CN208629053U - The non-contact accurate tool setting gauge of ultra-precise cutting diamond cutter - Google Patents

The non-contact accurate tool setting gauge of ultra-precise cutting diamond cutter Download PDF

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CN208629053U
CN208629053U CN201821392417.7U CN201821392417U CN208629053U CN 208629053 U CN208629053 U CN 208629053U CN 201821392417 U CN201821392417 U CN 201821392417U CN 208629053 U CN208629053 U CN 208629053U
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ring body
camera lens
ccd
support ring
tool setting
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CN201821392417.7U
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程颖
李晓凡
卢永斌
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Tianjin University of Science and Technology
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Tianjin University of Science and Technology
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Abstract

The utility model relates to a kind of non-contact accurate tool setting gauges of ultra-precise cutting diamond cutter, tool setting gauge includes the lighting source for supporting ring body, the camera lens of X, Y both direction, CCD and X-direction, the X-direction installation X-direction camera lens and its CCD of lathe coordinate are corresponded in support ring body, the Y direction installation Y-direction camera lens and its CCD of lathe coordinate are corresponded in support ring body, wherein X, Y-direction camera lens are located at the inside of support ring body, X, Y-direction CCD is located at the outside of support ring body, and lighting source is installed towards X-direction camera lens in side in support ring body.The tool setting gauge of the utility model realizes Cutting Tools for Superprecision Machining high-precision optical on-line checking, it overcomes tool position adjustment period length and tool wear in Ultra-precision Turning and is difficult to the difficulties avoided, increase substantially processing efficiency, and make cutter zero abrasion, there is biggish application prospect and promotional value.

