CN102593702B - Laser device with homenergic pulse waves and synchronized motion - Google Patents
Laser device with homenergic pulse waves and synchronized motion Download PDFInfo
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- CN102593702B CN102593702B CN2011100038522A CN201110003852A CN102593702B CN 102593702 B CN102593702 B CN 102593702B CN 2011100038522 A CN2011100038522 A CN 2011100038522A CN 201110003852 A CN201110003852 A CN 201110003852A CN 102593702 B CN102593702 B CN 102593702B
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Abstract
The invention discloses a laser device with homenergic pulse waves and a synchronized motion. The laser device comprises a resonant cavity, a light beam on-off modulator, a light beam energy modulator, a light power sensor, a motion controller, a light feedback controller and a trigger controller, wherein the resonant cavity outputs a plurality of pulse waves with stable pulse width time and energy; the light beam on-off modulator selectively enables one of the pulse waves to pass through; the light beam energy modulator adjusts the energy of the pulse waves according to a power feedback signal; the light power sensor senses the energy and the pulse width time of the pulse waves; the motion controller provides working motion information; the light feedback controller outputs the power feedback signal to the light beam energy modulator according to the energy of the pulse waves and the working motion information; and the trigger controller measures the time difference of the pulse waves detected from trigger to the light power sensor and corrects the opening time point of the light beam on-off modulator. Therefore, the processing quality can be stabilized, and the laser device is applied to various laser industrial manufacturing procedures.
Description
Technical field
The present invention is relevant for a kind of laser devices, particularly the laser devices that is synchronized with the movement of a kind of homenergic pulse wave.
Background technology
Laser of many uses, can be used as the processing purposes such as engraving (marking), delineation (scribing), break (fracturing) in commercial Application.For the design of the laser processing unit (plant) of such use, often being to pursue the laser resonant cavity can have high-quality light beam output, and pursues laser specification physically.
Yet, in resonant cavity driving source because of the demand of power must the time adjust, cause in resonant cavity heat balance unstable, and the resonant cavity inner assembly produces the heat drift phenomenon, makes laser output energy unstable.
Moreover in resonant cavity, quality switch (Q-switch) is adjusted switching frequency with the frequency change of output pulse wave, causes energy accumulation output unstable, makes the interior heat balance of resonant cavity keep difficult, also affects the stability of laser output energy.
Again, laser adds man-hour, and common routing motion system relatively moves between laser and workpiece and reaches the processing such as engraving, cutting and make.Therefore, if asynchronous between laser triggering and kinematic system, random processing drop point is unstable with producing, and the quality of impact processing.
Summary of the invention
Existing laser devices still can't be kept stable energy output and laser and trigger asynchronous with motion control.In view of the above problems, the laser devices that the object of the present invention is to provide a kind of homenergic pulse wave to be synchronized with the movement, be conducive to the lifting of laser crudy by this.
The invention provides the laser devices that a kind of homenergic pulse wave is synchronized with the movement, comprise resonant cavity, beam-switching modulator, beam energy modulator, optical power sensor, light back coupling controller, trigger controller and motion controller.
A plurality of pulse waves (Pulse) of resonant cavity output pulse width time and energy stabilization.The beam-switching modulator optionally allow resonant cavity output those pulse waves one of them pass through.The beam energy modulator is according to a power feedback signal adjustment by after the pulse wave energy of beam-switching modulator, and the output pulse wave is to process.Energy and the pulsewidth time of the pulse wave of optical power sensor sensor light beam energy modulator output.Light back coupling controller is electrically connected between optical power sensor and beam energy modulator, and according to the energy of a working motion information and optical power sensor sensing, and the power output feedback signal is to the beam energy modulator.Wherein, working motion information comprises the relative movement parameters of pulse wave and workpiece.Trigger controller is electrically connected to optical power sensor and beam-switching modulator.Trigger controller triggers the beam-switching modulator and opens and measure oneself and be toggled to optical power sensor and a time difference of pulse wave detected, and proofreaies and correct beam-switching modulator opening time point according to this time difference and working motion information.Motion controller is electrically connected to light back coupling controller and trigger controller, transmits working motion information to light back coupling controller and trigger controller.
See through the present invention, can stablize the pulse wave of output fixed energies because of resonant cavity maintaining heat balance, and by the outer beam-switching modulator of resonant cavity, according to required frequency, select pulse wave that it is passed through, reach the effect of homenergic output laser pulse wave.And routing motion system balance pulse wave is toggled to the time difference of outlet chamber, and can accurately in default processing place, process.
Description of drawings
Fig. 1 is the laser devices schematic diagram of the embodiment of the present invention.
