CN110044311A - A kind of dovetail groove guide rail slide unit measuring device and its measurement method - Google Patents
A kind of dovetail groove guide rail slide unit measuring device and its measurement method Download PDFInfo
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- CN110044311A CN110044311A CN201910343552.5A CN201910343552A CN110044311A CN 110044311 A CN110044311 A CN 110044311A CN 201910343552 A CN201910343552 A CN 201910343552A CN 110044311 A CN110044311 A CN 110044311A
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- signal
- slide unit
- diffraction image
- dovetail groove
- electric signal
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/08—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness for measuring thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C9/00—Measuring inclination, e.g. by clinometers, by levels
Abstract
The invention belongs to be machined field of measuring technique more particularly to a kind of dovetail groove guide rail slide unit measuring device, including measuring table, linear measure longimetry component and angle measure component, linear measure longimetry component is used to measure the height and width of slide unit or dovetail groove；Angle measure component includes rotating member, laser emitter, diffraction image receiving device and signal processing module, and rotating member is for driving laser emitter to rotate around Y-axis；The laser irradiation that laser emitter is used to be generated makes inclined-plane to be detected generate diffraction image signal to dovetail groove to be detected or the inclined-plane of dovetail slide unit；Diffraction image receiving device is for receiving diffraction image signal and being converted into electric signal；Signal processing module carries out processing analysis to the electric signal for receiving the electric signal that diffraction image receiving device is transmitted, to judge whether diffraction image receiving device receives diffraction image signal；The angular transducer for detecting laser emitter rotational angle is provided on rotating member.
Description
Technical field
The invention belongs to be machined field of measuring technique more particularly to a kind of dovetail groove guide rail slide unit measuring device and its
Measurement method.
Background technique
In machinery field, oat tail groove structure is widely used mechanical structure, makees mechanical movement under normal circumstances,
Because its motion stabilization, shaking small, there is very high kinematic accuracy, the effect of oat tail groove structure is usually to be oriented to and branch
Support.In modern industry, as shown in Figure 1, the guide rail structure that dovetail slide unit 42 and dovetail groove guide rail 41 cooperate is using very universal.
But the measurement after dovetail slide unit 42 and dovetail groove guide rail 41 are processed is always a problem, traditional measurement method needs to use
The measuring tools such as vernier caliper, by carrying out with the help of auxiliary element, also to carry out more complicated conversion can just obtain survey
Data are measured, measurement formality is cumbersome, and it is time-consuming and laborious, and also measurement result has been easy error.It is difficult to meet in a conventional manner real
The demand of border detection.The present invention provides a kind of dovetail groove guide rail slide unit measuring device based on laser diffraction and sensing technology to solve
Problem cumbersome, that conversion is complicated, measurement error is larger is certainly measured, keeps measurement more efficient, it is easy to operate, simplify conversion, as a result
Accurately, use scope is wider, there is certain market promotion prospect.
Summary of the invention
To solve the problems, such as to be not easy to measure after dovetail slide unit of the existing technology and the processing of dovetail groove guide rail, the present invention
A kind of dovetail groove guide rail slide unit measuring device and its measurement method are provided.
In order to solve the above technical problems, the technical solution adopted in the present invention is as follows, a kind of dovetail groove guide rail slide unit measurement
Device, including measuring table, linear measure longimetry component and angle measure component, the linear measure longimetry component include horizontal measurement plate, erect
Measurement plate, signal conditioner and computer, the horizontal measurement plate are slidably arranged on measuring table along Z-direction, the perpendicular measurement
Plate is slidably arranged in X direction in horizontal measurement plate, and first distance sensor, the perpendicular survey are fixedly installed in the horizontal measurement plate
Second distance sensor is fixedly installed on template, the signal conditioner is for receiving first distance sensor and second distance
The electric signal of sensor transmission, the amplification and filtering of horizontal electrical signal of going forward side by side, the signal conditioner pass through data collecting card and institute
State Computer signal connection；
The angle measure component includes rotating member, laser emitter, diffraction image receiving device and signal processing module,
The rotating member is arranged on measuring table, and its lower section for being located at linear measure longimetry component, and the rotating member is for driving laser
Transmitter is rotated around Y-axis；The laser irradiation that the laser emitter is used to be generated is sliding to dovetail groove to be detected or dovetail
On the inclined-plane of platform, inclined-plane to be detected is made to generate diffraction image signal；The diffraction image receiving device is for receiving the diffraction
Picture signal is simultaneously converted into electric signal；The signal processing module is for receiving the electricity that diffraction image receiving device is transmitted
Signal, and processing analysis is carried out to the electric signal, to judge whether diffraction image receiving device receives diffraction image signal；
The angular transducer for detecting laser emitter rotational angle, the angular transducer and signal are provided on the rotating member
The connection of conditioner signal.
Preferably, the rotating member includes the first pedestal, the second pedestal, first rotating shaft and the second shaft, the measurement
The lower part of platform offers accommodating chamber, the opening of the accommodating chamber and horizontal measurement plate towards identical, first pedestal is fixed
It is arranged in accommodating chamber, the first rotating shaft is rotatablely connected around Y-direction and the first pedestal, second pedestal and angular transducer
It is fixed in first rotating shaft, second shaft is rotatably arranged on the second pedestal around X-direction, the laser emitter
It is fixed in the second shaft；The diffraction image receiving device is fixed in accommodating chamber, and the diffraction image receives
Device and laser emitter are distributed along Y-direction, and the laser emitter is biased to diffraction image receiving device.Rotating member structure letter
Single reliable, convenient for assembly, the second shaft is connect by interference fit with the second pedestal, is conveniently adjusted laser emitter and is biased to diffraction
The angle of picture receiver part.
It is rotated preferably, the first rotating shaft is driven by stepper motor, slewing area is 0 °~90 °.I.e. laser is sent out
Emitter rotates within the scope of 0 °~90 °, guarantees that the laser of laser transmitter projects generates diffraction image signal on inclined-plane to be measured
While, shorten detection time.
Preferably, the signal processing module includes signal picker, binary conversion treatment device and signal processor, it is described
Successively signal connects for diffraction image receiving device, signal picker, binary conversion treatment device, signal processor and computer, described
Binary conversion treatment is carried out by binary conversion treatment device after the electric signal that signal picker reception diffraction image receiving device is transmitted,
It then passes to signal processor and carries out signal processing analysis, to judge whether diffraction image receiving device receives diffraction pattern
As signal.
Preferably, the signal processor selects arm processor.
Preferably, the laser emitter selects He-Ne laser emitter.
Preferably, the diffraction image receiving device selects photosensitive array device.
Further, the signal conditioner includes signal amplifier and traffic filter, and the data collecting card includes
A/D converter, successively signal connects for the signal amplifier, traffic filter, A/D converter and computer.
Further, the first guide groove is offered along Z-direction on the measuring table, extended outwardly in the horizontal measurement plate
There is the first sliding block being slidably matched with first guide groove；The second guide groove, institute are offered in the horizontal measurement plate in X direction
State the second sliding block for being outward extended in perpendicular measurement plate and being slidably matched with second guide groove.
