CN208224596U - A kind of piezoelectric deforming mirror with electronic cooling function - Google Patents
A kind of piezoelectric deforming mirror with electronic cooling function Download PDFInfo
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- CN208224596U CN208224596U CN201820741094.1U CN201820741094U CN208224596U CN 208224596 U CN208224596 U CN 208224596U CN 201820741094 U CN201820741094 U CN 201820741094U CN 208224596 U CN208224596 U CN 208224596U
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Abstract
The utility model belongs to field of optical device technology, and in particular to a kind of piezoelectric deforming mirror with electronic cooling function.The piezoelectric deforming mirror includes driving layer, specular layer, semiconductor chilling plate and cooling chamber, the driving layer is the piezoelectric patches of ring structure, the two sides of piezoelectric patches are covered with electrode layer, the outside that the driving layer is bonded in specular layer constitutes piezoelectric deforming mirror ontology, the center of the specular layer is coated with highly reflecting films without the region of piezoelectric patches covering, the region for being coated with highly reflecting films is working region, the cavity to form sealing is adhesively fixed in the other side of the specular layer and cooling chamber, semiconductor chilling plate is equipped in cavity, being powered to cooling down by semiconductor chilling plate keeps specular layer cooling.Piezoelectric deforming mirror described in the utility model has electronic cooling function, can protect piezoelectric deforming mirror not heat damage, and thermal deformation caused by thermal expansion coefficient mismatches is effectively reduced, improves correction mass；Piezoelectric deforming mirror structure described in the utility model is simple, facilitates production.
Description
Technical field
The utility model belongs to field of optical device technology, and in particular to a kind of piezoelectric deforming with electronic cooling function
Mirror.
Background technique
Distorting lens in adaptive optics system be used as wave-front corrector, by control mirror surface face type come to the reflected beams into
Row control, reaches different control functions by changing control target value, obtains in fields such as laser, astronomy, optical tweezer, micro-imagings
It must apply.Wherein in laser field, distorting lens can be corrected in aberration of the inside and outside of cavity of laser to laser, from
And improve the performance of laser.However in high-energy laser, since laser intensity is very high, even if distorting lens mirror surface is coated with
99.9% highly reflecting films, remaining 0.1% absorptivity also will generate adverse effect to distorting lens, it is possible to become mirror surface additionally
Shape and reduce correction performance, or even lead to device failure since mirror temperature is excessively high.And use the mode knot of circulating cooling liquid
Structure is complicated, and equipment is more, at high cost.To solve this problem, researcher drops distorting lens by using semiconductor refrigerating
Temperature processing.
Electronic cooling is the subject between Refrigeration Technique and semiconductor technology edge to grow up from the fifties,
The P-N junction that it is constituted using extraordinary semiconductor material, forms thermocouple pair, generates Peltier effect, i.e., is freezed by direct current
A kind of New Refrigerating method.
Utility model content
The utility model is in view of the deficiencies of the prior art, and it is an object of the present invention to provide a kind of piezoelectric deforming for having electronic cooling function
Mirror.
To realize above-mentioned purpose of utility model, the technical solution adopted in the utility model are as follows:
A kind of piezoelectric deforming mirror with electronic cooling function, including driving layer, specular layer, semiconductor chilling plate and cooling
Room, the driving layer are the piezoelectric patches of ring structure, and the two sides of piezoelectric patches are covered with electrode layer, and the driving layer is bonded in mirror surface
The outside of layer constitutes piezoelectric deforming mirror ontology, and the center of the specular layer is coated with highly reflecting films without the region of piezoelectric patches covering, institute
Stating and being coated with the region of highly reflecting films is working region, and the chamber to form sealing is adhesively fixed in the other side of the specular layer and cooling chamber
Body, cavity is interior to be equipped with semiconductor chilling plate, and being powered to cooling down by semiconductor chilling plate keeps specular layer cooling.
In above scheme, the electrode layer that the piezoelectric patches side Nian Jie with specular layer is covered is and piezoelectric patches phase similar shape
The annular electrode layer of shape, the electrode layer that the other side is covered are the polycyclic fan-shaped array structure electrode layer of separation.
In above scheme, the polycyclic fan-shaped array structure electrode layer is two ring sector array structure electrode layers.
In above scheme, the piezoelectric deforming mirror is column structure.
In above scheme, the working region is border circular areas, is slightly less than piezoelectric layer internal diameter.
In above scheme, the highly reflecting films are metal film with high reflectivity or deielectric-coating.
In above scheme, there are gaps between the semiconductor chilling plate and specular layer.
In above scheme, the two sides of the cooling chamber are provided with water inlet and exhaust outlet.
In above scheme, is set in the cavity wall of the cooling chamber and be used to support semiconductor chilling plate there are two notch.
In above scheme, the cavity wall of the cooling chamber is equipped with aperture, for being passed through the electric wire of semiconductor chilling plate.
The beneficial effects of the utility model are as follows: piezoelectric deforming mirror described in the utility model has electronic cooling function, can
To protect piezoelectric deforming mirror not heat damage, thermal deformation caused by thermal expansion coefficient mismatches is effectively reduced, improves correction matter
Amount；Piezoelectric deforming mirror structure described in the utility model is simple, facilitates production.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of piezoelectric deforming mirror described in the utility model.
Fig. 2 is the schematic diagram of the section structure of piezoelectric deforming mirror described in the utility model.
Fig. 3 is the electrode pattern of piezoelectric deforming mirror described in the utility model.
In figure, 1- specular layer, 2- drives layer, 3- metal electrode layer, 4- metal electrode layer, and 5- is coated with the work of highly reflecting films
Region, 6- semiconductor chilling plate, 7- cooling chamber, 8- water inlet, 9- exhaust outlet, 10- notch, 11- aperture, 12- semiconductor refrigerating
Piece electric wire.
Specific embodiment
The utility model in order to better understand furthers elucidate the content of the utility model below with reference to embodiment, but
The content of the utility model is not limited solely to the following examples.
Embodiment 1
Fig. 1 is the structural schematic diagram of the piezoelectric deforming mirror with refrigerating function.As shown in Figure 1, pressure provided in this embodiment
Electric distorting lens includes specular layer (1), driving layer (2), semiconductor chilling plate (6) and cooling chamber (7)；Layer (2) are driven to use outer diameter
40 millimeters, 18 millimeters of internal diameter, 100 microns of thickness circular ring shape piezoelectric ceramic piece, it is two-sided with metal electrode layer (3) and to belong to electric
Pole layer (4)；Specular layer (1) is using 50 millimeters of diameter, the circular metal plate or silicon wafer of 200 microns of thickness；One side on the outside of specular layer
It is burnishing surface as reflecting surface, inside can polish or unpolished；Specular layer (1) and driving layer (2) are bonded with epoxy glue
Together, distorting lens body construction is constituted, does not represent glue-line in figure.The center of one side is without piezoelectric patches covering on the outside of specular layer
Region is the working region (5) of distorting lens, and working region is border circular areas, is slightly less than the internal diameter of piezoelectric ceramic piece, is coated with high anti-
Penetrate the metal film or deielectric-coating of rate；Cooling chamber (7) column construction, the inside and cooling chamber (7) of distorting lens specular layer (1) pass through ring
The fixed cavity for forming sealing of oxygen glue sticking, the cavity two sides of cooling chamber are provided with water inlet (8) and exhaust outlet (9), for leading to
Enter cooling medium, cooling medium fills rear enclosed water inlet (8) and exhaust outlet (9), and the cooling medium filled in cooling chamber includes
But it is not limited to water, cooling oil, gas.It is placed in cooling chamber cavity semiconductor chilling plate (6), semiconductor chilling plate (6) and mirror
There are gap, the intracorporal coolant liquid of chamber and distorting lens mirror surface interior side contacts between surface layer (1), pass through mirror surface cooling after electronic cooling
Layer.
Fig. 2 is the schematic diagram of the section structure of piezoelectric deforming mirror described in the utility model, from figure 2 it can be seen that cooling chamber
(7) cavity two sides are provided with water inlet (8) and exhaust outlet (9), set on the cavity inner wall of cooling chamber there are two notch (10) use
It supports semiconductor chilling plate (6), cooling chamber cavity wall is equipped with the electric wire (12) that aperture (11) are used to lead to semiconductor chilling plate, connects
Aperture (11) are sealed after live wire.
Fig. 3 is the electrode pattern of piezoelectric deforming mirror described in the utility model, from figure 3, it can be seen that driving layer (2) is annular
The region of piezoelectric ceramic piece, metal film or deielectric-coating that specular layer center covered without piezoelectric patches, was coated with high reflectance is distorting lens
Working region (5), drive and be covered with metal electrode layer (3) on the lateral surface of layer (2), the structure of the metal electrode layer is separation
Two ring sector array structure electrode layers.
Obviously, above-described embodiment is only intended to clearly illustrate made example, and is not the limitation to embodiment.It is right
For those of ordinary skill in the art, can also make on the basis of the above description it is other it is various forms of variation or
It changes.There is no necessity and possibility to exhaust all the enbodiments.And the obvious variation or change therefore amplified
Within the dynamic protection scope created still in the utility model.
Claims (10)
1. a kind of piezoelectric deforming mirror with electronic cooling function, which is characterized in that including driving layer, specular layer, semiconductor system
Cold and cooling chamber, the driving layer are the piezoelectric patches of ring structure, and the two sides of piezoelectric patches are covered with electrode layer, the driving layer
The outside for being bonded in specular layer constitutes piezoelectric deforming mirror ontology, and the center of the specular layer is coated with height without the region of piezoelectric patches covering
Reflectance coating, the region for being coated with highly reflecting films are working region, and shape is adhesively fixed in the other side of the specular layer and cooling chamber
At the cavity of sealing, it is equipped with semiconductor chilling plate in cavity, being powered to cooling down by semiconductor chilling plate keeps specular layer cooling.
2. the piezoelectric deforming mirror according to claim 1 with electronic cooling function, which is characterized in that the piezoelectric patches with
The electrode layer that the side of specular layer bonding is covered is the annular electrode layer with piezoelectric patches same shape, the electricity that the other side is covered
Pole layer is the polycyclic fan-shaped array structure electrode layer of separation.
3. the piezoelectric deforming mirror according to claim 2 with electronic cooling function, which is characterized in that the polycyclic sector
Array structure electrode layer is two ring sector array structure electrode layers.
4. the piezoelectric deforming mirror according to claim 1 with electronic cooling function, which is characterized in that the piezoelectric deforming
Mirror is column structure.
5. the piezoelectric deforming mirror according to claim 1 with electronic cooling function, which is characterized in that the working region
For border circular areas, diameter is less than the internal diameter of the piezoelectric layer of ring structure.
6. the piezoelectric deforming mirror according to claim 1 with electronic cooling function, which is characterized in that the highly reflecting films
For metal film with high reflectivity or deielectric-coating.
7. the piezoelectric deforming mirror according to claim 1 with electronic cooling function, which is characterized in that the semiconductor system
Cold there are gaps between specular layer.
8. the piezoelectric deforming mirror according to claim 1 with electronic cooling function, which is characterized in that the cooling chamber
Two sides are provided with water inlet and exhaust outlet.
9. the piezoelectric deforming mirror according to claim 1 with electronic cooling function, which is characterized in that the cooling chamber
It is set in cavity wall and is used to support semiconductor chilling plate there are two notch.
10. the piezoelectric deforming mirror according to claim 1 with electronic cooling function, which is characterized in that the cooling chamber
Cavity wall be equipped with aperture.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820741094.1U CN208224596U (en) | 2018-05-18 | 2018-05-18 | A kind of piezoelectric deforming mirror with electronic cooling function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820741094.1U CN208224596U (en) | 2018-05-18 | 2018-05-18 | A kind of piezoelectric deforming mirror with electronic cooling function |
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| Publication Number | Publication Date |
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| CN208224596U true CN208224596U (en) | 2018-12-11 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113237246A (en) * | 2021-04-15 | 2021-08-10 | 成都仙德科技有限公司 | Stirling refrigerating and heating integrated machine |
-
2018
- 2018-05-18 CN CN201820741094.1U patent/CN208224596U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113237246A (en) * | 2021-04-15 | 2021-08-10 | 成都仙德科技有限公司 | Stirling refrigerating and heating integrated machine |
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