CN209778654U - Deposition apparatus and deposition system - Google Patents
Deposition apparatus and deposition system Download PDFInfo
- Publication number
- CN209778654U CN209778654U CN201821829905.XU CN201821829905U CN209778654U CN 209778654 U CN209778654 U CN 209778654U CN 201821829905 U CN201821829905 U CN 201821829905U CN 209778654 U CN209778654 U CN 209778654U
- Authority
- CN
- China
- Prior art keywords
- cooling
- box body
- deposition
- deposition apparatus
- cooling pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Surface Treatment Of Glass Fibres Or Filaments (AREA)
Abstract
The utility model provides a deposition equipment and deposition system, deposition equipment includes the box, sets up the overhead door and the setting of box side are in the thermal treatment equipment of bottom half, thermal treatment equipment is used for hot working optical fiber perform, be equipped with first cooling tube on the box, be equipped with the second cooling tube on the overhead door, first cooling tube all is used for circulating the coolant liquid with the second cooling tube. The utility model provides a deposition equipment and deposition system, simple structure through set up the cooling tube on box and overhead door, lets in the coolant liquid and cools off the temperature, and components and parts in the box are not fragile, and the fault rate is low, and overhead door non-deformable under high temperature avoids appearing ageing phenomenon, guarantees sealed effect.
Description
Technical Field
The utility model relates to an optical fiber perform field especially relates to a deposition equipment and deposition system.
Background
The optical fiber perform production equipment is mainly thermal processing heat treatment equipment, the heat generated by the equipment is large, and the environmental temperature is high. At present, equipment is sealed between metal partitions, but due to the fact that the temperature is high, components on the equipment are easy to damage due to high temperature, the temperature transmitted to the outer surface of the partitions is also high, heat conduction causes the deformation of sealing elements between the partitions, aging phenomena are easy to occur, gaps are generated at butt joints, the sealing effect cannot be achieved, heat is transmitted to the outer sides of the partitions to be large in heat dissipation, and certain influence is brought to the workshop environment.
SUMMERY OF THE UTILITY MODEL
In view of this, it is necessary to provide a deposition apparatus, in which the components in the box are not easily damaged and the sealing effect is good.
The utility model provides a deposition equipment, deposition equipment includes the box, sets up the overhead door and the setting of box side are in the thermal treatment equipment of bottom half, thermal treatment equipment is used for hot working optical fiber perform, be equipped with first cooling tube on the box, be equipped with the second cooling tube on the overhead door, first cooling tube all is used for circulating the coolant liquid with the second cooling tube.
Furthermore, the deposition equipment further comprises an exhaust system, wherein the exhaust system comprises an air supply part, an exhaust part and an airflow plate, the air supply part is arranged on the side surface of the box body to supply air into the box body, the exhaust part is communicated with an external waste gas tower to exhaust heat inside the box body, the airflow plate is arranged inside the box body and positioned between the air supply part and the exhaust part, and the airflow plate is used for enabling the air supplied by the air supply part to be uniformly distributed inside the box body so as to be exhausted.
Further, the air supply part is a fan unit, and the air volume of the fan unit is 1000-8000 m3/min。
Furthermore, the first cooling pipe is arranged on the top plate of the box body, two side walls connected with the side face where the lifting door is arranged on the box body and the opposite side walls.
Furthermore, all be equipped with first heat preservation on the lateral wall of the box and the roof that first cooling tube was located, first heat preservation cladding is in on the first cooling tube, the cladding has the surrounding layer on the first heat preservation, the surrounding layer is used for fixing first heat preservation and carries out the banding to it.
Further, the first heat preservation layer is a composite silicate cotton plate, and the outer cladding layer is an aluminum skin.
Furthermore, the lifting door comprises a door body, the second cooling pipe is arranged on the periphery of the door body, and the second heat-insulating layer is coated on the second cooling pipe.
Furthermore, the lifting door further comprises a transmission mechanism, the transmission mechanism comprises a motor, a speed reducer, a transmission shaft, a chain wheel and a chain which are sequentially connected, and the chain is connected with the door body.