A kind of measurement method of dovetail groove guide rail slide unit measuring device as described in any one of the above embodiments, including swallow is measured as follows
The step of tail slide unit:
(a) measuring device is placed on the pedestal of dovetail slide unit, along Z-direction slide the horizontal measurement plate to and slide unit
Top fitting, the first distance sensor positioned at measuring table and slide unit between, examine by the first distance sensor at this time
The height electric signal of slide unit is surveyed, the signal conditioner receives the height electric signal of first distance sensor, and carries out height electricity
The amplification and filtering of signal, then height electric signal is delivered to by computer by the data collecting card, the computer calculates
Obtain the height H of slide unit1；
(b) side of the measuring device is close to a sideline of slide unit, slide in X direction the perpendicular measurement plate to cunning
Another sideline of platform is bonded, and the second distance sensor is located at the top of slide unit, the second distance sensor inspection at this time
The width electric signal of slide unit is surveyed, the signal conditioner receives the width electric signal of second distance sensor, line width of going forward side by side electricity
The amplification and filtering of signal, then width electric signal is delivered to by computer by the data collecting card, the computer calculates
Obtain the width A on slide unit top；
(c) the first rotating shaft rotation, the angle signal of the angular transducer detection first rotating shaft rotation, the signal
The angle electric signal of conditioner receiving angle sensor, and the amplification and filtering of angle electric signal are carried out, then pass through the data
Angle electric signal is delivered to computer by capture card；The laser irradiation that the laser emitter generates simultaneously is to slide unit to be detected
On inclined-plane, inclined-plane to be detected is made to generate diffraction image signal, the diffraction image receiving device receives diffraction image signal and will
It is converted to electric signal, and the signal processing module receives the electric signal that diffraction image receiving device is transmitted, and to the telecommunications
Number processing analysis is carried out, to judge whether diffraction image receiving device receives diffraction image signal；When the diffraction image
When receiving device receives diffraction image signal, the computer records the angular values of angular transducer at this time, and takes described
The angular average α of angular transducer, the inclination angle of inclined plane of slide unit is calculated according to the angular average α of the angular transducer
β1。
The measurement method further includes the steps that measuring dovetail groove guide rail as follows:
(d) the height H of dovetail groove is calculated in same step (a), the computer2；
(e) the width B on the side wall top of dovetail groove guide rail is calculated in same step (b), the computer；
(f) the inclination angle of inclined plane β of dovetail groove is calculated in same step (c), the computer2。
The utility model has the advantages that dovetail groove guide rail slide unit measuring device of the invention, by using laser diffraction technology and sensing
Device technology, the degree of automation are higher；Dovetail groove guide rail slide unit measuring device of the invention, diffraction image receiving device using
Photosensitive array device, photosensitive array device carry out the continuous reception of diffraction image, and testing result is more comprehensive, and detection accuracy is high；
Dovetail groove guide rail slide unit measuring device of the invention, due to using laser diffraction and sensing technology, so measurement is more efficient, behaviour
To make simpler, mathematical operation is simpler, and it is as a result more accurate, save more times.
Detailed description of the invention
Fig. 1 is the cooperation schematic diagram of dovetail groove guide rail and dovetail slide unit；
Fig. 2 is the schematic perspective view of dovetail groove guide rail slide unit measuring device of the invention；
Fig. 3 is the schematic perspective view of the angle measure component of dovetail groove guide rail slide unit measuring device of the invention；
Fig. 4 is the perspective view of the explosion of the angle measure component of dovetail groove guide rail slide unit measuring device of the invention；
Fig. 5 is the schematic top plan view of the angle measure component of dovetail groove guide rail slide unit measuring device of the invention；
