CN207991459U - A kind of three-D measuring device using principle of reflection - Google Patents

A kind of three-D measuring device using principle of reflection Download PDF

Info

Publication number
CN207991459U
CN207991459U CN201820568862.8U CN201820568862U CN207991459U CN 207991459 U CN207991459 U CN 207991459U CN 201820568862 U CN201820568862 U CN 201820568862U CN 207991459 U CN207991459 U CN 207991459U
Authority
CN
China
Prior art keywords
reflection
light
principle
measuring device
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201820568862.8U
Other languages
Chinese (zh)
Inventor
谭浩泉
施耀杰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dongguan Ze Ze Mould Laser Technology Co Ltd
Original Assignee
Dongguan Ze Ze Mould Laser Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dongguan Ze Ze Mould Laser Technology Co Ltd filed Critical Dongguan Ze Ze Mould Laser Technology Co Ltd
Priority to CN201820568862.8U priority Critical patent/CN207991459U/en
Application granted granted Critical
Publication of CN207991459U publication Critical patent/CN207991459U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

The utility model discloses a kind of three-D measuring devices using principle of reflection, including workbench, being connected with one by two support bases above the workbench has the cantilever for being moved forward and backward function, one is connected on the cantilever has the outer cover for moving left and right function, the outer cover lower end, which is connected with one, has the lifting frame for moving up and down function, the lifting frame lower end is fixedly connected with a detection head assembly for being used for contact measured object, it is equipped in the outer cover and detection head assembly for emitting the light processing component for making light focusing reflection receive light again after light.Cooperation contact floating probe is reflected by light focusing, it is accurate to measure each shaft size of determinand and relative position, improve measurement accuracy.

