CN208084105U - A kind of finishing ring for polisher lapper - Google Patents

A kind of finishing ring for polisher lapper Download PDF

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Publication number
CN208084105U
CN208084105U CN201820338310.8U CN201820338310U CN208084105U CN 208084105 U CN208084105 U CN 208084105U CN 201820338310 U CN201820338310 U CN 201820338310U CN 208084105 U CN208084105 U CN 208084105U
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CN
China
Prior art keywords
finishing ring
ring
catch
polisher lapper
finishing
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Application number
CN201820338310.8U
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Chinese (zh)
Inventor
王永成
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SHANGHAI LEADING SEMICONDUCTOR TECHNOLOGY DEVELOPMENT Co Ltd
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SHANGHAI LEADING SEMICONDUCTOR TECHNOLOGY DEVELOPMENT Co Ltd
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Priority to CN201820338310.8U priority Critical patent/CN208084105U/en
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  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

A kind of finishing ring for polisher lapper, the inner wall for modifying ring has at least one perpendicular grooves, there are one recesses for the tooling tool used corresponding with finishing ring, perpendicular grooves are opposite with the position of recess, one L-shaped catch is placed in the space that perpendicular grooves are formed with recess, the vertical component effect of catch is placed in the perpendicular grooves, and the bottom of catch is placed in recess.By designing a perpendicular grooves in the inner wall of finishing ring, one recess of the Fixture Design used corresponding with the finishing ring fixes the relative position of finishing ring and tooling using catch, solves and modifies the thorny problem that relative displacement occurs with tooling for ring in process of lapping.

Description

A kind of finishing ring for polisher lapper
Technical field
The utility model belongs to grinding and polishing technical field, more particularly to a kind of finishing ring for polisher lapper.
Background technology
Chinese patent literature CN101148026A discloses " a kind of trimming ring type intelligent super precision polishing machine, including machine Seat, polishing disk, driving motor, velocity measurement mechanisms and intelligent control platform, the polishing disk are mounted on by main shaft on engine base, institute The output shaft for stating driving motor is connect with spindle drive, and the main shaft is sequentially connected with velocity measurement mechanisms, and the intelligent control is flat Platform connects driving motor and velocity measurement mechanisms, and the super precision polishing machine further includes finishing ring, finishing ring retainer, and described repaiies Basal disc of the installation for clamping workpiece in the domain, the finishing ring are located at the top of the polishing disk, finishing environmental protection Frame is held on engine base, the conditioning ring retainer is equipped with segmental arc, and the radian of the segmental arc is not less than pi/2, described The both ends of segmental arc are equipped with friction pulley, and the finishing ring is embedded in the segmental arc and abuts against on two friction pulleys, and described There is gap between finishing ring and the segmental arc ".
However during actual grinding, finishing ring that said program refers to for carry grind part tooling it Between, mutual frictional force is relied solely on to maintain being relatively fixed for position.Since frictional force is difficult to keep in process of lapping Uniformly stable, the position modified between ring and tooling relatively move often, it appears that are a kind of nonsynchronous situations, for grinding The control of honed journey brings adverse effect.
Utility model content
The embodiments of the present invention provide a kind of finishing ring for polisher lapper, it is therefore intended that solve ground The problem of relative displacement occurs between ring and tooling is modified in journey.
One of the embodiments of the present invention are a kind of finishing rings for polisher lapper, the inner wall of the finishing ring With at least one perpendicular grooves, there are one the tooling tools used correspondings with finishing ring recess, the perpendicular grooves with it is recessed The position of mouth is opposite, and a L-shaped catch is placed in the space that perpendicular grooves are formed with recess, and the vertical component effect of the catch is set to In in the perpendicular grooves, the bottom of the catch is placed in the recess.
Further, the vertical component effect of the catch is fixedly connected with the perpendicular grooves wall of the finishing ring using screw.Institute The vertical component effect for stating catch has the kidney slot for being used for adjusting position.It is provided with for flow-ground liquid on the ring wall of the finishing ring Gap.
One of advantageous effect of the embodiments of the present invention is, vertical recessed by the inner wall design one in finishing ring Slot, one recess of the Fixture Design used corresponding with the finishing ring fix the relative position of finishing ring and tooling using catch, It solves and modifies the thorny problem that relative displacement occurs with tooling for ring in process of lapping.
Description of the drawings
Detailed description below is read by reference to attached drawing, the utility model illustrative embodiments above-mentioned and other Objects, features and advantages will become prone to understand.In the accompanying drawings, show that this practicality is new by way of example rather than limitation Several embodiments of type, wherein:
Polisher lapper schematic diagram involved in Fig. 1 the utility model embodiments.
Ring structure schematic diagram is modified in Fig. 2 the utility model embodiments.
1 --- air cylinder support, 2 --- cylinder, 3 --- pressure disc, 4 --- control display, 5 --- abrasive disk, 6 --- First finishing ring, 7 --- guide wheel, 8 --- guide wheel arm, 9 --- desktop, 10 --- rack, 11 --- tooling, 111 --- workpiece Position, 100 --- the second finishing ring, 101 --- finishing ring perpendicular grooves, 102 --- tooling recess, 103 --- catch.
Specific implementation mode
As shown in Figure 1, in some embodiments, polisher lapper includes rack, the desktop being placed in rack, Yi Jian The air cylinder support of dress on the table.3 cylinders are vertically installed on air cylinder support, each cylinder moving portion is fitted with pressure Disk.
On desktop below pressure disc, the abrasive disk that can be motor driven rotation is installed.Pacify in the edge of abrasive disk Equipped with 3 guide wheel arms, respectively there are one guide wheels at the both ends of guide wheel arm.First finishing ring is placed on abrasive disk, by leading for guide wheel arm Wheel clamping.Tooling is placed in finishing ring, and tooling is work piece carrying tray, has the workpiece position hole for placing workpiece.
In grinding work-piece, pressure disc moves down under the cylinder drive, and just pressure lives in the workpiece in finishing ring. It modifies ring to be clamped by the guide wheel of guide wheel arm, is also at the state of rotation.Abrasive disk rotates under motor driving grinds workpiece Mill.Grinding control operation is completed by the control display mounted on rack side.
As shown in Fig. 2, in some embodiments, the inner wall of the second finishing ring has at least one perpendicular grooves, with second Finishing ring corresponds to recess there are one the tooling tools used, and the perpendicular grooves are opposite with the position of recess, and a L-shaped catch is set to In in the space that perpendicular grooves and recess are formed, the vertical component effect of the catch is placed in the perpendicular grooves, the catch Bottom is placed in the recess.
The vertical component effect of catch is fixedly connected with the perpendicular grooves wall of the finishing ring using screw.The vertical component effect of the catch With the kidney slot for adjusting position.This position is the fixed height of catch and finishing ring, to adapt to different toolings Size.
In at least one embodiment, the gap for flow-ground liquid is provided on the ring wall of the finishing ring.
It is worth noting that being created although foregoing teachings describe the utility model by reference to several specific implementation modes Spirit and principle, it should be appreciated that, it is not limited to the specific embodiments disclosed for the utility model, is drawn to various aspects Divide and does not also mean that the feature in these aspects cannot combine, it is this to divide the convenience merely to statement.The utility model purport Covering various modifications and equivalent arrangements included in spirit and scope of the appended claims.