Fig. 6 is the perspective view of the explosion of the linear measure longimetry component of dovetail groove guide rail slide unit measuring device of the invention；
Schematic perspective view when Fig. 7 is dovetail groove guide rail slide unit measuring device measurement dovetail slide unit of the invention；
Status diagram when Fig. 8 is dovetail groove guide rail slide unit measuring device measurement dovetail slide unit height of the invention；
Status diagram when Fig. 9 is dovetail groove guide rail slide unit measuring device measurement dovetail slide unit width of the invention；
Status diagram when Figure 10 is dovetail groove guide rail slide unit measuring device measurement dovetail slide unit angle of the invention；
Schematic perspective view when Figure 11 is dovetail groove guide rail slide unit measuring device measurement dovetail groove guide rail of the invention；
Status diagram when Figure 12 is dovetail groove guide rail slide unit measuring device measurement dovetail groove height of the invention；
Status diagram when Figure 13 is dovetail groove guide rail slide unit measuring device measurement dovetail groove guide rail width of the invention；
Status diagram when Figure 14 is dovetail groove guide rail slide unit measuring device measurement dovetail groove angle of the invention；
Figure 15 is that the laser diffraction technology of dovetail groove guide rail slide unit measuring device and the principle of sensing technology of the invention are shown
It is intended to；
In figure: 1, measuring table, the 11, first guide groove, 12, accommodating chamber, 2, linear measure longimetry component, 21, horizontal measurement plate,
211, the first sliding block, the 212, second guide groove, 22, perpendicular measurement plate, the 221, second sliding block, 23, first distance sensor, 24, the
Two range sensors, 25, signal conditioner, 251, signal amplifier, 252, traffic filter, 26, data collecting card, 261, A/
D converter, 27, computer, 3, angle measure component, 31, angular transducer, 32, laser emitter, 33, diffraction image reception
Device, 34, signal processing module, 341, signal picker, 342, binary conversion treatment device, 343, signal processor, 35, rotation
Part, the 351, first pedestal, the 352, second pedestal, 353, first rotating shaft, the 354, second shaft, 41, dovetail groove guide rail, 411, dovetail
Slot, 42, dovetail slide unit, 421, pedestal, 422, slide unit；The height H of slide unit1, the width A on slide unit top, the angle of angular transducer
Spend average value α, the inclination angle of inclined plane β of slide unit1, the height H of dovetail groove2, the width B on the side wall top of dovetail groove guide rail, dovetail groove
Inclination angle of inclined plane β2。
Specific embodiment
Embodiment
As shown in Fig. 1~15, a kind of dovetail groove guide rail slide unit measuring device, as shown in Figure 1, dovetail slide unit to be detected 42
Including pedestal 421 and the slide unit 422 being arranged on pedestal 421, the dovetail groove 411 of the slide unit 422 and dovetail groove guide rail 41 is sliding
Dynamic cooperation, which includes measuring table 1, linear measure longimetry component 2 and angle measure component 3, for ease of description with phase
Mutually vertical X-direction, Y-direction and Z-direction establishes space coordinates, and Z-direction is towards vertical direction, such as Fig. 2, Fig. 6 and Figure 15
Shown, the linear measure longimetry component 2 includes horizontal measurement plate 21, perpendicular measurement plate 22, signal conditioner 25 and computer 27, the cross
Measurement plate 21 is slidably arranged on measuring table 1 along Z-direction, and the perpendicular measurement plate 22 is slidably arranged in horizontal measurement plate in X direction
On 21, specifically, the first guide groove 11 is offered along Z-direction on the measuring table 1, is extended outwardly in the horizontal measurement plate 21
There is the first sliding block 211 being slidably matched with first guide groove 11；Second is offered in X direction in the horizontal measurement plate 21 to lead
To slot 212, the second sliding block 221 being slidably matched with second guide groove 212 is outward extended in the perpendicular measurement plate 22；Institute
It states and is fixedly installed first distance sensor 23 in horizontal measurement plate 21, second distance biography is fixedly installed in the perpendicular measurement plate 22
Sensor 24, the first distance sensor 23 and second distance sensor 24 are connect with 25 signal of signal conditioner respectively, described
Signal conditioner 25 is used to receive the electric signal that first distance sensor 23 and second distance sensor 24 transmit, and carries out telecommunications
Number amplification and filtering, the signal conditioner 25 connect by data collecting card 26 with 27 signal of computer, specifically,
