CN215947455U - In-furnace monitoring and detecting system for high-frequency induction single crystal furnace - Google Patents
In-furnace monitoring and detecting system for high-frequency induction single crystal furnace Download PDFInfo
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- CN215947455U CN215947455U CN202121320303.3U CN202121320303U CN215947455U CN 215947455 U CN215947455 U CN 215947455U CN 202121320303 U CN202121320303 U CN 202121320303U CN 215947455 U CN215947455 U CN 215947455U
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Abstract
The utility model discloses a furnace monitoring and detecting system for a high-frequency induction single crystal furnace, which belongs to the field of single crystal furnace monitoring systems and comprises a monitoring and detecting system body, wherein the monitoring and detecting system body comprises a shell, a monitoring probe and a control element, one side of the shell is provided with a first mounting hole, one end of the monitoring probe is fixedly arranged on the inner side wall of the first mounting hole, an inner cavity I, an inner cavity II and an inner cavity III are arranged in the shell, the control element is fixedly arranged on the inner side wall of the first inner cavity, the inner side wall of the inner cavity II is provided with a first mounting groove, the inner side wall of the first mounting groove is fixedly provided with a blower, the blower comprises a motor and fan blades, the output shaft of the motor is fixedly provided with the fan blades, the bottom of the shell is fixedly provided with a connecting seat, the bottom of the connecting seat is provided with a second mounting groove, and the heat dissipation fins can dissipate heat generated when the control element in the first inner cavity works, therefore, the service life of the control element can be greatly prolonged, and the functions are various.
Description
Technical Field
The utility model relates to a filtering device, in particular to a furnace monitoring and detecting system for a high-frequency induction single crystal furnace, and belongs to the field of single crystal furnace monitoring systems.
Background
The single crystal furnace is a device for melting polycrystalline materials such as polycrystalline silicon and the like by using a graphite heater in an inert gas (mainly nitrogen and helium) environment and growing dislocation-free single crystals by using a Czochralski method, wherein the diameter of the single crystal can be influenced by factors such as temperature, pulling speed and rotating speed, crucible tracking speed and rotating speed, flow rate of protective gas and the like in the growing process. The temperature mainly determines whether the crystal can be formed, and the speed directly influences the inherent quality of the crystal, and the influence can only be known through detection after the single crystal is pulled out.
However, the existing in-furnace monitoring and detecting system for the high-frequency induction single crystal furnace is inconvenient to install and time-consuming and labor-consuming when in use, and meanwhile, the existing in-furnace monitoring and detecting system for the high-frequency induction single crystal furnace is simple in structure and single in function.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the problems and provide a furnace monitoring and detecting system for a high-frequency induction single crystal furnace, wherein a radiating fin can radiate the temperature generated by a control element in an inner cavity I during working, so that the service life of the control element can be greatly prolonged, and the functions are various.
The utility model achieves the aim through the following technical scheme, the in-furnace monitoring and detecting system for the high-frequency induction single crystal furnace comprises a monitoring and detecting system body, the monitoring and detecting system body comprises a shell, a monitoring probe and a control element, one side of the shell is provided with a first mounting hole, one end of the monitoring probe is fixedly arranged on the inner side wall of the first mounting hole, a first inner cavity, a second inner cavity and a third inner cavity are arranged in the shell, the control element is fixedly arranged on the inner side wall of the first inner cavity, the inner side wall of the second inner cavity is provided with a first mounting groove, a blower is fixedly arranged on the inner side wall of the first mounting groove, the blower comprises a motor and fan blades, the fan blades are fixedly arranged on an output shaft of the motor, a connecting seat is fixedly arranged at the bottom of the shell, a second mounting groove is arranged at the bottom of the connecting seat, the exhaust pipe is fixedly mounted on the inner side wall of the mounting groove II, a fixed sucker is fixedly mounted at the bottom of the connecting rod, a mounting hole III is formed in the fixed sucker, and an exhaust pipe is fixedly mounted on the inner side wall of the mounting hole III.
Preferably, in order to facilitate heat dissipation of the present invention, the third inner cavity and the second inner cavity are both provided with a second mounting hole, and a heat dissipation fin is fixedly mounted on an inner side wall of the second mounting hole.
Preferably, in order to increase the heat dissipation effect of the present invention, the inner cavity iii is filled with a cooling liquid, and one end of the heat dissipation plate penetrates through the inner cavity iii through the mounting hole ii.
