CN208383063U - A kind of wafer detecting apparatus - Google Patents
A kind of wafer detecting apparatus Download PDFInfo
- Publication number
- CN208383063U CN208383063U CN201821021901.9U CN201821021901U CN208383063U CN 208383063 U CN208383063 U CN 208383063U CN 201821021901 U CN201821021901 U CN 201821021901U CN 208383063 U CN208383063 U CN 208383063U
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- China
- Prior art keywords
- light source
- motor
- wafer
- fixedly connected
- plate
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Abstract
The utility model discloses a kind of wafer detecting apparatus, including slide assemblies, support component and rotary components, the slide assemblies include pedestal, light source base, light source support plate, light source fixing plate, backlight, conveyer belt and first motor, the inner sidewall of the pedestal is equipped with shaft, and the shaft is fixedly connected with the base；In the case where known wafer size, infrared emission tube and infrared receiver can be passed through, camera can accurately determine position and the tilt angle of wafer, to pass through the position at four angles of camera accurate observation wafer, improve detection rates, pass through the flexible of electric pushrod, and then convenient for the height of control connecting plate and camera, pass through the second motor of starting and third motor again, control the rotation of support plate and square plate, convenient for the angle of control wafer rotation, the case where original wafer detecting apparatus has a single function is improved, brings otherwise benefit to user of service.
Description
Technical field
The utility model belongs to wafer detection technique field, and in particular to a kind of wafer detecting apparatus.
Background technique
Wafer refers to silicon wafer used in silicon semiconductor production of integrated circuits, since its shape is circle, therefore referred to as wafer；
It can be processed on silicon and is fabricated to various circuit component structures, and become the IC product for having specific electrical functionality, in wafer system
After making completion, wafer test is the very important test of a step, and wafer test is to be connected by probe with wafer upper contact
Touching, tests its electrical characteristic, judges whether it meets factory calibration.
Original wafer detecting apparatus can not accurately determine position and the inclination of wafer in the case where known wafer size
Angle gives user of service so as to cause that detection rates can not be caused to reduce by the position at four angles of camera accurate observation wafer
Bring inconvenience.
Utility model content
The purpose of this utility model is to provide a kind of wafer detecting apparatus, original to solve to propose in above-mentioned background technique
Wafer detecting apparatus in the case where known wafer size, position and the tilt angle of wafer can not be accurately determined, to lead
Cause detection rates can not be caused to reduce by the position at four angles of camera accurate observation wafer, to user of service bring it is many not
Just the problem of.
To achieve the above object, the utility model provides the following technical solutions: a kind of wafer detecting apparatus, including Slide Group
Part, support component and rotary components, the slide assemblies include pedestal, light source base, light source support plate, light source fixing plate, back
The inner sidewall of light source, conveyer belt and first motor, the pedestal is equipped with shaft, and the shaft is fixedly connected with the base, institute
It states conveyer belt and is slidably connected with the pedestal by the shaft, the light source base is located at the upper surface of the conveyer belt, and
It is fixedly connected with the conveyer belt, the output end of the first motor is rotatablely connected the shaft, the upper end of the light source base
Equipped with the light source support plate, the light source support plate is fixedly connected with the light source base, and the light source fixing plate is located at institute
The top of light source support plate is stated, and is fixedly connected with the light source support plate, the upper surface of the light source fixing plate is equipped with described
Backlight, the backlight are fixedly connected with the light source fixing plate, and the first motor and external power supply are electrically connected, described
Support component includes electric pushrod, connecting plate and camera, is equipped with electric pushrod, the electricity on the left of the upper surface of the light source base
Dynamic push rod is fixedly connected with the light source base, and the connecting plate is located at the top of the electric pushrod, and electronic is pushed away with described
Bar is fixedly connected, and the right end of the connecting plate is equipped with the camera, and the camera is fixedly connected with the connecting plate, the rotation
Component includes mounting post, the second motor, support plate and third motor, is equipped with the mounting post on the right side of the upper surface of the pedestal,
The mounting post is fixedly connected with the base, and second motor is located at the inner sidewall of the mounting post, and with the installation
Column is fixedly connected, and the output end of second motor is rotatablely connected the support plate, and the lateral wall of the support plate is equipped with described
Third motor, the third motor are fixedly connected with the support plate, and the upper surface of the support plate is equipped with square plate, and described the
The output end of three motors is rotatablely connected the square plate, and the upper surface of the square plate is equipped with wafer, the wafer and the side
Shape plate is fixedly connected, and second motor and the third motor and external power supply are electrically connected.