The signal conditioner 25 includes signal amplifier 251 and traffic filter 252, and the data collecting card 26 is converted including A/D
Device 261, successively signal connects for the signal amplifier 251, traffic filter 252, A/D converter 261 and computer 27；
As shown in Fig. 2, Fig. 3, Fig. 4, Fig. 5 and Figure 15, the angle measure component 3 includes rotating member 35, laser emitter
32, diffraction image receiving device 33 and signal processing module 34, the rotating member 35 is arranged on measuring table 1, and it is located at
The lower section of linear measure longimetry component 2, the rotating member 35 is for driving laser emitter 32 to rotate around Y-axis；The laser emitter
32 laser irradiation for being generated makes inclined-plane to be detected to dovetail groove 411 to be detected or the inclined-plane of dovetail slide unit 42
Diffraction image signal is generated, the laser emitter 32 selects He-Ne laser emitter, but not limited to this；The diffraction image
For receiving device 33 for receiving the diffraction image signal and being converted into electric signal, diffraction image receiving device 33 selects light
Quick array device, but not limited to this；The input terminal of the signal processing module 34 and the output end of diffraction image receiving device 33
It is connected, the output end of the signal processing module 34 is connected with computer 27, and the signal processing module 34 is for receiving diffraction
The electric signal that picture receiver part 33 is transmitted, and processing analysis is carried out to the electric signal, to judge diffraction image receiver
Whether part 33 receives diffraction image signal, and specifically, the signal processing module 34 includes signal picker 341, binaryzation
Processor 342 and signal processor 343, the diffraction image receiving device 33, signal picker 341, binary conversion treatment device
342, successively signal connects signal processor 343 with computer 27, and the signal picker 341 receives diffraction image receiving device
After 33 electric signals transmitted by binary conversion treatment device 342 carry out binary conversion treatment, then pass to signal processor 343 into
Row signal processing analysis, to judge whether diffraction image receiving device 33 receives diffraction image signal, wherein signal processing
Device 343 selects arm processor, but not limited to this；It is provided on the rotating member 35 for detecting 32 angle of rotation of laser emitter
The angular transducer 31 of degree, the angular transducer 31 are also connect with 25 signal of signal conditioner.
As shown in Figure 2, Figure 3 and Figure 4, for the ease of the angular adjustment of assembly and laser emitter 32, the rotating member 35
Including the first pedestal 351, the second pedestal 352, first rotating shaft 353 and the second shaft 354, the lower part of the measuring table 1 is opened up
Have an accommodating chamber 12, the opening of the accommodating chamber 12 and horizontal measurement plate 21 towards identical, first pedestal 351 is fixed at
In accommodating chamber 12, the first rotating shaft 353 is rotatablely connected around Y-direction and the first pedestal 351, and the fixation of the second pedestal 352 is set
It sets in first rotating shaft 353 close to one end of the first pedestal 351, it is remote that the angular transducer 31 is fixed at first rotating shaft 353
One end from the first pedestal 351, second shaft 354 are rotatably arranged on the second pedestal 352 around X-direction, the laser hair
Emitter 32 is fixed in the second shaft 354；The diffraction image receiving device 33 is fixed in accommodating chamber 12, described
Diffraction image receiving device 33 and laser emitter 32 are distributed along Y-direction, and the laser emitter 32 is biased to diffraction image and is connect
Device 33 is received, for the ease of adjusting the drift angle of laser emitter 32, and prevents laser emitter 32 in detection process from shaking, the
Two shafts 354 and the second pedestal 352 are interference fitted, and adjustment laser emitter 32 is biased to diffraction image receiving device 33 before measuring
Angle so that when diffraction image receiving device 33 receives diffraction image signal, the orthographic projection of laser emitter 32 perpendicular to
Inclined-plane, as shown in figs.10 and 14；To improve detection accuracy and shortening detection time, the first rotating shaft 353 passes through shaft coupling
It is sequentially connected (not illustrating in figure) with stepper motor, the stepper motor driving first rotating shaft 353 rotates, and slewing area is 0 °
~90 °.The i.e. described laser emitter 32 rotates within the scope of 0 °~90 °.
