CN208547810U - 一种可调节激光模组的对位ldi曝光机 - Google Patents
一种可调节激光模组的对位ldi曝光机 Download PDFInfo
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CN113934113A (zh) * | 2021-10-18 | 2022-01-14 | 深圳市凯瑞得智能股份有限公司 | 一种基于ccd对位系统的曝光机 |
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CN113934113A (zh) * | 2021-10-18 | 2022-01-14 | 深圳市凯瑞得智能股份有限公司 | 一种基于ccd对位系统的曝光机 |
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Denomination of utility model: An alignment LDI exposure machine with adjustable laser module Effective date of registration: 20210428 Granted publication date: 20190226 Pledgee: Shunde Guangdong rural commercial bank Limited by Share Ltd. Daliang branch Pledgor: FOSHAN TANSIDING TECHNOLOGY Co.,Ltd. Registration number: Y2021440000166 |
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Date of cancellation: 20220523 Granted publication date: 20190226 Pledgee: Shunde Guangdong rural commercial bank Limited by Share Ltd. Daliang branch Pledgor: FOSHAN TANSIDING TECHNOLOGY CO.,LTD. Registration number: Y2021440000166 |
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PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: An alignment LDI exposure machine with adjustable laser module Effective date of registration: 20220525 Granted publication date: 20190226 Pledgee: Guangdong Shunde Rural Commercial Bank Co.,Ltd. science and technology innovation sub branch Pledgor: FOSHAN TANSIDING TECHNOLOGY CO.,LTD. Registration number: Y2022980006379 |