Preferably, in order to prevent external dust from entering the housing, one side of the housing is provided with a third mounting hole, and a filter screen is fixedly mounted on the inner side wall of the third mounting hole.
Preferably, in order to install the spring conveniently, a baffle is fixedly installed on the inner side wall of the exhaust pipe, and a third installation groove is formed in the baffle.
Preferably, in order to install the sealing gasket conveniently, a spring is fixedly installed on the inner side wall of the mounting groove III, and a sealing gasket is fixedly installed at one end of the spring.
Preferably, in order to install the display screen conveniently, the outer side wall of the housing is provided with a mounting groove four, and the display screen is fixedly mounted on the inner side wall of the mounting groove four.
The utility model has the beneficial effects that:
1. when a user needs to install the vacuum suction cup on the single crystal furnace, the user can firstly attach the fixed suction cup to the single crystal furnace and then press the fixed suction cup, so that air in the fixed suction cup can be extruded, further the air in the fixed suction cup can eject out the sealing gasket in the ventilation pipe, further the air in the vacuum suction cup can flow out, further the pressure in the fixed suction cup is reduced, further the vacuum suction cup can be fixed on the single crystal furnace, and the fixing mode is simpler.
2. The cooling liquid can be used for radiating the radiating fins, so that the radiating effect of the radiating fins can be improved, the radiating fins can be used for radiating the temperature generated by the control element in the inner cavity I when the control element works, the service life of the control element can be greatly prolonged, and the control element has multiple functions.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention.
Fig. 2 is a cross-sectional view of the housing of the present invention.
FIG. 3 is a cross-sectional view of the fixed suction cup of the present invention.
FIG. 4 is a cross-sectional view of a vent according to the present invention.
In the figure: 1. the monitoring system comprises a monitoring system body, 2, a shell, 3, a monitoring probe, 4, a control element, 5, a motor, 6, fan blades, 7, a connecting seat, 8, a connecting rod, 9, a fixed sucker, 10, an exhaust pipe, 11, a cooling fin, 12, cooling liquid, 13, a filter screen, 14, a baffle, 15, a spring, 16, a sealing gasket, 17 and a display screen.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-4, a furnace monitoring and detecting system for a high-frequency induction single crystal furnace comprises a monitoring and detecting system body 1, wherein the monitoring and detecting system body 1 comprises a shell 2, a monitoring probe 3 and a control element 4, one side of the shell 2 is provided with a first mounting hole, one end of the monitoring probe 3 is fixedly mounted on the inner side wall of the first mounting hole, an inner cavity I, an inner cavity II and an inner cavity III are arranged in the shell 2, the control element 4 is fixedly mounted on the inner side wall of the first inner cavity, the inner side wall of the inner cavity II is provided with a first mounting groove, a blower is fixedly mounted on the inner side wall of the first mounting groove and comprises a motor 5 and fan blades 6, the fan blades 6 are fixedly mounted on an output shaft of the motor 5, a connecting seat 7 is fixedly mounted at the bottom of the shell 2, a second mounting groove is arranged at the bottom of the connecting seat 7, and a connecting rod 8 is fixedly mounted on the inner side wall of the second mounting groove, the bottom fixed mounting of connecting rod 8 has fixed suction cup 9, is provided with mounting hole three on the fixed suction cup 9, and fixed mounting has blast pipe 10 on the inside wall of mounting hole three, and the air current that the hair-dryer circular telegram produced after the work can dispel the heat to fin 11.
As a technical optimization scheme of the present invention, as can be seen from fig. 2, the inner cavity three and the inner cavity two are both provided with the mounting hole two, the inner side wall of the mounting hole two is fixedly provided with the heat sink 11, the inner cavity three is filled with the cooling liquid 12, one end of the heat sink 11 is inserted into the inner cavity three through the mounting hole two, the cooling liquid 12 can dissipate heat of the heat sink 11, so that a heat dissipation effect of the heat sink 11 can be improved, and the heat sink 11 can dissipate heat of the temperature generated when the control element 4 in the inner cavity one works, so that a service life of the control element 4 can be greatly prolonged.
As a technical optimization scheme of the utility model, as can be seen from the figure, one side of the housing 2 is provided with a third mounting hole, the inner side wall of the third mounting hole is fixedly provided with a filter screen 13, the outer side wall of the housing 2 is provided with a fourth mounting groove, the inner side wall of the fourth mounting groove is fixedly provided with a display screen 17, and the filter screen 13 can filter external dust, so that the external dust can be prevented from entering the utility model.
