CN113957517A - Single crystal growing furnace vacuum detection system - Google Patents
Single crystal growing furnace vacuum detection system Download PDFInfo
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- CN113957517A CN113957517A CN202111094780.7A CN202111094780A CN113957517A CN 113957517 A CN113957517 A CN 113957517A CN 202111094780 A CN202111094780 A CN 202111094780A CN 113957517 A CN113957517 A CN 113957517A
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- 239000013078 crystal Substances 0.000 title claims abstract description 36
- 238000001514 detection method Methods 0.000 title claims abstract description 34
- 238000009434 installation Methods 0.000 claims description 34
- 238000005192 partition Methods 0.000 claims description 14
- 230000007246 mechanism Effects 0.000 claims description 7
- 239000000523 sample Substances 0.000 claims description 7
- 238000007789 sealing Methods 0.000 claims description 4
- 230000005540 biological transmission Effects 0.000 claims description 3
- 235000017166 Bambusa arundinacea Nutrition 0.000 claims description 2
- 235000017491 Bambusa tulda Nutrition 0.000 claims description 2
- 241001330002 Bambuseae Species 0.000 claims description 2
- 235000015334 Phyllostachys viridis Nutrition 0.000 claims description 2
- 239000011425 bamboo Substances 0.000 claims description 2
- 239000011148 porous material Substances 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 11
- 238000000034 method Methods 0.000 description 8
- 230000000903 blocking effect Effects 0.000 description 6
- 239000007787 solid Substances 0.000 description 6
- 238000001914 filtration Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000006185 dispersion Substances 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 239000003595 mist Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
Abstract
The invention belongs to the technical field of single crystal furnaces, and particularly relates to a single crystal furnace vacuum detection system. The invention utilizes the baffle to respectively plug the exhaust pipe and the connecting pipe, thereby distinguishing the vacuum change conditions of the furnace body and the vacuum pipeline to effectively judge the air leakage condition, reducing the using number of vacuum degree detectors and improving the actual using effect and effectiveness of the vacuum detection of the single crystal furnace.
Description
Technical Field
The invention relates to the technical field of single crystal furnaces, in particular to a vacuum detection system of a single crystal furnace.
Background
The single crystal furnace is a device for melting polycrystalline materials such as polycrystalline silicon and the like by using a graphite heater in an inert gas (mainly nitrogen and helium) environment and growing dislocation-free single crystals by using a Czochralski method, and mainly comprises a furnace body, an electric control cabinet, a main vacuum pump, a vacuum pipeline, a cooling water system, a power transformer and other main parts, and the single crystal furnace is usually required to be vacuumized in the furnace body in the actual use process.
Actually in the in-process of using single crystal growing furnace, the vacuum in the furnace body has important influence to the quality of processing operation, consequently often can be provided with the vacuum detector and carry out the vacuum and detect, but prior art sets up the vacuum detector on the vacuum pipe that sets up between furnace body and the vacuum pump and detects the vacuum condition, but it can't effectively distinguish the furnace body and the vacuum change in the vacuum pipe, can't distinguish promptly that whether furnace body gas leakage or pipeline gas leakage.
Disclosure of Invention
Based on the technical problem of the background technology, the invention provides a vacuum detection system of a single crystal furnace.
The invention provides a single crystal furnace vacuum detection system which comprises a fixed cylinder, wherein the fixed cylinder is horizontally arranged, the bottom end of the circumferential outer wall of the fixed cylinder is connected with a connecting pipe, one side of the circumferential outer wall of the fixed cylinder is connected with an exhaust pipe, the middle position between the inner walls of the two ends of the fixed cylinder is rotatably connected with a horizontally arranged installation cylinder, one end of the installation cylinder is in transmission connection with a driving motor, a vacuum degree detector is fixed at the position, corresponding to the center of the installation cylinder, of one end, away from the driving motor, of the fixed cylinder, a probe of the vacuum degree detector extends into the installation cylinder, a connecting plate is fixed at one side of the circumferential outer wall of the installation cylinder, a baffle of an arc structure is fixed at one end, away from the installation cylinder, the outer wall of the baffle is in sliding connection with the inner wall of the fixed cylinder, and a filter screen seat is fixed at one side, away from the connecting plate, of the circumferential outer wall of the installation cylinder.
Preferably, the both ends opening setting of solid fixed cylinder, and the both ends of solid fixed cylinder all can be dismantled and be connected with sealed apron, and one side that solid fixed cylinder circumference inner wall bottom is close to the exhaust tube is fixed with spacing frame, the outer wall of baffle and the inner wall sliding connection of spacing frame, and the one end that the installation section of thick bamboo was kept away from to the screen frame is fixed with the sliding plate of arc structure, the outer wall of sliding plate and the inner wall sliding connection of solid fixed cylinder.
Preferably, one side of the installation cylinder close to the filter screen seat is set into a fixed screen plate, the filter screen seat is fixed in the middle position of the fixed screen plate, a guide plate with an arc-shaped structure is fixed between two sides of the inner wall of the circumference of the installation cylinder, the middle position of the guide plate is arched towards one side close to the filter screen seat, the guide plate is positioned on one side of a probe of the vacuum degree detector close to the filter screen seat, one side of the installation cylinder far away from the fixed screen plate is set into a connection screen plate, and the connection screen plate is positioned on one side of the connection plate close to the exhaust pipe.
Preferably, the filter screen seat is provided with a first filter screen plate and a second filter screen plate which penetrate through and are fixed on the fixed screen plate, a connecting cavity is formed between the first filter screen plate and the second filter screen plate, connecting holes which are distributed at equal intervals in the horizontal direction are formed in the positions, corresponding to the connecting cavity, of the outer wall of the fixed screen plate, the second filter screen plate is located on one side close to the connecting screen plate, and the aperture of the mesh of the second filter screen plate is smaller than that of the mesh of the first filter screen plate.
Preferably, partition plates distributed at equal intervals are fixed between the inner walls of the two sides of the connecting cavity, the cross sections of the partition plates are arranged to be V-shaped structures, and the middle positions of the partition plates are bent towards the installation cylinder.
Preferably, the guide plate is provided with guide grooves distributed equidistantly on one side close to the filter screen seat, the guide grooves are arranged in a hole-like structure, and the inner diameter of each guide groove gradually shrinks inwards.
Preferably, connecting cylinders are fixed on two sides between inner walls of two ends of the fixed cylinder, the connecting cylinder close to one side of the exhaust tube is arranged above the exhaust tube, the connecting cylinder far away from one side of the exhaust tube is arranged below the exhaust tube, and piston mechanisms moving to and fro are arranged in the two connecting cylinders.
Preferably, a plurality of wind holes have been seted up to the outer wall of connecting cylinder, and the wind hole on two connecting cylinders distributes respectively in the both ends position of solid fixed cylinder, and piston mechanism is provided with the electric telescopic handle who is fixed in the solid fixed cylinder tip, and electric telescopic handle's one end is fixed with the piston with connecting cylinder inner wall sliding connection, and the piston is located the one end position that the wind hole was kept away from to the corresponding connecting cylinder.
Preferably, the wind hole of connecting cylinder outer wall sets to the multiunit, and every group wind hole sets to be annular array along the outer wall of connecting cylinder and distributes, and multiunit wind hole distributes along the axis equidistance of connecting cylinder, and the both sides that the connecting cylinder outer wall is located every group wind hole all are fixed with the drainage plate of loop configuration, and the drainage plate sets to the arc structure of outside hunch-up.
Preferably, the drainage groove that annular array distributes is seted up to the circumference inner wall of drainage plate, and the width of drainage groove reduces gradually towards the one end of keeping away from the connecting cylinder, and the degree of depth of drainage groove reduces gradually towards the one end of keeping away from the connecting cylinder.
The beneficial effects of the invention are as follows:
in the embodiment of the invention, the air flow in the furnace body passes through the filter screen seat above by the blocking of the connecting plate and is then extracted from the extraction pipe, thereby avoiding the influence of the dust or water mist accumulation on the vacuum degree detector and the vacuum pump through the filtering operation, and the baffle plate rotates back and forth along with the mounting cylinder periodically after the vacuum is stabilized, the exhaust pipe is blocked when the baffle plate rotates to the position of the exhaust pipe, the vacuum degree detector detects the stable condition or the changing condition of the vacuum degree in the furnace body under the state, when the baffle rotates to the position of the connecting pipe, the connecting pipe is blocked, the vacuum degree detector detects the vacuum degree change condition of the vacuum pipeline connected with the exhaust pipe in the state, therefore, the vacuum change conditions of the furnace body and the vacuum pipeline are distinguished, the air leakage condition is effectively judged, the number of vacuum degree detectors is reduced, and the actual use effect and effectiveness of the single crystal furnace vacuum detection are improved.