Description

The non-contact accurate tool setting gauge of ultra-precise cutting diamond cutter
Technical field
The utility model belongs to super hot investment casting field, while belonging to mechanical parameter fields of measurement, is related to a kind of superfinishing The close non-contacting measuring technique of turning diamond cutter, especially a kind of ultra-precise cutting diamond cutter are non-contact precisely to knife Instrument.
Background technique
With the aggravation of modernized society's the accelerating rhythm of life and energy consumption, it is desirable to instrument and equipments can be more Add it is portable and energy saving, therefore, modern optic electronics it is either military or it is civilian all towards miniaturization, integrated and light weight The direction of change is developed.Optical element used in conventional optical systems is mainly plane or spherical surface, is needed by multi-disc optics member Part is just able to achieve good optical design demand, and therefore, optical system is generally more complex.With the manufacturing development of optics, open Beginning there is aspherical and free form surface, can not only maximum simplied system structure, realize it is integrated, moreover it is possible to greatest extent Raising and improve system performance, by it is gradual for minimize in the system of lightness.
Only under the premise of free form surface can be manufactured, be possible to develop freeform optics.Currently, superfinishing Close Single point diamond turning o technology is that one of the manufacture means of high-precision optical free form surface can be achieved.The advantages of technology, is Machine-Tool Control precision is high, cutter can sharpen sharp enough, is cooperating good cutting material and mN grades of cutting force that can realize The optical component of Nanoscale Surface roughness and submicron order face type deviation.
Spatial position accuracy between diamond cutter and lathe is that the acquisition of Ultra-precision diamond turning is high-precision One of the necessary condition for spending optical surface type, needs to be corrected roughly by optics tool setting gauge, and combines repeatedly Test-cut met accurate It corrects (being commonly called as to knife).Currently, single-point diamond super precision lathe cutting tools measurement method mainly has vertical microscope optical detection Detection device that the gentle flotation line of device is adjustable differential transformer (LVDT), generally existing repetitive positioning accuracy is poor, and reliability is low, must The deficiency that trial cut measurement correction makes up measuring device to the method for knife deviation must be relied on repeatedly.
Conventional suspension formula optics setting system repeatability positioning accuracy for super precision lathe is greater than 10 μm, and reliability Difference because structure is cantilever beam structure of the supporting point far from cutting zone, and is processed PV value and is required generally in 0.5um~1um, light After learning to knife, Test-cut met is still needed to carry out the calibration of cutter exact position, time waste and tool is caused to wear in vain.
Utility model content
The utility model is to improve single-point diamond precise processing precision and processing efficiency as final goal, with knife in processing Tool position detecting system is research object, for existing vertical micro- setting system repetitive positioning accuracy is poor, resolution ratio is low The problems such as and the problems such as Test-cut met is low to cutting efficiency and tool wear, intend a set of novel optical cutter on-line checking dress of exploitation It sets.The device is based on image recognition technology, is realized using the mechanical structure and optical system of novel superelevation repetitive positioning accuracy Automatic acquisition of the Ultra-precision Turning process to cutter parameters, and it is freely bent can to meet optics by calculating dressing tool offset The needs of face machining accuracy solve the problems, such as that tool position is difficult to modify in Ultra-precision Turning.
Realize the technical solution of the utility model aim:
A kind of non-contact accurate tool setting gauge of ultra-precise cutting diamond cutter, the mirror including support ring body, X, Y both direction The lighting source of head, CCD and X-direction, the X-direction that support ring body correspond to lathe coordinate install X-direction camera lens and its CCD corresponds to the Y direction installation Y-direction camera lens and its CCD of lathe coordinate in support ring body, and wherein X, Y-direction camera lens are located at branch The inside of pushing out ring body, X, Y-direction CCD are located at the outside of support ring body, and side is installed towards X-direction camera lens and illuminated in support ring body Light source.
Moreover, the tool setting gauge absorption is mounted on the vacuum chuck of super precision lathe.
Moreover, the bore of the support ring body is 100~150mm.
Moreover, the pixel of the CCD is depending on measurement visual field catercorner length and the ratio of measurement accuracy.
Moreover, the maximum amplification of the camera lens is depending on the ratio of photosurface width and true field width.
The design of the utility model revolving support avoids original cantilevered optics tool setting device weight due to caused by gravity The disadvantage of multiple positioning accuracy difference, can achieve very high repetitive positioning accuracy, it can guarantee camera focus and machine tool chief axis it Between relative positional relationship.Diamond cutter is converted into picture signal by optical measuring system, is transferred in industrial personal computer, is led to It crosses image processing system to be handled, according to information such as pixel distribution and brightness, obtains the edge contour of cutter, calculate half The geometric parameters such as diameter, angle, and with certain format storage and output display.By research tool-setting error to parts size precision The influence generated with form accuracy proposes turnery processing scale error model caused by lathe X and Y-direction tool-setting error respectively, Further influence of the analysis tool-setting error to machining shape.And calibration technique is parameterized using arc profile degree, it will be to knife Error and the comprehensive kinematic error compensation of machine tool error improve the machining accuracy of freeform optics surface into machining path.
The advantages of the utility model and the utility model has the advantages that
1, the utility model tool setting gauge can cooperate high power to put by measuring system repeatability Positioning Precision Control within 1um Macro lens extracts cutter profile location information, tool position deviation is quick and precisely corrected, so that improving processing efficiency avoids cutter Abrasion, breaks routine techniques constraint, increases new technical force for Ultra-precision Turning technology chain.
2, the utility model tool setting gauge realizes Cutting Tools for Superprecision Machining high-precision optical on-line checking, overcomes ultraprecise The tool position adjustment period is long in processing and tool wear is difficult to the difficulties avoided, increases substantially processing efficiency, and make Cutter zero abrasion has biggish application prospect and promotional value.
