavity 4, by steam supply valve 10, methanol vapor is exported.Can have isopropyl alcohol consumption each arid cycle, and opening isopropyl alcohol supply valve 12 can be to the interior interpolation isopropyl alcohol of steam cavity 4, meanwhile opens nitrogen discharge valve 7 nitrogen being trapped in last arid cycle in steam cavity 4 is drained into waste liquid gas collecting chamber 14.In the time that the isopropyl alcohol liquid level of adding rises to the height of liquid level sensor 6, liquid level sensor 6 instruction isopropyl alcohol supply valves 12 cut out, and stop the supply of isopropyl alcohol, close nitrogen discharge valve 7 simultaneously, can observe the variation of steam cavity 4 internal pressures by Pressure gauge 9.Isopropyl alcohol heater 5 is arranged on the bottom of steam cavity 4, is heated to the temperature of setting to isopropyl alcohol, and general control is at the boiling point of isopropyl alcohol.When need to be emptying to the isopropyl alcohol in steam cavity 4, open isopropyl alcohol drain valve 8, disacard refiinate is discharged in waste liquid gas collecting chamber 14.When dry by the methanol vapor spraying in double-deck jet pipe 3, constantly be condensate in silicon chip water film surface, moisture film is under isopropyl alcohol low surface tension and Action of Gravity Field, along erectting the silicon chip surface landing of placing, open triple valve 11 sprays the hot nitrogen heating through nitrogen heater 13 from double-deck jet pipe 3, purge silicon chip surface, make residual isopropyl alcohol be subject to thermal evaporation, obtain the silicon chip of bone dry.On silicon chip, the water of landing and the isopropyl alcohol of condensation are collected into quartzy cylinder 1 bottom, enter waste liquid gas collecting chamber 14 along pipeline.After whole dry run finishes, open quartzy cylinder top head 2, mechanical arm takes out silicon box.
Claims (5)
1. a dry silicon chip isopropyl alcohol drying device, it is characterized in that: described dry silicon chip isopropyl alcohol drying device comprises by quartzy cylinder (1), quartz cylinder top head (2), the dry cavity of double-deck jet pipe (3) composition and by steam cavity (4), isopropyl alcohol heater (5), liquid level sensor (6), nitrogen discharge valve (7), isopropyl alcohol drain valve (8), Pressure gauge (9), methanol vapor supply valve (10), triple valve (11), isopropyl alcohol supply valve (12), steam generation cavity and the waste liquid gas collecting chamber (14) of nitrogen heater (13) composition form, wherein two double-deck jet pipes (3) are arranged on respectively quartzy cylinder (1) internal upper part both sides, double-deck jet pipe (3) by a fine quartz jet pipe together with a rubble English jet pipe coaxial package, the rotatable adjustment of inner and outer tubes of double-deck jet pipe (3) angle each other, the front end sleeve of double-deck jet pipe (3) has the tetrafluoro cap with sealing ring, and rear end is connected with triple valve (11) with isopropyl alcohol supply valve (12) by pipeline, quartz cylinder top head (2) can slide into along guide rail the top of quartzy cylinder (1), quartz cylinder (1) bottom centre position is equipped with a pipeline being connected with waste liquid gas collecting chamber (14), the steam cavity (4) of steam generation cavity is the heating container of a sealing, steam cavity (4) outer wall one side is equipped with liquid level sensor (6) and is equipped with respectively and isopropyl alcohol supply valve (12) and the pipeline that is connected with nitrogen heater, opposite side is communicated with waste liquid gas collecting chamber (14) respectively by the pipeline that nitrogen discharge valve (7) and isopropyl alcohol drain valve (8) are housed, and Pressure gauge (9) is contained in the top of nitrogen discharge valve (7) pipeline, triple valve (11) is contained in nitrogen heater (13) and pipeline top, and isopropyl alcohol heater (5) is arranged on the bottom of steam cavity (4), waste liquid gas collecting chamber (14) is arranged on the lower position of isopropyl alcohol drying device.
2. the dry silicon chip isopropyl alcohol drying device of one according to claim 1, it is characterized in that: methanol vapor jet pipe adopts double-deck jet pipe (3), on the fine quartz jet pipe tube wall of double-deck jet pipe (3), be processed with two rows of openings, every rows of openings quantity is 68, and between two rows of openings, angle is 180 degree.
3. the dry silicon chip isopropyl alcohol drying device of one according to claim 1, is characterized in that: on the rubble English jet pipe tube wall of double-deck jet pipe (3), be processed with a rows of openings, the number of openings is 68.
4. the dry silicon chip isopropyl alcohol drying device of one according to claim 1, is characterized in that: the groups of openings clamping angle on the perforate on the fine quartz jet pipe tube wall of double-deck jet pipe (3) and rubble English jet pipe tube wall is 90 degree.
5. the dry silicon chip isopropyl alcohol drying device of one according to claim 1, is characterized in that: position of opening level when installation on two rubble English jet pipe tube walls is relative.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420268737.7U CN203940717U (en) | 2014-05-26 | 2014-05-26 | A kind of dry silicon chip isopropyl alcohol drying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420268737.7U CN203940717U (en) | 2014-05-26 | 2014-05-26 | A kind of dry silicon chip isopropyl alcohol drying device |
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| Publication Number | Publication Date |
|---|---|
| CN203940717U true CN203940717U (en) | 2014-11-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420268737.7U Expired - Fee Related CN203940717U (en) | 2014-05-26 | 2014-05-26 | A kind of dry silicon chip isopropyl alcohol drying device |
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| CN (1) | CN203940717U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107719980A (en) * | 2017-11-13 | 2018-02-23 | 国网技术学院 | A kind of storing unit for special operation screening clothing |
-
2014
- 2014-05-26 CN CN201420268737.7U patent/CN203940717U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107719980A (en) * | 2017-11-13 | 2018-02-23 | 国网技术学院 | A kind of storing unit for special operation screening clothing |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141112 Termination date: 20170526 |