Drawings
FIG. 1 is a schematic view of the overall structure of a single crystal furnace vacuum detection system according to the present invention;
FIG. 2 is a schematic view of the internal structure of a fixed cylinder of a single crystal furnace vacuum detection system according to the present invention;
FIG. 3 is a schematic structural diagram of a baffle of a single crystal furnace vacuum detection system in an initial state according to the present invention;
FIG. 4 is a schematic structural diagram of a single crystal furnace vacuum detection system according to the present invention, in which a baffle and an exhaust tube are in a corresponding position;
FIG. 5 is a schematic structural diagram of a single crystal furnace vacuum detection system according to the present invention, in which a baffle plate and a connecting pipe are in a corresponding position;
FIG. 6 is a schematic diagram of a filter base structure of a single crystal furnace vacuum detection system according to the present invention;
FIG. 7 is a schematic view of a baffle structure of a single crystal furnace vacuum detection system according to the present invention;
FIG. 8 is a schematic structural view of a connecting cylinder of a single crystal furnace vacuum detection system according to the present invention;
FIG. 9 is a schematic structural view of a flow guide plate of a single crystal furnace vacuum detection system according to the present invention.
In the figure: the device comprises a fixed cylinder 1, a connecting pipe 2, an exhaust pipe 3, an installation cylinder 4, a vacuum degree detector 5, a connecting plate 6, a baffle 7, a filter screen seat 8, a sealing cover plate 9, a limiting frame 10, a sliding plate 11, a first filter screen plate 12, a second filter screen plate 13, a connecting cavity 14, a fixed screen plate 15, a connecting hole 16, a partition plate 17, a guide plate 18, a flow guide groove 1801, a connecting screen plate 19, a connecting cylinder 20, an air hole 21, a piston 22, a flow guide plate 23 and a flow guide groove 2301.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.
Example 1
Referring to fig. 1-2, a single crystal furnace vacuum detection system comprises a fixed cylinder 1, the fixed cylinder 1 is horizontally arranged, the bottom end of the circumferential outer wall of the fixed cylinder 1 is connected with a connecting pipe 2, the bottom end of the connecting pipe 2 is fixed in a furnace body, one side of the circumferential outer wall of the fixed cylinder 1 is connected with an exhaust pipe 3, the exhaust pipe 3 is connected with a vacuum pump, the middle position between the inner walls of the two ends of the fixed cylinder 1 is rotatably connected with a horizontally arranged installation cylinder 4, one end of the installation cylinder 4 is connected with a driving motor in a transmission manner, a vacuum degree detector 5 is fixed at the position, corresponding to the center of the installation cylinder 4, of one end of the fixed cylinder 1 far away from the driving motor, a probe of the vacuum degree detector 5 extends into the installation cylinder 4, a connecting plate 6 is fixed at one side of the circumferential outer wall of the installation cylinder 4, a baffle 7 with an arc structure is fixed at the end of the connecting plate 6 far away from the installation cylinder 4, and the baffle 7 is positioned between the connecting pipe 2 and the exhaust pipe 3, the outer wall of the baffle 7 is connected with the inner wall of the fixed cylinder 1 in a sliding way, one side of the circumferential outer wall of the installation cylinder 4, which is far away from the connecting plate 6, is fixed with a filter screen seat 8, in the practical use process, the fixed cylinder 1 is connected outside the furnace body by using the connecting pipe 2, the exhaust pipe 3 is connected with a vacuum pump so as to vacuumize the inside of the furnace body through a cavity in the fixed cylinder 1, referring to fig. 3, the position of the baffle 7 in the state between the connecting pipe 2 and the exhaust pipe 3 does not influence the normal vacuumizing operation, the air flow in the furnace body passes through the filter screen seat 8 above by the blocking of the connecting plate and is then extracted from the exhaust pipe 3, thereby the use of the vacuum degree detector 5 and the vacuum pump is prevented from being influenced by the dust or water mist accumulation through the filtering operation, the baffle 7 rotates along with the installation cylinder 4 in a periodic reciprocating way after the vacuum is stabilized, and the exhaust pipe 3 is blocked when the baffle 7 rotates to the position of the exhaust pipe 3, referring to fig. 4, the vacuum degree detector 5 detects the stable condition or the change condition of the vacuum degree in the furnace body in the state, and the connecting pipe 2 is blocked when the baffle 7 rotates to the position of the connecting pipe 2, and referring to fig. 5, the vacuum degree detector 5 detects the change condition of the vacuum degree of the vacuum pipeline connected with the exhaust pipe 3 in the state, so that the vacuum change conditions of the furnace body and the vacuum pipeline are distinguished, the air leakage condition is effectively judged, the using number of the vacuum degree detectors is reduced, and the actual using effect and effectiveness of the vacuum detection on the single crystal furnace are improved.
Referring to fig. 2, in the invention, two ends of a fixed cylinder 1 are provided with openings, and two ends of the fixed cylinder 1 can be detachably connected with sealing cover plates 9, one side of the bottom of the circumferential inner wall of the fixed cylinder 1, which is close to an exhaust pipe 3, is fixed with a limit frame 10, the outer wall of a baffle 7 is in sliding connection with the inner wall of the limit frame 10, one end of a filter screen seat 8, which is far away from an installation cylinder 4, is fixed with a sliding plate 11 of an arc structure, the outer wall of the sliding plate 11 is in sliding connection with the inner wall of the fixed cylinder 1, the stability of the movement of the baffle 7 is ensured by using the limit of the limit frame 10 and the sliding plate 11 which are symmetrically arranged, and the use effect of blocking and sealing by using the baffle 7 during vacuum detection is improved by using the joint of the limit frame 10 and the baffle 7.
Referring to fig. 6, in the present invention, one side of the mounting cylinder 4 close to the filter screen seat 8 is provided with a fixed screen 15, the filter screen seat 8 is fixed at the middle position of the fixed screen 15, a guide plate 18 with an arc structure is fixed between two sides of the circumferential inner wall of the mounting cylinder 4, the middle position of the guide plate 18 is arched towards one side close to the filter screen seat 8, the guide plate 18 is positioned at one side of the probe of the vacuum degree detector 5 close to the filter screen seat 8, one side of the mounting cylinder 4 far from the fixed screen 15 is provided with a connection screen 19, the connection screen 19 is positioned at one side of the connection plate 6 close to the exhaust tube 3, so that in the actual use process, after the air flow in the furnace body enters the fixed cylinder 1, the air flow respectively passes through the filter screen seat 8 and the fixed screen 15, and the connection screen 19 is utilized to enable the vacuum degree detector 5 to perform vacuum degree detection on the cavity communicated in the fixed cylinder 1, thereby preventing the air flow dust and the water mist from directly contacting with the probe to reduce the service life of the vacuum degree detector 5, and the distribution of the filter screen seat 8 and the fixed screen plate 15 is utilized to match with the arc-shaped arched guide plate 18 to improve the guide flow change effect on the movement of the air flow, so that the filtering effect on the air flow is improved by increasing the movement of the air flow along the radial direction.
Referring to fig. 6, in the present invention, a filter screen seat 8 is provided with a first filter screen plate 12 and a second filter screen plate 13 penetrating through and fixed on a fixed screen plate 15, a connection cavity 14 is formed between the first filter screen plate 12 and the second filter screen plate 13, connection holes 16 are formed in the outer wall of the fixed screen plate 15 and at positions corresponding to the connection cavity 14, the connection holes are distributed at equal intervals in the horizontal direction, the second filter screen plate 13 is located at one side close to a connection screen plate 19, and the aperture of the meshes of the second filter screen plate 13 is smaller than that of the meshes of the first filter screen plate 12, so that in the actual use process, a guide plate 18 with an arc structure is used for guiding by matching the connection cavity 14 between the two filter screen plates, and the dispersive filtering effect of the position of the filter screen seat 8 on the air flow is improved, so as to prevent other components entering along with the air flow from affecting the normal use of the vacuum pump and the vacuum degree detector 5.
Referring to fig. 6, in the present invention, partition plates 17 are fixed between inner walls of two sides of the connection cavity 14, the cross sections of the partition plates 17 are arranged in a V-shaped configuration, and the middle positions of the partition plates 17 are bent toward the installation cylinder 4, so that the impact dispersion effect of the airflow at the position of the filter screen seat 8 is improved by using the partition plates 17 bent in the V-shaped configuration in cooperation with the guide plate 18 having an arc-shaped configuration, so as to improve the actual filtering effect, and the collection and blocking of other substances in the airflow are improved by using the blocking of the plurality of partition plates 17, thereby further improving the effectiveness of the long-term use of the device.