Claims (7)

1. a kind of finishing ring for polisher lapper, which is characterized in that the inner wall of the finishing ring has at least one vertical Groove, there are one recesses for the tooling tool used corresponding with the finishing ring, and the perpendicular grooves are opposite with the position of recess, one L-shaped catch is placed in the space that perpendicular grooves are formed with recess, and the vertical component effect of the catch is placed in the perpendicular grooves, The bottom of the catch is placed in the recess.
2. being used for the finishing ring of polisher lapper as described in claim 1, which is characterized in that the vertical component effect of the catch and institute The perpendicular grooves wall for stating finishing ring is fixedly connected.
3. being used for the finishing ring of polisher lapper as claimed in claim 2, which is characterized in that the vertical component effect of the catch and institute The perpendicular grooves wall for stating finishing ring is fixedly connected using screw.
4. being used for the finishing ring of polisher lapper as claimed in claim 3, which is characterized in that the vertical component effect of the catch has Kidney slot for adjusting position.
5. being used for the finishing ring of polisher lapper as described in claim 1, which is characterized in that the tooling is work piece carrying tray, With the workpiece position hole for placing workpiece.
6. being used for the finishing ring of polisher lapper as described in claim 1, which is characterized in that opened on the ring wall of the finishing ring It is useful for the gap of flow-ground liquid.
7. being used for the finishing ring of polisher lapper as described in claim 1, which is characterized in that the polisher lapper includes,
Rack;
The desktop being placed in rack;
The air cylinder support of installation on the table;
At least three cylinder being vertically mounted on air cylinder support;
The pressure disc of each cylinder moving portion installation;
On desktop below pressure disc, the abrasive disk that can be motor driven rotation is installed;
3 guide wheel arms are at least installed in the edge of abrasive disk;
Respectively there are one guide wheels at the both ends of guide wheel arm;
The finishing ring is placed on abrasive disk, is clamped by the guide wheel of guide wheel arm;
The tooling is placed in finishing ring;
Control display mounted on rack side.
CN201820338310.8U 2018-03-13 2018-03-13 A kind of finishing ring for polisher lapper Active CN208084105U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201820338310.8U CN208084105U (en) 2018-03-13 2018-03-13 A kind of finishing ring for polisher lapper

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201820338310.8U CN208084105U (en) 2018-03-13 2018-03-13 A kind of finishing ring for polisher lapper

Publications (1)

Publication Number Publication Date
CN208084105U true CN208084105U (en) 2018-11-13

Family

ID=64062538

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201820338310.8U Active CN208084105U (en) 2018-03-13 2018-03-13 A kind of finishing ring for polisher lapper

Country Status (1)

Country Link
CN (1) CN208084105U (en)

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