Description

A kind of three-D measuring device using principle of reflection
Technical field
The utility model belongs to technical field of measuring equipment more particularly to a kind of three-D using principle of reflection measures dress It sets.
Background technology
Three-dimensional measuring instrument is also known as three-coordinates measuring machine, refers to that can measure the geometric form of physics in spatial dimension The high precision measuring instrument of shape, length, flatness etc., three-dimensional measuring instrument are widely used in machine industry.
Traditional three-D mainly coordinates contact type probe to measure three shaft sizes by optical ruler, for complex-shaped non- The more difficult measurement of linear product, precision be not also high.
Therefore, inventor is dedicated to designing a kind of new three-D measuring device to solve the above problems.
Utility model content
The purpose of this utility model is that:A kind of three-D measuring device using principle of reflection is provided, can accurately be measured Relative position, measurement accuracy are higher.
In order to achieve the above object, technical solution adopted in the utility model is:
A kind of three-D measuring device using principle of reflection, including workbench, the workbench top pass through two branch Support seat, which is connected with one, has the cantilever for being moved forward and backward function, and being connected with one on the cantilever has the function of to move left and right Outer cover, the outer cover lower end, which is connected with one and has, moves up and down the lifting frame of function, and the lifting frame lower end is solid Surely it is connected with a detection head assembly for being used for contact measured object, after being equipped in the outer cover and detection head assembly for emitting light Light focusing reflection is set to receive the light processing component of light again.
Further, the light processing component has a first laser focusing detector being set in the outer cover, The detection head assembly has a probe base, is equipped with the first lens in the cavity of the probe base from top to bottom and with described the The coaxial speculum of one lens, the first laser focusing detector be used for detect light be irradiated in the speculum and reflect The amount of movement of light in the vertical direction.
Further, described outer cover one end is internally provided with the second laser focusing detector, the second laser focusing detection It is equipped with the second lens in front of device, a spectroscope is provided tiltedly in front of second lens, the spectroscope is located at described first thoroughly Right over mirror, the second laser focusing detector is irradiated in the light of the speculum and reflection with respect to position for detecting light Set amount of movement.
Further, a saddle is installed in the cavity of the probe base, the saddle upper surface under the speculum Surface is fixedly connected.
Further, the saddle lower end is fixed with a probe, and the probe lower end is spherical in shape.
Further, the magnet of an annular is equipped between the saddle and first lens, the magnet is installed on institute It states in the cavity of probe base, the saddle upper end is made of iron or cobalt or nickel, and the entire saddle provides suction by the magnet Gravitation is suspended in the cavity of the probe base.
Further, an air bearing is fixed in the cavity of the probe base, the air bearing is set in the cunning On the outside of part, the probe base lower end is equipped with an air inlet pipe, the air inlet pipe pass through the part probe base and with the air axis Hold connection.
Further, the cantilever left and right ends are equipped with sliding block, and the sliding block is lived by air bearing and the support base Dynamic connection.
Further, cantilever rear and front end face is protruded respectively sets there are two corresponding sliding rail, two cunnings Two positive stop strips are respectively equipped on dynamic rail road.
Further, two support bases are T-shaped, and support base lower end center is equipped with a through-hole.
Compared with prior art, the utility model has following technique effect:
A kind of three-D measuring device using principle of reflection provided by the utility model is matched by light focusing reflection Splice grafting touch floating probe, it is accurate to measure each shaft size of determinand and relative position, improve measurement accuracy.
Description of the drawings
Fig. 1 is the front view of the utility model three-D measuring device;
Fig. 2 is the left view of the utility model three-D measuring device;
Fig. 3 is the utility model light processing component and detecting head assemble cross-section and partial enlarged view.
It illustrates:
Specific implementation mode
Below in conjunction with the accompanying drawings, the embodiment of the utility model is specifically illustrated, attached drawing is only for reference and illustrates to use, not structure The limitation of pairs of the utility model patent protection domain.
Referring to figs. 1 to Fig. 3, a kind of three-D measuring device using principle of reflection, including workbench 1,1 top of workbench Being connected with one by two support bases 2 has the cantilever 3 for being moved forward and backward function, and being connected with one on the cantilever 3 has The outer cover 4 of function is moved left and right, which, which is connected with one, has the lifting frame 5 for moving up and down function, lifts frame 5 lower end of frame is fixedly connected with a detection head assembly 6 for being used for contact measured object, is equipped in outer cover 4 and detection head assembly 6 for sending out Penetrate the light processing component 7 for making light focusing reflection receive light again after light.
Two support bases 2 are T-shaped, and 2 lower end center of support base is equipped with a through-hole, and 3 left and right ends of the cantilever are equipped with sliding block 33, which is flexibly connected by air bearing with support base 2, and support base 2 is equipped with optical ruler, and cantilever 3 is in air bearing It is moved forward and backward under the action of interior gas, to measure the distance of the back-and-forth motion of cantilever 3, i.e. Y-axis moves size, two before and after cantilever 3 End face is protruded respectively to be set there are two corresponding sliding rail 31, and two are respectively equipped on two sliding rails 31 and plays position-limiting action Positive stop strip 32, outer cover 4 are flexibly connected by air bearing with cantilever 3, and cantilever 3 is equipped with optical ruler, and outer cover 4 is in air bearing It is moved left and right along sliding rail 31 and positive stop strip 32 under the action of gas, moves left and right distance to measure outer cover 4, i.e. X-axis is moved Dynamic size.
There is light processing component 7 a first laser focusing detector 71 being set in outer cover 4, detection head assembly 6 to have There is a probe base 61, which, which is equipped with, always puts on the cavity of lower surface, is equipped with the in the cavity from top to bottom One lens 72 and the speculum 73 coaxial with the first lens 72, the first laser focusing detector 71 are used for detecting being irradiated in speculum 73 and the light amount of movement in the vertical direction that reflects, the first laser focusing detector 71 is frequency stabilization laser focusing detector, The first laser focusing detector 71 includes frequency stabilization laser and photodetector, which has transmitting With the function of receiving frequency stabilization laser light, moreover it is possible to be detected to light, the first laser focusing detector 71 emits light through first Lens 72 reflect, and focus and reflect on speculum 73, and reflection light reflects that be back to first radium-shine through the first lens 72 again To focus/detector 71,5 displacement distance of lifting frame is thus measured, as Z axis moves size.
4 one end of the outer cover is internally provided with the second laser focusing detector 74,74 front of the second laser focusing detector Equipped with the second lens 75, which is provided tiltedly with a spectroscope 76, which is being located at the first lens 72 just Top, the second laser focusing detector 74 are used to detect the light relative position movement that light is irradiated in speculum 73 and reflects Amount, the second laser focusing detector 74 are semiconductor laser focusing detector, which includes partly leading Body laser and photodetector, the second laser focusing detector 74 have the function of emitting and receiving semiconductor laser light, go back Light can be detected, the second laser focusing detector 74 transmitting light refracts to spectroscope 76 through the second lens 75, by dividing The reflection of light microscopic 76 is diverted to the first lens 72, and light focuses on speculum 73 after the refraction of the first lens 72, and light is through speculum 73 reflections are reflected through the first lens 72 again, reflex to the second lens 75 through spectroscope 76 again, light through the second lens 75 again Secondary refraction returns to the second laser focusing detector 74, thus measures the relative displacement of two differences on determinand.
The cavity lower end of the probe base 61 is installed with an air bearing 62, and a saddle is equipped in the air bearing 62 63, which is fixed with a probe 64, which has the contact head of a ball-type, and 61 lower end of probe base is equipped with One air inlet pipe 67, the air inlet pipe 67 are passed through and part probe base 61 and are connected to air bearing 62, air feed pump by air inlet pipe 67 to The inside of air bearing 62 gas supply, driving saddle 63 rotate, and speculum 73 is fixed on 63 top of saddle, 73 lower surface of speculum with 63 upper surface of saddle is fixedly connected, and the magnet 65 of an annular is equipped between saddle 63 and the first lens 72, which is installed on In the cavity of probe base 61 and concentric with speculum 73,63 upper end of saddle is made of iron or cobalt or nickel, which is located at reflection It near mirror 73, is suspended in the cavity of probe base 61 so that entire saddle 63 provides attraction by magnet 65, magnet 65 and sky It is connected by ring block between the shell of gas bearing 62, the first lens 72 are located at 65 top of magnet, the first lens 72 and magnet 65 Between connected by annular canister, which is equipped with fixed cover 66, the first lens 72 be fixed on annular canister and fixed cover 66 it Between, saddle 63, hollow bearing 62, speculum 73, magnet 65, the first lens 72, annular canister, ring block and fixed cover 66 are respectively positioned on In the cavity of probe base 61.
Multiple air bearing are connected to air feed pump respectively, and cantilever 3 is moved forward and backward, and optical ruler measures Y-axis displacement distance, outer cover 4 move left and right, and optical ruler measures X-axis displacement distance, and saddle 63 does not stall dynamic, the drive probe 64 of saddle 63 and the rotation of speculum 73 Turn, saddle 63 magnet 65 sucking action low suspension in the cavity of probe base 61, so that speculum 73 is also suspended in probe base In 61 cavity, when lifting frame 5 moves up or down and when 64 not run-off the straight of probe, from the first laser focusing detector 71 light launched, which focus after the refraction of the first lens 72 through speculum 73, to be reflected, and is returned to again by the refraction of the first lens 72 First laser focusing detector 71, light changes passing time with the movement of lifting frame 5, and then calculates Z-direction Displacement distance, when probe 64 touches inclined-plane, saddle 63 drive speculum 73 tilt an angle, by the second laser focusing examine The light that device 74 is launched is surveyed, spectroscope 76 is refracted to through the second lens 75, the first lens 72 are diverted to by the reflection of spectroscope 76, Light focuses on speculum 73 after the refraction of the first lens 72, and light is reflected through speculum 73 to be reflected through the first lens 72 again, The second lens 75 are reflexed to through spectroscope 76 again, light reflects through the second lens 75 and returns to the second laser focusing detector again 74, light changes passing time and position with the inclination of speculum 73, and then can calculate the relative position between two points, Meanwhile speculum 73 tilts time and the change in location that can also influence the transmitting of the first laser focusing detector 71 and receive light, Change light passing time, and then recalculates the displacement distance of Z-direction, three axis displacement distance combination relative positions Calculate two different points three dimensions specific location and size.
A kind of three-D measuring device using principle of reflection provided by the utility model is matched by light focusing reflection Splice grafting touch floating probe, it is accurate to measure each shaft size of determinand and relative position, improve measurement accuracy
Above disclosed is only the preferred embodiment of the utility model, and the right of the utility model cannot be limited with this Protection domain, therefore equivalent variations made according to the patent scope of the utility model still belong to the model that the utility model is covered It encloses.

Claims (10)

1. a kind of three-D measuring device using principle of reflection, including workbench (1), which is characterized in that the workbench (1) Top is connected with one by two support bases (2) has the cantilever (3) for being moved forward and backward function, activity on the cantilever (3) Being connected with one has the outer cover (4) for moving left and right function, and outer cover (4) lower end, which is connected with one, to be had the function of to move up and down Lifting frame (5), lifting frame (5) lower end be fixedly connected with one be used for contact measured object detection head assembly (6), institute It states outer cover (4) and detects and be equipped in head assembly (6) for making light focusing reflection receive again at the light of light after emitting light Manage component (7).
2. utilizing the three-D measuring device of principle of reflection as described in claim 1, which is characterized in that the light processing group There is part (7) a first laser focusing detector (71) being set in the outer cover (4), the detection head assembly (6) to have One probe base (61), be equipped with from top to bottom in the cavity of the probe base (61) the first lens (72) and with first lens (72) coaxial speculum (73), the first laser focusing detector (71), which is used for detecting light, is irradiated in the speculum (73) and the light amount of movement in the vertical direction that reflects.
3. utilizing the three-D measuring device of principle of reflection as claimed in claim 2, which is characterized in that the outer cover (4) one End is internally provided with the second laser focusing detector (74), and the second lens are equipped in front of the second laser focusing detector (74) (75), it is provided tiltedly with a spectroscope (76) in front of second lens (75), the spectroscope (76) is located at first lens (72) right over, the second laser focusing detector (74) be used for detect light be irradiated in the speculum (73) and reflect Light relative position amount of movement.
4. utilizing the three-D measuring device of principle of reflection as claimed in claim 2, which is characterized in that the probe base (61) Cavity in a saddle (63) is installed, saddle (63) upper surface is fixedly connected with the speculum (73) lower surface.
5. utilizing the three-D measuring device of principle of reflection as claimed in claim 4, which is characterized in that under the saddle (63) End is fixed with a probe (64), and probe (64) lower end is spherical in shape.
6. as claimed in claim 4 utilize principle of reflection three-D measuring device, which is characterized in that the saddle (63) with The magnet (65) of an annular is equipped between first lens (72), the magnet (65) is installed on the sky of the probe base (61) Intracavitary, saddle (63) upper end are made of iron or cobalt or nickel, and the entire saddle (63) provides suction by the magnet (65) Gravitation is suspended in the cavity of the probe base (61).
7. utilizing the three-D measuring device of principle of reflection as claimed in claim 4, which is characterized in that the probe base (61) Cavity in be fixed with an air bearing (62), the air bearing (62) is set on the outside of the saddle (63), the probe Seat (61) lower end be equipped with an air inlet pipe (67), the air inlet pipe (67) pass through the part probe base (61) and with the air axis Hold (62) connection.
8. utilizing the three-D measuring device of principle of reflection as described in claim 1, which is characterized in that the cantilever (3) is left Right both ends are equipped with sliding block (33), and the sliding block (33) is flexibly connected by air bearing with the support base (2).
9. utilizing the three-D measuring device of principle of reflection as described in claim 1, which is characterized in that before the cantilever (3) Both ends of the surface are protruded respectively afterwards sets there are two corresponding sliding rail (31), and two are respectively equipped on two sliding rails (31) Positive stop strip (32).
10. utilizing the three-D measuring device of principle of reflection as described in claim 1, which is characterized in that two supports Seat (2) is T-shaped, and support base (2) the lower end center is equipped with a through-hole.
CN201820568862.8U 2018-04-19 2018-04-19 A kind of three-D measuring device using principle of reflection Active CN207991459U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201820568862.8U CN207991459U (en) 2018-04-19 2018-04-19 A kind of three-D measuring device using principle of reflection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201820568862.8U CN207991459U (en) 2018-04-19 2018-04-19 A kind of three-D measuring device using principle of reflection

Publications (1)

Publication Number Publication Date
CN207991459U true CN207991459U (en) 2018-10-19

Family

ID=63831026

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201820568862.8U Active CN207991459U (en) 2018-04-19 2018-04-19 A kind of three-D measuring device using principle of reflection

Country Status (1)

Country Link
CN (1) CN207991459U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115219750A (en) * 2022-07-07 2022-10-21 深圳市斯纳达科技有限公司 Three-dimensional electric probe base with force feedback

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115219750A (en) * 2022-07-07 2022-10-21 深圳市斯纳达科技有限公司 Three-dimensional electric probe base with force feedback

Similar Documents

Publication Publication Date Title
CN101166948A (en) Surface sensing device with optical sensor
CN110455246A (en) A kind of surface shape measurement device and method for conformal optical element
CN209802322U (en) Glass flatness detection mechanism
CN108680124A (en) Form tolerance Photoelectric Detection robot and detection method
CN108362221A (en) A kind of free form surface pattern nano-precision detection method and device
CN207991459U (en) A kind of three-D measuring device using principle of reflection
CN209432070U (en) A kind of Endoporus measuring device
CN106323171A (en) Two-dimensional laser scanning probe
CN103245293B (en) Adopt the device and method of laser rotary mirror scanning survey annular wheel pattern
CN110567377B (en) Pyramid prism length standard rod length measuring device and measuring method thereof
CN106289063A (en) The one-dimensional laser scanning testing head of single light source
CN106441137A (en) Three-dimensional laser scanning probe
CN105737781A (en) Three-dimensional measuring device special for thin and long thin-wall workpiece
CN203687902U (en) Three-dimensional probe system based on hydrodynamics principles
CN105783795A (en) Measuring device for flatness of polishing plastic disc of large ring polishing machine, and measuring method thereof
CN105222715B (en) A kind of direct incident-type light arm scale-up version one-dimensional linear gauge head
CN206113879U (en) One -dimensional laser scanning gauge head unit
CN105180814B (en) A kind of novel smooth arm amplifying type two-dimensional linear gauge head
CN208887571U (en) A kind of three-dimensional shape measuring apparatus position detecting device
KR20040081946A (en) Apparatus for measuring roughness and flatness
CN205388458U (en) Direct incident formula light arm enlargies linear gauge head of type two dimension
CN204240941U (en) A kind of device measuring the diameter run-out of escape wheel teeth
CN102788670B (en) A kind of gas meter, flow meter air valve mating surface pick-up unit
CN105333820A (en) Novel optical arm amplification-type three-dimensional linear measuring head
CN106403835A (en) One-dimensional laser scanning probe

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant