CN209541679U - A kind of X/Y plane photo-electric non-contact displacement sensor system - Google Patents

A kind of X/Y plane photo-electric non-contact displacement sensor system Download PDF

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Publication number
CN209541679U
CN209541679U CN201920603487.0U CN201920603487U CN209541679U CN 209541679 U CN209541679 U CN 209541679U CN 201920603487 U CN201920603487 U CN 201920603487U CN 209541679 U CN209541679 U CN 209541679U
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China
Prior art keywords
displacement
electro
optical system
photoelectric sensor
sensor
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Expired - Fee Related
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CN201920603487.0U
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Chinese (zh)
Inventor
钟子明
徐志祥
黄龙
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Dalian University of Technology
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Dalian University of Technology
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Abstract

A kind of X/Y plane photo-electric non-contact displacement sensor system, belongs to electro-optical system field and internet of things field, including computer system, electro-optical system and kinetic control system;Electro-optical system is fixed on object under test and connect with computer system, and kinetic control system is connect with electro-optical system, mobile in the direction XY for controlling object to be measured;Object to be measured is set to above substrate.Photoelectric sensor includes image processing system, digital signal processor and SPI interface, it is handled by the picture signal that digital signal processor acquires imaging sensor, electro-optical system is obtained in the displacement Δ X and Δ Y of X and Y-direction, displacement is transferred to singlechip control chip by photoelectric sensor SPI interface again, data after treatment are sent to computer system by WIFI module and are handled.Measurement, real-time Transmission and Bit andits control while the utility model can be realized the displacement of XY both direction, the problem of being able to solve prior art high speed, both direction while measuring displacement.

Description

A kind of X/Y plane photo-electric non-contact displacement sensor system
Technical field
The utility model belongs to electro-optical system and internet of things field, is related to a kind of non-contact displacement biography of X-Y plane photo-electric Sensor system and its application method.
Background technique
High speed machine has obtained vigorous growth due to can greatly improve production efficiency in recent years, numerically-controlled machine tool, It is successfully applied in the equipment such as robot, electronic package machine, Material Sorting machine.However, due to the restriction of detection means, The motion profile test of high speed machine is carried out in the case where being far below its operating rate, under high-speed cruising such as 1g or more acceleration Motion profile be then difficult to detect, to high speed machine motion trail analysis, diagnosis bring very big difficulty.
Currently, the motion profile test of high speed machine is tested in the case where being far below its operating rate, due to speed effect Significantly, the track testing result under low speed and high speed, it is high accelerate under track have bigger difference, with the test result under low speed come It represents or speculates that mechanical track at high speeds is last resort, and test equipment is mostly expensive.Common at present swashs The Optical displacement sensor such as thousands of members of Panasonic HG-C1200c1400 laser displacement sensor list branch price, and measurement accuracy only has 5um, it is very high to the environmental requirement of test site, it is unfavorable for the relevant technologies and is promoted in the trajectory measurement of high speed machine.This The CMOS optical sensor that patent innovation uses can provide non-mechanical tracking engine, in the achievable image of the chip interior Capture, digitlization and digital processing, cooperate relevant processing circuit, cost control in dozens of yuan and Measurement Resolution is reachable At low cost, precision is high to 1.5um, integrated level is high, has opened up the application field of electro-optical imaging sensors;The displacement essence of this system Degree is 1.5um, and limit measuring speed is 10.16m/s, measurement while can be realized the displacement of high-speed, high precision X-Y both direction, It has a good application prospect.
Utility model content
The utility model provides a kind of X/Y plane photo-electric non-contact displacement sensor system and its application method.
The technical solution adopted in the utility model is as follows:
A kind of X/Y plane photo-electric non-contact displacement sensor system, including computer system, electro-optical system and movement Control system.The electro-optical system is fixed on object under test and connect with computer system, and major function is that measurement displacement becomes Change and send data to computer system.The kinetic control system includes two servo motors, is connected with electro-optical system It connects, it is mobile in the direction XY for controlling object to be measured.
The electro-optical system is mainly by photoelectric sensor HERO16K, STM32F0 singlechip control chip, WIFI module ESP8266 and peripheral circuit composition, photoelectric sensor HERO16K, STM32F0 singlechip control chip, WIFI module ESP8266 Three is integrated on pcb board, and installation in the shell, is communicated entirely through WIFI module ESP8266 with computer system. The photoelectric sensor HERO16K includes image capturing system, digital signal processor and SPI interface;STM32F0 single-chip microcontroller Control chip has 2 SPI interfaces, is connected with photoelectric sensor SPI interface, up to 87 high-speed i/o interfaces, serial two lines debugging (SWD);WIFI module ESP8266 embeds lwip protocol stack, supports serial ports local upgrade firmware, and Windows and Linux is supported to open Hair.The photoelectric sensor HERO16K realizes the real-time and accurate measurement tracking of equipment displacement by image processing function, The displacement signal obtained after photoelectric sensor is handled again is under the control of STM32F0 singlechip control chip by serial ports through WIFI Module ESP8266 is transmitted data in computer, and computer handles displacement signal, and shows measurement knot on the screen Fruit and the subsequent data processing of progress.
Further, the X-Y plane photo-electric non-contact displacement sensor system, including control system, horizontal displacement Register, vertical displacement register, sequence circuit, sense amplifier, output amplifier, cmos image sensor array.Each portion The effect of part are as follows:
Control system: for charge on horizontal, vertical displacement register to be converted to voltage, and pass through output amplifier It is exported after amplification;
Horizontal shift register: for capturing image object feature calculation and the consistent moving direction of sensor principal direction Displacement waits control system detection conversion;
Vertical displacement register: the photogenerated charge of image-sensitive unit is transferred to vertical displacement position in cmos image sensor array In register, control system reads charge and is converted to voltage signal;
Cmos image sensor array: the photosensitive part of CMOS optical image former records present image, waits at digital signal Manage device acquisition;
Sequence circuit: digital signal processor (DSP) time frequency analysis simultaneously extracts characteristic value Δ x and Δ y, and auxiliary is integrated Operation calculates XY displacement, and photogenerated charge is transferred in horizontal and vertical displacement sensor;
Sense amplifier: sense amplifier is the core component of memory, and the output of digital signal processor is believed Number amplification after be stored in register;
Output amplifier: the register voltage signal that control circuit is converted to is amplified, STM32F0 single-chip microcontroller is reached Control the detectable level of chip.
Further, the picture signal that the digital signal processor acquires cmos image sensor is handled, and is obtained To the displacement Δ x and Δ y of electro-optical system in the x and y direction, then the displacement that processing is obtained passes through photoelectric sensor SPI Interface is transferred to STM32F0 singlechip control chip, and data after treatment are sent to calculating by WIFI module ESP8266 Machine system.
A kind of application method of X-Y plane photo-electric non-contact displacement sensor system, the non-contact displacement sensor system System can be used for the displacement monitoring of object to be measured, can be used for the quantitative movement for controlling object to be measured, specifically include with Lower step:
When the displacement monitoring for object to be measured, step are as follows:
(1) when needing to monitor the motion profile of object to be measured, photoelectric sensor is placed on object to be measured, to Measurement object is placed in above substrate.
(2) when the autonomous travel of object to be measured, photoelectric sensor (HERO16K) automatic light source is radiated on substrate, The image of substrate is constantly captured by its cmos image sensor, photoelectric sensor carries out the detection of displacement Δ x, Δ y, and will In data deposit level, vertical displacement register;And singlechip control chip (STM32F0) passes through SPI interface and photoelectric transfer Sensor HERO16K is communicated, and object autonomous travel displacement to be measured is detected, by WIFI module ESP8266 interface to meter The transmission of calculation machine.Computer is according to the data real-time display object motion track received and carries out processing analysis.
When control object to be measured quantitatively moves, step are as follows:
(1) when needing current object quantitative displacement, photoelectric sensor is placed on object to be measured, object to be measured Body is placed in above substrate, and drives object to be measured mobile in the direction XY by servo motor.
(2) data are sent to WIFI module ESP8266 interface by computer, singlechip control chip (STM32F0) connects Two servo motor movements are controlled by SPI interface by after data, to quantitatively control the position of object.
The beneficial effects of the utility model are: the utility model is by using high-resolution photoelectric sensor and high speed processing Device integrated chip, servo motor and the end PC are able to solve existing skill to realize the real-time Transmission and Bit andits control of displacement data The problem of art high speed, both direction measure displacement simultaneously.
Detailed description of the invention
Fig. 1 is the schematic diagram of the non-contact displacement sensing system of the utility model X/Y plane photo-electric;
Fig. 2 is the utility model cmos image sensor internal structure block diagram.
Specific embodiment
The preferred reality of according to the present invention will be described in detail below with reference to the accompanying drawings the non-contact displacement sensing system of X/Y plane photo-electric Apply mode.
The X/Y plane photo-electric non-contact displacement sensor system includes electro-optical system, computer system and movement Control system.Electro-optical system is fixed on object under test, and major function is measurement change in displacement and sends data to computer System, mainly by photoelectric sensor (HERO16K), STM32F0 singlechip control chip and WIFI module ESP8266 and outside Enclose circuit composition.Wherein photoelectric sensor (HERO16K) includes image capturing system, digital signal processor and SPI interface, STM32F0 single-chip microcontroller has 2 SPI interfaces, up to 87 high-speed i/o interfaces, and serial two line debugs (SWD), WIFI module ESP8266 embeds lwip protocol stack, supports serial ports local upgrade firmware, and Windows and Linux is supported to develop photoelectric sensor (HERO16K) the real-time and accurate measurement tracking of the displacement of equipment is realized by image processing function, then by photoelectric sensor The displacement signal obtained after processing passes through WIFI module by serial ports under the control of STM32F0 singlechip control chip again ESP8266 is transmitted data in computer, is then handled by the host computer on computer displacement signal, and is being shielded Subsequent data processing is shown and carried out on curtain.
Electro-optical system is fixed on object to be measured combined with Figure 1 and Figure 2,.After system work, photoelectric sensor (HERO16K) image for constantly capturing substrate by its cmos image sensor under the irradiation of light source, at digital signal Reason device (DSP) time frequency analysis simultaneously extracts characteristic value Δ x and Δ y, saves to corresponding register, and make motion triggers register (Motion_Burst) mark position 1, is waited to be read;Singlechip control chip (STM32F0) is using port mode simulation master SPI is communicated with HERO16K, uses USB interrupt mode with the transmission of PC machine data.After PC host receives data, by by with Track system software host computer shows real-time tracking track on indicator screen, and does subsequent processing to data.Photoelectric transfer Sensor (HERO16K) includes an image capturing system (IAS), a digital signal processor (DSP) and a four line serial ports (SPI interface).IAS captures precise and tiny surface image by lens and lighting system, these images obtain movement after DSP is handled Direction and distance.DSP calculates relative displacement Δ x and Δ y.Image capturing system is made of cmos image sensor, packet Include control circuit, horizontal displacement sensors, vertical displacement register, sequence circuit, sense amplifier, output amplifier, CMOS Image sensor array.The picture signal that digital signal processor acquires cmos image sensor is handled, and is obtained this and is The displacement Δ x and Δ y of system in the x and y direction, then the displacement that processing obtains is transferred to single-chip microcontroller control by SPI interface In coremaking piece (STM32F0).It is realized and is communicated using singlechip control chip (STM32F0).STM32F0 Serial Interface Engine is responsible for The signal grade processing that the encoding and decoding of serial data, correcting data error, position filling and other USB need, and be finally completed and USB interface Between byte transmission.To realize usb communication, it is necessary to execute the order and data format of the serial communication of standard, utilize The firmware techniques of CypressUSB microcontroller just can reach simultaneous asynchronous data transmissions basic function.
In conjunction with Fig. 1 Fig. 2, control system is connect with singlechip control chip in electro-optical system (STM32F0) by serial ports, single Mobile distance is read in piece machine control chip (STM32F0) from WIFI module, is calculated due pulse by calculator and is believed Number number is sent to control system to reach expected precision.
Embodiment described above only expresses the embodiments of the present invention, and but it cannot be understood as practical to this The limitation of the range of new patent, it is noted that for those skilled in the art, do not departing from the utility model design Under the premise of, various modifications and improvements can be made, these belong to the protection scope of the utility model.