Fig. 2 is the block schematic diagram of the embodiment of the present invention.
Fig. 3 is the block schematic diagram of resonant cavity in the embodiment of the present invention.
Fig. 4 is another block schematic diagram of the embodiment of the present invention.
Symbol description
100: laser devices 110: laser module
112: laser light path 114: laser head
120: motion platform 130: control desk
140: power module 150: refrigerating module
200: workpiece 300: pulse wave
310: resonant cavity 311: laser diode
312: GSGG GSAG laser crystals 313: the quality switch
314: times frequency module 3141: frequency-doubling crystal
3142: and frequency crystal 315: aperture grating
316: optical fiber 317: light path mirror group
320: beam-switching modulator 330: the beam energy modulator
340: optical power sensor 342: the power message
350: light back coupling controller 352: power feedback signal
360: trigger controller 370: motion controller
372: 380: the first spectroscopes of working motion information
390: 410: the second spectroscopes of reflector
420: light beam detection device 430: Laser beam quality control device
440: select ripple device 450: dummy load
460: reflector
Embodiment
Below enumerate specific embodiment to describe content of the present invention in detail, and use graphic as aid illustration.The symbol system of mentioning in explanation is with reference to reference numeral.
Please refer to shown in Figure 1ly, is the laser devices schematic diagram of the embodiment of the present invention, adds the actual positional relationship in man-hour in order to disclose laser devices 100 and workpiece 200.Laser devices 100 comprises laser module 110, motion platform 120, control desk 130, power module 140 and refrigerating module 150.
As shown in Figure 1, laser module 110 comprises laser light path 112 and laser head 114.Laser light path 112 is in order to generate laser light.Laser head 114 is processed in order to export this laser light.Motion platform 120 carrying workpieces 200, but and level and vertical mobile workpiece 200, and make workpiece 200 and laser light relative motion, carve, the processing such as cutting.Control desk 130 is in order to the laser parameter of setting relevant laser module 110 and the kinematic parameter of relevant motion platform 120.And control desk 310 is also in order to control refrigerating module 150.Power module 140 is in order to provide laser module 110 and control desk 130 required electric powers.Refrigerating module 150 is connected to laser module 110, in order to laser module 110 is lowered the temperature.Refrigerating module 150 preferably can comprise electronic refrigerator (Thermoelectric cooling, TEC), water cooler, refrigerating compressor or its combination, in order to as thermostatic control.
Seeing also shown in Figure 2ly, is the block schematic diagram of the embodiment of the present invention.The laser devices 100 that the homenergic pulse wave is synchronized with the movement is in order to process workpiece 200.Laser devices 100 comprises resonant cavity 310, beam-switching modulator 320, beam energy modulator 330, optical power sensor 340, light back coupling controller 350, trigger controller 360 and motion controller 370.Preferably, resonant cavity 310, beam-switching modulator 320, beam energy modulator 330, optical power sensor 340, light back coupling controller 350 and trigger controller 360 are arranged in the laser module 110 of Fig. 1; Motion controller 370 is positioned at the motion platform 120 of Fig. 1.
Seeing also shown in Figure 3ly, is the block schematic diagram of resonant cavity 310 in the embodiment of the present invention, is take other semiconductor lasers as example.Resonant cavity 310 comprises laser diode 311, GSGG GSAG laser crystals 312, quality switch (Q-switch) 313 and times frequency module 314.Preferably, laser diode 312 is diode arrays; Quality switch 313 essence are acousto-optic modulator (Acoustic-Optic Modulator); Times frequency module 314 comprises at least one nonlinear crystal, for example, see through frequency-doubling crystal 3141 with and the combination of crystal 3142 frequently, can be three times of primary frequency with the laser frequency transitions.Quality switch 313 can trigger resonant cavity 310 output pulse waves (Pulse) 300, and determines the pulsewidth time of pulse wave 300, therefore, and identical a plurality of pulse waves 300 of sustainable output pulse width time of resonant cavity 310.In addition, see through and to allow the interior maintaining heat balance of resonant cavity 310, resonant cavity 310 inner assemblies are not had cause the pulse wave 300 unsettled situations of power because of heat drift.By this, the energy of each pulse wave 300 can keep stable.In this, pulse wave 300 essence can be pulsed laser light, nearly laser or long pulse laser light.
See also shown in Figure 3, more comprise aperture grating 315 in resonant cavity 310, between quality switch 313 and frequency-doubling crystal 3141, in order to the pulse wave 300 that produces single mode, can avoid pulse wave 300 because the multi-modal power that causes changes, make pulse wave 300 energy more stable.So, have in this field and know that usually the knowledgeable should understand, make pulse wave 300 can meet high-quality process requirements for single mode,, if right pulse wave of the present invention 300 is multi-modal, also be enough to produce stable output.In addition, more can have optical fiber 316 between each assembly in resonant cavity 310 and comprise the light path mirror group 317 of a plurality of lens, use the modulation light path.
For keeping the smoothness of explanation, relevant resonant cavity 310 is the maintaining heat balance how, will wait until Fig. 4 and describe.Below will go on to say the remaining component except resonant cavity 310 in Fig. 2.
Please consult again shown in Figure 2ly, beam-switching modulator 320 receives the plural pulse wave 300 of resonant cavities 310 outputs, and optionally allows one of them pulse wave 300 by beam-switching modulator 320.In this, beam-switching modulator 320 can be acousto-optic modulator or electrooptic modulator (Electro-Optic Modulator).By this, see through the resonant cavity 310 of stable energy output, coordinate the beam-switching modulator 320 of resonant cavity 310 outsides, can generate outside pulse wave 300 with demand, the energy of those pulse waves 300 more can be kept stable.
As shown in Figure 2, after beam energy modulator 330 was adjusted the energy of the pulse wave 300 that passes through beam-switching modulator 320 according to a power feedback signal 352, laser devices 100 output pulse waves 300 were to process workpiece 200., in this, though seeing through thermal equilibrium control, aforementioned resonant cavity 310 makes pulse wave 300 energy stabilizations of resonant cavity 310 outputs.But in fact,, because of the stability restriction of each assemblies in resonant cavity 310 itself, make still have an appointment 3% to 5% amplitude of variation of pulse wave 300 its energy of being exported by resonant cavity 310.Therefore need the another energy that sees through the pulse wave 300 of the thin section of beam energy modulator 330 fine setting beam-switching modulator 320 outputs.Beam energy modulator 330 has the high-order digit analog circuit, can carry out high accuracy and control.Beam energy modulator 330 preferably can be acousto-optic modulator.Via the energy of beam energy modulator 330 fine setting pulse waves 300, each pulse wave 300 of laser devices 100 outputs all can be kept identical energy level.
In this, laser devices 100 more comprises the first spectroscope 380, in order to the pulse wave 300 of light splitting by 330 outputs of beam energy modulator, and is received by optical power sensor 340 and workpiece 200 respectively.Make 300 pairs of workpieces 200 of pulse wave process energy and the pulsewidth time that can see through simultaneously optical power sensor 340 sensing pulse waves 300.Preferably, the first spectroscope 380 essence can be polarizer, and particularly the circular polarization mirror, export pulse wave 300 circular polarization (Circular polarization) to workpiece 200, makes the hot spot of pulse wave 300 and Energy distribution thereof even.In addition, laser devices 100 more comprises a plurality of reflectors (Reflectors) 390,, in order to form light path, is beneficial to pulse wave 300 and advances.
As shown in Figure 2, motion controller 370 is electrically connected to light back coupling controller 350.Light back coupling controller 350 is electrically connected between beam energy modulator 330 and optical power sensor 340.Motion controller 370 is in order to transmit a working motion information 372 to light back coupling controller 350 and trigger controller 360.Working motion information 372 comprises the relative movement parameters of pulse wave 300 and workpiece 200, and essence can be relative position, speed of related movement, the relative acceleration of pulse wave 300 and workpiece 200 or is familiar with this operator and can thinks easily and have to express both parameters of movement relation.Pulse wave 300 power of optical power sensor 340 sensings outputs, and power message 342 to the light that transmits relevant pulse wave 300 power is feedback controller 350.
Therefore, light is feedback controller 350 can be according to power message 342 and working motion information 372, and power output feedback signal 352 is to beam energy modulator 330.Accordingly, make beam energy modulator 330 learn pulse wave 300 real outputs and actual working motion situation by power feedback signal 352, adjust according to this pulse wave 300 power.
As shown in Figure 2, motion controller 370 is electrically connected to trigger controller 360.Trigger controller 360 is electrically connected to beam-switching modulator 320 and optical power sensor 340.Trigger controller 360 is opened in order to trigger beam-switching modulator 320, and measurement detects the time difference of pulse wave 300 from being triggered to optical power sensor 340.Trigger controller 360 according to this time difference and working motion information 372, and proofread and correct beam-switching 320 opening time of modulator point.By this, in the time of can reaching processing and the effect of synchronized movement, particularly movement velocity and change.