Preferably, the quantity of the third motor is eight, is located at the lateral wall of the support plate.
Preferably, circular trough is opened up on the right side of the upper surface of the pedestal, the bottom end of the mounting post is embedded in the circular trough
It is interior.
Preferably, the quantity of the camera is four, and four cameras are projeced into the position at four angles of wafer respectively.
Preferably, the shape of the light source base is cuboid, and the width of the conveyer belt is wider than the light source base
Degree is wide.
Compared with prior art, the utility model has the beneficial effects that in the case where known wafer size, it can be by red
Outside line transmitting tube and infrared receiver, camera can accurately determine position and the tilt angle of wafer, to pass through camera standard
The really position at observation four angles of wafer, improves detection rates, by the flexible of electric pushrod, and then convenient for control connecting plate and phase
The height of machine, then by the second motor of starting and third motor, the rotation of support plate and square plate is controlled, convenient for control wafer rotation
The angle turned, improves the case where original wafer detecting apparatus has a single function, brings otherwise benefit to user of service.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the left view structural representation of the utility model；
Fig. 3 is the base vertical view in the utility model；
Fig. 4 is the wafer top view in the utility model；
Fig. 5 is the backlight schematic diagram of internal structure in the utility model；
In figure: 10, slide assemblies；11, pedestal；12, light source base；13, light source support plate；14, light source fixing plate；15,
Backlight；16, conveyer belt；17, first motor；20, support component；21, electric pushrod；22, connecting plate；23, camera；30, it revolves
Turn component；31, mounting post；32, the second motor；33, support plate；34, third motor.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
Fig. 1-5 is please referred to, the utility model provides a kind of technical solution: a kind of wafer detecting apparatus, including slide assemblies
10, support component 20 and rotary components 30, slide assemblies 10 are solid including pedestal 11, light source base 12, light source support plate 13, light source
Fixed board 14, backlight 15, conveyer belt 16 and first motor 17, the inner sidewall of pedestal 11 are equipped with shaft, and shaft and pedestal 11 are fixed
Connection, conveyer belt 16 is slidably connected with pedestal 11 by shaft, and light source base 12 is located at the upper surface of conveyer belt 16, and with transmission
Band 16 is fixedly connected, and the output end of first motor 17 is rotatablely connected shaft, and the upper end of light source base 12 is equipped with light source support plate 13,
Light source support plate 13 is fixedly connected with light source base 12, and light source fixing plate 14 is located at the top of light source support plate 13, and and light source
Support plate 13 is fixedly connected, and the upper surface of light source fixing plate 14 is equipped with backlight 15, and backlight 15 and light source fixing plate 14 are fixed
Connection, first motor 17 and external power supply are electrically connected, and support component 20 includes electric pushrod 21, connecting plate 22 and camera 23,
Electric pushrod 21 is equipped on the left of the upper surface of light source base 12, electric pushrod 21 is fixedly connected with light source base 12, connecting plate 22
Be fixedly connected positioned at the top of electric pushrod 21, and with electric pushrod 21, the right end of connecting plate 22 is equipped with camera 23, camera 23 with
Connecting plate 22 is fixedly connected, and rotary components 30 include mounting post 31, the second motor 32, support plate 33 and third motor 34, pedestal
Mounting post 31 is equipped on the right side of 11 upper surface, mounting post 31 is fixedly connected with pedestal 11, and the second motor 32 is located at mounting post 31
Inner sidewall, and be fixedly connected with mounting post 31, the output end of the second motor 32 is rotatablely connected support plate 33, the outside of support plate 33
Wall is equipped with third motor 34, and third motor 34 is fixedly connected with support plate 33, and the upper surface of support plate 33 is equipped with square plate, third
The output end of motor 34 is rotatablely connected square plate, and the upper surface of square plate is equipped with wafer, and wafer is fixedly connected with square plate, and second
Motor 32 and third motor 34 and external power supply are electrically connected.
In the present embodiment, 21 model DTZ06 of electric pushrod, 17 model Y355M2-2 of first motor, the second motor
32 model 5IK120RGN-CF, 34 model of third motor, 130 small machine, first motor 17, the second motor 32 and third electricity
Machine 34 is electrically connected with external power supply respectively, and the right end of connecting plate 22 is equipped with camera 23, and the right end of camera 23 is sent out equipped with infrared ray
Pipe is penetrated, the upper surface of support plate 33 is equipped with eight infrared receivers, and the inner sidewall of pedestal 11 is equipped with shaft, conveyer belt 16 and bottom
Seat 11 is slidably connected by shaft, and the output end of first motor 17 is rotatablely connected the shaft, and infrared emission tube issues red
Outside line projects infrared receiver, and by the micro computer in integrated circuit, treated that signal is sent to impulse electromagnetic valve, electricity
Magnet valve stops operating after receiving signal by specified instruction control first motor 17, and wafer is accurately positioned in the position of four cameras 23
The position at four angles, convenient for observing the position at four angles of wafer by four cameras 23, thus accurately determine wafer position and
Tilt angle, if infrared receiver is not received by infrared ray, solenoid valve control first motor 17 is rotated, first motor 17
Output end drive shaft rotation, and then drive the transmission of conveyer belt 16, be automatically positioned four angles of wafer convenient for four cameras 23
Position, improve detection efficiency, the external receiver of remote-control sytem of electric pushrod 21 can control electric pushrod by receiver of remote-control sytem
It is flexible, and then convenient for the height of control camera 23, the starting of the second motor 32 is driven by external power supply, then pass through the second motor
32 output end is rotatablely connected support plate 33, to realize the rotation of support plate 33, drives third motor 34 by external power supply
Starting, then square plate is rotatablely connected by the output end of third motor 34, to realize the rotation of wafer.
Further, the quantity of third motor 34 is eight, is located at the lateral wall of support plate 33.
In the present embodiment, the square plate is rotatablely connected by the output end of third motor 34, to drive the rotation of wafer
Turn.
Further, circular trough is opened up on the right side of the upper surface of pedestal 11, the bottom end of mounting post 31 is in circular trough.
In the present embodiment, by the circular trough opened up on the right side of 11 upper surface of pedestal, it is easily installed the fixation of column 31.
Further, the quantity of camera 23 is four, and four cameras 23 are projeced into the position at four angles of wafer respectively.
In the present embodiment, the position at four angles of wafer is projected by camera 23, convenient for accurately determining the position of wafer and inclining
Rake angle
Further, the shape of light source base 12 is cuboid, and the width of conveyer belt 16 is wider than the width of light source base 12.
In the present embodiment, in sliding process, 16 upper surface of conveyer belt is equipped with light source base 12, passes through the work of conveyer belt 16
With convenient for the transmission of the drive light source base 12 of conveyer belt 16.
The working principle and process for using of the utility model: after the utility model installs, user of service can be will test
Device moving to point-of-use, external power supply is opened, and can manually control the flexible of electric pushrod 21 by receiver of remote-control sytem, into
And convenient for the height of control connecting plate 22, the right end of connecting plate 22 is equipped with camera 23, and the right end of camera 23 emits equipped with infrared ray
The upper surface of pipe, support plate 33 is equipped with eight infrared receivers, if the position of position and four angles of wafer that camera 23 projects
Inconsistent, infrared receiver can not receive infrared ray, then solenoid valve receives after signal by specified the first electricity of instruction control
Machine 17 rotates, and the output end of first motor 17 drives shaft rotation, and then drives the transmission of conveyer belt 16, the upper table of conveyer belt 16
Face is equipped with light source base 12, by the transmission of conveyer belt 16, and then drives the sliding of light source base 12, consequently facilitating camera 23 is certainly
The position at dynamic positioning four angles of wafer, improves detection efficiency, if the position consistency of position and four angles of wafer that camera 23 projects,
Infrared receiver receives infrared ray, then solenoid valve control first motor 17 stops operating, and the position of four cameras 23 is accurate
The position at four angles of wafer is positioned, the position at four angles of wafer is observed convenient for four cameras 23, to accurately determine the position of wafer
It sets and tilt angle, the output end of the second motor 32 is rotatablely connected support plate 33, the second motor 32 can be driven by external power supply
Starting, and then control the rotation of support plate 33, the output end of third motor 34 is rotatablely connected square plate, can pass through external power supply
The starting of third motor 34 is driven, and then controls the rotation of square plate, to control the rotation of wafer.
While there has been shown and described that the embodiments of the present invention, for the ordinary skill in the art,
It is understood that these embodiments can be carried out with a variety of variations in the case where not departing from the principles of the present invention and spirit, repaired
Change, replacement and variant, the scope of the utility model is defined by the appended claims and the equivalents thereof.
