CN207944170U - A kind of monocrystaline silicon stove bell - Google Patents

A kind of monocrystaline silicon stove bell Download PDF

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Publication number
CN207944170U
CN207944170U CN201721340707.2U CN201721340707U CN207944170U CN 207944170 U CN207944170 U CN 207944170U CN 201721340707 U CN201721340707 U CN 201721340707U CN 207944170 U CN207944170 U CN 207944170U
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CN
China
Prior art keywords
vacuum
lid
sphere
fixed
wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201721340707.2U
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Chinese (zh)
Inventor
路建华
陈钦强
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qinghai Crystal Optoelectronics Co Ltd
Original Assignee
Qinghai Crystal Optoelectronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Priority to CN201721340707.2U priority Critical patent/CN207944170U/en
Application granted granted Critical
Publication of CN207944170U publication Critical patent/CN207944170U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model discloses a kind of monocrystaline silicon stove bells, including lid, concubine connecting flange and vacuum sphere, the bottom end of lid is fixed with retainer plate, the center on lid top is fixed with connecting tube, the side of connecting tube is equipped with flap valve, and the top of connecting tube is fixed with concubine connecting flange, and the outer wall of lid side is fixed with vacuum-pumping tube, the top of vacuum-pumping tube is fixedly connected with vacuum sphere, and vacuum transducer is equipped on the inner wall of vacuum sphere.The design that the utility model vacuum orifice is connect by vacuum sphere with lid, can to avoid connection when vacuumizing it is not close caused by vacuum pressure it is insufficient, improve the effect vacuumized;The vacuum transducer being equipped with can detect the vacuum pressure of lid portion inside constantly, intuitively be shown vacuum pressure value by display screen, and person easy to operation controls the vacuum pressure in stove in true scope, improves the quality of monocrystalline silicon.