For example, when movement velocity is slack-off, if without above-mentioned processing and synchronized movement mechanism, before processing pulse wave 300 will be machined in former predetermined processing place; If see through above-mentioned processing and synchronized movement mechanism, can pass through 320 temporary closes of beam-switching modulator, according to the aforementioned time difference that is toggled to output, before the relative motion of estimating laser head 114 and workpiece 200 will move to former predetermined processing place, trigger controller 360 triggers beam-switching modulator 320 and opens, and output pulse wave 300 is to process.
See also shown in Figure 4, it is another block schematic diagram of the embodiment of the present invention, system except Fig. 2 discloses, more comprises the second spectroscope 410, light beam detection device (Beam profiler) 420, Laser beam quality control device 430, selects ripple device 440, dummy load (Dummy load) 450 and reflector 460.
As shown in Figure 4, a plurality of reflectors 460 form light path, are beneficial to pulse wave 300 and advance.The second spectroscope 410 is in order to receive the pulse wave 300 of resonant cavity 310 output, and the most of pulse wave 300 of light splitting pass through reflector 460 and the beam-switching modulator 320 that arrives; Light splitting fraction pulse wave 300 is to light beam detection device 420.Light beam detection device 420 is in order to detect the light shape of this pulse wave 300, via statistical analysis light shape and loss and obtain at least one light quality parameter.Laser beam quality control device 430 is electrically connected to light beam detection devices 420, and according to the light Q factor adjustment resonant cavity 310.More precisely, the assemblies such as Laser beam quality control device 430 laser diode 311 interior according to light quality parameter adjustment resonant cavity 310, GSGG GSAG laser crystals 312, quality switch 313, with the loss of pre-compensation laser, and can make resonant cavity 310 produce stable energy and the good pulse wave 300 of optical quality.
In addition, please merge with reference to Fig. 1 and shown in Figure 4, the interior temperature of resonant cavity 310 is also monitored and controlled to Laser beam quality control device 430.By the temperature of each assembly in the sensing resonant cavity, lower the temperature in conjunction with refrigerating module 150, reach heat balance and keep constant temperature and make in resonant cavity 310, be in the temperature range of optkmal characteristics to keep each assembly in resonant cavity 310.Preferably, the temperature range of optkmal characteristics is 22 degree Celsius, and so the present invention is not as limit, and visual actual process requirements is adjusted.
Please continue with reference to shown in Figure 4, select ripple device 440 between beam-switching modulator 320 and beam energy modulator 330.Pulse wave 300 is passed through after beam-switching modulator 320, select only P ripple (the Parallel wave of pulse wave 300 by selecting ripple device 440, P-wave) with S ripple (Perpendicular, S-wave) one of them by selecting ripple device 440 to arrive beam energy modulator 330.By this, can select P ripple or S ripple according to the material's absorption properties of workpiece 200, to meet process requirements.
In addition, pulse wave 300 energy that trigger first because of resonant cavity 310 will be larger than set point, selects the ripple device 440 more can be when Mintrop wave pulse wave 300 carries out, the utilization that cooperates with beam-switching modulator 320, and the pulse wave 300 that triggers is not first exported.For example: if beam-switching modulator 320 is electrooptical switching.Beam-switching modulator 320 makes the S ripple of pulse wave 300 select ripple device 440 by exporting to.Select ripple device 400 to make the S ripple of this pulse wave 300 by arriving at dummy load 450 through a sub-path and being absorbed.By this, Mintrop wave pulse wave 300 can not exported and keep crudy.In this, the above-mentioned ripple that selects is only for giving an example, and the present invention is not as limit.This area has knows that usually it can be P ripple or S ripple by pulse wave via controlling selection with the ripple that selects that selects the ripple device that the knowledgeable should understand beam-switching modulator 320.
In sum, function of the present invention is to stablize the energy of laser output, and through trigger laser with synchronized movement.Make the laser pulse wave that often once prior modulation, produces all carry identical energy, and act on fixed position.By this, the present invention can stablize crudy, and can be applicable to each laser industrial process.
Although technology contents of the present invention discloses as above with preferred embodiment; so it is not in order to limit the present invention; anyly be familiar with the technique personnel; do not breaking away from spirit of the present invention a little change and the retouching done; all should be covered by in category of the present invention, so the content that protection scope of the present invention ought define according to claim is as the criterion.
