CN108506733A - Material bulking device - Google Patents
Material bulking device Download PDFInfo
- Publication number
- CN108506733A CN108506733A CN201810442928.3A CN201810442928A CN108506733A CN 108506733 A CN108506733 A CN 108506733A CN 201810442928 A CN201810442928 A CN 201810442928A CN 108506733 A CN108506733 A CN 108506733A
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- China
- Prior art keywords
- valve
- delivery pipe
- pipe road
- tail gas
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000463 material Substances 0.000 title claims abstract description 167
- 239000007789 gas Substances 0.000 claims abstract description 125
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 107
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 53
- 238000001816 cooling Methods 0.000 claims description 18
- 238000006467 substitution reaction Methods 0.000 claims description 13
- 238000010521 absorption reaction Methods 0.000 claims description 2
- 229910000831 Steel Inorganic materials 0.000 description 28
- 239000010959 steel Substances 0.000 description 28
- 238000000034 method Methods 0.000 description 5
- 238000001514 detection method Methods 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 238000009924 canning Methods 0.000 description 2
- 235000019628 coolness Nutrition 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 239000011149 active material Substances 0.000 description 1
- 239000002156 adsorbate Substances 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 150000002902 organometallic compounds Chemical class 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D1/00—Pipe-line systems
- F17D1/08—Pipe-line systems for liquids or viscous products
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D1/00—Pipe-line systems
- F17D1/02—Pipe-line systems for gases or vapours
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D3/00—Arrangements for supervising or controlling working operations
- F17D3/01—Arrangements for supervising or controlling working operations for controlling, signalling, or supervising the conveyance of a product
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D5/00—Protection or supervision of installations
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Public Health (AREA)
- Water Supply & Treatment (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Abstract
The present invention relates to material bulking devices, including container to be filled, material delivery pipe road system, vacuum line system, tail gas pipe-line system and nitrogen pipeline system, material source is connect by material delivery pipe road system with container, tail gas pipe-line system, vacuum line system and nitrogen pipeline system and material delivery pipe road system and reservoir；Material delivery pipe road system includes material delivery pipe road and the first valve for being set to material delivery pipe road, the material inlet end on material delivery pipe road is connected to material source, the material outlet end on the material delivery pipe road is connected to the material inlet of container, and a control device connect with the first valve and controls the opening and closing of first valve.So that the filling operation of material is carried out in conventional environment, provides safe atmosphere for the filling of material, realize that the safety of material is filling, do not limited by optional equipments such as glove boxes, simple operation, safety.
Description
Technical field
The present invention relates to a kind of material bulking devices, belong to chemical equipment technical field.
Background technology
The sources MO, that is, high-purity metal organic compound are outer using the progress of metal organic chemical vapor deposition (MOCVD) technology
Backing material when epitaxial growth, such as GaAs, GaN, InP, AlGaAs compound semiconductor ultra-thin film material, can be used to produce
LED epitaxial wafer, HEMT device, semiconductor laser, solar cell etc.；It is one of the critical material for developing photoelectronic industry,
It is also the indispensable raw material of production high brightness, super brightness luminescent material and large scale integrated circuit.The sources MO have very active
Chemical property, it is extremely sensitive to air and steam, in air can moment spontaneous combustion, meet water high-explosive then occurs.Therefore, the sources MO
Filling needs closed and without O2, without H2It is carried out in the environment of O.
In the prior art, the well known sources MO canning means are filling in anaerobic anhydrous inert atmosphere glove box.Glove box
It is high purity inert gas to be filled in babinet, and be circulated throughout the laboratory equipment for filtering active material therein, mainly by leading
Babinet, transition chamber two parts composition.On main box there are two or more than two gloves operate interface, in order to which operator operates.
In addition, before babinet or it is front and back be equipped with observation window, operator is it can clearly be observed that operating process in babinet so that
Operating process is intuitively presented in operator at the moment.During filling, easily waved since the Partial Species in the sources MO have
Therefore the characteristic of hair is easy so that being full of the sources gaseous state MO in glove box, this makes adsorbate (such as organic solvent in glove box
Adsorption column) largely it is consumed, it needs to frequently replace.
As the fast development of market economy, application of electronic technology field are growing, the huge market demand in the sources MO
Amplitude increase, for the filling sources MO steel cylinder specification also therewith constantly amplification, by initial 500g, 1000g be amplified to 8kg,
16kg or even bigger, since the steel cylinder after filling is heavier, during artificial move cylinders, steel cylinder is easy to slip
It to damage glove box, and then is possible to cause the burning of the sources MO, this so that pure manual operations becomes more difficult in glove box, deposits
In larger security risk.
It can be seen that traditional artificial canning means have been difficult to meet demand.
Invention content
The purpose of the present invention is overcoming the shortcomings of the prior art, a kind of material bulking device is provided, hand is not being needed
In the case of the optional equipments such as casing, it is filling safety can be carried out to material.
The purpose of the present invention is achieved through the following technical solutions：
Material bulking device, feature are：Including container to be filled, material delivery pipe road system, vacuum line system, tail
Material source is connect by air pipe system and nitrogen pipeline system, material delivery pipe road system with container, the offgas duct
Road system, vacuum line system and nitrogen pipeline system and material delivery pipe road system and reservoir；
Material delivery pipe road system includes material delivery pipe road and the first valve for being set to material delivery pipe road
The material inlet end of door, the material delivery pipe road is connected to material source, the material outlet end connection on the material delivery pipe road
To the material inlet of container, a control device connect with the first valve and controls the opening and closing of first valve.
Further, above-mentioned material bulking device, wherein first valve is pneumatic operated valve, pneumatic operated valve and an electromagnetism
Valve connects, and control device is electrically connected with the solenoid valve and by the opening and closing of solenoid valve control pneumatic operated valve.
Further, above-mentioned material bulking device a, wherein quality stream is installed between material delivery pipe road and container
Gauge, mass flowmenter connect control device, quality signal are passed to control device, when quality signal indicates the weight of container
When reaching predetermined value, control device controls the first valve and closes.
Further, above-mentioned material bulking device, wherein the nitrogen pipeline system includes nitrogen pipeline and is used for
Connect nitrogen connecting line, the nitrogen valve on material delivery pipe road and nitrogen pipeline, the first gas outlet of the nitrogen pipeline
End is connected to the gas inlet-outlet of container by nitrogen valve, and the gas access end of nitrogen pipeline is connected to substitution gas source, sets
It changes gas source and substitution gas is filled with to material delivery pipe road system by nitrogen pipeline, nitrogen connecting line, nitrogen valve.
Further, above-mentioned material bulking device, wherein the vacuum line system includes vacuum line and is used for
Vacuum connector pipe, the vacuum valve on material delivery pipe road and vacuum line are connected, the Single port of the vacuum line passes through true
Empty valve is connected to the gas inlet-outlet of container, and the another port of vacuum line is connected to vacuum extractor, and vacuum extractor is logical
It crosses vacuum line and vacuum connector pipe, vacuum valve vacuumizes material delivery pipe road.
Further, above-mentioned material bulking device, wherein vacuum buffer is equipped between vacuum line and vacuum extractor
Tank.
Further, above-mentioned material bulking device, wherein vacuum buffer tank is contained in the first cooling device.
Further, above-mentioned material bulking device, wherein the tail gas pipe-line system includes tail gas pipeline and is used for
Tail gas connecting line, the tail gas valve on material delivery pipe road and tail gas pipeline are connected, the Single port of the tail gas pipeline passes through tail
Air valve is connected to the gas inlet-outlet of container, another port connection tail gas buffer, pressure equaliser, the tail of tail gas pipeline
Aspiration receiving apparatus, tail gas buffer is by the material collection in tail gas pipeline, and pressure is constant in pressure equaliser holding container, tail
Aspiration receiving apparatus absorbs the material in tail gas.
Further, above-mentioned material bulking device, wherein the tail gas buffer is contained in the second cooling device.
Further, above-mentioned material bulking device, wherein the container is set as multiple, and multiple containers are with parallel connection side
Formula is connected to material delivery pipe road system and nitrogen pipeline system, vacuum line system, in tail gas pipe-line system.
The present invention has significant advantages and beneficial effects compared with prior art, embodies in the following areas：
1. the filling operation of material is enable to be carried out in conventional environment, safe gas atmosphere is provided for the filling of material
It encloses, realizes that the safety of material is filling, do not limited by optional equipments such as glove boxes, simple operation, safety, while breaking away from traditional hand
Limitation of the casing to filling specification can be adapted for the container of filling various different sizes, the container of especially larger specification；
2. using the metering method of mass flowmenter, effectively solve the problems, such as that existing measured with electronic scale is not allowed, filling essence
Degree greatly improves；
3. material bulking device of the present invention can be realized to filling steel cylinder on-line period, effectively shorten working hours, significantly
Improve the filling efficiency of material.
