CN207958549U - A kind of GaAs dislocation corrosion heating equipment - Google Patents
A kind of GaAs dislocation corrosion heating equipment Download PDFInfo
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- CN207958549U CN207958549U CN201721784262.7U CN201721784262U CN207958549U CN 207958549 U CN207958549 U CN 207958549U CN 201721784262 U CN201721784262 U CN 201721784262U CN 207958549 U CN207958549 U CN 207958549U
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Abstract
The utility model is related to a kind of GaAs dislocation corrosion heating equipments, including irony work shape part, annular insulating layer, heating device and the crucible with crucible cover.Irony work shape part includes annular element, barrel-shaped workpiece and panel-like member, the lower end of barrel-shaped workpiece is fixed on the intermediate position of panel-like member, annular element is arranged around the upper end of barrel-shaped workpiece, it is located inside barrel-shaped workpiece to crucible opening upwards, annular insulating layer is arranged between annular element and panel-like member and around barrel-shaped workpiece, heating device is located at the lower section of panel-like member, and opposite with barrel-shaped workpiece position.The GaAs dislocation corrosion heating equipment of the utility model increases thermal capacitance, will not make condensing potassium hydroxide being put into more arsenide gallium monocrystal print, increase the service efficiency of itself by heating irony " workpiece " come heating crucible.
Description
Technical field
The utility model belongs to material installation field, more particularly to a kind of GaAs dislocation corrosion heating equipment.
Background technology
Dislocation (dislocation) refers to a kind of interior microscopic defect of crystalline material, the i.e. local irregular arrangement of atom.
The dislocation of crystal has many detrimental effects to crystalline material, can such as enable band and change；Influence mobility etc..Dislocation density
It is one of the important indicator for weighing quality of materials.
Dislocation density is defined as forming number (a/cm of dislocation pit in per surface area2).Crystal print is by specific
After corrosion, it can be formed be made of the etch pit or hillock with specific shape with corner angle certain low index surfaces on the surface.It is logical
Dislocation etch pit is shown frequently with this preferential chemical corrosion technology, realizes that dislocation density measures.
In heat erosion arsenide gallium monocrystal sample, first potassium hydroxide is placed in platinum or silver crucible be heated to melting and it is clear
After clear, then GaAs sample is put into potassium hydroxide melt liquid and is corroded.In this process, traditional heating device is special
The tubulose heating furnace that can be placed in tune with crucible of door customization.This heating furnace has two big disadvantages：
1. thermal capacity is relatively low.Since the print size and number corroded every time is different, if temperature is just to making potassium hydroxide melt
Melt, condensing potassium hydroxide can be made by being put into multiple prints, if temperature adjusting is higher, print is frangible and corrosion is uneven.
2. in corroding GaAs sample with potassium hydroxide, has the potassium hydroxide melted on a small quantity and overflow, corrosion adds
The service life of hot stove tile, heating furnace is shorter, and heating furnace needs custom-made, of high cost.
Utility model content
The purpose of this utility model is that in order to solve the above problem, the utility model provides a kind of GaAs dislocation corrosion heating
Equipment.The technical solution of the utility model is achieved by the following way.
A kind of GaAs dislocation corrosion heating equipment, including irony work shape part, annular insulating layer, heating device and carry earthenware
The crucible of crucible lid.Irony work shape part includes annular element, barrel-shaped workpiece and panel-like member, and the lower end of barrel-shaped workpiece is fixed on panel-like member
Intermediate position, annular element are arranged around the upper end of barrel-shaped workpiece, are located inside barrel-shaped workpiece to crucible opening upwards, annular heat preservation
For layer positioned at annular element and panel-like member between and around barrel-shaped workpiece setting, heating device is located at the lower section of panel-like member, and with it is barrel-shaped
The location of workpiece is opposite.
Wherein, heating device is round electric furnace pan, and the diameter of heating device is more than the lower end outer diameter of barrel-shaped workpiece.Annular is protected
The inner cavity of warm layer is corresponding with heating device position, and the upper end inner edge of annular insulating layer and the upper end outer rim of barrel-shaped workpiece are close to setting
It sets, the diameter of the lower end of annular insulating layer is close with the size of the diameter of heating device.
