CN208270943U - With exposure stage fine-tuning in the Z-axis direction - Google Patents
With exposure stage fine-tuning in the Z-axis direction Download PDFInfo
- Publication number
- CN208270943U CN208270943U CN201820875733.3U CN201820875733U CN208270943U CN 208270943 U CN208270943 U CN 208270943U CN 201820875733 U CN201820875733 U CN 201820875733U CN 208270943 U CN208270943 U CN 208270943U
- Authority
- CN
- China
- Prior art keywords
- exposing lamp
- tuning
- nut
- exposure stage
- axis direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
It is a kind of with exposure stage fine-tuning in the Z-axis direction, including Exposing Lamp and film platform, the film platform is located at the lower section of Exposing Lamp, Exposing Lamp Z-direction driving mechanism is equipped in the side of the Exposing Lamp, the Exposing Lamp Z-direction driving mechanism includes pedestal, is equipped with mounting base on the base, the Z-direction drive member for Z-direction driving Exposing Lamp is equipped in the mounting base, the Z-direction drive member is connect by connector with Exposing Lamp.The utility model can cooperate with micro-adjusting mechanism and achieve the purpose that rapid focus.
Description
Technical field
It is especially a kind of for exposing to mobile phone backboard or mobile phone screen the utility model relates to exposure machine technical field
With exposure stage fine-tuning in the Z-axis direction.
Background technique
The existing exposure machine for exposing to mobile phone backboard or mobile phone screen, exposure stage generally comprise an exposure
Lamp is arranged below film platform in Exposing Lamp, is successively arranged glass web plate and film on the film platform, flat in the film
Mobile phone backboard or mobile phone screen transfer and bogey are equipped with below platform, the mobile phone backboard or mobile phone screen that need to expose is mobile
To below film platform, for exposure.When this exposure stage needs to focus, the Z-direction freqency fine adjustment machine being located under film platform can only be used
Structure is adjusted, time-consuming.
Utility model content
In order to overcome the above problem, the utility model provides one kind can cooperate with micro-adjusting mechanism, reach rapid focus
With exposure stage fine-tuning in the Z-axis direction.
The technical solution of the utility model is: providing a kind of with exposure stage fine-tuning in the Z-axis direction, including exposure
Light lamp and film platform, the film platform are located at the lower section of Exposing Lamp, drive in the side of the Exposing Lamp equipped with Exposing Lamp Z-direction
Motivation structure, the Exposing Lamp Z-direction driving mechanism include pedestal, are equipped with mounting base on the base, set in the mounting base
There is the Z-direction drive member for Z-direction driving Exposing Lamp, the Z-direction drive member is connect by connector with Exposing Lamp.
As the improvement to the utility model, the Z-direction drive member includes motor, screw rod and the spiral shell on screw rod
Mother, the nut are connect with the connector.
As the improvement to the utility model, it is respectively equipped with a film Z-direction below each film platform and drives
Motivation structure, for adjusting the spacing of the film platform and the Exposing Lamp.
As the improvement to the utility model, the film Z-direction driving mechanism includes feed screw nut's structure and motor, described
Film platform is located on nut, and is moved up and down along guide rail.
As the improvement to the utility model, the level for driving Exposing Lamp to move horizontally is arranged below in the pedestal
Moving drive mechanism.
As the improvement to the utility model, the driving mechanism that moves horizontally includes moving horizontally motor, is moved horizontally
Nut-screw rod structure, the nut for moving horizontally nut-screw rod structure are connect with the pedestal.
The utility model is equipped with Exposing Lamp Z-direction driving mechanism, the exposure in the side of the Exposing Lamp due to using
Lamp Z-direction driving mechanism includes pedestal, is equipped with mounting base on the base, is equipped in the mounting base and exposes for Z-direction driving
The Z-direction drive member of light lamp, the Z-direction drive member passes through the structure that connector is connect with Exposing Lamp, so that the utility model
It can cooperate with micro-adjusting mechanism and achieve the purpose that rapid focus.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of embodiment of the utility model.
Specific embodiment
Specific embodiment of the present utility model is described in further detail with reference to the accompanying drawing.
Referring to Figure 1, what Fig. 1 was disclosed is a kind of with exposure stage fine-tuning in the Z-axis direction, including Exposing Lamp 1
With film platform 2, the film platform 2 is located at the lower section of Exposing Lamp 1, drives in the side of the Exposing Lamp 1 equipped with Exposing Lamp Z-direction
Motivation structure 3, the Exposing Lamp Z-direction driving mechanism 3 includes pedestal 31, is equipped with mounting base 32 on the pedestal 31, in the peace
Fill seat 32 be equipped with for Z-direction driving Exposing Lamp 1 Z-direction drive member 33, the Z-direction drive member 33 by connector 34 with
Exposing Lamp 1 connects.In this way, cooperating the utility model with micro-adjusting mechanism achievees the purpose that rapid focus.
Preferably, the Z-direction drive member 33 includes motor 331, screw rod and the nut 333 on screw rod, the spiral shell
Mother 333 connect with the connector 34, and the nut 333 moves up and down on the slide rail.
Preferably, a film Z-direction driving mechanism 4 is respectively equipped with below the film platform, it is described for adjusting
The spacing (not shown) of film platform and the Exposing Lamp.
Preferably, the film Z-direction driving mechanism includes feed screw nut's structure and motor, and the film platform is located at nut
On, and moved up and down along guide rail.
Preferably, it is arranged below in the pedestal 31 for driving what Exposing Lamp 1 moved horizontally to move horizontally driving mechanism
5。
Preferably, the driving mechanism 5 that moves horizontally includes moving horizontally motor 51, moves horizontally nut-screw rod structure,
The nut for moving horizontally nut-screw rod structure is connect with the pedestal 31.
Obviously, it is practical without departing from this can to carry out various modification and variations to the utility model by those skilled in that art
Novel spirit and scope.If in this way, these modifications and variations of the present invention belong to the utility model claims and
Within the scope of its equivalent technologies, then the utility model is also intended to including these modification and variations.
Claims (6)
1. a kind of with exposure stage fine-tuning in the Z-axis direction, including Exposing Lamp (1) and film platform (2), the film
Platform (2) is located at the lower section of Exposing Lamp (1), it is characterised in that: drives in the side of the Exposing Lamp (1) equipped with Exposing Lamp Z-direction
Mechanism (3), the Exposing Lamp Z-direction driving mechanism (3) include pedestal (31), on the pedestal (31) be equipped with mounting base (32),
The Z-direction drive member (33) for Z-direction driving Exposing Lamp (1), the Z-direction drive member are equipped on the mounting base (32)
(33) it is connect by connector (34) with Exposing Lamp (1).
2. there is exposure stage fine-tuning in the Z-axis direction described according to claim 1, it is characterised in that: the Z-direction
Drive member (33) includes motor (331), screw rod and the nut (333) on screw rod, the nut (333) and the connection
Part (34) connection.
3. having exposure stage fine-tuning in the Z-axis direction according to claim 1 or described in 2, it is characterised in that: in institute
It states and is respectively equipped with a film Z-direction driving mechanism (4) below film platform (2), for adjusting the film platform (2) and institute
State the spacing of Exposing Lamp (1).
4. having exposure stage fine-tuning in the Z-axis direction according to claim 3, it is characterised in that: the film
Z-direction driving mechanism (4) includes feed screw nut's structure and motor, and the film platform (2) is located on nut, and along guide rail above and below
It is mobile.
5. having exposure stage fine-tuning in the Z-axis direction according to claim 1 or described in 2, it is characterised in that: in institute
Pedestal (31) is stated to be arranged below for driving what Exposing Lamp (1) moved horizontally to move horizontally driving mechanism (5).
6. according to claim 5 have exposure stage fine-tuning in the Z-axis direction, it is characterised in that: the level
Moving drive mechanism (5) includes moving horizontally motor (51), moves horizontally nut-screw rod structure, moves horizontally nut-screw rod structure
Nut connect with the pedestal (31).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820875733.3U CN208270943U (en) | 2018-06-07 | 2018-06-07 | With exposure stage fine-tuning in the Z-axis direction |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820875733.3U CN208270943U (en) | 2018-06-07 | 2018-06-07 | With exposure stage fine-tuning in the Z-axis direction |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208270943U true CN208270943U (en) | 2018-12-21 |
Family
ID=64688274
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820875733.3U Expired - Fee Related CN208270943U (en) | 2018-06-07 | 2018-06-07 | With exposure stage fine-tuning in the Z-axis direction |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208270943U (en) |
-
2018
- 2018-06-07 CN CN201820875733.3U patent/CN208270943U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20181221 Termination date: 20210607 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |