CN204883045U - Water -cooling piezoelectricity distorting lens - Google Patents
Water -cooling piezoelectricity distorting lens Download PDFInfo
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- CN204883045U CN204883045U CN201520547705.5U CN201520547705U CN204883045U CN 204883045 U CN204883045 U CN 204883045U CN 201520547705 U CN201520547705 U CN 201520547705U CN 204883045 U CN204883045 U CN 204883045U
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Abstract
The utility model provides a water -cooling piezoelectricity distorting lens, includes the mirror body, and mirror body support piece and piezoelectric patches are equipped with the cooling chamber that holds the coolant liquid among the mirror body support piece, and the cooling chamber has coolant liquid entry and a cooling liquid exit, and the mirror body sets up in mirror body support piece top in order to seal the cooling chamber, the piezoelectric patches is the annular, and the piezoelectric patches is fixed in the mirror body as the frame, set up the first electrode between the piezoelectric patches and the mirror body, the upper surface of piezoelectric patches sets up the second electrode, the mirror body is not by the work area of the part of piezoelectric patches cover as the mirror body, the mirror body and mirror body support piece are fixed. The utility model has the advantages of direct and the mirror physical contact of piezoelectric patches, and do not contact with the coolant liquid.
Description
Technical field
The utility model belongs to optical device field, relates to a kind of water-cooled piezoelectric deforming mirror.
Technical background
Distorting lens as wave-front corrector, realizes correcting the wavefront distortion in optical system by the pattern changing self minute surface in real time, makes system reach perfect condition, obtain application in fields such as astronomy, laser, micro-imagings in ADAPTIVE OPTICS SYSTEMS.Wherein at laser field, distorting lens can correct by the aberration in the inside and outside of cavity of laser instrument to laser instrument, thus improves the performance of laser instrument.But in high-energy laser, because laser intensity is very high, even if distorting lens minute surface is coated with the highly reflecting films of 99.9%, 0.1% remaining absorptivity also will produce harmful effect to distorting lens, likely make minute surface additional deformation and reduce correcting feature, even causing device failure because mirror temperature is too high.For addressing this problem, researchist carries out cooling process by water-cooling pattern to distorting lens.
No. CN201310237019.3, Chinese patent application discloses a kind of distorting lens monoblock type water-cooling mechanism, comprise heat sink, mirror body, actuation element and two water swivels, the containing tank that top is opened wide is provided with in heat sink, heat sinkly be provided with water inlet and water delivering orifice, and be provided with multiple temple, each temple vertical direction be located in heat sink on.Mirror body is located at heat sink top, and the lower surface of mirror body is connected with the upper surface of each temple.Actuation element is provided with multiple actuating leg, and multiple actuating leg is connected the deformation quantity controlling mirror body with the actuating amount by controlling each actuating leg respectively with the lower surface of multiple temple, two water swivels are communicated with water delivering orifice with water inlet respectively.The shortcoming of this distorting lens is: actuation element drives the mirror bodily form to become by activating leg, temple, connector and connection leg, and actuation element, by several somes indirect contact mirror bodies, causes the driving effect of actuation element bad, minute surface deformation weak effect; And temple is through the containing tank that liquid coolant is housed, the complex structure of transmission.
No. CN201420010286.7, Chinese patent application discloses the two piezoelectric deforming mirror of a kind of water-cooled, comprise the two piezoelectric deforming mirror main body of water-cooled and the two piezoelectric deforming mirror mirror holder of water-cooled, the two piezoelectric deforming mirror of water-cooled is arranged in the two piezoelectric deforming mirror mirror holder of water-cooled, and the two piezoelectric deforming mirror of water-cooled comprises catoptron one, catoptron two, piezoelectric chip one, piezoelectric chip two, contact conductor, distorting lens support member, microchannel one; The two piezoelectric deforming mirror mirror holder of water-cooled comprises front shroud, back shroud and microchannel two, the microchannel two that mirror holder front shroud is arranged is corresponding with the microchannel one on catoptron two, after water flowing, take away the heat on catoptron one outside surface by flowing water, the water cooling function of distorting lens can be realized.The shortcoming of this distorting lens is: although piezoelectric chip directly contacts with catoptron two, piezoelectric chip and contact conductor are all soaked in liquid coolant; And, mirror body is made up of catoptron one and catoptron two, and flowing water realizes refrigerating function through microchannel one and microchannel two, and the existence of microchannel one makes catoptron one different with the structure of catoptron two, cause the DEFORMATION RESPONSE of two catoptrons to piezoelectric chip inconsistent, affect mirror-quality.
