CN208084147U - A kind of conditioner discs of abrasive disk - Google Patents

A kind of conditioner discs of abrasive disk Download PDF

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Publication number
CN208084147U
CN208084147U CN201820338319.9U CN201820338319U CN208084147U CN 208084147 U CN208084147 U CN 208084147U CN 201820338319 U CN201820338319 U CN 201820338319U CN 208084147 U CN208084147 U CN 208084147U
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CN
China
Prior art keywords
abrasive disk
conditioner discs
sand paper
pedestal
pressure disc
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Application number
CN201820338319.9U
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Chinese (zh)
Inventor
王永成
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SHANGHAI LEADING SEMICONDUCTOR TECHNOLOGY DEVELOPMENT Co Ltd
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SHANGHAI LEADING SEMICONDUCTOR TECHNOLOGY DEVELOPMENT Co Ltd
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Abstract

A kind of conditioner discs of abrasive disk, abrasive disk are used for polisher lapper, and the conditioner discs include:Pressure disc;The pedestal being bonded is fixed with pressure disc;Post substrate in the bottom surface of pedestal;And multi-disc is attached to the sand paper on substrate.Sand paper is diamond sand paper.Sand paper is evenly distributed along the edge of base bottom surface.The utility model is by by diamond sand paper panelization, reducing the higher problem of conditioner discs cost of abrasive disk.

Description

A kind of conditioner discs of abrasive disk
Technical field
The utility model belongs to grinding and polishing technical field, more particularly to a kind of conditioner discs of abrasive disk.
Background technology
Chinese patent literature CN101148026A discloses " a kind of trimming ring type intelligent super precision polishing machine, including machine Seat, polishing disk, driving motor, velocity measurement mechanisms and intelligent control platform, the polishing disk are mounted on by main shaft on engine base, institute The output shaft for stating driving motor is connect with spindle drive, and the main shaft is sequentially connected with velocity measurement mechanisms, and the intelligent control is flat Platform connects driving motor and velocity measurement mechanisms, and the super precision polishing machine further includes finishing ring, finishing ring retainer, and described repaiies Basal disc of the installation for clamping workpiece in the domain, the finishing ring are located at the top of the polishing disk, finishing environmental protection Frame is held on engine base, the conditioning ring retainer is equipped with segmental arc, and the radian of the segmental arc is not less than pi/2, described The both ends of segmental arc are equipped with friction pulley, and the finishing ring is embedded in the segmental arc and abuts against on two friction pulleys, and described There is gap between finishing ring and the segmental arc ".
The polished silicon wafer referred in said program can also become abrasive disk.Abrasive disk is after using, the flatness on surface It can change, it is also desirable to be modified.Existing conditioner discs are repaiied to abrasive disk by whole boart boart paper gasket It is whole so that conditioner discs it is expensive, increase production cost.
Utility model content
The embodiments of the present invention provide a kind of conditioner discs of abrasive disk, it is therefore intended that solve the conditioner discs valence of abrasive disk The more expensive problem of lattice.
One of the embodiments of the present invention are a kind of conditioner discs of abrasive disk, and the conditioner discs include:Pressure disc;With Pressure disc fixes the pedestal of fitting;Post substrate in the bottom surface of pedestal;And multi-disc is attached to the sand paper on substrate.The sand paper is Diamond sand paper.The sand paper is evenly distributed along the edge of base bottom surface.The bottom surface of the substrate pressure sensitive adhesive and pedestal Fitting.
Further, the diameter of the pedestal is more than the diameter of the pressure disc, and pressure disc forms a platform with pedestal Rank.Top surface is equipped with shackle in the pressure disc.
One of advantageous effect of the embodiments of the present invention is, by by diamond sand paper panelization, reducing grinding The higher problem of conditioner discs cost of disk.
Description of the drawings
Detailed description below is read by reference to attached drawing, the utility model illustrative embodiments above-mentioned and other Objects, features and advantages will become prone to understand.In the accompanying drawings, show that this practicality is new by way of example rather than limitation Several embodiments of type, wherein:
The structural schematic diagram of polisher lapper in Fig. 1 the utility model embodiments.
The part-structure schematic diagram of conditioner discs finishing abrasive disk in Fig. 2 the utility model embodiments.
The overlooking structure diagram of conditioner discs in Fig. 3 the utility model embodiments.
The present invention looks up structural representation of conditioner discs in Fig. 4 the utility model embodiments.
1 --- air cylinder support, 2 --- cylinder, 3 --- pressure disc, 4 --- control panel, 5 --- abrasive disk, 6 --- it repaiies The domain, 7 --- guide wheel, 8 --- guide wheel arm, 9 --- desktop, 10 --- rack, 11 --- conditioner discs,
112 --- pedestal, 113 --- shackle, 114 --- substrate, 115 --- diamond sand paper.
Specific implementation mode
As shown in Figure 1, in some embodiments, polisher lapper includes rack, the desktop being placed in rack, Yi Jian The air cylinder support of dress on the table.3 cylinders are vertically installed on air cylinder support, each cylinder moving portion is fitted with pressure Disk.
On desktop below pressure disc, the abrasive disk that can be motor driven rotation is installed.Pacify in the edge of abrasive disk Equipped with 3 guide wheel arms, respectively there are one guide wheels at the both ends of guide wheel arm.
It modifies ring to be clamped by the guide wheel of guide wheel arm, abrasive disk rotates under motor driving, and grinding control operation then passes through What the control display mounted on rack side was completed.
As shown in Fig. 2, in some embodiments, when being modified to abrasive disk, conditioner discs are placed on abrasive disk, finishing Ring is placed on the step of conditioner discs, and finishing ring is clamped by the guide wheel of guide wheel arm.
As shown in Figure 3 and Figure 4, in some embodiments, conditioner discs include:Pressure disc;The base being bonded is fixed with pressure disc Seat;Post substrate in the bottom surface of pedestal;And multi-disc is attached to the sand paper on substrate.The diameter of pedestal is more than the straight of the pressure disc Diameter, pressure disc form a step with pedestal.Pressure disc is fixed below the cylinder of polisher lapper, and top surface is set in pressure disc There is shackle.
In further embodiments, sand paper is diamond sand paper.Sand paper is evenly distributed along the edge of base bottom surface.At least In one embodiment, substrate pressure sensitive adhesive is bonded with the bottom surface of pedestal.
It is worth noting that being created although foregoing teachings describe the utility model by reference to several specific implementation modes Spirit and principle, it should be appreciated that, it is not limited to the specific embodiments disclosed for the utility model, is drawn to various aspects Divide and does not also mean that the feature in these aspects cannot combine, it is this to divide the convenience merely to statement.The utility model purport Covering various modifications and equivalent arrangements included in spirit and scope of the appended claims.

