CN208157853U - Laser output power stablizes output facula tunable arrangement and its laser - Google Patents
Laser output power stablizes output facula tunable arrangement and its laser Download PDFInfo
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- CN208157853U CN208157853U CN201820553313.3U CN201820553313U CN208157853U CN 208157853 U CN208157853 U CN 208157853U CN 201820553313 U CN201820553313 U CN 201820553313U CN 208157853 U CN208157853 U CN 208157853U
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Abstract
The utility model relates to technical field of metal material surface treatment, are difficult to ensure laser power stabilization output and the nonadjustable problem of output facula for existing laser, provide laser output power and stablize output facula tunable arrangement and its laser.Wherein, laser output power stablizes output facula tunable arrangement, including signal processor, Laser Control System and the fast axis collimation mirror and beam splitter set gradually on the output laser optical path of laser to be regulated；Transmission direction along reflection sampling laser sets gradually optical sampling system and high power detection sensor；The power of reflection sampling laser of the high power detection sensor real-time detection by conversion；Signal processor is electrically connected with high power detection sensor and Laser Control System respectively；Laser Control System is electrically connected with laser to be regulated；Beam shaping system is arranged in transmission direction along transmission laser, for carrying out collimation and shaping to transmission laser.
Description
Technical field
The utility model relates to technical field of metal material surface treatment, and in particular to laser output power stablizes output light
Spot tunable arrangement and its laser.
Background technique
The elder generation that laser technology and processing technology combine is belonged to using the technology that laser processes metal material surface
Into manufacturing technology, developed in recent years quite rapidly.Since high-power semiconductor laser has photoelectric conversion efficiency height, energy consumption
The advantages that low, light-weight, small in size, the service life is long is to meet high efficiency, high benefit, low cost and low consumed metal material
The important technical of Surface-micromachining process shows apparent advantage in field of laser processing.
In metal material surface process, the power of laser directly affects the processing quality of product.Due to temperature, wet
The variation of degree, laser output power are unavoidably varied, and in prolonged process of manufacture, production environment
Severe, operator improper use and laser itself service life, the power of laser can be made as the time is continuous
Decaying, this will seriously affect the quality of metal material surface processing, increases the defect rate of product.
In order to keep the stability of laser power, generally by the electrooptic modulator that is placed in laser output light road or
Acousto-optic modulator keeps output power steady to monitor laser output power, then by the current or voltage that controller adjusts laser
It is fixed.But since the light injury threshold of electrooptic modulator or acousto-optic modulator is lower, stable high power laser is not suitable for it
Output power, and it is higher using this method design cost.And such method is generally used for solid state laser, optical fiber laser, gas
Body laser or dye laser are generally used in laser communications field and laser medicine field, are not particularly suited for using
Laser processes metal material surface.
It industrially applies at present and does not keep power stability in the semiconductor stack laser of metal material surface processing
Device.Semiconductor stack laser generally carries out power test using high power laser light power meter using under non-processing state,
This method cannot understand the variation of power in time in production practice, it is difficult to which guarantee laser power stablizes output, usually
Cause the increase of production defect ware.
In order to meet metal material surface actual processing production requirement, for different surfaces shape or different processing request
Workpiece needs various sizes of laser beam to carry out surface processing, this just needs to change laser head assembly or replacement film forming system,
It is very inconvenient in actual use.
Therefore adjustment changed power can be monitored in real time there is an urgent need to a kind of, keep stable output power, make to process and detect
It is synchronous to carry out, while it being able to achieve the adjustable device of output facula again.
Utility model content
The purpose of the utility model is to overcome existing lasers to be difficult to ensure laser power stabilization output and output light
The nonadjustable defect of spot, and laser output power is provided and stablizes output facula tunable arrangement and its laser.
To achieve the above object, technical solution provided by the utility model is：Laser output power stablizes output facula can
Device is adjusted, is characterized in that, including signal processor, Laser Control System and output in laser to be regulated
The fast axis collimation mirror and beam splitter set gradually on laser optical path；Beam splitter for will export laser be divided into reflection sampling laser with
Transmission laser；Transmission direction along reflection sampling laser sets gradually optical sampling system and high power detection sensor；Optics
Sampling system converts the size of reflection sampling laser, and reflection of the high power detection sensor real-time detection by conversion is adopted
The power of sample laser；Signal processor is electrically connected with high power detection sensor and Laser Control System respectively, for anti-
The power for penetrating sampling laser is analyzed and processed, and processing result is transmitted to Laser Control System；Laser Control System
It is electrically connected with laser to be regulated, for receiving the processing result of signal processor transmission, and manages result according to this to wait adjust
It saves laser and sends output laser power adjustment signal；Change laser by changing driving current or the driving voltage of laser
Device exports the power of laser, so that the power of transmission laser be made to keep stablizing.Transmission direction setting light beam along transmission laser is whole
Shape system, for carrying out collimation and shaping to transmission laser, to obtain meeting the beam sizes requirement that surface processing needs
Working laser.