Detailed description of the invention
Fig. 1 is the three-dimensional structure diagram of this tool setting gauge;
Fig. 2 is three axis single-point diamond lathe structure schematic diagrames;
Fig. 3 (a) is the usage state diagram of this tool setting gauge;;
Scheme of installation of Fig. 3 (b) this tool setting gauge on three axis single-point diamond lathe vacuum chucks;
Fig. 4 is the working principle block diagram of this tool setting gauge;
Fig. 5 is this tool setting gauge optical detection process schematic;
Fig. 6 is influence model of the tool-setting error to work pieces process face shape;
The existing suspension type optics setting system of Fig. 7 is to knife post-processing surface PV value;
Fig. 8 processes rear surface PV value using the compensation presetting cutter method of this patent.
Specific embodiment
The utility model is described in further detail with reference to the accompanying drawing and by specific embodiment, and following embodiment is only retouched The property stated, it is not restrictive, protection scope of this utility model cannot be limited by this.
A kind of non-contact accurate tool setting gauge of ultra-precise cutting diamond cutter, including support ring body 1, X and Y both direction The lighting source of camera lens, CCD and X-direction, support ring body correspond to lathe coordinate X-direction install X-direction camera lens 7 and its CCD8 corresponds to the Y direction installation Y-direction camera lens 4 and its CCD3 of lathe coordinate in support ring body.Wherein X, Y-direction camera lens position In the inside of support ring body, X, Y-direction CCD are located at the outside of support ring body, and side is installed towards X-direction camera lens in support ring body Lighting source 5.
The support ring body bore is 120mm, and the design of revolving support avoids original beam type optics tool setting device The disadvantage of the difference of the repetitive positioning accuracy due to caused by gravity.
The specific implementation step of the calculating of the microlens and CCD parameter that are referred in the utility model implementation process are as follows:
(1) firstly, calculating the pixel request of CCD, according to formula (1),
The catercorner length of visual field is wherein measured according to measurement object, it is determined as 1.5mm, measurement accuracy are 1 μm, obtain CCD Pixel at least should be 1500, it is possible to select the CCD of 2048x1526 pixel, can meet the requirements.
(2) the visual field size as required for the photosurface size of camera and measuring system, estimates micro objective most Big amplification factor, according to formula (2),
Such as, the CCD selected is 1/2 inch, photosurface 6.4mmx4.8mm, true field required for measuring system Width isIt can then calculateIt may be selected according to this maximum amplification Corresponding microscope;
(3) simultaneously, the selection of camera lens needs to consider measurement request, such as the type selecting for constraining completion camera lens of operating distance.
It is referred in the utility model implementation process and adjusts knife tool arc center and main-shaft core ultraprecise to positive specific reality Apply step are as follows:
(1) firstly, being less than 100nm using inductance instrument correct radial bounce datum level 6 and main shaft concentricity;
(2) then, parallel with the face XOZ using the integrated datum level 2 of inductance instrument searching Y-direction CCD, the depth of parallelism is less than 100nm, from And realize knife tool arc center and main-shaft core ultraprecise to just.
What is referred in the utility model implementation process obtains the specific implementation step of tool image using optical detection apparatus Are as follows:
(1) optical measuring system includes optical system, image capturing system, image processing module and image display module Deng as shown in Figure 4;
(2) diamond cutter is converted by picture signal by CCD, be transferred in industrial personal computer, pass through image processing system It is handled, according to information such as pixel distribution and brightness, obtains the edge contour of cutter, calculate the set such as radius, angle ginseng Number, and with certain format storage and output and display;
(3) optical detection apparatus needs to be completed at the same time the measurement of the spatial position of corner radius and point of a knife, adopts respectively Image acquisition is carried out with two CCD cameras, as shown in Figure 5.Measurement accuracy is required to reach 1 μm, the measurement system of vertical direction System completes the measurement of corner radius, and the measuring system of horizontal direction completes the measurement of point of a knife spatial position.
What is referred in the utility model implementation process obtains diamond cutter parameter by tool image using image procossing Specific implementation step are as follows:
(1) image processing process is as shown in fig. 6, by image preprocessing, the image characteristic point in image processing techniques Extract with match, the reconstruct of characteristic point obtains D coordinates value of the characteristic point in vision system;
(2) cutter and following process system coordinate system space bit can be constructed according to the vision system coordinate system of Accurate Calibration Relationship is set, to realize precision to knife process.
The specific implementation established error assessment system and carry out machining path compensation referred in the utility model implementation process Step are as follows:
(1) influence that research tool-setting error generates parts size precision and form accuracy, establish error assessment system into Row network analysis.By knife error respectively to height Y-direction and horizontal X direction projection, such tool-setting error is to processing surface precision Influence factor has been simplified as three: cutter height direction alignment error, cutter horizontal direction alignment error and point of a knife curvature are partly The offset error of diameter, it is as shown in Figure 7 that this three errors influence model to workpiece surface figure accuracy;The direct shadow of spatial position state of cutter Ring the surface precision of workpieces processing;The offset error of point of a knife radius of curvature directly affects the form error of workpiece to be machined, point of a knife The waviness error of arc radius also can finally rerun a movie onto finished surface, same to influence workpiece surface face type;
(2) turnery processing scale error model caused by lathe X and Y-direction tool-setting error is proposed respectively, is further analyzed Influence of the tool-setting error to machining shape;
(3) calibration technique is parameterized using arc profile degree, by the comprehensive kinematic error compensation of tool-setting error and lathe to adding In work path, the machining accuracy of freeform optics surface is improved.
It is complete to two with the compensation presetting cutter method of suspension type optics setting system existing on lathe and this patent respectively Complete the same workpiece carries out trial cut, trial cut parameter be it is identical aspherical, workpiece surface is measured using contourgraph, is such as schemed 7, shown in Fig. 8, by the comparison of surface PV value, 1.8035 μm of original method, 0.7026 μm of this method, PV value, which has, to be obviously improved.

Claims (5)

1. a kind of non-contact accurate tool setting gauge of ultra-precise cutting diamond cutter, it is characterised in that: including supporting ring body, X, Y two The lighting source of the camera lens in a direction, CCD and X-direction correspond to the X-direction installation X-direction of lathe coordinate in support ring body Camera lens and its CCD correspond to the Y direction installation Y-direction camera lens and its CCD of lathe coordinate in support ring body, wherein X, Y-direction mirror Head is located at the inside of support ring body, and X, Y-direction CCD are located at the outside of support ring body, and side is towards X-direction camera lens in support ring body Lighting source is installed.
2. the non-contact accurate tool setting gauge of ultra-precise cutting diamond cutter according to claim 1, it is characterised in that: described Tool setting gauge absorption is mounted on the vacuum chuck of super precision lathe.
3. the non-contact accurate tool setting gauge of ultra-precise cutting diamond cutter according to claim 1, it is characterised in that: described The bore for supporting ring body is 100~150mm.
4. the non-contact accurate tool setting gauge of ultra-precise cutting diamond cutter according to claim 1, it is characterised in that: described The pixel of CCD is depending on measurement visual field catercorner length and the ratio of measurement accuracy.
5. the non-contact accurate tool setting gauge of ultra-precise cutting diamond cutter according to claim 1, it is characterised in that: described The maximum amplification of camera lens is depending on the ratio of photosurface width and true field width.
CN201821392417.7U 2018-08-28 2018-08-28 The non-contact accurate tool setting gauge of ultra-precise cutting diamond cutter Active CN208629053U (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108942413A (en) * 2018-08-28 2018-12-07 天津科技大学 The non-contact accurate tool setting gauge of ultra-precise cutting diamond cutter and presetting cutter method
CN110000606A (en) * 2019-04-18 2019-07-12 哈尔滨工业大学 A kind of presetting cutter method for processing Terahertz slow-wave structure part
CN111571307A (en) * 2020-05-14 2020-08-25 哈尔滨理工大学 On-machine detection device for cutter abrasion
TWI749961B (en) * 2020-12-22 2021-12-11 雷應科技股份有限公司 Tool detector

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108942413A (en) * 2018-08-28 2018-12-07 天津科技大学 The non-contact accurate tool setting gauge of ultra-precise cutting diamond cutter and presetting cutter method
CN108942413B (en) * 2018-08-28 2024-04-19 天津科技大学 Non-contact accurate tool setting gauge and tool setting method for ultra-precise turning diamond tool
CN110000606A (en) * 2019-04-18 2019-07-12 哈尔滨工业大学 A kind of presetting cutter method for processing Terahertz slow-wave structure part
CN111571307A (en) * 2020-05-14 2020-08-25 哈尔滨理工大学 On-machine detection device for cutter abrasion
TWI749961B (en) * 2020-12-22 2021-12-11 雷應科技股份有限公司 Tool detector

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