A kind of measurement method of dovetail groove guide rail slide unit measuring device as described above, as shown in Fig. 7 and Figure 15, including such as
The step of lower measurement dovetail slide unit 42:
(a) as shown in figure 8, the measuring device is placed on the pedestal 421 of dovetail slide unit 42, described in Z-direction sliding
Horizontal measurement plate 21 is bonded to the top of slide unit 422, and the first distance sensor 23 is located at measuring table 1 and slide unit at this time
Between 422, the first distance sensor 23 detects the height electric signal of slide unit 422, and the signal conditioner 25 receives first
The height electric signal of range sensor 23, and the amplification and filtering of height electric signal are carried out, then pass through the data collecting card 26
Height electric signal is delivered to computer 27, the height H of slide unit 422 is calculated in the computer 271；
(b) as shown in figure 9, the side of the measuring device to be close to a sideline of slide unit 422, in X direction described in sliding
Perpendicular measurement plate 22 to another sideline with slide unit 422 is bonded, and the second distance sensor 24 is located at the upper of slide unit 422 at this time
Side, the second distance sensor 24 detect the width electric signal of slide unit 422, and the signal conditioner 25 receives second distance and passes
The width electric signal of sensor 24, the amplification and filtering of line width of going forward side by side electric signal, then pass through the data collecting card 26 for width
Electric signal is delivered to computer 27, and the width A on 422 top of slide unit is calculated in the computer 27；
(c) as shown in Figure 10, the first rotating shaft 353 rotates, and the angular transducer 31 detects first rotating shaft 353 and rotates
Angle signal, the angle electric signal of the 25 receiving angle sensor 31 of signal conditioner, and carry out putting for angle electric signal
Big and filtering, then angle electric signal is delivered to by computer 27 by the data collecting card 26；The laser emitter simultaneously
In 32 laser irradiations to the inclined-plane of slide unit 422 to be detected generated, inclined-plane to be detected is made to generate diffraction image signal, the diffraction
Picture receiver part 33 receives diffraction image signal and is converted into electric signal, and the signal processing module 34 receives diffraction pattern
Processing analysis is carried out as the electric signal that receiving device 33 is transmitted, and to the electric signal, to judge diffraction image receiving device
Whether 33 receive diffraction image signal；When the diffraction image receiving device 33 receives diffraction image signal, the meter
Calculation machine 27 records the angular values of angular transducer 31 at this time, and takes the angular average α of the angular transducer 31, according to institute
The angular average α for stating angular transducer 31 calculates the inclination angle of inclined plane β of slide unit 4221, because diffraction image receiving device 33 receives
When to diffraction image signal, the orthographic projection of laser emitter 32 is perpendicular to inclined-plane, β1=α；
In conclusion according to the height H of slide unit 4221, the width A on 422 top of slide unit and the inclination angle of inclined plane β of slide unit 4221It can
The other sizes of dovetail slide unit 42 are calculated；
As shown in Figure 11 and Figure 15, which further includes the steps that measuring dovetail groove guide rail 41 as follows:
(d) as shown in figure 12, the height H of dovetail groove 411 is calculated in same step (a), the computer 272；
(e) as shown in figure 13, the side wall top of dovetail groove guide rail 41 is calculated in same step (b), the computer 27
Width B；
(f) as shown in figure 14, the inclination angle of inclined plane β of dovetail groove 411 is calculated in same step (c), the computer 272, because
When diffraction image receiving device 33 receives diffraction image signal, the orthographic projection of laser emitter 32 is perpendicular to inclined-plane, β2=α.
In conclusion according to the height H of dovetail groove 4112, dovetail groove guide rail 41 side wall top width B and dovetail groove
411 inclination angle of inclined plane β2The other sizes of dovetail groove guide rail 41 can be calculated.
Claims (10)
1. a kind of dovetail groove guide rail slide unit measuring device, it is characterised in that: including measuring table (1), linear measure longimetry component (2) and
Angle measure component (3), the linear measure longimetry component (2) include horizontal measurement plate (21), perpendicular measurement plate (22), signal conditioner
(25) it is slidably arranged on measuring table (1) with computer (27), the horizontal measurement plate (21) along Z-direction, the perpendicular measurement plate
(22) it is slidably arranged in X direction on horizontal measurement plate (21), first distance sensing is fixedly installed on the horizontal measurement plate (21)
Device (23) is fixedly installed second distance sensor (24) on the perpendicular measurement plate (22), and the signal conditioner (25) is used for
Receive the electric signal of first distance sensor (23) and second distance sensor (24) transmission, the amplification and mistake of horizontal electrical signal of going forward side by side
Filter, the signal conditioner (25) are connect by data collecting card (26) with the computer (27) signal；
The angle measure component (3) includes rotating member (35), laser emitter (32), diffraction image receiving device (33) and letter
Number processing module (34), the rotating member (35) is arranged on measuring table (1), and it is located under linear measure longimetry component (2)
Side, the rotating member (35) is for driving laser emitter (32) to rotate around Y-axis；The laser emitter (32) is for being produced
In raw laser irradiation to dovetail groove to be detected (411) or the inclined-plane of dovetail slide unit (42), inclined-plane to be detected is made to generate diffraction
Picture signal；The diffraction image receiving device (33) is for receiving the diffraction image signal and being converted into electric signal；
The signal processing module (34) for receiving the electric signal that diffraction image receiving device (33) is transmitted, and to the electric signal into
Row processing analysis, to judge whether diffraction image receiving device (33) receives diffraction image signal；The rotating member (35)
On be provided with angular transducer (31) for detecting laser emitter (32) rotational angle, the angular transducer (31) and letter
The connection of number conditioner (25) signal.
2. dovetail groove guide rail slide unit measuring device according to claim 1, it is characterised in that: the rotating member (35) includes
First pedestal (351), the second pedestal (352), first rotating shaft (353) and the second shaft (354), under the measuring table (1)
Portion offers accommodating chamber (12), the opening of the accommodating chamber (12) and horizontal measurement plate (21) towards identical, first pedestal
(351) it being fixed in accommodating chamber (12), the first rotating shaft (353) is rotatablely connected around Y-direction and the first pedestal (351),
Second pedestal (352) and angular transducer (31) are fixed on first rotating shaft (353), second shaft
(354) it is rotatably arranged on the second pedestal (352) around X-direction, the laser emitter (32) is fixed at the second shaft
(354) on；The diffraction image receiving device (33) is fixed in accommodating chamber (12), the diffraction image receiving device
(33) it is distributed with laser emitter (32) along Y-direction, and the laser emitter (32) is biased to diffraction image receiving device (33).
3. dovetail groove guide rail slide unit measuring device according to claim 2, it is characterised in that: the first rotating shaft (353)
It is driven and is rotated by stepper motor, slewing area is 0 °~90 °.
4. dovetail groove guide rail slide unit measuring device according to claim 1 or 2, it is characterised in that: the signal processing mould
Block (34) includes signal picker (341), binary conversion treatment device (342) and signal processor (343), and the diffraction image receives
Device (33), signal picker (341), binary conversion treatment device (342), signal processor (343) and computer (27) are successively believed
Number connection, the signal picker (341) receive after the electric signal that diffraction image receiving device (33) are transmitted by binaryzation
Processor (342) carries out binary conversion treatment, then passes to signal processor (343) and carries out signal processing analysis, to judge
Whether diffraction image receiving device (33) receives diffraction image signal.
5. dovetail groove guide rail slide unit measuring device according to claim 4, it is characterised in that: the signal processor
(343) arm processor is selected.
6. dovetail groove guide rail slide unit measuring device according to claim 1, it is characterised in that: the laser emitter (32)
Select He-Ne laser emitter.
7. dovetail groove guide rail slide unit measuring device according to claim 1 or 6, it is characterised in that: the diffraction image connects
It receives device (33) and selects photosensitive array device.
8. dovetail groove guide rail slide unit measuring device according to claim 1, it is characterised in that: the signal conditioner (25)
Including signal amplifier (251) and traffic filter (252), the data collecting card (26) includes A/D converter (261), institute
Stating signal amplifier (251), traffic filter (252), A/D converter (261) and computer (27), successively signal connects.
9. dovetail groove guide rail slide unit measuring device according to claim 1 or 2, it is characterised in that: the measuring table (1)
On offered the first guide groove (11) along Z-direction, be outward extended with and first guide groove on the horizontal measurement plate (21)
(11) the first sliding block (211) being slidably matched；The second guide groove (212), institute are offered in X direction on the horizontal measurement plate (21)
State the second sliding block (221) for being outward extended on perpendicular measurement plate (22) and being slidably matched with second guide groove (212).
10. a kind of measurement method of dovetail groove guide rail slide unit measuring device as described in any one of claims 1 to 9, feature
It is: includes the steps that measuring dovetail slide unit (42) as follows:
(a) measuring device is placed on the pedestal (421) of dovetail slide unit (42), slides the horizontal measurement plate along Z-direction
(21) to being bonded with the top of slide unit (422), the first distance sensor (23) is located at measuring table (1) and slide unit at this time
(422) between, the height electric signal of first distance sensor (23) detection slide unit (422), the signal conditioner (25)
The height electric signal of first distance sensor (23) is received, and carries out the amplification and filtering of height electric signal, then passes through the number
Height electric signal is delivered to computer (27) according to capture card (26), the height of slide unit (422) is calculated in the computer (27)
Spend H1；
(b) side of the measuring device is close to a sideline of slide unit (422), slides the perpendicular measurement plate (22) in X direction
To being bonded with another sideline of slide unit (422), the second distance sensor (24) is located at the top of slide unit (422) at this time,
The width electric signal of the second distance sensor (24) detection slide unit (422), the signal conditioner (25) receive second away from
Width electric signal from sensor (24), the amplification and filtering of line width of going forward side by side electric signal, then pass through the data collecting card
(26) width electric signal is delivered to computer (27), the width A on slide unit (422) top is calculated in the computer (27)；
(c) first rotating shaft (353) rotation, the angle letter of angular transducer (31) detection first rotating shaft (353) rotation
Number, the angle electric signal of signal conditioner (25) the receiving angle sensor (31), and carry out angle electric signal amplification and
Filtering, then angle electric signal is delivered to by computer (27) by the data collecting card (26)；The laser emitter simultaneously
(32) in the laser irradiation to the inclined-plane of slide unit to be detected (422) generated, inclined-plane to be detected is made to generate diffraction image signal, it is described
Diffraction image receiving device (33) receives diffraction image signal and is converted into electric signal, and the signal processing module (34) connects
The electric signal that diffraction image receiving device (33) are transmitted is received, and processing analysis is carried out to the electric signal, to judge diffraction pattern
As whether receiving device (33) receive diffraction image signal；When the diffraction image receiving device (33) receives diffraction image
When signal, the computer (27) records the angular values of angular transducer (31) at this time, and takes the angular transducer (31)
Angular average α, the inclination angle of inclined plane β of slide unit (422) is calculated according to the angular average α of the angular transducer (31)1；
The measurement method further includes the steps that measuring dovetail groove guide rail (41) as follows:
(d) the height H of dovetail groove (411) is calculated in same step (a), the computer (27)2；
(e) the width B on the side wall top of dovetail groove guide rail (41) is calculated in same step (b), the computer (27)；
(f) the inclination angle of inclined plane β of dovetail groove (411) is calculated in same step (c), the computer (27)2。
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| CN115015276A (en) * | 2022-08-01 | 2022-09-06 | 华兴智慧(北京)科技有限公司 | Workpiece inclined plane detection device for manufacturing high-end equipment |
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