Utility model content
In order to overcome the actuation element of prior art existence by several somes indirect contact mirror bodies, although cause the bad or piezoelectric chip of the driving effect of actuation element directly to contact with catoptron, but piezoelectric chip and contact conductor are all soaked in the shortcoming in liquid coolant, the utility model provides a kind of piezoelectric patches and directly contacts with mirror body, and a kind of water-cooled piezoelectric deforming mirror do not contacted with liquid coolant.
A kind of water-cooled piezoelectric deforming mirror, comprise mirror body, mirror body support member and piezoelectric patches, be provided with the cooling chamber holding liquid coolant in mirror body support member, cooling chamber has liquid coolant entrance and cooling liquid outlet, and mirror body is arranged at mirror body support member top with closed cooling chamber; Ringwise, piezoelectric patches is fixed on mirror body as frame to piezoelectric patches; Arrange the first electrode between piezoelectric patches and mirror body, the upper surface of piezoelectric patches arranges the second electrode; The part that mirror body is not covered by piezoelectric patches is as the perform region of mirror body; Mirror body and mirror body support member are fixed.
Further, first electrode is and piezoelectric patches shape, measure-alike overall electrode, second electrode is the split electrode be made up of electrode block, electrode block comprises the secter pat of outermost ring block and internal layer, multiple secter pat equidistantly distributes and surrounds an associative ring, ring block and associative ring are coaxially arranged, associative ring be one or two or multiple.
Further, mirror body is compressed to mirror body support member by hold-down mechanism, hold-down mechanism comprises the screw be spirally connected with mirror body support member and pressing plate piezoelectric patches and mirror body compressed to mirror body support member, screw is uniformly distributed along the periphery of mirror body, have distance between pressing plate and the second electrode, pressing plate outside, the second electrode is interior; Between mirror body and mirror body support member, the first packing ring is set, the second packing ring is set between piezoelectric patches and pressing plate.
Further, the perform region of mirror body is coated with deielectric-coating or the metal film of high reflectance.
Further, mirror body is rounded, and piezoelectric patches and the first electrode are annular, the associative ring of the second electrode by secter pat with the equidistant array distribution in the center of circle; Pressing plate is flange.
The utility model has the advantage of: 1. the mirror body for optical correction is individual layer homogeneous texture, effectively can reduce thermal expansivity and not mate the thermal deformation caused.
2. actuator is in the skin of mirror body, and with liquid coolant physical separation, actuator and electrical connection thereof, not by the impact of liquid coolant, improve stability and the reliability of distorting lens.
Accompanying drawing explanation
Fig. 1 is the structural representation of the water-cooled piezoelectric deforming mirror of periphery fixed described in the utility model.
Fig. 2 is the structural representation of the water-cooled piezoelectric deforming mirror of simple supported edge described in the utility model.
Fig. 3 is piezoelectric deforming mirror electrode pattern.
Embodiment
As shown in Figure 1, the water-cooled piezoelectric deforming mirror that the present embodiment provides comprises piezoelectric patches 1, mirror body 2 and mirror body support member 6, and mirror body support member 6 is provided with the cooling chamber 61 holding liquid coolant.Piezoelectric patches 1 adopts the ring-shaped piezo ceramic sheet of external diameter 50 millimeters, internal diameter 20 millimeters, and thickness is 100 microns.
Two-sided with metal (silver, aluminium etc.) electrode layer 3,4.Mirror body 2 adopts the silicon chip of 50 mm dia thickness 200 microns, piezoid or sheet metal.Mirror external side one side be polished surface as reflecting surface, inner side can polishing also can not polishing.Piezoelectric patches 1 and mirror body 2 are connected together with Wear Characteristics of Epoxy Adhesive, form distorting lens body construction, do not indicate glue-line in figure.
Mirror body support member 6 is circular configuration, and both sides are provided with water inlet 7 and water delivering orifice 8.Lower surface and the cavity 6 of distorting lens mirror body are adhesively fixed by epoxy glue, form the cavity of sealing.Liquid coolant flows into from water inlet 7, and after entering cavity, liquid coolant and distorting lens minute surface interior side contacts cool, and flow out afterwards from water delivering orifice 8.
Ringwise, piezoelectric patches 1 is fixed on mirror body 2 as frame to piezoelectric patches 1; Arrange the first electrode 4 between piezoelectric patches 1 and mirror body 2, the upper surface of piezoelectric patches 1 arranges the second electrode 3; The part that mirror body 2 is not covered by piezoelectric patches 1 is as the perform region of mirror body; Mirror body 2 and piezoelectric patches 1 are compressed to mirror body support member 6 by hold-down mechanism.Distorting lens perform region is slightly less than piezoelectric layer internal diameter, and distorting lens perform region is coated with metal film or the deielectric-coating 5 of high reflectance.
Be illustrated in figure 2 the schematic diagram with hold-down mechanism fixed mirror body.Mirror body is fixed on mirror body support member by hold-down mechanism.Hold-down mechanism comprises the screw 11 be spirally connected with mirror body support member and the pressing plate 10 piezoelectric patches 1 and mirror body 2 compressed to mirror body support member 6, screw 11 is uniformly distributed along the periphery of mirror body 2, have distance between pressing plate 10 and the second electrode 3, pressing plate 10 outside, the second electrode 3 is interior; First packing ring 91 is set between mirror body 2 and mirror body support member 6, the second packing ring 92 is set between piezoelectric patches 1 and pressing plate 10.Through pressing plate 10, distorting lens body body construction is fixed to mirror body support member by screw 11.The circular in cross-section of the first packing ring 91 and the second packing ring 92, mirror body is compressed by the first packing ring 91 by pressing plate, and the surrounding of mirror body can so can rotate, and this mounting means is that freely-supported is installed.
Certainly, also can be directly mirror body is bonded and fixed on mirror body support member.Or, the cross section of the first packing ring 91 and the cross section of the second packing ring 92 all rectangular, mirror body is pressed on mirror body support member by the first flat packing ring with pressing plate.After this mirror body and mirror body support member are fixed, the mounting means that mirror body periphery can not rotate is clamped installation.
Be illustrated in figure 3 the vertical view of the second electrode.The piezoelectric patches 1 of annular upper surface to bond the second electrode 3, lower surface bonds the first electrode 4.Wherein the first electrode 4 is the overall electrode with sizes such as piezoelectric layers, is about 1 micron thickness, uses as hearth electrode.Second electrode 3 is the split electrode be made up of electrode block, electrode block comprises the secter pat 12 of outermost ring block 13 and internal layer, multiple secter pat 12 equidistantly distributes and surrounds an associative ring, and ring block 13 and associative ring are coaxially arranged, associative ring be one or two or multiple.The thickness of ring block 13 and secter pat 12 is all about 1 micron.This example electrode is made up of three circles, and outmost turns is ring electrode 13, can be used to correct out of focus aberration.Inner two circles are divided into multiple electrode 12, can be used for correcting the aberrations such as out of focus, astigmatism, coma.Because the actuator of this distorting lens by means of only edge realizes producing distortion to middle minute surface, therefore distorting lens mainly corrects low order aberration.And the aberration in actual high intensity laser is mainly low order aberration, therefore this distorting lens can meet the demand of practical application.
Mirror body 2 is rounded, piezoelectric patches 1 and the first electrode 4 in annular, the associative ring of the second electrode 3 by secter pat 12 with the equidistant array distribution in the center of circle; Pressing plate 10 is flange.