Claims (1)

1. a kind of X/Y plane photo-electric non-contact displacement sensor system, which is characterized in that the non-contact displacement sensor System includes computer system, electro-optical system and kinetic control system;The electro-optical system is fixed on object under test simultaneously It is connect with computer system, for measuring change in displacement;The kinetic control system includes two servo motors, and photoelectricity System connection, it is mobile in the direction XY for controlling object to be measured;Object to be measured be set to substrate above, and object to be measured with Substrate does not contact;
The electro-optical system is mainly by photoelectric sensor HERO16K, STM32F0 singlechip control chip, WIFI module ESP8266 and peripheral circuit composition, photoelectric sensor HERO16K, STM32F0 singlechip control chip, WIFI module ESP8266 Three is integrated on pcb board, and installation in the shell, is communicated entirely through WIFI module ESP8266 with computer system; The SPI interface of the STM32F0 singlechip control chip is connected with the SPI interface of photoelectric sensor HERO16K;WIFI module ESP8266 embeds lwip protocol stack;
The photoelectric sensor HERO16K by image processing function realize object under test displacement real-time and accurate measurement with Track, including image capturing system, digital signal processor and SPI interface;Digital Signal Processing in photoelectric sensor HERO16K The picture signal that device acquires cmos image sensor is handled, and obtains the displacement Δ x of electro-optical system in the x and y direction With Δ y, then the obtained displacement of processing is transferred to STM32F0 singlechip control chip by photoelectric sensor SPI interface, warp Data of crossing that treated are sent to computer system through WIFI module ESP8266 by serial ports, by computer to displacement signal It is handled.
CN201920603487.0U 2019-04-29 2019-04-29 A kind of X/Y plane photo-electric non-contact displacement sensor system Expired - Fee Related CN209541679U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109974597A (en) * 2019-04-29 2019-07-05 大连理工大学 A kind of X/Y plane photo-electric non-contact displacement sensor system and its application method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109974597A (en) * 2019-04-29 2019-07-05 大连理工大学 A kind of X/Y plane photo-electric non-contact displacement sensor system and its application method

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Granted publication date: 20191025

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