Description of the drawings
Fig. 1：The attachment structure schematic diagram of the present invention.
Specific implementation mode
For a clearer understanding of the technical characteristics, objects and effects of the present invention, specific implementation is now described in detail
Scheme.
As shown in Figure 1, material bulking device, including container 3 to be filled, material delivery pipe road system, vacuum line system
System, tail gas pipe-line system and nitrogen pipeline system, material source 1 is connect by material delivery pipe road system with container 3, described
Tail gas pipe-line system, vacuum line system and nitrogen pipeline system are connected to material delivery pipe road system and container 3；
Material delivery pipe road system includes material delivery pipe road 4 and the first valve being set on material delivery pipe road 4
14, the material inlet end on material delivery pipe road 4 is connected to material source 1, and the material outlet end on the material delivery pipe road 4 is connected to
The material inlet of container 3, a control device connect with the first valve 14 and control the opening and closing of first valve 14.Wherein,
One valve 14 is pneumatic operated valve, and pneumatic operated valve is connect with a solenoid valve 16, and control device is electrically connected with solenoid valve 16 and passes through solenoid valve
The opening and closing of 16 control pneumatic operated valves.
One mass flowmenter 12, the connection control dress of mass flowmenter 12 are installed between material delivery pipe road 4 and container 3
It sets, quality signal is passed into control device, when quality signal indicates that the weight of container 3 reaches predetermined value (such as 14kg, 17kg
Deng) when, control device controls the first valve 14 and closes.The second valve (standby valve) 17 is provided on material delivery pipe road 4.
Nitrogen pipeline system includes nitrogen pipeline 28 and the nitrogen for connecting material delivery pipe road 4 and nitrogen pipeline 28
Connecting line 29, nitrogen valve 25, the first gas outlet end of nitrogen pipeline 28 are connected to the gas of container 3 by nitrogen valve 25
The gas access end of body entrance, nitrogen pipeline 28 is connected to substitution gas source 2, and substitution gas source 2 passes through nitrogen pipeline 28, nitrogen
Gas connecting line 29, nitrogen valve 25 are filled with substitution gas to material delivery pipe road system, thus by material delivery pipe road system
With in gas piping system air and vapor discharge.
Vacuum line system includes vacuum line 5 and connects for connecting material delivery pipe road 4 and the vacuum of vacuum line 5
Road 6, vacuum valve 18 are taken over, the Single port of vacuum line 5 is connected to the gas inlet-outlet of container 3 by vacuum valve 18, very
The another port on blank pipe road 5 is connected to vacuum extractor 7, and vacuum extractor 7 passes through vacuum line 5 and vacuum connector pipe 6, true
Empty valve 18 vacuumizes material delivery pipe road 4, to by material delivery pipe road system and gas piping system air and
Vapor is discharged.Vacuum buffer tank 8 is equipped between vacuum line 5 and vacuum extractor 7, the Single port of vacuum connector pipe 6 connects
It is connected to the material outlet end part on material delivery pipe road 4, another port is connected to vacuum line 5.Vacuum buffer tank 8 is contained in
In one cooling device 13.
Tail gas pipe-line system includes tail gas pipeline 32 and the tail gas for connecting material delivery pipe road 4 and tail gas pipeline 32
Connecting line 33, tail gas valve 24, the Single port of tail gas pipeline 32 are connected to the gas discrepancy of container 3 by tail gas valve 24
Mouthful, another port connection tail gas buffer 35, pressure equaliser 36, the device for absorbing tail gas 37 of tail gas pipeline 32, tail gas delay
Tank 35 is rushed by the material collection in tail gas pipeline 32, pressure is constant in 36 holding container 3 of pressure equaliser, device for absorbing tail gas
37 absorb the material in tail gas.Tail gas buffer 35 is contained in the second cooling device 30.
It should be noted that container 3 may be configured as multiple, multiple containers are connected to material delivery pipe road system with parallel way
In nitrogen pipeline system, vacuum line system, tail gas pipe-line system, material-filling is carried out independently of each other.Material delivery pipe road
It is provided with leakage detection apparatus on system and gas piping system.
When filling, step is：
A, the air-tightness that material delivery pipe road system and tail gas pipe-line system are checked by leakage detection apparatus, when air-tightness reaches
Preassigned when work；By vacuum line system by the air and water in material pipe-line system and tail gas pipe-line system
Steam is discharged.