Content described in this instructions embodiment is only enumerating the way of realization that utility model is conceived; protection domain of the present utility model should not be regarded as being only limitted to the concrete form that embodiment is stated, protection domain of the present utility model also and conceive the equivalent technologies means that can expect according to the utility model in those skilled in the art.
Claims (6)
1. a water-cooled piezoelectric deforming mirror, comprises mirror body, mirror body support member and piezoelectric patches, and be provided with the cooling chamber holding liquid coolant in mirror body support member, cooling chamber has liquid coolant entrance and cooling liquid outlet, and mirror body is arranged at mirror body support member top with closed cooling chamber; It is characterized in that: ringwise, piezoelectric patches is fixed on mirror body as frame to piezoelectric patches; Arrange the first electrode between piezoelectric patches and mirror body, the upper surface of piezoelectric patches arranges the second electrode; The part that mirror body is not covered by piezoelectric patches is as the perform region of mirror body; Mirror body and mirror body support member are fixed.
2. water-cooled piezoelectric deforming mirror as claimed in claim 1, it is characterized in that: the first electrode is and piezoelectric patches shape, measure-alike overall electrode, second electrode is the split electrode be made up of electrode block, electrode block comprises the secter pat of outermost ring block and internal layer, multiple secter pat equidistantly distributes and surrounds an associative ring, ring block and associative ring are coaxially arranged, associative ring be one or two or multiple.
3. water-cooled piezoelectric deforming mirror as claimed in claim 1 or 2, it is characterized in that: mirror body is compressed to mirror body support member by hold-down mechanism, hold-down mechanism comprises the screw be spirally connected with mirror body support member and pressing plate piezoelectric patches and mirror body compressed to mirror body support member, screw is uniformly distributed along the periphery of mirror body, have distance between pressing plate and the second electrode, pressing plate outside, the second electrode is interior; Between mirror body and mirror body support member, the first packing ring is set, the second packing ring is set between piezoelectric patches and pressing plate.
4. water-cooled piezoelectric deforming mirror as claimed in claim 3, is characterized in that: the perform region of mirror body is coated with deielectric-coating or the metal film of high reflectance.
5. water-cooled piezoelectric deforming mirror as claimed in claim 4, it is characterized in that: mirror body is rounded, piezoelectric patches and the first electrode are annular, the associative ring of the second electrode by secter pat with the equidistant array distribution in the center of circle; Pressing plate is flange.
6. water-cooled piezoelectric deforming mirror as claimed in claim 5, is characterized in that: piezoelectric patches is positioned at the external side of mirror, is connected inside mirror body with cooling chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520547705.5U CN204883045U (en) | 2015-07-27 | 2015-07-27 | Water -cooling piezoelectricity distorting lens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520547705.5U CN204883045U (en) | 2015-07-27 | 2015-07-27 | Water -cooling piezoelectricity distorting lens |
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| Publication Number | Publication Date |
|---|---|
| CN204883045U true CN204883045U (en) | 2015-12-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520547705.5U Withdrawn - After Issue CN204883045U (en) | 2015-07-27 | 2015-07-27 | Water -cooling piezoelectricity distorting lens |
Country Status (1)
| Country | Link |
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| CN (1) | CN204883045U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105022162A (en) * | 2015-07-27 | 2015-11-04 | 宁波大学 | Water-cooled piezoelectric distorting lens |
| CN108535860A (en) * | 2018-05-23 | 2018-09-14 | 宁波大学 | A kind of novel double piezoelectric deforming mirrors |
-
2015
- 2015-07-27 CN CN201520547705.5U patent/CN204883045U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105022162A (en) * | 2015-07-27 | 2015-11-04 | 宁波大学 | Water-cooled piezoelectric distorting lens |
| CN108535860A (en) * | 2018-05-23 | 2018-09-14 | 宁波大学 | A kind of novel double piezoelectric deforming mirrors |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20151216 Effective date of abandoning: 20171110 |
|
| AV01 | Patent right actively abandoned |