Claims (5)
1. a kind of wafer detecting apparatus, it is characterised in that: including slide assemblies (10), support component (20) and rotary components
(30), the slide assemblies (10) include pedestal (11), light source base (12), light source support plate (13), light source fixing plate (14),
The inner sidewall of backlight (15), conveyer belt (16) and first motor (17), the pedestal (11) is equipped with shaft, the shaft and institute
It states pedestal (11) to be fixedly connected, the conveyer belt (16) is slidably connected with the pedestal (11) by the shaft, the light source
Pedestal (12) is located at the upper surface of the conveyer belt (16), and is fixedly connected with the conveyer belt (16), the first motor
(17) output end is rotatablely connected the shaft, and the upper end of the light source base (12) is equipped with the light source support plate (13), institute
It states light source support plate (13) to be fixedly connected with the light source base (12), the light source fixing plate (14) is located at light source support
The top of plate (13), and be fixedly connected with the light source support plate (13), the upper surface of the light source fixing plate (14) is equipped with institute
It states backlight (15), the backlight (15) is fixedly connected with the light source fixing plate (14), the first motor (17) and outer
Portion's power supply is electrically connected, and the support component (20) includes electric pushrod (21), connecting plate (22) and camera (23), the light source
Electric pushrod (21) are equipped on the left of the upper surface of pedestal (12), the electric pushrod (21) and the light source base (12) fixed company
It connects, the connecting plate (22) is located at the top of the electric pushrod (21), and is fixedly connected with the electric pushrod (21), described
The right end of connecting plate (22) is equipped with the camera (23), and the camera (23) is fixedly connected with the connecting plate (22), the rotation
Turning component (30) includes mounting post (31), the second motor (32), support plate (33) and third motor (34), the pedestal (11)
The mounting post (31) are equipped on the right side of upper surface, the mounting post (31) is fixedly connected with the pedestal (11), second electricity
Machine (32) is located at the inner sidewall of the mounting post (31), and is fixedly connected with the mounting post (31), second motor (32)
Output end be rotatablely connected the support plate (33), the lateral wall of the support plate (33) is equipped with the third motor (34), institute
It states third motor (34) to be fixedly connected with the support plate (33), the upper surface of the support plate (33) is equipped with square plate, described
The output end of third motor (34) is rotatablely connected the square plate, and the upper surface of the square plate is equipped with wafer, the wafer with
The square plate is fixedly connected, and second motor (32) and the third motor (34) and external power supply are electrically connected.
2. a kind of wafer detecting apparatus according to claim 1, it is characterised in that: the quantity of the third motor (34) is
Eight, it is located at the lateral wall of the support plate (33).
3. a kind of wafer detecting apparatus according to claim 1, it is characterised in that: on the right side of the upper surface of the pedestal (11)
Circular trough is opened up, the bottom end of the mounting post (31) is in the circular trough.
4. a kind of wafer detecting apparatus according to claim 1, it is characterised in that: the quantity of the camera (23) is four
A, four cameras (23) are projeced into the position at four angles of wafer respectively.
5. a kind of wafer detecting apparatus according to claim 1, it is characterised in that: the shape of the light source base (12) is
The width of cuboid, the conveyer belt (16) is wider than the width of the light source base (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821021901.9U CN208383063U (en) | 2018-06-29 | 2018-06-29 | A kind of wafer detecting apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821021901.9U CN208383063U (en) | 2018-06-29 | 2018-06-29 | A kind of wafer detecting apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208383063U true CN208383063U (en) | 2019-01-15 |
Family
ID=64965056
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821021901.9U Expired - Fee Related CN208383063U (en) | 2018-06-29 | 2018-06-29 | A kind of wafer detecting apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208383063U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109946579A (en) * | 2019-04-04 | 2019-06-28 | 杭州载力科技有限公司 | A kind of semiconductor wafer detecting device |
| CN112903584A (en) * | 2021-01-19 | 2021-06-04 | 西安奕斯伟硅片技术有限公司 | Device for adjusting position of detection light source relative to wafer to be detected |
| CN113053765A (en) * | 2021-03-08 | 2021-06-29 | 常州雷射激光设备有限公司 | Detection equipment for semiconductor diode chip |
-
2018
- 2018-06-29 CN CN201821021901.9U patent/CN208383063U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109946579A (en) * | 2019-04-04 | 2019-06-28 | 杭州载力科技有限公司 | A kind of semiconductor wafer detecting device |
| CN112903584A (en) * | 2021-01-19 | 2021-06-04 | 西安奕斯伟硅片技术有限公司 | Device for adjusting position of detection light source relative to wafer to be detected |
| CN113053765A (en) * | 2021-03-08 | 2021-06-29 | 常州雷射激光设备有限公司 | Detection equipment for semiconductor diode chip |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190115 Termination date: 20200629 |