Referring to fig. 6 to 7, in the present invention, the flow guide grooves 1801 are equidistantly disposed on one side of the flow guide plate 18 close to the filter screen seat 8, the flow guide grooves 1801 are disposed in a hole-like structure, and the inner diameter of the flow guide grooves 1801 gradually shrinks inwards, so that the flow guide grooves 1801 cooperate with the partition plates 17 to guide the air flow to the central position in the connection cavity 14, thereby improving the blocking and dispersing effects of the partition plates 17 on the air flow.
Example 2
Referring to fig. 8, in the present invention, a plurality of air holes 21 are formed in the outer wall of the connecting cylinder 20, and the air holes 21 of the two connecting cylinders 20 are respectively distributed at two end positions of the fixed cylinder 1, the piston mechanism is provided with an electric telescopic rod fixed at the end of the fixed cylinder 1, one end of the electric telescopic rod is fixed with a piston 22 slidably connected with the inner wall of the connecting cylinder 20, the piston 22 is located at a position corresponding to one end of the connecting cylinder 20 far away from the air holes 21, in practice, the two pistons 22 are moved in the same direction during the vacuum pumping process, even if the air holes 21 of the two connecting cylinders 20 respectively perform the suction and blowing operations, so as to accelerate the air flow movement and improve the vacuum-pumping efficiency, when the vacuum degree is detected and the baffle 7 is used for plugging, the two pistons 22 are moved reversely, the air cavity in the fixed cylinder 1 is extruded simultaneously to whether air leakage exists is judged fast through the data feedback of the vacuum degree detector 5, and therefore the actual vacuum detection effect is improved.
Referring to fig. 8, in the present invention, the air holes 21 on the outer wall of the connecting cylinder 20 are arranged into a plurality of groups, each group of air holes 21 is arranged to be distributed along the outer wall of the connecting cylinder 20 in an annular array, the plurality of groups of air holes 21 are distributed equidistantly along the axis of the connecting cylinder 20, the outer wall of the connecting cylinder 20 is fixed with the drainage plates 23 in an annular structure at both sides of each group of air holes 21, and the drainage plates 23 are arranged in an outwardly arched arc structure;
referring to fig. 9, drainage groove 2301 that the annular array distributes is seted up to the circumference inner wall of drainage plate 23, and drainage groove 2301's width reduces gradually towards the one end of keeping away from connecting cylinder 20, the degree of depth of drainage groove 2301 reduces gradually towards the one end of keeping away from connecting cylinder 20, and utilize drainage plate 23 and a plurality of drainage groove 2301 of both sides arc structure and with the quick outside dispersion of wind hole 21 air current, in order to improve the air current in utilizing connecting cylinder 20 and inside piston mechanism to disperse fixed cylinder 1 fast evenly, improve the evacuation efficiency, and quick even dispersion air current and effectively carry out the detection that the vacuum changed.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.
Claims (10)
1. A single crystal furnace vacuum detection system comprises a fixed cylinder (1) and is characterized in that the fixed cylinder (1) is horizontally placed, the bottom end of the circumferential outer wall of the fixed cylinder (1) is connected with a connecting pipe (2), one side of the circumferential outer wall of the fixed cylinder (1) is connected with an exhaust pipe (3), an installation cylinder (4) which is horizontally placed is rotatably connected with the middle position between the inner walls of the two ends of the fixed cylinder (1), one end of the installation cylinder (4) is connected with a driving motor in a transmission manner, a vacuum degree detector (5) is fixed at the position, corresponding to the center of the installation cylinder (4), of one end, away from the driving motor, of the fixed cylinder (1), a probe of the vacuum degree detector (5) extends into the installation cylinder (4), a connecting plate (6) is fixed at one side of the circumferential outer wall of the installation cylinder (4), and a baffle (7) with an arc-shaped structure is fixed at one end, away from the installation cylinder (4), of the connecting plate (6), the outer wall of baffle (7) and the inner wall sliding connection of fixed cylinder (1), one side that connecting plate (6) were kept away from to installation section of thick bamboo (4) circumference outer wall is fixed with filter screen seat (8).
2. The single crystal furnace vacuum detection system according to claim 1, wherein the two ends of the fixed cylinder (1) are provided with openings, the two ends of the fixed cylinder (1) are detachably connected with sealing cover plates (9), a limiting frame (10) is fixed on one side of the bottom of the circumferential inner wall of the fixed cylinder (1) close to the exhaust pipe (3), the outer wall of the baffle plate (7) is slidably connected with the inner wall of the limiting frame (10), a sliding plate (11) with an arc structure is fixed on one end of the filter screen seat (8) far away from the installation cylinder (4), and the outer wall of the sliding plate (11) is slidably connected with the inner wall of the fixed cylinder (1).
