CN102125789A - MO source production line inert environment protection device - Google Patents
MO source production line inert environment protection device Download PDFInfo
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- CN102125789A CN102125789A CN2011100382587A CN201110038258A CN102125789A CN 102125789 A CN102125789 A CN 102125789A CN 2011100382587 A CN2011100382587 A CN 2011100382587A CN 201110038258 A CN201110038258 A CN 201110038258A CN 102125789 A CN102125789 A CN 102125789A
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- paraffin oil
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- active carbon
- oil adsorption
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Abstract
The invention provides an MO source production line inert environment protection device, which comprises a nitrogen buffer tank, a paraffin oil adsorption tank and an active carbon adsorption column, wherein the air outlet at the bottom of the nitrogen buffer tank is communicated with the air inlet at the top of the paraffin oil adsorption tank, and the air outlet on the lateral part of the paraffin oil adsorption tank is communicated with the air inlet at the bottom of the active carbon adsorption column. An MO source and a large part of organic solvent steam in the MO source production line tail gas are absorbed by the paraffin oil in the paraffin oil adsorption tank, the organic solvent is adsorbed by the active carbon in the active carbon adsorption column, and then the tail gas reaches the environment permitted discharge standard and is safely discharged; and most importantly, operation of the MO production line in the inert environment is ensured.
Description
Technical field
The present invention relates to a kind of inert environments protection equipment, relate in particular to a kind of MO source production line inert environments protective device.
Background technology
The MO product-derived has the nature of danger of meeting air burning, meeting the water blast, so the tail gas that produces in the production process of MO source could normal discharging after need carrying out safe handling.
Therefore, at the chemical characteristic in MO source, need design one cover device for absorbing tail gas.
Summary of the invention
The objective of the invention is to overcome the deficiency that prior art exists, a kind of device for absorbing tail gas is provided.
Purpose of the present invention is achieved through the following technical solutions:
MO source production line inert environments protective device; characteristics are: comprise nitrogen buffer tank, paraffin oil adsorption tanks and active carbon adsorption column; the gas outlet of described nitrogen buffer tank bottom is connected with the air inlet at paraffin oil adsorption tanks top, and the gas outlet of described paraffin oil adsorption tanks sidepiece is connected with the air inlet of charcoal absorption column bottom.
Further, above-mentioned MO source production line inert environments protective device is provided with check valve between the gas outlet of described nitrogen buffer tank bottom and the air inlet at paraffin oil adsorption tanks top.
The substantive distinguishing features of technical solution of the present invention and progressive being mainly reflected in:
1. nitrogen buffer tank has guaranteed the production line pressure balance, and it is dangerous to have avoided the air suck-back to cause the MO product-derived to produce;
2. MO source and the most of organic solvent in the organic absorption tail gas of paraffin oil adsorption tanks guarantees that MO source production line tail gas can safety dumping, can not occur playing the effect of fluid-tight simultaneously because MO source and air reaction are lighted the tail gas phenomenon;
3. the MO source that absorbs in the paraffin oil adsorption tanks can be in adsorption tanks with atmosphere in the oxygen slow reaction generate oxide white, can guarantee that paraffin oil changes safety and carry out.
Description of drawings
Below in conjunction with accompanying drawing technical solution of the present invention is described further:
Fig. 1: organigram of the present invention.
The implication of each Reference numeral sees the following form among the figure:
The specific embodiment
As shown in Figure 1; MO source production line inert environments protective device; comprise nitrogen buffer tank 1; paraffin oil adsorption tanks 3 and active carbon adsorption column 4; the air inlet at nitrogen buffer tank 1 top is connected with production line tail gas pipeline; the gas outlet of nitrogen buffer tank 1 bottom is connected with the air inlet at paraffin oil adsorption tanks 3 tops; and between the air inlet at the gas outlet of nitrogen buffer tank 1 bottom and paraffin oil adsorption tanks 3 tops, be provided with check valve 2; the gas outlet of wax oil adsorption tanks 3 sidepieces is connected with the air inlet of active carbon adsorption column 4 bottoms, the high row of the logical atmosphere in the gas outlet at nitrogen buffer tank 1 top.