Further, above-mentioned optical sampling system include along reflection sampling laser transmission direction set gradually it is aspherical
Mirror and cylindrical lens.
Further, above-mentioned beam shaping system includes being positive along the focal power that transmission laser transmission direction is set gradually
The third lens group and focal power that the second lens group, the focal power that first lens group, focal power are negative are positive be positive the 4th thoroughly
Microscope group；Second lens group moves realization zoom along transmission laser optical axis；The third lens group is moved along transmission laser optical axis, for mending
Repay the mobile caused aberration of the second lens group.
Further, above-mentioned beam splitter is flat spectroscope or Amici prism.
Further, above-mentioned high power detection sensor is air-cooled or water cooling using thermistor or thermocouple element
Laser power meter.
In addition, the utility model also provides a kind of stable output power and output facula tunable laser, including high power
Semiconductor stack laser bodies, are characterized in that：It further include that above-mentioned laser output power stablizes the adjustable dress of output facula
It sets.
Further, above-mentioned high power semiconductor storehouse laser bodies are using one or more high power semiconductor storehouses
Laser.Multiple laser beams that multiple high power semiconductor storehouse lasers issue close beam skill using conjunction beam technology, including space
Art, polarization coupling technology and wavelength coupling technical solution synthesize a laser beam as output laser output.
The course of work of the utility model：
The output laser power value of laser is preset, the beam splitter with suitable plane of incidence light transmittance is chosen, obtains
Preset reflected laser power value.
Output laser is divided into reflection sampling laser and transmission laser along different directions transmission through beam splitter.
After reflection sampling laser is converted to small size hot spot from large scale light beam by optical sampling system, high power is detected
Sensor carries out real-time detection to the power of reflection sampling laser small size hot spot, and op-tical power information is converted to electric signal, passes
It is defeated to be analyzed and processed to signal processor.
The optical power that signal processor will acquire is compared with preset reflected laser power setting value, judges that difference is
It is no within the allowable range, and judging result is fed back into Laser Control System.
Laser Control System controls the driving current of high power semiconductor storehouse laser, when difference exceeds allowed band
When value, the driving current of high power semiconductor storehouse laser is adjusted, is always held at difference in allowed band value, it is ensured that half
The output laser power stability of conductor storehouse laser is in preset value, to keep the stabilization of the working laser power of output.
Transmission laser by the collimation and plastics design of beam shaping system, reach beam shape that surface processing needs and
Size；For the beam sizes requirement of different surface processing requests, by changing the multiple lens groups of beam shaping internal system
Relative position, make output working laser beam sizes accordingly change, to realize that the working laser of different beam sizes is defeated
Out.
Compared with prior art, the utility model has the advantages that：
1, the utility model can carry out the power of laser real in the case where not influencing laser normal use
When monitoring feedback and control, and keep laser power stablize output, be conducive to improve process in product quality it is steady
It is qualitative, the consistency of product is kept, the performance of product is improved, the quality for improving product has with qualification rate extremely important
Meaning.
2, for the requirement of different surfaces shape and surface processing spot size, by changing optics in beam shaping system
Element relative position, make laser head output facula size according to surface processing need to carry out corresponding change, can be changed without it is sharp
In the case where optical-head apparatus or replacement film forming system, very easily meets the needs of different processing.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model stable output power and output facula tunable laser embodiment；
Fig. 2 is the structural schematic diagram of high power semiconductor storehouse laser bodies embodiment；
Fig. 3 is the light path system schematic diagram of Fig. 1 laser.
Each label is described as follows in figure：
1-high power semiconductor storehouse laser bodies, 11-output laser, 12-fast axis collimation mirrors；
2-beam splitters, 21-reflection sampling laser, 22-transmission lasers；
3-optical sampling systems, 31-non-spherical lenses, 32-cylindrical lenses；
4-high power detection sensors；
5-signal processors；
6-Laser Control Systems；
7-beam shaping systems, the 71-the first lens group, the 72-the second lens group, 73-the third lens groups, 74-the four
Lens group, 75-working lasers.
Specific embodiment
The utility model is described in further detail with reference to the accompanying drawings and examples.