Wherein, the upper end fitting annular element setting of annular insulating layer, lower end is bonded panel-like member setting.
Wherein, the thickness of annular element and panel-like member is 3mm, and the thickness of barrel-shaped workpiece is 10mm.
Wherein, insulating layer is Alumina Foam insulating brick-layer.
Wherein, the upper end inner edge of the outer rim of crucible and barrel-shaped workpiece is close to setting.
Wherein, crucible cover is equipped with handle, and the through-hole less than 5mm there are two diameter is set at the top of crucible cover.
The utility model has made " drum " irony workpiece, silver crucible is put into wherein, by heating irony " work
Part " carrys out heating crucible, increases thermal capacitance, will not make condensing potassium hydroxide being put into more arsenide gallium monocrystal print, and
Irony workpiece will not be corroded by potassium hydroxide, and service life is longer.In addition, the utility model also increases spy in " drum " part
The insulating layer of different shape.By the heat transfer and this insulating layer of " drum " part, crucible temperature can be made uniform, efficiently used simultaneously
The heat that entire electric furnace generates.
Description of the drawings
By reading the detailed description of hereafter preferred embodiment, various other advantages and benefit are common for this field
Technical staff will become clear.Attached drawing only for the purpose of illustrating preferred embodiments, and is not considered as to this practicality
Novel limitation.And throughout the drawings, the same reference numbers will be used to refer to the same parts.In the accompanying drawings：
Fig. 1 shows a kind of schematic diagram of GaAs dislocation corrosion heating equipment according to the utility model embodiment.
Specific implementation mode
The illustrative embodiments of the disclosure are more fully described below with reference to accompanying drawings.Although showing this public affairs in attached drawing
The illustrative embodiments opened, it being understood, however, that may be realized in various forms the disclosure without the reality that should be illustrated here
The mode of applying is limited.It is to be able to be best understood from the disclosure on the contrary, providing these embodiments, and can be by this public affairs
The range opened completely is communicated to those skilled in the art.
As shown in Figure 1, a kind of GaAs dislocation corrosion heating equipment, including irony work shape part 1, annular insulating layer 2, heating
Device 3 and crucible 4 with crucible cover.
Irony work shape part 1 includes annular element 10, barrel-shaped workpiece 20 and panel-like member 30, and the lower end of barrel-shaped workpiece 20 is fixed on plate
The intermediate position of shape part 30, annular element 10 are located at barrel-shaped workpiece to 4 opening upwards of crucible around the setting of the upper end of barrel-shaped workpiece 20
Inside 20, annular insulating layer is arranged between annular element 10 and panel-like member 30 and around barrel-shaped workpiece 20, and heating device 3 is located at
The lower section of panel-like member 30, and it is opposite with 20 position of barrel-shaped workpiece.
The internal diameter of barrel-shaped workpiece 20 is slightly larger than the maximum gauge of crucible, highly more slightly higher than crucible, and temperature has heating device logical
It crosses irony work shape part and passes to crucible so that crucible is heated evenly.
Replace common heating furnace with special round electric furnace, due to common electric furnace can only heated base, crucible can be made to be heated not
Uniformly, to influence the corrosion of GaAs.
The diameter of heating device 3 is more than the lower end outer diameter of barrel-shaped workpiece 20, inner cavity and the heating device 3 of annular insulating layer 2
Position corresponds to, and the upper end inner edge of annular insulating layer 2 is adapted to the upper end outer rim of barrel-shaped workpiece 20 so that annular insulating layer 2 it is upper
Hold inner edge close to the upper end outer rim setting of barrel-shaped workpiece 20.The lower end inner edge of annular insulating layer 2 is adapted to heating device 3 so that
The diameter of the lower end inner edge of annular insulating layer 2 be equal to or slightly greater than or less than heating device 3 diameter.Annular insulating layer 2
Upper end is bonded the annular element setting, and lower end is bonded the panel-like member 30 and is arranged.Insulating layer is so set, can make adding for electric furnace
It is hot uniformly simultaneously effective to utilize thermal energy.
In a specific embodiment, the thickness of annular element 10 and panel-like member 30 is 3mm, the thickness of barrel-shaped workpiece 20
For 10mm, annular insulating layer is Alumina Foam insulating brick-layer.The upper end inner edge of the outer rim of crucible 4 and barrel-shaped workpiece 20 is close to setting
It sets, crucible cover is equipped with handle, and the through-hole less than 5mm there are two diameter is set at the top of crucible cover.
Since the iron plate used in workpiece is sufficiently thick, thermal capacitance is sufficiently large, and crucible is made integrally to be heated evenly, and is not in corrode not
The case where uniform or condensing potassium hydroxide, temperature is easy to control, easy to use.
The preferable specific implementation mode of the above, only the utility model, but the scope of protection of the utility model is not
It is confined to this, any one skilled in the art within the technical scope disclosed by the utility model, can readily occur in
Change or replacement, should be covered within the scope of the utility model.Therefore, the scope of protection of the utility model should be with
Subject to the scope of the claims.
Claims (7)
1. a kind of GaAs dislocation corrosion heating equipment, which is characterized in that including irony work shape part (1), annular insulating layer (2),
Heating device (3) and crucible (4) with crucible cover；
The irony work shape part (1) includes annular element (10), barrel-shaped workpiece (20) and panel-like member (30), the barrel-shaped workpiece (20)
Lower end be fixed on the intermediate position of the panel-like member (30), the annular element (10) is around the upper end of the barrel-shaped workpiece (20)
Setting, is located to crucible (4) opening upwards barrel-shaped workpiece (20) inside, and the annular insulating layer is located at the annular
It is arranged between part (10) and the panel-like member (30) and around the barrel-shaped workpiece (20), the heating device (3) is located at described
The lower section of panel-like member (30), and it is opposite with the barrel-shaped workpiece (20) position.
2. GaAs dislocation corrosion heating equipment as described in claim 1, which is characterized in that
The heating device (3) is round electric furnace pan, and the diameter of the heating device (3) is more than under the barrel-shaped workpiece (20)
Hold outer diameter；
The inner cavity of the annular insulating layer (2) is corresponding with the heating device (3) position, the upper end of the annular insulating layer (2)
The upper end outer rim of inner edge and the barrel-shaped workpiece (20) close to setting, the diameter of the lower end of the annular insulating layer (2) with it is described
The size of the diameter of heating device (3) is close.
3. GaAs dislocation corrosion heating equipment as claimed in claim 2, which is characterized in that
The upper end of the annular insulating layer (2) is bonded the annular element setting, and lower end is bonded panel-like member (30) setting.
4. GaAs dislocation corrosion heating equipment as described in claim 1, which is characterized in that
The thickness of the annular element (10) and the panel-like member (30) is 3mm, and the thickness of the barrel-shaped workpiece (20) is 10mm.
5. GaAs dislocation corrosion heating equipment as described in claim 1, which is characterized in that
The annular insulating layer is Alumina Foam insulating brick-layer.
6. GaAs dislocation corrosion heating equipment as described in claim 1, which is characterized in that
The outer rim of the crucible (4) and the upper end inner edge of the barrel-shaped workpiece (20) are close to setting.
7. GaAs dislocation corrosion heating equipment as described in claim 1, which is characterized in that
The crucible cover is equipped with handle, and the through-hole less than 5mm there are two diameter is set at the top of the crucible cover.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721784262.7U CN207958549U (en) | 2017-12-19 | 2017-12-19 | A kind of GaAs dislocation corrosion heating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721784262.7U CN207958549U (en) | 2017-12-19 | 2017-12-19 | A kind of GaAs dislocation corrosion heating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207958549U true CN207958549U (en) | 2018-10-12 |
Family
ID=63729423
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721784262.7U Active CN207958549U (en) | 2017-12-19 | 2017-12-19 | A kind of GaAs dislocation corrosion heating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207958549U (en) |
-
2017
- 2017-12-19 CN CN201721784262.7U patent/CN207958549U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20220222 Address after: 065201 South Youyan Technology Group Co., Ltd. No.2, Xingdu village, Yanjiao, Sanhe City, Langfang City, Hebei Province Patentee after: GRINM GUOJING ADVANCED MATERIALS Co.,Ltd. Address before: 065001 No.4 Baihe Road, Langfang Development Zone, Langfang City, Hebei Province Patentee before: GRINM ELECTRO-OPTIC MATERIALS CO.,LTD. |
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| TR01 | Transfer of patent right |