CN208520938U - A kind of leakage current test equipment of chip - Google Patents

A kind of leakage current test equipment of chip Download PDF

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Publication number
CN208520938U
CN208520938U CN201820764753.3U CN201820764753U CN208520938U CN 208520938 U CN208520938 U CN 208520938U CN 201820764753 U CN201820764753 U CN 201820764753U CN 208520938 U CN208520938 U CN 208520938U
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CN
China
Prior art keywords
side plate
chip
pedestal
driven voller
electric machine
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Expired - Fee Related
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CN201820764753.3U
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Chinese (zh)
Inventor
王淑琴
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Shenzhen Diertai Technology Co Ltd
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Shenzhen Diertai Technology Co Ltd
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Priority to CN201820764753.3U priority Critical patent/CN208520938U/en
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Publication of CN208520938U publication Critical patent/CN208520938U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model provides a kind of leakage current test equipment of chip, including apparatus body, the apparatus body includes pedestal, the pedestal is U-shaped structure, the first side plate is connected on one vertical part of the pedestal, the second side plate is connected on another vertical part of the pedestal, first side plate and second side plate are horizontal opposite, transport mechanism is equipped between first side plate and second side plate, the transport mechanism includes the first driven voller and the second driven voller, the utility model passes through transport mechanism to mechanism for testing self-feeding, mechanism for testing carries out electric leakage current test to chip to be measured, the electric leakage of each pin flows through multi-channel analog selection switch feeding control module and is handled, and determine non-defective unit or waste product, to be sorted to subsequent handling to chip to be measured, automation and intelligence degree are high, it is strong to greatly reduce hand labor Degree, improves testing efficiency, ensure that measuring accuracy, improve production and processing efficiency.