Description

A kind of monocrystaline silicon stove bell
Technical field
The utility model is related to a kind of bell, specially a kind of monocrystaline silicon stove bell.
Background technology
Monocrystaline silicon stove is the manufacturing equipment that monocrystalline silicon is produced by vertical pulling method, is mainly made of furnace body, concubine and lid etc., Traditional monocrystaline silicon stove bell only plays a certain protective role monocrystaline silicon stove, and practical function is little, and the pumping being equipped with Vacuum tube is easy during vacuumizing causes vacuum pressure inadequate because air-tightness is bad, and be difficult to will be in stove by operator Vacuum pressure control in suitable range, for requiring very accurately for monocrystalline silicon growing vacuum pressure value, ten It is unfavorable to divide, and if the temperature step control in stove is bad, can also influence the efficiency and quality of monocrystalline silicon production, therefore we Improvement is made to this, proposes a kind of monocrystaline silicon stove bell.
Utility model content
Monocrystaline silicon stove furnace cover structure of the existing technology is single, the simple defect of function to solve, and the utility model carries For a kind of monocrystaline silicon stove bell.
In order to solve the above-mentioned technical problem, the utility model provides the following technical solution:
A kind of monocrystaline silicon stove bell of the utility model, including lid, concubine connecting flange and vacuum sphere, the bottom of the lid End is fixed with retainer plate, and the center on the lid top is fixed with connecting tube, and the side of the connecting tube is equipped with turnover panel The top of valve, the connecting tube is fixed with concubine connecting flange, and the outer wall of the lid side is fixed with vacuum-pumping tube, institute The top for stating vacuum-pumping tube is fixedly connected with vacuum sphere, and vacuum transducer, the vacuum are equipped on the inner wall of the vacuum sphere The top of ball is equipped with vacuum orifice, and the outer wall of the lid other side is fixed with three temperature detection pipes successively, described in three Be mounted on temperature monitor inside temperature detection pipe, the positive middle part of lid offers observation slot, the lid it is outer Display screen is installed, the display screen is electrically connected with vacuum transducer on wall.
Further, the connecting line of the vacuum transducer passes through vacuum sphere to be electrically connected with display screen, the connecting line It is equipped with sealing ring with the junction of vacuum sphere.
Further, the heat resisting temperature of the temperature monitor is more than 500 degree, and the probe of three temperature monitors is equal It is placed in lid portion inside, and the level altitude of three temperature monitors is different.
Further, pyroceram is installed inside the observation slot.
Further, switch is installed, the display screen is electrical with external power supply by switching on the outer wall of the lid Connection.
Compared with prior art, the utility model has the advantages that:This kind of monocrystaline silicon stove bell, vacuum orifice are logical Cross the design that vacuum sphere is connect with lid, can to avoid connection when vacuumizing it is not close caused by vacuum pressure it is insufficient, improve and take out The effect of vacuum;The vacuum transducer being equipped with can detect the vacuum pressure of lid portion inside constantly, by display screen by vacuum pressure Force value intuitively shows that person easy to operation controls the vacuum pressure in stove in true scope, improves monocrystalline silicon Quality;Three temperature monitors being equipped with can detect interior temperature gradient of coming out of the stove constantly, and person easy to operation controls temperature, improves The production efficiency of monocrystalline silicon;The observation slot being equipped with can observe the upgrowth situation of monocrystalline silicon for operator, convenient for making timely Adjustment.
Description of the drawings
Fig. 1 is a kind of structural schematic diagram of monocrystaline silicon stove bell of the utility model;
Fig. 2 is a kind of part section structural representation of monocrystaline silicon stove bell of the utility model.
In figure:1, lid;2, retainer plate;3, connecting tube;4, concubine connecting flange;5, flap valve;6, slot is observed;7, resistance to height Warm glass;8, vacuum-pumping tube;9, vacuum sphere;10, vacuum orifice;11, display screen;12, temperature detection pipe;13, temperature monitor; 14, it switchs;15, vacuum transducer.
Specific implementation mode
To make the technical means, creative features, achievement of purpose, and effectiveness of the utility model be easy to understand, below In conjunction with specific implementation mode, the utility model is expanded on further.
As shown in Figs. 1-2, a kind of monocrystaline silicon stove bell, including lid 1, concubine connecting flange 4 and vacuum sphere 9, lid 1 Bottom end is fixed with retainer plate 2, and the center on 1 top of lid is fixed with connecting tube 3, and the side of connecting tube 3 is equipped with flap valve 5, the top of connecting tube 3 is fixed with concubine connecting flange 4, and the outer wall of 1 side of lid is fixed with vacuum-pumping tube 8, vacuumizes The top of pipe 8 is fixedly connected with vacuum sphere 9, and vacuum transducer 15 is equipped on the inner wall of vacuum sphere 9, and the top of vacuum sphere 9 is set There is a vacuum orifice 10, the outer wall of 1 other side of lid is fixed with three temperature detection pipes 12 successively, in three temperature detection pipes 12 Portion is mounted on temperature monitor 13, and 1 positive middle part of lid offers observation slot 6, display screen is equipped on the outer wall of lid 1 11, display screen 11 is electrically connected with vacuum transducer 15.
Wherein, the connecting line of vacuum transducer 15 passes through vacuum sphere 9 to be electrically connected with display screen 11, connecting line and vacuum sphere 9 junction avoids the air pressure inside of vacuum sphere 9 from being influenced by ambient pressure equipped with sealing ring when vacuumizing.
Wherein, the heat resisting temperature of temperature monitor 13 is more than 500 degree, and the probe of three temperature monitors 13 is placed in lid Inside 1, and the level altitude of three temperature monitors 13 is different, can accurately measure the temperature gradient in stove, person easy to operation Flexible modulation temperature.
Wherein, it observes inside slot 6 and pyroceram 7 is installed, operator's slot 6 only from can be observed in stove constantly Monocrystalline silicon growing situation, convenient for timely making the adjustment of the conditions such as temperature, pressure.
Wherein, switch 14 is installed on the outer wall of lid 1, display screen 11 is electrically connected by switch 14 and external power supply, The vacuum pressure value that vacuum transducer detects can be shown that person's observation and adjustment easy to operation are taken out by display screen 11 constantly The speed of vacuum.
It should be noted that the utility model is a kind of monocrystaline silicon stove bell, when specific operation, operator can be by lid The retainer plate 2 of 1 bottom is mounted on the top of monocrystaline silicon stove, is then installed the concubine of monocrystaline silicon stove by concubine connecting flange 4 On, thus form a complete monocrystaline silicon stove;Polycrystalline silicon raw material can be placed on inside monocrystaline silicon stove and carry out by operator Heating;Operator can open switch 14 in the process, and such vacuum transducer 15 will detect that the vacuum pressure inside vacuum sphere 9 Power, (vacuum sphere 9 is connected to 1 inside of lid, so air pressure is consistent) person easy to operation control the speed vacuumized, and realization will be in stove Vacuum pressure control in a true scope;Three temperature monitors 13 can detect inside lid 1 at the moment simultaneously Temperature gradient, person easy to operation control temperature, to improve the efficiency that monocrystaline silicon stove produces monocrystalline silicon;In the mistake of monocrystalline silicon growing Cheng Zhong, operator can observe the upgrowth situation of monocrystalline silicon by observing 6 moment of slot, and person easy to operation, which makes, timely to be adjusted, Practicability higher.
The advantages of basic principles and main features and the utility model of the utility model have been shown and described above.One's own profession The technical staff of industry is it should be appreciated that the present utility model is not limited to the above embodiments, described in above embodiments and description Only illustrate the principles of the present invention, on the premise of not departing from the spirit and scope of the utility model, the utility model is also It will have various changes and improvements, these various changes and improvements fall within the scope of the claimed invention.The utility model Claimed range is defined by the appending claims and its equivalent thereof.