B, open material source 1, by material pipeline transport system into container 3 filling material, when filling completion, closure
Material source 1；
C, filling container 3 will be completed to disconnect with gas piping system and material delivery pipe road system.
Wherein, in stepb, the opening and closing of the first valve 14 is controlled by control device, it is defeated through material with control material source 1
Send the filling material into container 3 of pipeline 4.Quality signal is passed to control device by mass flowmenter 12, when quality signal indicates
When the quality of container 3 reaches predetermined value, control device controls the first valve 14 and closes.
Vacuum extractor 7 will be taken out by vacuum line 5 and vacuum connector pipe 6, vacuum valve 18 in material delivery pipe road 4
Vacuum, to by material delivery pipe road system and gas piping system air and vapor be discharged.
Before step c, by vacuum extractor 7 by the material outlet end on material delivery pipe road 4 and the second valve 17 it
Between part in surplus material be retracted in surge tank 8, step c is carried out when surplus material is extracted.
Material bulking device of the present invention can be suitable for the filling of special material, and special material refers in easy and air
The material that certain ingredients chemically react, these materials are unsuitable for filling in air, such as sources MO etc..In this regard, material fills
Assembling device provides suitable atmosphere for material to be filled, material be filled under this atmosphere in container 3 and
It will not be chemically reacted simultaneously with the gas in the system of material delivery pipe road, to ensure that filling safety.The present invention
Material bulking device is by being arranged gas piping system, by the air and water in material delivery pipe road system and gas piping system
Steam is discharged so that (especially chemistry is anti-there is no easily reacting with material for the atmosphere in the system of material delivery pipe road
Answer) gas, this makes subsequent material-filling become more convenient, is no longer limited to glove box as mentioned in the background art
In, but operation can be carried out in open environment, not only so that fill operations are more convenient, but also it is effectively shortened
Filling time improves the efficiency of material-filling.
With material for the sources MO, for substitution gas to be described in detail for nitrogen, the container 3 for the filling sources MO is closed
Steel cylinder, before filling, the gas in steel cylinder is the gas not reacted with material.
Be accomplished in several ways by material delivery pipe road system and gas piping system air and vapor discharge,
Form by way of example is described in detail.
A kind of mode be by the form of gas displacement by the delivery pipeline system of the sources MO air and vapor be replaced into
The gas not reacted with the sources MO, such as inert gas and nitrogen, it is contemplated that the cost of inert gas is higher, it is therefore preferable that
Ground uses the air in the delivery pipeline system of the sources nitrogen displacement MO.Substitution gas source 2 passes through nitrogen body pipeline 28 and nitrogen body connecting tube
Road 29, nitrogen body valve 25 are filled with substitution gas into material delivery pipe road system, thus by material delivery pipe road system and gas
Air in pipe-line system and vapor discharge.
When the sources MO that the MO source inlets of steel cylinder (container 3) are connected to the sources MO transfer pipeline (material delivery pipe road 4) export
After end, the switch in substitution gas source 2, nitrogen connecting line 29, nitrogen valve of the substitution gas by nitrogen pipeline 28 are opened
25, valve 15 reaches the sources MO transfer pipeline, replaces air therein, later, closes nitrogen valve 25, valve 15, opens steel cylinder
MO source inlets and gas inlet-outlet to be connected to the sources MO transfer pipeline and tail gas connecting line 33, be passed through the sources MO, the sources MO led to
The sources MO transfer pipeline is crossed to be filled in steel cylinder.
Gas in steel cylinder is inhaled by tail gas connecting line 33 by tail gas buffer 35, pressure equaliser 36, tail gas
It is discharged into ambient atmosphere after receiving apparatus 37.In order to enable the sources MO for reaching tail gas buffer 35 stay in tail gas buffer 35 to keep away
Exempt from the sources MO to be emitted into device for absorbing tail gas 37 by pressure equaliser 36, tail gas buffer 35 is contained in the second cooling device
In 30, by MO source coolings.The sources MO after cooling become solid-state from liquid, to stay in tail gas buffer 35.Second cooling
Device 30 can be diversified forms, it is preferable that the second cooling device 30 is cold-trap.In addition, in order to reinforce ensureing, gaseous state MO is prevented
Source enters in the second cooling device 30, and tail gas buffer 35 could be provided as multiple, and multiple surge tanks are connected on tail gas pipeline 32
Between pressure equaliser 36.What pressure equaliser 36 was discharged by the way of spray-absorption liquid for device for absorbing tail gas 37
Tail gas is further collected.