As a technical optimization scheme of the utility model, as can be seen from fig. 3 and 4, a baffle 14 is fixedly installed on the inner side wall of an exhaust pipe 10, a third installation groove is formed in the baffle 14, a spring 15 is fixedly installed on the inner side wall of the third installation groove, and a sealing gasket 16 is fixedly installed at one end of the spring 15, when a user needs to install the utility model on a single crystal furnace, the user can first attach the fixed sucker 9 to the single crystal furnace and then press the fixed sucker 9, so that air in the fixed sucker 9 can be squeezed, further the air in the fixed sucker 9 can eject the sealing gasket 16 in the ventilation pipe, further the air in the vacuum sucker can flow out, further the pressure in the fixed sucker 9 is reduced, further the utility model can be fixed on the single crystal furnace, and the fixing mode is simple.
It will be evident to those skilled in the art that the utility model is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (7)
1. The in-furnace monitoring and detecting system for the high-frequency induction single crystal furnace is characterized by comprising the following components in parts by weight: the monitoring and detecting system comprises a monitoring and detecting system body (1), wherein the monitoring and detecting system body (1) comprises a shell (2), a monitoring probe (3) and a control element (4), a first mounting hole is formed in one side of the shell (2), one end of the monitoring probe (3) is fixedly mounted on the inner side wall of the first mounting hole, a first inner cavity, a second inner cavity and a third inner cavity are arranged in the shell (2), the control element (4) is fixedly mounted on the inner side wall of the first inner cavity, a first mounting groove is formed in the inner side wall of the second inner cavity, a blower is fixedly mounted on the inner side wall of the first mounting groove and comprises a motor (5) and blades (6), the blades (6) are fixedly mounted on an output shaft of the motor (5), a connecting seat (7) is fixedly mounted at the bottom of the shell (2), and a second mounting groove is formed in the bottom of the connecting seat (7), fixed mounting has connecting rod (8) on the inside wall of mounting groove two, the bottom fixed mounting of connecting rod (8) has fixed suction cup (9), be provided with mounting hole three on fixed suction cup (9), fixed mounting has blast pipe (10) on the inside wall of mounting hole three.
2. The in-furnace monitoring and detecting system for the high-frequency induction single crystal furnace according to claim 1, characterized in that: and the inner cavity III and the inner cavity II are both provided with a mounting hole II, and the inner side wall of the mounting hole II is fixedly provided with a radiating fin (11).
3. The in-furnace monitoring and detecting system for the high-frequency induction single crystal furnace according to claim 2, characterized in that: and the cooling liquid (12) is filled in the third inner cavity, and one end of the radiating fin (11) penetrates through the third inner cavity through the second mounting hole.
4. The in-furnace monitoring and detecting system for the high-frequency induction single crystal furnace according to claim 1, characterized in that: one side of shell (2) is provided with mounting hole three, fixed mounting has filter screen (13) on the inside wall of mounting hole three.
5. The in-furnace monitoring and detecting system for the high-frequency induction single crystal furnace according to claim 1, characterized in that: a baffle (14) is fixedly mounted on the inner side wall of the exhaust pipe (10), and a third mounting groove is formed in the baffle (14).
6. The in-furnace monitoring and detecting system for the high-frequency induction single crystal furnace according to claim 1, characterized in that: and a spring (15) is fixedly mounted on the inner side wall of the mounting groove III, and a sealing gasket (16) is fixedly mounted at one end of the spring (15).
7. The in-furnace monitoring and detecting system for the high-frequency induction single crystal furnace according to claim 1, characterized in that: the outer side wall of the shell (2) is provided with a mounting groove IV, and a display screen (17) is fixedly mounted on the inner side wall of the mounting groove IV.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121320303.3U CN215947455U (en) | 2021-06-15 | 2021-06-15 | In-furnace monitoring and detecting system for high-frequency induction single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121320303.3U CN215947455U (en) | 2021-06-15 | 2021-06-15 | In-furnace monitoring and detecting system for high-frequency induction single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215947455U true CN215947455U (en) | 2022-03-04 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121320303.3U Active CN215947455U (en) | 2021-06-15 | 2021-06-15 | In-furnace monitoring and detecting system for high-frequency induction single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215947455U (en) |
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2021
- 2021-06-15 CN CN202121320303.3U patent/CN215947455U/en active Active
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