Claims (7)

1. a kind of conditioner discs of abrasive disk, the abrasive disk is used for polisher lapper, which is characterized in that the conditioner discs include:
Pressure disc;
The pedestal being bonded is fixed with pressure disc;
Post substrate in the bottom surface of pedestal;And
Multi-disc is attached to the sand paper on substrate.
2. the conditioner discs of abrasive disk as described in claim 1, which is characterized in that the sand paper is diamond sand paper.
3. the conditioner discs of abrasive disk as described in claim 1, which is characterized in that the sand paper along base bottom surface edge It is evenly distributed.
4. the conditioner discs of abrasive disk as described in claim 1, which is characterized in that the bottom surface of the substrate pressure sensitive adhesive and pedestal Fitting.
5. the conditioner discs of abrasive disk as described in claim 1, which is characterized in that the diameter of the pedestal is more than the pressure disc Diameter, pressure disc and pedestal form a step.
6. the conditioner discs of abrasive disk as described in claim 1, which is characterized in that the pressure disc is fixed on polisher lapper Below cylinder.
7. the conditioner discs of abrasive disk as described in claim 1, which is characterized in that polisher lapper includes,
Rack;
The desktop being placed in rack;
The air cylinder support being installed on above desktop;
At least three cylinder being vertically mounted on air cylinder support;
The pressure disc of each cylinder moving portion installation;
In rack, the abrasive disk that can be motor driven rotation is installed;
3 guide wheel arms are at least installed on the table;
Respectively there are one guide wheels at the both ends of guide wheel arm;
Conditioner discs are placed on abrasive disk, and finishing ring is placed on the step of conditioner discs, and finishing ring is clamped by the guide wheel of guide wheel arm;
Control panel mounted on rack side.
CN201820338319.9U 2018-03-13 2018-03-13 A kind of conditioner discs of abrasive disk Active CN208084147U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201820338319.9U CN208084147U (en) 2018-03-13 2018-03-13 A kind of conditioner discs of abrasive disk

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201820338319.9U CN208084147U (en) 2018-03-13 2018-03-13 A kind of conditioner discs of abrasive disk

Publications (1)

Publication Number Publication Date
CN208084147U true CN208084147U (en) 2018-11-13

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201820338319.9U Active CN208084147U (en) 2018-03-13 2018-03-13 A kind of conditioner discs of abrasive disk

Country Status (1)

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CN (1) CN208084147U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111941284A (en) * 2020-07-27 2020-11-17 西安理工大学 Roller ring composite plane grinding and finishing device
CN112676947A (en) * 2020-12-28 2021-04-20 王兆举 Automatic workpiece shaft butt-joint positioning mechanism for intelligent plane refiner

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111941284A (en) * 2020-07-27 2020-11-17 西安理工大学 Roller ring composite plane grinding and finishing device
CN111941284B (en) * 2020-07-27 2022-01-07 西安理工大学 Roller ring composite plane grinding and finishing device
CN112676947A (en) * 2020-12-28 2021-04-20 王兆举 Automatic workpiece shaft butt-joint positioning mechanism for intelligent plane refiner

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