3. The single crystal furnace vacuum detection system according to claim 1 or 2, wherein one side of the installation cylinder (4) close to the filter screen seat (8) is provided with a fixed screen plate (15), the filter screen seat (8) is fixed at the middle position of the fixed screen plate (15), a guide plate (18) with an arc-shaped structure is fixed between two sides of the inner wall of the circumference of the installation cylinder (4), the middle position of the guide plate (18) is arched towards one side close to the filter screen seat (8), the guide plate (18) is positioned at one side of the probe of the vacuum degree detector (5) close to the filter screen seat (8), one side of the installation cylinder (4) far away from the fixed screen plate (15) is provided with a connecting screen plate (19), and the connecting screen plate (19) is positioned at one side of the connecting plate (6) close to the exhaust pipe (3).
4. The single crystal furnace vacuum detection system according to claim 3, wherein the filter screen seat (8) is provided with a first filter screen plate (12) and a second filter screen plate (13) which penetrate through and are fixed on a fixed screen plate (15), a connecting cavity (14) is formed between the first filter screen plate (12) and the second filter screen plate (13), connecting holes (16) are formed in the outer wall of the fixed screen plate (15) and correspond to the connecting cavity (14) and are distributed at equal intervals in the horizontal direction, the second filter screen plate (13) is positioned on one side close to the connecting screen plate (19), and the pore diameter of the meshes of the second filter screen plate (13) is smaller than that of the meshes of the first filter screen plate (12).
5. The vacuum detection system of the single crystal furnace is characterized in that partition plates (17) are fixed between the inner walls of the two sides of the connecting cavity (14) and are distributed equidistantly, the cross sections of the partition plates (17) are arranged into a V-shaped structure, and the middle positions of the partition plates (17) are bent towards the mounting cylinder (4).
6. The single crystal furnace vacuum detection system according to claim 5, wherein the side of the flow guide plate (18) close to the filter screen seat (8) is provided with flow guide grooves (1801) which are equidistantly distributed, the flow guide grooves (1801) are arranged in a hole-like structure, and the inner diameter of the flow guide grooves (1801) gradually shrinks inwards.
7. The single crystal furnace vacuum detection system according to claim 1 or 2, wherein connecting cylinders (20) are fixed on two sides between the inner walls of two ends of the fixed cylinder (1), the connecting cylinder (20) close to one side of the exhaust tube (3) is arranged at the upper position of the exhaust tube (3), the connecting cylinder (20) far away from one side of the exhaust tube (3) is arranged at the lower position of the exhaust tube (3), and piston mechanisms which reciprocate are arranged in the two connecting cylinders (20).
8. The single crystal furnace vacuum detection system according to claim 7, wherein a plurality of air holes (21) are formed in the outer wall of the connecting cylinder (20), the air holes (21) in the two connecting cylinders (20) are respectively distributed at two end positions of the fixed cylinder (1), the piston mechanism is provided with an electric telescopic rod fixed at the end of the fixed cylinder (1), one end of the electric telescopic rod is fixed with a piston (22) slidably connected with the inner wall of the connecting cylinder (20), and the piston (22) is located at one end position, far away from the air holes (21), of the corresponding connecting cylinder (20).
9. The single crystal furnace vacuum detection system according to claim 8, wherein the air holes (21) on the outer wall of the connecting cylinder (20) are arranged in multiple groups, each group of air holes (21) is arranged to be distributed along the outer wall of the connecting cylinder (20) in an annular array, the multiple groups of air holes (21) are distributed at equal intervals along the axis of the connecting cylinder (20), the annular-structure flow guide plates (23) are fixed on two sides of the outer wall of the connecting cylinder (20) positioned at each group of air holes (21), and the flow guide plates (23) are arranged in an outwardly arched arc structure.
10. The single crystal furnace vacuum detection system according to claim 9, wherein the circumferential inner wall of the flow guide plate (23) is provided with flow guide grooves (2301) distributed in an annular array, the width of each flow guide groove (2301) is gradually reduced towards one end far away from the connecting cylinder (20), and the depth of each flow guide groove (2301) is gradually reduced towards one end far away from the connecting cylinder (20).
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115143780A (en) * | 2022-06-27 | 2022-10-04 | 连城凯克斯科技有限公司 | Synthetic furnace capable of improving vacuum sealing control precision |
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| CN113957517B (en) | 2023-12-26 |
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