Claims (9)
1. the laser devices that the homenergic pulse wave is synchronized with the movement, is characterized in that, comprises:
One resonant cavity, a plurality of pulse waves of output pulse width time and energy stabilization;
One beam-switching modulator, optionally allow the output of this resonant cavity these a plurality of pulse waves one of them pass through;
One beam energy modulator, after the energy of a power feedback signal adjustment by the pulse wave of this beam-switching modulator, export this pulse wave to process;
One optical power sensor, energy and the pulsewidth time of this pulse wave of this beam energy modulator output of sensing;
One light back coupling controller, be electrically connected between this optical power sensor and this beam energy modulator, energy according to a working motion information and this optical power sensor sensing, and export this power feedback signal to this beam energy modulator, wherein, this working motion information comprises the relative movement parameters of this pulse wave and a workpiece;
One trigger controller, be electrically connected to this optical power sensor and this beam-switching modulator, this trigger controller triggers this beam-switching modulator and opens and measure and a time difference of this pulse wave detected from being toggled to this optical power sensor, and proofreaies and correct this beam-switching modulator opening time point according to this time difference and working motion information; And
One motion controller, be electrically connected to this light back coupling controller and this trigger controller, transmits this working motion information to this light back coupling controller and this trigger controller.
2. the laser devices that is synchronized with the movement of a kind of homenergic pulse wave as claimed in claim 1, is characterized in that, also comprises:
One light beam detection device, detect the output of this resonant cavity these a plurality of pulse waves light shape and obtain at least one light quality parameter; And
One Laser beam quality control device, according to this at least one light quality parameter and this resonant cavity of adjustment, and, control this resonance cavity temperature, reach heat balance and make in this resonant cavity.
3. the laser devices that is synchronized with the movement of a kind of homenergic pulse wave as claimed in claim 1, is characterized in that, this resonant cavity also comprises at least one nonlinear crystal.
4. the laser devices that is synchronized with the movement of a kind of homenergic pulse wave as claimed in claim 1, is characterized in that, this resonant cavity also comprises an aperture grating, and making this pulse wave is single mode.
5. the laser devices that is synchronized with the movement of a kind of homenergic pulse wave as claimed in claim 1, is characterized in that, this resonant cavity also comprises a quality switch, and this quality switch is acousto-optic modulator.
6. the laser devices that is synchronized with the movement of a kind of homenergic pulse wave as claimed in claim 1, is characterized in that, this beam-switching modulator is selected from the group of acousto-optic modulator and electrooptic modulator.
7. the laser devices that is synchronized with the movement of a kind of homenergic pulse wave as claimed in claim 1, is characterized in that, this beam energy modulator is acousto-optic modulator.
8. the laser devices that is synchronized with the movement of a kind of homenergic pulse wave as claimed in claim 1, is characterized in that, also comprises:
One polarizer, will export this optical power sensor to after this pulse wave circular polarization of this beam energy modulator output.
9. the laser devices that is synchronized with the movement of a kind of homenergic pulse wave as claimed in claim 1, is characterized in that, also comprises:
One selects the ripple device, and between this beam-switching modulator and this beam energy modulator, one of them selects the ripple device by this to select the P ripple of this pulse wave of this beam-switching modulator output only and S ripple.
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| CN2011100038522A CN102593702B (en) | 2011-01-04 | 2011-01-04 | Laser device with homenergic pulse waves and synchronized motion |
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| CN2011100038522A CN102593702B (en) | 2011-01-04 | 2011-01-04 | Laser device with homenergic pulse waves and synchronized motion |
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| JP5465363B1 (en) * | 2013-02-14 | 2014-04-09 | 三菱電機株式会社 | Laser processing apparatus, processing control apparatus, and pulse frequency control method |
| JP6355496B2 (en) * | 2014-09-17 | 2018-07-11 | 住友重機械工業株式会社 | Laser processing apparatus and pulse laser beam output method |
| CN108941935A (en) * | 2018-08-14 | 2018-12-07 | 卓弢机器人盐城有限公司 | A kind of laser cutting machine and its working method of monitoring duty |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6080148A (en) * | 1996-11-18 | 2000-06-27 | Trimedyne, Inc. | Variable pulse width lasing device |
| CN201659377U (en) * | 2010-01-26 | 2010-12-01 | 合冠科技股份有限公司 | Laser device for electromechanical control curve technology of panel electro-conductive film |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2541493B2 (en) * | 1993-12-21 | 1996-10-09 | 日本電気株式会社 | Laser processing equipment |
| US20080124816A1 (en) * | 2004-06-18 | 2008-05-29 | Electro Scientific Industries, Inc. | Systems and methods for semiconductor structure processing using multiple laser beam spots |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6080148A (en) * | 1996-11-18 | 2000-06-27 | Trimedyne, Inc. | Variable pulse width lasing device |
| CN201659377U (en) * | 2010-01-26 | 2010-12-01 | 合冠科技股份有限公司 | Laser device for electromechanical control curve technology of panel electro-conductive film |
Non-Patent Citations (1)
| Title |
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| JP特开平7-178578A 1995.07.18 |
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