Description

A kind of leakage current test equipment of chip
Technical field
The utility model relates to chip testing devices technical field, in particular to the leakage current test equipment of a kind of chip.
Background technique
It is open circuit under ideal conditions, between the pin and the earth of chip, is high resistant shape between them but under actual conditions State flows through in addition might have small electric current when voltage, and this electric current is known as leakage current.After chip flow, need to survey Whether the leakage current for trying chip is up to standard, and the leakage current such as fruit chip is excessive, for example is applied to mobile phone, laptop etc. and needs electricity On battery-powered electronic equipment, chip can serious influence stand-by time, influence the quality of product, thus leakage current need it is prudent Consider.
In recent years, with the development of integrated circuit, various chip pins are closer and closer, and pin is more and more, pin spacing Also smaller and smaller, many difficulties are brought to production, maintenance, Integration Assembly And Checkout.Existing leakage current measurement method is usually people Work uses test fixture and multimeter, tests the leakage current of chip pin one by one, and this method testing efficiency is very low, test essence Degree is unable to get guarantee, leverages production and processing efficiency.
Utility model content
(1) the technical issues of solving
To solve the above-mentioned problems, the utility model provides a kind of leakage current test equipment of chip, passes through conveyer Structure carries out electric leakage current test to chip to be measured to mechanism for testing self-feeding, mechanism for testing, and the electric leakage of each pin flows through multichannel mould Quasi- selection switch is sent into control module and is handled, and determines non-defective unit or waste product, to divide to subsequent handling chip to be measured It picking, automation and intelligence degree are high, and labor intensity is greatly reduced, testing efficiency is improved, ensure that measuring accuracy, Improve production and processing efficiency.
(2) technical solution
A kind of leakage current test equipment of chip, including apparatus body, the apparatus body include pedestal, the pedestal is U-shaped structure connects the first side plate on one vertical part of the pedestal, connects the second side plate on another vertical part of the pedestal, First side plate and second side plate are that level is opposite, and conveyer is equipped between first side plate and second side plate Structure, the transport mechanism include the first driven voller and the second driven voller, and first side is run through in one end of first driven voller One end of plate is simultaneously stretched out outside first side plate, and the other end of first driven voller runs through one end of second side plate and stretches Out outside second side plate, one end of second driven voller runs through the other end of first side plate and stretches out first side Outside plate, the other end of second driven voller runs through the other end of second side plate and stretches out outside second side plate, described Conveyer belt is equipped between first driven voller and second driven voller, the conveyer belt is equipped with a pair of of rib, a pair of gear The opposite two sides positioned at the conveyer belt in side, the inside of the rib are equipped with slot, are equipped with chip between a pair of rib The two sides of support plate, the chip support plate are equipped with inserted block, and the inserted block is corresponding with the slot, the chip support plate and the gear Side is connected by the inserted block with the slot, and the upper surface of the chip support plate is equipped with several placing grooves, the placing groove On the central axes of the chip support plate, the first rotating electric machine and the second electric rotating are respectively equipped on the transverse part of the pedestal The opposite transverse part both ends positioned at the pedestal of machine, first rotating electric machine and second rotating electric machine, first rotation First rotary shaft of rotating motor runs through a vertical part of the pedestal and stretches out outside a vertical part of the pedestal, stretches out in described Between first rotary shaft and first driven voller outside one vertical part of pedestal be equipped with the first tightening belt, described second Second rotary shaft of rotating electric machine runs through another vertical part of the pedestal and stretches out outside another vertical part of the pedestal, stretches out It is equipped in second rotary shaft outside another vertical part of the pedestal and between first driven voller the second tightening belt, The conveyer belt is equipped with mechanism for testing, and the mechanism for testing includes testing jig, and the testing jig is inverted U-shaped structure, the survey One vertical part of examination frame is connected with first side plate, another vertical part of the testing jig is connected with second side plate Connect, be equipped with control module in the transverse part of the testing jig, the transverse part bottom side of the testing jig it is placed in the middle be equipped with linear motor, it is described The end connecting test head of the telescopic rod of linear motor, the measuring head includes data reception board, is set in the data reception board There is multi-channel analog selection switch, the bottom of the data reception board is equipped with the connection base being recessed inwardly, the multi-channel analog choosing It selects switch to be electrically connected with the connection base, the multi-channel analog selection switch passes through data line and the control module It is electrically connected, the bottom of the data reception board connects line collecting