As shown in Figure 1 a kind of stable output power and output facula tunable laser, including high power semiconductor storehouse
Laser bodies 1 and laser output power stablize output facula tunable arrangement.
As shown in Fig. 2, high power semiconductor storehouse laser bodies 1 use a high power semiconductor storehouse laser,
The laser beam size that it is issued is very big, wherein very big in the fast axis direction angle of divergence, about 40 °, fast axis direction exports 11 ruler of laser
Very little maximum can reach 100mm；About 5 ° of the slow-axis direction angle of divergence, slow-axis direction exports 11 sizes of laser≤10mm.
Referring to Fig. 1, laser output power stablizes output facula tunable arrangement, including signal processor 5, laser control system
System 6 and the fast axis collimation mirror set gradually in output 11 optical path of laser of high power semiconductor storehouse laser bodies 1
12 and beam splitter 2；Fast axis collimation mirror 12 compresses very big fast axis divergence angle；Beam splitter 2 uses flat spectroscope, and being used for will
Output laser 11 is divided into reflection sampling laser 21 and transmission laser 22 along different directions transmission；Along the biography of reflection sampling laser 21
Defeated direction sets gradually optical sampling system 3 and high power detection sensor 4；Light beam is arranged in transmission direction along transmission laser 22
Orthopedic systems 7.High power detection sensor 4 uses air-cooled laser power meter in the present embodiment.
Signal processor 5 is electrically connected with high power detection sensor 4 and Laser Control System 6 respectively, laser control
System 6 is electrically connected with laser to be regulated.
As shown in figure 3, optical sampling system 3 include along reflection sampling 21 transmission direction of laser set gradually it is aspherical
Mirror 31 and cylindrical lens 32；The large scale laser beam of reflection sampling laser 21 is turned by non-spherical lens 31 and cylindrical lens 32
It is changed to and is suitable for the received small size hot spot of high power detection sensor 4, the size range of small size hot spot is generally 2~φ of φ
20mm。
The laser power issued due to high power semiconductor storehouse laser is up to several kilowatts, even higher, common function
Rate detection sensor cannot reach the requirement of power detection, therefore using 4 real-time detection of high power detection sensor by conversion
Reflection sampling laser 21 power.High power detection sensor 4 refers to probe power >=5W, using thermistor or thermocouple
The power detector of element.
Referring to Fig. 1, signal processor 5 is used to be analyzed and processed the power of reflection sampling laser 21, and processing is tied
Fruit is transmitted to Laser Control System 6.
Laser Control System 6 be used for receive signal processor 5 transmission processing result, and according to this reason result to
It adjusts laser and sends output 11 power regulating signals of laser, change laser output by changing the driving current of laser
The power of laser makes the power of transmission laser keep stablizing.
Beam shaping system 7 is used to carry out transmission laser 22 collimation and shaping.As shown in figure 3, including swashing along transmission
The second lens group 72, the light focus that the first lens group 71, the focal power that the focal power that 22 transmission direction of light is set gradually is positive are negative
Spend the 4th lens group 74 that the third lens group 73 being positive and focal power are positive；First lens group 71, the second lens group 72, third
Lens group 73 and the 4th lens group 74 are all made of cylindrical lens.
It is focused the beam on the working face of workpiece to be processed by four set of cylindrical lenses, obtains the square having a size of a × b
Shaped light beam hot spot.It can realize zoom and aberration compensation by changing the distance between four cylindrical lenses, can will focus on work
The beam sizes made on face change into a × c；Such as size a × b rectangular light beam hot spot for being 2 × 14 is adjusted to size a × c
It is 2 × 20.The beam sizes for changing working laser according to actual needs, make desired size hot spot reach workpiece surface, thus
It obtains meeting the working laser 75 that the beam sizes that surface processing needs require.
The above is only preferred embodiments of the present invention are described, not by the technical side of the utility model
Case limited to this, such as optical sampling system and beam shaping system can be the combination of multiple cylindrical lenses, be also possible to more
The combination of a cylindrical lens, spherical lens, non-spherical lens.Those skilled in the art conceive in the major technique of the utility model
On the basis of made any known deformation belong to the claimed technology scope of the utility model.
Claims (7)
1. laser output power stablizes output facula tunable arrangement, it is characterised in that：Including signal processor (5), laser control
System (6) processed and the fast axis collimation mirror (12) set gradually in output laser (11) optical path of laser to be regulated and point
Shu Jing (2)；Beam splitter (2) is divided into reflection sampling laser (21) and transmission laser (22) for that will export laser (11)；
Transmission direction along reflection sampling laser (21) sets gradually optical sampling system (3) and high power detection sensor (4)；
Optical sampling system (3) converts the size of reflection sampling laser (21), and high power detection sensor (4) is visited in real time
Survey the power of reflection sampling laser (21) by conversion；
Signal processor (5) is electrically connected with high power detection sensor (4) and Laser Control System (6) respectively, for anti-
The power for penetrating sampling laser (21) is analyzed and processed, and processing result is transmitted to Laser Control System (6)；
Laser Control System (6) is electrically connected with laser to be regulated, for receiving the processing knot of signal processor (5) transmission
Fruit, and manage result according to this and send output laser (11) power regulating signals to laser to be regulated；
Along transmission laser (22) transmission direction be arranged beam shaping system (7), for transmission laser (22) collimated with
And shaping.
2. laser output power according to claim 1 stablizes output facula tunable arrangement, it is characterised in that：The optics
Sampling system (3) includes the non-spherical lens (31) and cylindrical lens set gradually along reflection sampling laser (21) transmission direction
(32)。
3. laser output power according to claim 1 or 2 stablizes output facula tunable arrangement, it is characterised in that：It is described
Beam shaping system (7) includes the first lens group being positive along the focal power that transmission laser (22) transmission direction is set gradually
(71), the third lens group (73) and focal power that the second lens group (72), the focal power that focal power is negative are positive be positive the 4th
Lens group (74)；
Second lens group (72) is along the mobile realization zoom of transmission laser (22) optical axis；The third lens group (73) is along transmission laser (22)
Optical axis is mobile, for compensating the second lens group (72) mobile caused aberration.
4. laser output power according to claim 3 stablizes output facula tunable arrangement, it is characterised in that：The beam splitting
Mirror (2) is flat spectroscope or Amici prism.
5. laser output power according to claim 4 stablizes output facula tunable arrangement, it is characterised in that：The Gao Gong
Rate detection sensor (4) is air-cooled or water cooling laser power meter.
6. a kind of stable output power and output facula tunable laser, including high power semiconductor storehouse laser bodies (1),
It is characterized in that：It further include that laser output power as claimed in claim 1 to 5 stablizes output facula tunable arrangement.
7. a kind of stable output power according to claim 6 and output facula tunable laser, it is characterised in that：It is described
High power semiconductor storehouse laser bodies (1) are using one or more high power semiconductor storehouse lasers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820553313.3U CN208157853U (en) | 2018-04-18 | 2018-04-18 | Laser output power stablizes output facula tunable arrangement and its laser |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820553313.3U CN208157853U (en) | 2018-04-18 | 2018-04-18 | Laser output power stablizes output facula tunable arrangement and its laser |
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| CN208157853U true CN208157853U (en) | 2018-11-27 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108493764A (en) * | 2018-04-18 | 2018-09-04 | 西安必盛激光科技有限公司 | Laser output power stablizes output facula tunable arrangement and its laser |
| CN110661167A (en) * | 2019-09-20 | 2020-01-07 | 云谷（固安）科技有限公司 | Laser energy compensation system, laser crystallization device and method for compensating laser energy |
| CN114832228A (en) * | 2022-07-04 | 2022-08-02 | 中国科学院长春光学精密机械与物理研究所 | Multi-wavelength laser promotes transdermal device of dosing |
-
2018
- 2018-04-18 CN CN201820553313.3U patent/CN208157853U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108493764A (en) * | 2018-04-18 | 2018-09-04 | 西安必盛激光科技有限公司 | Laser output power stablizes output facula tunable arrangement and its laser |
| CN110661167A (en) * | 2019-09-20 | 2020-01-07 | 云谷（固安）科技有限公司 | Laser energy compensation system, laser crystallization device and method for compensating laser energy |
| CN114832228A (en) * | 2022-07-04 | 2022-08-02 | 中国科学院长春光学精密机械与物理研究所 | Multi-wavelength laser promotes transdermal device of dosing |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20230911 Address after: Building E8, Phase III, China Electronics West Zhigu, No. 3 Xinghuo Avenue, High tech Industrial Development Zone, Xianyang City, Shaanxi Province, 710000 yuan Patentee after: Shaanxi Beiling Hongguang Optical Technology Co.,Ltd. Address before: Room 102, 1st Floor, Building 11, No. 17 Information Avenue, New Industrial Park, High tech Zone, Xi'an City, Shaanxi Province, 710119 Patentee before: XI'AN BESAME LASER TECHNOLOGY Co.,Ltd. |
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| TR01 | Transfer of patent right |