Claims (5)

1. a kind of monocrystaline silicon stove bell, including lid (1), concubine connecting flange (4) and vacuum sphere (9), which is characterized in that described The bottom end of lid (1) is fixed with retainer plate (2), and the center on lid (1) top is fixed with connecting tube (3), the company The side for taking over (3) is equipped with flap valve (5), and the top of the connecting tube (3) is fixed with concubine connecting flange (4), described The outer wall of lid (1) side is fixed with vacuum-pumping tube (8), and the top of the vacuum-pumping tube (8) is fixedly connected with vacuum sphere (9), vacuum transducer (15) is installed, the top of the vacuum sphere (9) is equipped with vacuum orifice on the inner wall of the vacuum sphere (9) (10), the outer wall of lid (1) other side is fixed with three temperature detection pipes (12), three temperature detection pipes successively (12) internal to be mounted on temperature monitor (13), the positive middle part of the lid (1) offers observation slot (6), the lid (1) display screen (11) is installed, the display screen (11) is electrically connected with vacuum transducer (15) on outer wall.
2. a kind of monocrystaline silicon stove bell according to claim 1, which is characterized in that the connection of the vacuum transducer (15) Line passes through vacuum sphere (9) to be electrically connected with display screen (11), and the junction of the connecting line and vacuum sphere (9) is equipped with sealing ring.
3. a kind of monocrystaline silicon stove bell according to claim 1, which is characterized in that the temperature monitor (13) it is heat-resisting Temperature is more than 500 degree, and the probe of three temperature monitors (13) is placed in lid (1) inside, and three temperature monitors (13) level altitude is different.
4. a kind of monocrystaline silicon stove bell according to claim 1, which is characterized in that be equipped with inside the observation slot (6) Pyroceram (7).
5. a kind of monocrystaline silicon stove bell according to claim 1, which is characterized in that installed on the outer wall of the lid (1) There are switch (14), the display screen (11) to be electrically connected by switch (14) and external power supply.
CN201721340707.2U 2017-10-18 2017-10-18 A kind of monocrystaline silicon stove bell Expired - Fee Related CN207944170U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201721340707.2U CN207944170U (en) 2017-10-18 2017-10-18 A kind of monocrystaline silicon stove bell

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201721340707.2U CN207944170U (en) 2017-10-18 2017-10-18 A kind of monocrystaline silicon stove bell

Publications (1)

Publication Number Publication Date
CN207944170U true CN207944170U (en) 2018-10-09

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ID=63703105

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201721340707.2U Expired - Fee Related CN207944170U (en) 2017-10-18 2017-10-18 A kind of monocrystaline silicon stove bell

Country Status (1)

Country Link
CN (1) CN207944170U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113957517A (en) * 2021-09-17 2022-01-21 魏波 Single crystal growing furnace vacuum detection system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113957517A (en) * 2021-09-17 2022-01-21 魏波 Single crystal growing furnace vacuum detection system
CN113957517B (en) * 2021-09-17 2023-12-26 内蒙古晶祥工贸有限公司 Single crystal furnace vacuum detection system

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GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20181009

Termination date: 20201018

CF01 Termination of patent right due to non-payment of annual fee