plate, and the bottom of the line collecting plate is equipped with several test probes, described Position and the quantity for testing probe are corresponding with the pin of chip to be measured, and the top of the line collecting plate is equipped with connecting male, described Connecting male is corresponding with the connection base, the line collecting plate and the data reception board by the connecting male with it is described Connection base is connected, and the test probe and the connecting male are electrically connected, and the test probe passes through the multichannel mould Quasi- selection switch connects the input terminal of the control module with the data line, and the output end of the control module connects respectively It connects first rotating electric machine, second rotating electric machine and the linear motor, external power supply and provides operating voltage for system.
Further, first rotating electric machine and second rotating electric machine select RS-380SH type stepper motor.
Further, the multi-channel analog selection switch selects 16 path analoging switch CD4067.
Further, the connection base and the connecting male are made of carbon fibre material.
Further, the control module selects 16 single-chip microcontroller MC95S12DJ128.
(3) beneficial effect
The utility model provides a kind of leakage current test equipment of chip, is put into chip for chip front side to be measured is directed downwardly In the placing groove of support plate, chip support plate is connected by the inserted block of two sides with the slot of rib, thus it is fixed on a moving belt with Conveyer belt moves together, and the installation connection type of inserted block and slot is highly convenient for dismounting, time saving and energy saving, meets different model core The testing requirement of piece, control module control the first rotating electric machine and the second rotating electric machine synchronous working, the first rotating electric machine and the Two rotating electric machines pass through the first tightening belt and the second tightening belt respectively while driving the rotation of the first driven voller, the first driven voller The second driven voller is driven to follow rotation by conveyer belt, so that transmit transport mechanism chip to be measured toward mechanism for testing direction, When chip to be measured enters in mechanism for testing, linear motor puts down measuring head, and test probe is connect by connecting male and data The connection base for receiving plate is connected, so that test probe be made to be fixedly mounted on data reception board bottom, connecting male and connection are female The installation connection type of seat is also very easy to disassemble, can be used for replacing the test probe of corresponding chip to be measured, meets different shaped The testing requirement of number chip, test probe are connected with the pin of chip to be measured, measure the electric leakage fluxion of the pin of chip to be measured According to leakage data turns through the A/D of multi-channel analog selection switch and data line feeding control module in data reception board Parallel operation is handled, and determines whether the leakage data of pin is up to standard, therefore, it is determined that chip to be measured is non-defective unit or waste product, after Continuous process sorts chip to be measured, and automation and intelligence degree are high, greatly reduces labor intensity, improves survey Efficiency is tried, measuring accuracy is ensure that, improves production and processing efficiency, simple in sturcture, ingenious in design, detection accuracy is high, rings Answer speed fast, stability and good reliability have good practicability and scalability, can be widely used in chip testing Other occasions.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of the leakage current test equipment of chip involved in the utility model.
Fig. 2 is a kind of connection of the chip support plate and rib of the leakage current test equipment of chip involved in the utility model Schematic diagram.
Fig. 3 shows for a kind of Facad structure of the transport mechanism of the leakage current test equipment of chip involved in the utility model It is intended to.
Fig. 4 shows for a kind of Facad structure of the mechanism for testing of the leakage current test equipment of chip involved in the utility model It is intended to.
Fig. 5 is a kind of structural schematic diagram of the measuring head of the leakage current test equipment of chip involved in the utility model.
Fig. 6 is a kind of System Working Principle figure of the leakage current test equipment of chip involved in the utility model.
Specific embodiment
Embodiment involved in the utility model is described in further details with reference to the accompanying drawing.
In conjunction with FIG. 1 to FIG. 6, a kind of leakage current test equipment of chip, including apparatus body, apparatus body include pedestal 1, Pedestal 1 is U-shaped structure, connects the first side plate 2 on a vertical part of pedestal 1, connects the second side plate on another vertical part of pedestal 1 3, the first side plate 2 and the second side plate 3 are that level is opposite, and transport mechanism, conveyer are equipped between the first side plate 2 and the second side plate 3 Structure includes the first driven voller 4 and the second driven voller 5, the one end and stretching first of one end of the first driven voller 4 through the first side plate 2 Outside side plate 2, the other end of the first driven voller 4 runs through one end of the second side plate 3 and stretches out outside the second side plate 3, the second driven voller 5 One end is outside the other end and the first side plate 2 of stretching of the first side plate 2, and the other end of the second driven voller 5 is through the second side plate 3 The other end simultaneously stretches out outside the second side plate 3, conveyer belt 6 is equipped between the first driven voller 4 and the second driven voller 5, conveyer belt 6 is equipped with A pair of of rib 7, the opposite two sides positioned at conveyer belt 6 of a pair of of rib 7, the inside of rib 7 are equipped with slot 8, a pair of of rib 7 it Between be equipped with chip support plate 9, the two sides of chip support plate 9 are equipped with inserted block 10, and inserted block 10 is corresponding with slot 8, chip support plate 9 and rib 7 are connected by inserted block 10 with slot 8, and the upper surface of chip support plate 9 is equipped with several placing grooves 11, and placing groove 11 is located at chip load On the central axes of plate 9, the first rotating electric machine 12 and the second rotating electric machine 13, the first electric rotating are respectively equipped on the transverse part of pedestal 1 Machine 12 and the opposite transverse part both ends positioned at pedestal 1 of the second rotating electric machine 13, the first rotary shaft 14 of the first rotating electric machine 12 are passed through It wears a vertical part of pedestal 1 and stretches out outside a vertical part of pedestal 1, stretch out in the first rotary shaft outside a vertical part of pedestal 1 14 and first are equipped with the first tightening belt 15 between driven voller 4, and the second rotary shaft 16 of the second rotating electric machine 13 is through pedestal 1 Another vertical part is simultaneously stretched out outside another vertical part of pedestal 1, stretch out in the second rotary shaft 16 outside another vertical part of pedestal 1 with The second tightening belt 17 is equipped between first driven voller 4, conveyer belt 6 is equipped with mechanism for testing, and mechanism for testing includes testing jig 18, Testing jig 18 is inverted U-shaped structure, and a vertical part of testing jig 18 is connected with the first side plate 2, another vertical part of testing jig 18 It is connected with the second side plate 3, control module 19 is equipped in the transverse part of testing jig 18, the transverse part bottom side of testing jig 18 is placed in the middle is set There is linear motor 20, the end connecting test head of the telescopic rod 21 of linear motor 20, measuring head includes data reception board 22, data It is equipped with multi-channel analog in receiver board 22 and selects switch 23, the bottom of data reception board 22 is equipped with the connection base 24 being recessed inwardly, Multi-channel analog selection switch 23 with connect base 24 electric connection, multi-channel analog selection switch 23 pass through data line 25 and Control module 19 is electrically connected, and the bottom of data reception board 22 connects line collecting plate 26, and the bottom of line collecting plate 26 is equipped with several tests Probe 27, position and the quantity for testing probe 27 are corresponding with the pin of chip to be measured, and it is public that the top of line collecting plate 26 is equipped with connection Seat 28, connecting male 28 is corresponding with connection base 24, line collecting plate 26 and data reception board 22 pass through connecting male 28 with connect Base 24 is connected, and test probe 27 and connecting male 28 are electrically connected, and test probe 27 selects switch 23 by multi-channel analog With the input terminal of 25 link control module 19 of data line, the output end of control module 19 is separately connected the first rotating electric machine 12, the second rotating electric machine 13 and linear motor 20, external power supply provides operating voltage for system.
The alignment of inserted block 10 of chip support plate 9 is inserted into the slot 8 of rib 7, so that chip support plate 9 is fixed on conveyer belt The upper surface of 6, make chip support plate 9 that conveyer belt 6 be followed to move together.Inserted block 10 and the installation connection type of slot 8 are highly convenient for tearing open Dress, it is time saving and energy saving, meet the testing requirement of different model chip.
By in the chip front side to be measured placing groove 11 directed downwardly for being put into chip support plate 9, i.e., so that the pin court of chip to be measured On.External power supply is connected, system is made to enter working condition.Control module 19 exports two-way synchronous control signal control first respectively Rotating electric machine 12 and the work of the second rotating electric machine 13, the first rotating electric machine 12 drive the rotation of the first rotary shaft 14, the second electric rotating Machine 13 drives the rotation of the second rotary shaft 16, and the first rotary shaft 14 and the second rotary shaft 16 pass through the first tightening belt 15 and the respectively Two tightening belts 17 drive the rotation of the first driven voller 4 simultaneously, the first driven voller 4 further through conveyer belt 6 drive the second driven voller 5 with With rotation, to make transport mechanism move toward mechanism for testing direction, by the chip support plate 9 on conveyer belt 6 toward mechanism for testing direction Transmission.First rotating electric machine 12 and the second rotating electric machine 13 select RS-380SH type stepper motor, can very easily set The step frequency of rotating electric machine, so that the speed of rotation of rotary shaft is adjusted, to adjust the transfer rate of transport mechanism.
When chip to be measured enters in mechanism for testing, control module 19 controls linear motor 20 and works, and telescopic rod 21 is by end Measuring head put down.The lead harness of test probe 27 comes together in connecting male 28 by line collecting plate 26, and test probe 27 passes through Connecting male 28 and the connection base 24 of data reception board 22 are fixedly linked, and connecting male 28 connects with the installation for connecting base 24 It connects that mode is also very easy to disassemble, can be used for replacing the test probe 27 of different chips to be measured, meet different model chip Testing requirement.Connecting male 28 and connection base 24 are made of carbon fibre material, and carbon fiber axle is high to intensity and modulus, density Low, no creep higher than performance, superhigh temperature resistant under non-oxidizing atmosphere, fatigue performance is good, and thermal expansion coefficient is small and has each to different Property, good corrosion resistance, good conductive and heat-conductive and electromagnetism performance tired out, can repeatedly plug, service life is lasting.
Measuring head is put down by linear motor 20, and the test probe 27 of bottom is pressed against above the pin of chip to be measured, thus The pin and test probe 27 for making chip to be measured form test loop, and the electric leakage of the pin of chip to be measured is measured by test probe 27 Flow data.The test leakage data gating of multi-channel analog selection 23 pairs of test probes 27 of switch in data reception board 22 connects It receives, multi-channel analog selects switch 23 to select 16 path analoging switch CD4067, can pass through 16 tunnel leakage datas simultaneously, meets big absolutely The testing requirement of segment chip.Multi-channel analog selection switch 23 is connected by data line 25 with control module 19, is leaked electricity Flow data is admitted to the analog signal input channel of control module 19 through multi-channel analog selection switch 23 and data line 25.Control A/D converter built in the analog signal input channel of molding block 19 carries out analog-to-digital conversion process to leakage data, and determines to leak Whether current data is up to standard.If the leakage data of one of pin of chip to be measured is not up to standard, control module 19 determines The chip to be measured be waste product, otherwise control module 19 determine the chip to be measured be non-defective unit, with to subsequent handling to chip to be measured into Row sorting.
The input detection signal of 19 pairs of test probes 27 of control module is handled, respectively output control signal control first Rotating electric machine 12, the second rotating electric machine 13 and linear motor 20 work.In order to simplify circuit, cost is reduced, system is improved The scalability in later period, control module 19 select 16 single-chip microcontroller MC95S12DJ128, Flash, 8KB's of built-in 128KB There is the EEPROM of RAM and 2KB 5V input and driving capability, CPU working frequency can reach 50MHz.The independent number I/ in 29 tunnels O Interface, 20 road bands interrupt and the digital I/O interface of arousal function, and 10 A/D converters in 28 channels are defeated with 8 channels Enter capture/output to compare, also there are 8 programmable channels PWM.With 2 serial asynchronous communication interface SCI, 2 synchronous serials Peripheral Interface SPI, I2C bus and CAN functional module etc., meet design requirement.
The utility model provides a kind of leakage current test equipment of chip, is put into chip for chip front side to be measured is directed downwardly In the placing groove of support plate, chip support plate is connected by the inserted block of two sides with the slot of rib, thus it is fixed on a moving belt with Conveyer belt moves together, and the installation connection type of inserted block and slot is highly convenient for dismounting, time saving and energy saving, meets different model core The testing requirement of piece, control module control the first rotating electric machine and the second rotating electric machine synchronous working, the first rotating electric machine and the Two rotating electric machines pass through the first tightening belt and the second tightening belt respectively while driving the rotation of the first driven voller, the first driven voller The second driven voller is driven to follow rotation by conveyer belt, so that transmit transport mechanism chip to be measured toward mechanism for testing direction, When chip to be measured enters in mechanism for testing, linear motor puts down measuring head, and test probe is connect by connecting male and data The connection base for receiving plate is connected, so that test probe be made to be fixedly mounted on data reception board bottom, connecting male and connection are female The installation connection type of seat is also very easy to disassemble, can be used for replacing the test probe of corresponding chip to be measured, meets different shaped The testing requirement of number chip, test probe are connected with the pin of chip to be measured, measure the electric leakage fluxion of the pin of chip to be measured According to leakage data turns through the A/D of multi-channel analog selection switch and data line feeding control module in data reception board Parallel operation is handled, and determines whether the leakage data of pin is up to standard, therefore, it is determined that chip to be measured is non-defective unit or waste product, after Continuous process sorts chip to be measured, and automation and intelligence degree are high, greatly reduces labor intensity, improves survey Efficiency is tried, measuring accuracy is ensure that, improves production and processing efficiency, simple in sturcture, ingenious in design, detection accuracy is high, rings Answer speed fast, stability and good reliability have good practicability and scalability, can be widely used in chip testing Other occasions.
Embodiment described above is only that preferred embodiments of the present invention are described, not practical to this Novel conception and scope is defined.Without departing from the design concept of the present utility model, ordinary people in the field couple The all variations and modifications that the technical solution of the utility model is made, should fall within the protection scope of the present utility model, this reality With novel claimed technology contents, it is all described in the claims.

Claims (5)

1. a kind of leakage current test equipment of chip, including apparatus body, it is characterised in that: the apparatus body includes pedestal, The pedestal is U-shaped structure, connects the first side plate on a vertical part of the pedestal, connects on another vertical part of the pedestal Second side plate, first side plate and second side plate are that level is opposite, between first side plate and second side plate Equipped with transport mechanism, the transport mechanism includes the first driven voller and the second driven voller, and one end of first driven voller is run through One end of first side plate is simultaneously stretched out outside first side plate, and the other end of first driven voller runs through second side plate One end and stretch out outside second side plate, the other end and stretching of one end of second driven voller through first side plate Outside first side plate, the other end of second driven voller runs through the other end of second side plate and stretches out described second side Outside plate, it being equipped with conveyer belt between first driven voller and second driven voller, the conveyer belt is equipped with a pair of of rib, and one The two sides positioned at the conveyer belt opposite to the rib, the inside of the rib are equipped with slot, between a pair of rib Equipped with chip support plate, the two sides of the chip support plate are equipped with inserted block, and the inserted block is corresponding with the slot, the chip support plate It is connected by the inserted block with the slot with the rib, the upper surface of the chip support plate is equipped with several placing grooves, institute It states placing groove to be located on the central axes of the chip support plate, the first rotating electric machine and second is respectively equipped on the transverse part of the pedestal The opposite transverse part both ends positioned at the pedestal of rotating electric machine, first rotating electric machine and second rotating electric machine, it is described First rotary shaft of the first rotating electric machine runs through a vertical part of the pedestal and stretches out outside a vertical part of the pedestal, stretches out It is equipped in first rotary shaft outside a vertical part of the pedestal and between first driven voller the first tightening belt, institute The second rotary shaft for stating the second rotating electric machine runs through another vertical part of the pedestal and stretches out another vertical part of the pedestal Outside, it stretches out in and is equipped with second between second rotary shaft and first driven voller outside another vertical part of the pedestal Tight belt, the conveyer belt are equipped with mechanism for testing, and the mechanism for testing includes testing jig, and the testing jig is inverted U-shaped structure, One vertical part of the testing jig is connected with first side plate, another vertical part of the testing jig and second side plate Be connected, be equipped with control module in the transverse part of the testing jig, the transverse part bottom side of the testing jig it is placed in the middle be equipped with linear motor, The end connecting test head of the telescopic rod of the linear motor, the measuring head includes data reception board, the data reception board Interior to be equipped with multi-channel analog selection switch, the bottom of the data reception board is equipped with the connection base being recessed inwardly, the multichannel mould Quasi- selection switch is electrically connected with the connection base, and the multi-channel analog selection switch passes through data line and the control Module is electrically connected, and the bottom of the data reception board connects line collecting plate, and the bottom of the line collecting plate is equipped with several test probes, The position of the test probe and quantity are corresponding with the pin of chip to be measured, and the top of the line collecting plate is equipped with connecting male, The connecting male is corresponding with the connection base, the line collecting plate and the data reception board by the connecting male with The connection base is connected, and the test probe and the connecting male are electrically connected, and the test probe passes through described more Road analog selection switchs the input terminal that the control module is connected with the data line, the output end point of the control module First rotating electric machine, second rotating electric machine and the linear motor, external power supply are not connected provides work for system Voltage.
2. a kind of leakage current test equipment of chip according to claim 1, it is characterised in that: first rotating electric machine RS-380SH type stepper motor is selected with second rotating electric machine.
3. a kind of leakage current test equipment of chip according to claim 1, it is characterised in that: the multi-channel analog selection Switch selects 16 path analoging switch CD4067.
4. a kind of leakage current test equipment of chip according to claim 1, it is characterised in that: the connection base and institute Connecting male is stated to be made of carbon fibre material.
5. a kind of leakage current test equipment of chip according to claim 1, it is characterised in that: the control module is selected 16 single-chip microcontroller MC95S12DJ128.
CN201820764753.3U 2018-05-22 2018-05-22 A kind of leakage current test equipment of chip Expired - Fee Related CN208520938U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201820764753.3U CN208520938U (en) 2018-05-22 2018-05-22 A kind of leakage current test equipment of chip

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201820764753.3U CN208520938U (en) 2018-05-22 2018-05-22 A kind of leakage current test equipment of chip

Publications (1)

Publication Number Publication Date
CN208520938U true CN208520938U (en) 2019-02-19

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Application Number Title Priority Date Filing Date
CN201820764753.3U Expired - Fee Related CN208520938U (en) 2018-05-22 2018-05-22 A kind of leakage current test equipment of chip

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112345920A (en) * 2020-11-03 2021-02-09 武汉智汇芯科技有限公司 Power-up method and device for testing laser diode chip

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112345920A (en) * 2020-11-03 2021-02-09 武汉智汇芯科技有限公司 Power-up method and device for testing laser diode chip

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CF01 Termination of patent right due to non-payment of annual fee
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Granted publication date: 20190219

Termination date: 20190522