After filling completion before steel cylinder under dismounting, needs the remaining sources MO discharge in the transfer pipeline of the sources MO or return
It receives, after the steel cylinder under dismounting, the remaining sources MO are leaked and ingress of air in the transfer pipeline of the sources MO.In this regard, can adopt
With various ways, such as：When the weight in the sources MO filling in steel cylinder reaches predetermined value closure material source, opening tail gas valve
24, valve 15 returns to wherein remaining MO source streams in steel cylinder.
Another way is by way of vacuumizing the connecting line of the sources MO transfer pipeline, by the sources MO transfer pipeline
The sources MO extraction in connecting line, to avoid the sources the MO contact H when removing steel cylinder2O、O2.Vacuum extractor 7 passes through vacuum line 5
With vacuum connector pipe 6, vacuum valve 18 and will be vacuumized in the transfer pipeline of the sources MO.
Complete it is filling after before steel cylinder under dismounting, need the remaining sources MO in the transfer pipeline of the sources MO being discharged to steel cylinder
It is interior or be recovered in specific container, after the steel cylinder under dismounting, in the delivery pipeline system of the sources MO outside the remaining sources MO
It lets out and ingress of air.In this regard, the sources MO filling apparatus further includes the vacuum buffer being connected between vacuum tube 5 and vacuum extractor 7
Tank 8, when the weight in the sources MO filling in steel cylinder reaches predetermined value, closure material source, the MO source inlets and gas for closing steel cylinder go out
Entrance opens simultaneously the vacuum on vacuum connector pipe 6 to disconnect the connection with the sources MO transfer pipeline and tail gas connecting line 33
Valve 18, valve 15 and then the secondary switch for opening vacuum extractor 7, by vacuum line 5 and vacuum connector pipe 6 by MO
The remaining sources MO are sucked out and are recovered in vacuum buffer tank 8 in the connecting line of source transfer pipeline 4.In order to enable it is slow to reach vacuum
The sources MO for rushing tank 8 stay in vacuum buffer tank 8 and are inhaled into vacuum extractor 7 by vacuum buffer tank 8 to avoid the sources MO, vacuum
Surge tank 8 is contained in the first cooling device 13, by MO source coolings.The sources MO after cooling become solid-state from liquid, to stay
In vacuum buffer tank 8.First cooling device 13 can be diversified forms, it is preferable that the first cooling device 13 is cold-trap.Separately
Outside, in order to reinforce ensureing, prevent the sources gaseous state MO from entering in the first cooling device 13, vacuum buffer tank 8 could be provided as it is multiple, it is more
A vacuum buffer tank 8 is connected between vacuum line 5 and vacuum extractor 7.
In order to improve filling efficiency, steel cylinder (container 3) could be provided as multiple, and multiple steel cylinders are connected in parallel on MO
On source delivery pipeline system and tail gas pipe-line system, to carry out the filling of the sources MO independently of each other.And for the ease of
Steel cylinder is connected on the sources MO delivery pipeline system and tail gas pipe-line system before filling and after filling steel cylinder dismounting
And carrying, by connection by metal hose in the sources the MO outlet end of the sources MO transfer pipeline, the gas of steel cylinder goes out the MO source inlets of steel cylinder
Entrance is by connection by metal hose in the port of tail gas connecting line 33.
In addition, in order to improve the safety coefficient in the pouring process of the sources MO, need to ensure MO source delivery pipeline systems and tail gas
The air-tightness of pipe-line system reaches certain standard, therefore, can be arranged on the sources MO delivery pipeline system and/or gas piping system
There is leakage detection apparatus, to check entire pipe later on steel cylinder to be connected to the sources MO delivery pipeline system and the gas piping system
Road system whether gas leakage, fill operations could be carried out when air leakage reaches certain standard.
In conclusion material bulking device of the present invention enables the filling operation of material to be carried out in conventional environment, it can
Filling for material provides safe atmosphere, realizes that the safety of material is filling, is not limited by optional equipments such as glove boxes,
Simple operation, safety, while limitation of the traditional flat case to filling specification is broken away from, it can be adapted for filling various different sizes
Container, the container of especially larger specification.In addition the metering method that mass flowmenter can be used efficiently solves and existing uses electronics
The problem for claiming metering inaccurate, filling accuracy greatly improve.Material bulking device of the present invention can be to filling steel cylinder on-line period, effectively
Ground shortens the working time, improves the filling efficiency of material.
It should be noted that：The foregoing is merely the preferred embodiment of the present invention, are not limited to the power of the present invention
Sharp range；The description above simultaneously, should can be illustrated and implement for the special personage of correlative technology field, thus it is other without departing from
The equivalent change or modification completed under disclosed spirit, should be included in claim.
Claims (10)
1. material bulking device, it is characterised in that：Including container (3) to be filled, material delivery pipe road system, vacuum line system
Material source (1) is connect by system, tail gas pipe-line system and nitrogen pipeline system, material delivery pipe road system with container (3),
The tail gas pipe-line system, vacuum line system and nitrogen pipeline system are connected to material delivery pipe road system and container (3)；
Material delivery pipe road system include material delivery pipe road (4) and be set on material delivery pipe road (4) first
The material inlet end of valve (14), the material delivery pipe road (4) is connected to material source (1), the material delivery pipe road (4)
Material outlet end is connected to the material inlet of container (3), and a control device connect with the first valve (14) and controls described first
The opening and closing of valve (14).
2. material bulking device according to claim 1, it is characterised in that：First valve (14) is pneumatic operated valve, gas
Dynamic valve is connect with a solenoid valve (16), and control device is electrically connected with solenoid valve (16) and controls pneumatic operated valve by solenoid valve (16)
Opening and closing.
3. material bulking device according to claim 1, it is characterised in that：Between material delivery pipe road (4) and container (3)
One mass flowmenter (12) is installed, mass flowmenter (12) connects control device, quality signal is passed to control device, when
When the weight of quality signal instruction container (3) reaches predetermined value, control device controls the first valve (14) and closes.
4. material bulking device according to claim 1, it is characterised in that：The nitrogen pipeline system includes nitrogen pipeline
(28) and nitrogen connecting line (29), nitrogen valve (25) for connecting material delivery pipe road (4) and nitrogen pipeline (28),
The first gas outlet end of the nitrogen pipeline (28) is connected to the gas inlet-outlet of container (3), nitrogen by nitrogen valve (25)
The gas access end of air pipe (28) is connected to substitution gas source (2), and substitution gas source (2) pass through nitrogen pipeline (28), nitrogen
Connecting line (29), nitrogen valve (25) are filled with substitution gas to material delivery pipe road system.
5. material bulking device according to claim 1, it is characterised in that：The vacuum line system includes vacuum line
(5) and vacuum connector pipe (6), vacuum valve (18) for connecting material delivery pipe road (4) and vacuum line (5), institute
The Single port for stating vacuum line (5) is connected to the gas inlet-outlet of container (3) by vacuum valve (18), vacuum line (5)
Another port is connected to vacuum extractor (7), and vacuum extractor (7) passes through vacuum line (5) and vacuum connector pipe (6), true
Empty valve (18) vacuumizes material delivery pipe road (4).
6. material bulking device according to claim 5, it is characterised in that：Vacuum line (5) and vacuum extractor (7) it
Between be equipped with vacuum buffer tank (8).
7. material bulking device according to claim 6, it is characterised in that：Vacuum buffer tank (8) is contained in the first cooling
In device (13).
8. material bulking device according to claim 1, it is characterised in that：The tail gas pipe-line system includes tail gas pipeline
(32) and tail gas connecting line (33), tail gas valve (24) for connecting material delivery pipe road (4) and tail gas pipeline (32),
The Single port of the tail gas pipeline (32) is connected to the gas inlet-outlet of container (3), tail gas pipeline by tail gas valve (24)
(32) another port connection tail gas buffer (35), pressure equaliser (36), device for absorbing tail gas (37), tail gas buffer
(35) by the material collection in tail gas pipeline (32), pressure equaliser (36) holding container (3) interior pressure is constant, tail gas absorption
Device (37) absorbs the material in tail gas.
9. material bulking device according to claim 8, it is characterised in that：The tail gas buffer (35) is contained in second
In cooling device (30).
10. material bulking device according to claim 1, it is characterised in that：The container (3) is set as multiple, multiple
Container is connected to material delivery pipe road system and nitrogen pipeline system, vacuum line system, tail gas pipe-line system with parallel way
On.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810442928.3A CN108506733A (en) | 2018-05-10 | 2018-05-10 | Material bulking device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810442928.3A CN108506733A (en) | 2018-05-10 | 2018-05-10 | Material bulking device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108506733A true CN108506733A (en) | 2018-09-07 |
Family
ID=63400510
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810442928.3A Pending CN108506733A (en) | 2018-05-10 | 2018-05-10 | Material bulking device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108506733A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
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