CN219490229U - Quick disassembly furnace cooling device for silicon rod crystal pulling furnace - Google Patents
Quick disassembly furnace cooling device for silicon rod crystal pulling furnace Download PDFInfo
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- CN219490229U CN219490229U CN202320438606.8U CN202320438606U CN219490229U CN 219490229 U CN219490229 U CN 219490229U CN 202320438606 U CN202320438606 U CN 202320438606U CN 219490229 U CN219490229 U CN 219490229U
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- crystal pulling
- auxiliary chamber
- pulling furnace
- heat exchange
- furnace body
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model discloses a quick-disassembly furnace cooling device for a silicon rod crystal pulling furnace, which comprises a crystal pulling furnace body, wherein the top of the crystal pulling furnace body is communicated with a boiler auxiliary chamber, a connecting pipe is arranged outside the boiler auxiliary chamber, an auxiliary chamber door cover is arranged outside the connecting pipe, a sealing mechanism is arranged inside the auxiliary chamber door cover, a cooling mechanism is arranged inside the boiler auxiliary chamber, a lifting rod is inserted into the auxiliary chamber of the boiler, the crystal pulling furnace body can pull crystal, and an operator can improve the cooling speed of the crystal pulling furnace body through the cooling mechanism, so that the production efficiency is improved, the sealing property of the crystal pulling furnace body can be improved through the sealing mechanism, and meanwhile, the operator can observe the condition inside the crystal pulling furnace body conveniently.
Description
Technical Field
The utility model belongs to the technical field of crystal pulling furnaces, and particularly relates to a rapid disassembly cooling device for a silicon rod crystal pulling furnace.
Background
Pulling refers to the fact that the silicon atoms of molten elemental silicon are arranged in a diamond lattice to form many nuclei during solidification, and a pulling furnace is required to complete pulling during pulling.
The crystal pulling furnace needs to be cooled from 1400 ℃ to 200 ℃ or normal temperature before being disassembled, and the existing technology is standing passive cooling, so that the cooling time is too long, and the production efficiency is affected.
Disclosure of Invention
Aiming at the defects existing in the prior art, the utility model aims to provide a rapid disassembly cooling device for a silicon rod crystal pulling furnace, which has the advantage of rapid cooling.
In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a quick detach stove cooling device of silicon rod crystal pulling furnace, includes the crystal pulling furnace body, the top intercommunication of crystal pulling furnace body has the boiler auxiliary chamber, the outside of boiler auxiliary chamber is provided with the connecting pipe, the outside of connecting pipe is provided with auxiliary chamber door closure, the inside of auxiliary chamber door closure is provided with sealing mechanism, the inside of boiler auxiliary chamber is provided with cooling mechanism, the inside grafting of boiler auxiliary chamber has the lifting rod.
Preferably, the cooling mechanism comprises a heat exchange tube, the heat exchange tube is arranged in the auxiliary chamber of the boiler and is fixedly connected with the lifting rod, two cooling tubes are arranged outside the door cover of the auxiliary chamber, and two stainless steel hoses which are correspondingly distributed are communicated between the two cooling tubes and the heat exchange tube.
Preferably, the sealing mechanism comprises an opening, the opening is formed in the auxiliary chamber door cover, an observation window is arranged in the opening, and a rubber sheet is arranged on one side, close to the auxiliary chamber of the boiler, of the auxiliary chamber door cover.
Preferably, the heat exchange tube is in a threaded ring shape, and the wall thickness is mm.
Preferably, the surface of the heat exchange tube adopts black treatment and concave-convex treatment, so as to increase the absorption of heat radiation.
Preferably, the bottom of the crystal pulling furnace body is provided with four corresponding distributed bases.
Preferably, the pitch of the heat exchange tube is mm constant pitch and the number of turns.
Compared with the prior art, the utility model has the beneficial effects that:
1. when the crystal pulling furnace body needs to be cooled, the cooling liquid is firstly poured into the stainless steel hose through the external input and the hot liquid output of the cooling liquid in the two cooling pipes, so that the cooling liquid enters the heat exchange pipe, the cooling function of the cooling liquid in a reciprocating cycle is achieved, the original tightness of the crystal pulling furnace body is ensured, and oxidation caused by the entering of external oxygen-containing air is avoided; through the lifting rod, the heat exchange tube can be lifted and lowered, when the temperature needs to be lowered, the heat exchange tube is lifted when cooling is not needed, the heat exchange tube enters the crystal pulling furnace body, the heat exchange tube is in a threaded ring shape, the contact with the air inside the crystal pulling furnace body is increased, the heat exchange rate of cooling liquid in the heat exchange tube is increased, the surface of the heat exchange tube is subjected to black treatment and concave-convex treatment, the absorption of heat radiation is increased, the cooling time of the crystal pulling furnace body can be reduced through the mechanism, and the normal heating and crystal pulling of an original furnace body are not influenced.
2. When the auxiliary chamber door cover is closed, the tightness of the joint of the auxiliary chamber door cover and the connecting pipe can be increased through the rubber sheet, and through the mutual cooperation of the opening and the observation window, the situation of the inside crystal pulling of the observation crystal pulling furnace body can be increased and distributed by an operator, and meanwhile, the position where the heat exchange pipe is placed can be observed.
Drawings
FIG. 1 is a schematic diagram of the overall side view of the present utility model;
FIG. 2 is a schematic diagram of the overall structure of the present utility model;
FIG. 3 is a schematic view of the overall internal cross-section of the present utility model;
fig. 4 is a schematic view of the overall explosive decomposition structure of the present utility model.
In the figure: 1. a crystal pulling furnace body; 2. a cooling mechanism; 201. a heat exchange tube; 202. a cooling tube; 203. a stainless steel hose; 3. a sealing mechanism; 301. an observation window; 302. opening holes; 303. a rubber sheet; 4. a boiler auxiliary chamber; 5. a lifting rod; 6. a base; 7. a sub-chamber door cover; 8. and (5) connecting pipes.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Embodiment one:
referring to fig. 1-4, the present utility model provides a technical solution: the utility model provides a quick detach stove cooling device of silicon rod crystal pulling furnace, includes crystal pulling furnace body 1, and the top intercommunication of crystal pulling furnace body 1 has boiler auxiliary chamber 4, and the outside of boiler auxiliary chamber 4 is provided with connecting pipe 8, and the outside of connecting pipe 8 is provided with auxiliary chamber door closure 7, and the inside of auxiliary chamber door closure 7 is provided with sealing mechanism 3, and the inside of boiler auxiliary chamber 4 is provided with cooling mechanism 2, and the inside grafting of boiler auxiliary chamber 4 has lifting rod 5.
In this embodiment, can pull the crystal through the crystal pulling furnace body 1, through cooling body 2, can make operating personnel improve the cooled rate of crystal pulling furnace body 1 to improve production efficiency, can increase the leakproofness of crystal pulling furnace body 1 through sealing mechanism 3, the operating personnel of also being convenient for observe the inside condition of crystal pulling furnace body 1 simultaneously.
Embodiment two:
referring to fig. 1-4, on the basis of the first embodiment, the present utility model provides a technical solution: the cooling mechanism 2 comprises a heat exchange tube 201, the heat exchange tube 201 is arranged in the auxiliary chamber 4 of the boiler and is fixedly connected with a lifting rod 5, two cooling tubes 202 are arranged outside an auxiliary chamber door cover 7, two stainless steel hoses 203 which are distributed correspondingly are communicated between the two cooling tubes 202 and the heat exchange tube 201, the shape of the heat exchange tube 201 is in a threaded ring shape, the wall thickness is 5mm, the surface of the heat exchange tube 201 is subjected to black treatment and concave-convex treatment, the absorption of heat radiation is increased, and four bases 6 which are distributed correspondingly are arranged at the bottom of the crystal pulling furnace body 1.
In this embodiment, when the crystal pulling furnace body 1 needs to be cooled, the cooling liquid is first poured into the stainless steel hose 203 through the external input and the hot liquid output of the cooling liquid in the two cooling pipes 202, so that the cooling liquid enters the inside of the heat exchange pipe 201, thereby achieving the cooling function of the reciprocating circulation of the cooling liquid, ensuring the original tightness of the crystal pulling furnace body 1, and avoiding the oxidation caused by the entering of external oxygen-containing air; through lifting rod 5, can make heat exchange tube 201 promote and descend, when the needs are cooled down, lower heat exchange tube 201, lift heat exchange tube 201 when need not the cooling, make the entering crystal pulling furnace body 1 of heat exchange tube 201 inside, heat exchange tube 201 adopts the screw ring shape, increase with the contact of crystal pulling furnace body 1 inside air, increase the heat exchange rate of coolant liquid in the heat exchange tube 201, heat exchange tube 201 surface adopts black processing and unsmooth processing, increase the absorption to the thermal radiation, reducible cooling time of crystal pulling furnace body 1 through above-mentioned mechanism, do not influence original furnace body normal heating and crystal pulling simultaneously.
Embodiment III:
referring to fig. 1-4, on the basis of the first embodiment and the second embodiment, the present utility model provides a technical solution: the sealing mechanism 3 comprises an opening 302, the opening 302 is arranged in the auxiliary chamber door cover 7, an observation window 301 is arranged in the opening 302, and a rubber sheet 303 is arranged on one side of the auxiliary chamber door cover 7, which is close to the auxiliary chamber 4 of the boiler.
In this embodiment, when the auxiliary chamber door cover 7 is being closed, the tightness of the junction between the auxiliary chamber door cover 7 and the connecting pipe 8 can be increased by the rubber sheet 303, and the situation of pulling the crystal inside the crystal pulling furnace body 1 can be observed by the operator by increasing the distribution of the mutual cooperation of the holes 302 and the observation windows 301, and meanwhile, the position where the heat exchange tube 201 is placed can be observed.
