CN208292219U - 一种用于ald自动化上下料机的花篮缓存装置 - Google Patents
一种用于ald自动化上下料机的花篮缓存装置 Download PDFInfo
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- CN208292219U CN208292219U CN201721867166.9U CN201721867166U CN208292219U CN 208292219 U CN208292219 U CN 208292219U CN 201721867166 U CN201721867166 U CN 201721867166U CN 208292219 U CN208292219 U CN 208292219U
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- 238000007599 discharging Methods 0.000 title claims abstract description 32
- 238000003860 storage Methods 0.000 title claims abstract description 28
- 230000007246 mechanism Effects 0.000 claims abstract description 18
- 230000001360 synchronised effect Effects 0.000 claims description 35
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 16
- 229910052710 silicon Inorganic materials 0.000 claims description 16
- 239000010703 silicon Substances 0.000 claims description 16
- 230000009467 reduction Effects 0.000 claims description 9
- 230000009471 action Effects 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 claims description 3
- 239000003638 chemical reducing agent Substances 0.000 claims description 3
- 238000007667 floating Methods 0.000 claims description 3
- 238000009434 installation Methods 0.000 claims description 3
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 3
- 230000001681 protective effect Effects 0.000 claims description 2
- 230000001960 triggered effect Effects 0.000 claims description 2
- 230000014759 maintenance of location Effects 0.000 abstract 1
- 239000000463 material Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000000712 assembly Effects 0.000 description 3
- 238000000429 assembly Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229920006324 polyoxymethylene Polymers 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 238000013082 photovoltaic technology Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 230000036339 tooth positioning Effects 0.000 description 1
- 238000005491 wire drawing Methods 0.000 description 1
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CN201721867166.9U CN208292219U (zh) | 2017-12-27 | 2017-12-27 | 一种用于ald自动化上下料机的花篮缓存装置 |
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CN201721867166.9U CN208292219U (zh) | 2017-12-27 | 2017-12-27 | 一种用于ald自动化上下料机的花篮缓存装置 |
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CN208292219U true CN208292219U (zh) | 2018-12-28 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN108217177A (zh) * | 2017-12-27 | 2018-06-29 | 江苏微导纳米装备科技有限公司 | 一种用于ald自动化上下料机的花篮缓存装置 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108217177A (zh) * | 2017-12-27 | 2018-06-29 | 江苏微导纳米装备科技有限公司 | 一种用于ald自动化上下料机的花篮缓存装置 |
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GR01 | Patent grant | ||
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CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: 214028 No.11 Lijiang Road, Xinwu District, Wuxi City, Jiangsu Province Patentee after: Jiangsu micro nano technology Co.,Ltd. Address before: 214028, No. four, No. 7 Road, Wuxi New District, Jiangsu Patentee before: JIANGSU LEADMICRO NANO-EQUIPMENT TECHNOLOGY Ltd. |
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CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: No. 27 Changjiang South Road, Xinwu District, Wuxi City, Jiangsu Province, China Patentee after: Jiangsu micro nano technology Co.,Ltd. Country or region after: China Address before: No.11 Lijiang Road, Xinwu District, Wuxi City, Jiangsu Province Patentee before: Jiangsu micro nano technology Co.,Ltd. Country or region before: China |