Nitrogen buffer tank 1 has guaranteed the production line pressure balance, and it is dangerous to have avoided the air suck-back to cause the MO product-derived to produce.MO source and most of organic solvent in paraffin oil adsorption tanks 3 organic absorption tail gas guarantee that MO source production line tail gas can safety dumping, can not occur because MO source and air reaction are lighted the tail gas phenomenon.The MO source that absorbs in the paraffin oil adsorption tanks 3 can be in adsorption tanks with atmosphere in the oxygen slow reaction generate oxide white, can guarantee that paraffin oil changes safety and carry out.
During concrete the application, MO source production line tail gas sponges MO source and most of organic vapor through the paraffin oil in the paraffin oil adsorption tanks 3, reaches environmental permission discharge standard and safety dumping after falling organic solvent by the charcoal absorption in the active carbon adsorption column 4 again.Paraffin oil in paraffin oil in the paraffin oil adsorption tanks 3 and the active carbon adsorption column 4 is regularly changed, active carbon that changes and paraffin oil recycling.
It is emphasized that: above only is preferred embodiment of the present invention, be not that the present invention is done any pro forma restriction, every foundation technical spirit of the present invention all still belongs in the scope of technical solution of the present invention any simple modification, equivalent variations and modification that above embodiment did.
Claims (2)
1.MO source production line inert environments protective device; it is characterized in that: comprise nitrogen buffer tank, paraffin oil adsorption tanks and active carbon adsorption column; the gas outlet of described nitrogen buffer tank bottom is connected with the air inlet at paraffin oil adsorption tanks top, and the gas outlet of described paraffin oil adsorption tanks sidepiece is connected with the air inlet of charcoal absorption column bottom.
2. MO according to claim 1 source production line inert environments protective device is characterized in that: be provided with check valve between the gas outlet of described nitrogen buffer tank bottom and the air inlet at paraffin oil adsorption tanks top.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011100382587A CN102125789A (en) | 2011-02-15 | 2011-02-15 | MO source production line inert environment protection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011100382587A CN102125789A (en) | 2011-02-15 | 2011-02-15 | MO source production line inert environment protection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102125789A true CN102125789A (en) | 2011-07-20 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011100382587A Pending CN102125789A (en) | 2011-02-15 | 2011-02-15 | MO source production line inert environment protection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102125789A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103924219A (en) * | 2014-04-25 | 2014-07-16 | 安徽亚格盛电子新材料有限公司 | Device capable of automatically supplementing MO (metal organic) source |
| CN107159646A (en) * | 2017-07-10 | 2017-09-15 | 江苏南大光电材料股份有限公司 | The automatic flushing device and its method of MO carrying shields steel loading bottle |
| CN108506733A (en) * | 2018-05-10 | 2018-09-07 | 江苏南大光电材料股份有限公司 | Material bulking device |
-
2011
- 2011-02-15 CN CN2011100382587A patent/CN102125789A/en active Pending
Non-Patent Citations (2)
| Title |
|---|
| L.M.F.KAUFMANN,ET AL.: "safety aspects of movpe in research and development：an example", 《JOURNAL OF CRYSTAL GROWTH》 * |
| 沈令康等: "三甲基镓的制备", 《微电子学》 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103924219A (en) * | 2014-04-25 | 2014-07-16 | 安徽亚格盛电子新材料有限公司 | Device capable of automatically supplementing MO (metal organic) source |
| CN103924219B (en) * | 2014-04-25 | 2016-06-08 | 安徽亚格盛电子新材料有限公司 | The device in MO source can be automatically replenished |
| CN107159646A (en) * | 2017-07-10 | 2017-09-15 | 江苏南大光电材料股份有限公司 | The automatic flushing device and its method of MO carrying shields steel loading bottle |
| CN108506733A (en) * | 2018-05-10 | 2018-09-07 | 江苏南大光电材料股份有限公司 | Material bulking device |
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| Date | Code | Title | Description |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20110720 |