The working principle and the using flow of the utility model are as follows: when the crystal pulling furnace body 1 needs to be cooled, firstly, the cooling liquid is poured into the stainless steel hose 203 through the external input and the hot liquid output of the cooling liquid in the two cooling pipes 202, so that the cooling liquid enters the heat exchange pipe 201, the cooling function of the reciprocating circulation of the cooling liquid is achieved, the original tightness of the crystal pulling furnace body 1 is ensured, and oxidation caused by the entering of external oxygen-containing air is avoided; through lifting rod 5, can make heat exchange tube 201 promote and descend, when the needs are cooled down, lower heat exchange tube 201, lift heat exchange tube 201 when need not the cooling, make the entering crystal pulling furnace body 1 of heat exchange tube 201 inside, heat exchange tube 201 adopts the screw ring shape, increase with the contact of crystal pulling furnace body 1 inside air, increase the heat exchange rate of coolant liquid in the heat exchange tube 201, heat exchange tube 201 surface adopts black processing and unsmooth processing, increase the absorption to the thermal radiation, reducible cooling time of crystal pulling furnace body 1 through above-mentioned mechanism, do not influence original furnace body normal heating and crystal pulling simultaneously.
When the auxiliary chamber door cover 7 is closed, the tightness of the joint of the auxiliary chamber door cover 7 and the connecting pipe 8 can be increased through the rubber sheet 303, the situation that the operator increases the distributed observation crystal pulling furnace body 1 is pulled through the mutual cooperation of the holes 302 and the observation windows 301, the position where the heat exchange pipe 201 is placed can be observed, the tightness of the crystal pulling furnace body 1 can be effectively increased through the mechanism, and meanwhile, the situation that the operator observes the inside of the crystal pulling furnace body 1 is more convenient.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (7)
1. The utility model provides a quick detach stove cooling device of silicon rod crystal pulling stove, includes crystal pulling stove body (1), its characterized in that: the utility model discloses a crystal pulling furnace, including crystal pulling furnace body (1), boiler auxiliary chamber (4) are provided with in top intercommunication of crystal pulling furnace body (1), the outside of boiler auxiliary chamber (4) is provided with connecting pipe (8), the outside of connecting pipe (8) is provided with auxiliary chamber door closure (7), the inside of auxiliary chamber door closure (7) is provided with sealing mechanism (3), the inside of boiler auxiliary chamber (4) is provided with cooling mechanism (2), the inside of boiler auxiliary chamber (4) is pegged graft and is had lifting rod (5).
2. The rapid disassembly cooling device for a silicon rod crystal pulling furnace according to claim 1, wherein: the cooling mechanism (2) comprises a heat exchange tube (201), the heat exchange tube (201) is arranged in the auxiliary chamber (4) of the boiler and is fixedly connected with the lifting rod (5), two cooling tubes (202) are arranged outside the door cover (7) of the auxiliary chamber, and two stainless steel hoses (203) which are correspondingly distributed are communicated between the two cooling tubes (202) and the heat exchange tube (201).
3. The rapid disassembly cooling device for a silicon rod crystal pulling furnace according to claim 1, wherein: sealing mechanism (3) are including trompil (302), trompil (302) are seted up in the inside of vice room door closure (7), the inside of trompil (302) is provided with observation window (301), one side that is close to boiler auxiliary chamber (4) of vice room door closure (7) is provided with sheet rubber (303).
4. The rapid disassembly cooling device for a silicon rod crystal pulling furnace according to claim 2, wherein: the heat exchange tube (201) is in a threaded ring shape, and the wall thickness is 5mm.
5. The rapid disassembly cooling device for a silicon rod crystal pulling furnace according to claim 2, wherein: the surface of the heat exchange tube (201) adopts black treatment and concave-convex treatment, and the absorption of heat radiation is increased.
6. The rapid disassembly cooling device for a silicon rod crystal pulling furnace according to claim 1, wherein: four bases (6) which are distributed correspondingly are arranged at the bottom of the crystal pulling furnace body (1).
7. The rapid disassembly cooling device for a silicon rod crystal pulling furnace according to claim 2, wherein: the pitch of the heat exchange tube (201) is 60mm, the pitch is constant, and the number of turns is 17.5.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320438606.8U CN219490229U (en) | 2023-03-09 | 2023-03-09 | Quick disassembly furnace cooling device for silicon rod crystal pulling furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320438606.8U CN219490229U (en) | 2023-03-09 | 2023-03-09 | Quick disassembly furnace cooling device for silicon rod crystal pulling furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219490229U true CN219490229U (en) | 2023-08-08 |
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ID=87509346
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320438606.8U Active CN219490229U (en) | 2023-03-09 | 2023-03-09 | Quick disassembly furnace cooling device for silicon rod crystal pulling furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219490229U (en) |
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2023
- 2023-03-09 CN CN202320438606.8U patent/CN219490229U/en active Active
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