The utility model provides an adopt deposition equipment's deposition system, includes cooling system, cooling system is including holding pond, intake pump and wet return pump all set up in hold in the pond, intake pump and wet return pump equally divide respectively with first cooling tube and second cooling tube connect.
Furthermore, the cooling system further comprises a primary filter and a secondary filter, the primary filter divides the water containing pool into two parts, the water inlet pump and the water return pump are respectively arranged in the primary filter and the water return pump, one end of the secondary filter is connected with the water inlet pump, and the other end of the secondary filter is respectively connected with the first cooling pipe and the second cooling pipe.
Furthermore, the cooling system further comprises a cooling device, the cooling device is connected with the water containing pool, and the cooling device is used for reducing the temperature of the cooling liquid in the water containing pool.
The utility model provides a deposition equipment simple structure through set up the cooling tube on box and overhead door, lets in the coolant liquid and cools off the temperature, and components and parts in the box are not fragile, and the fault rate is low, and overhead door non-deformable under high temperature avoids appearing ageing phenomenon, guarantees sealed effect.
Drawings
Fig. 1 is a schematic structural diagram of a deposition apparatus according to an embodiment of the present invention.
Fig. 2 is a schematic structural view of the deposition apparatus shown in fig. 1 from another perspective.
Fig. 3 is a schematic structural view of a lift gate according to an embodiment of the present invention.
Fig. 4 is a schematic structural diagram of a cooling system according to an embodiment of the present invention.
Description of the main elements
The following detailed description of the invention will be further described in conjunction with the above-identified drawings.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
It will be understood that when an element is referred to as being "mounted on" another element, it can be directly on the other element or intervening elements may also be present. When a component is referred to as being "disposed on" another component, it can be directly on the other component or intervening components may also be present.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "or/and" includes any and all combinations of one or more of the associated listed items.
Referring to fig. 1, fig. 1 is a schematic structural diagram of a deposition apparatus 100 according to an embodiment of the present invention, the deposition apparatus 100 is used for heat-treating an optical fiber preform, the deposition apparatus 100 includes a box 10, an exhaust system 20, a lift gate 30, and a heat treatment apparatus 101, and the heat treatment apparatus 101 is used for heat-treating the preform. The exhaust system 20 and the lifting door 30 are both disposed on the box body 10.
Referring to fig. 2, the box 10 includes a plurality of side walls, a top plate 11 and a bottom plate 12, which are disposed opposite to each other, and the side walls, the top plate 11 and the bottom plate 12 form a substantially rectangular box 10. An opening (not shown) is formed on one of the side walls, and the lifting door 30 is disposed at the opening to control the opening and closing of the opening. The heat treatment equipment 101 is arranged on the bottom plate 12 of the box body 10. The top plate 11 of the box body 10, two side walls connected with the side surface where the lifting door 30 is located on the box body 10, and the opposite side walls are all provided with first cooling pipes 13, and the first cooling pipes 13 are distributed on the top plate 11 and the side walls in a serpentine shape. In this embodiment, the first cooling pipe 13 is a stainless steel pipe, the gap between the pipes of the first cooling pipe 13 is 20mm, the diameter of the first cooling pipe 13 is 20mm, and the thickness of the pipe wall is 3 mm. The first cooling pipe 13 is filled with a cooling liquid circulating therethrough. The side wall of the box body 10 provided with the first cooling pipe 13 and the top plate 11 are both provided with a first heat preservation layer 14, the first heat preservation layer 14 is coated on the first cooling pipe 13, the first heat preservation layer 14 is coated with an outer cladding layer 15, and the outer cladding layer 15 is used for fixing and sealing the edge of the first heat preservation layer 14. In the present embodiment, the first thermal insulation layer 14 is a composite silicate cotton plate with a thickness of 50 mm; the outer cladding 15 is an aluminum skin with a thickness of 1.5 mm.
The exhaust system 20 includes a blowing unit 21, an exhaust unit 22, and an airflow plate 23, the blowing unit 21 is disposed on a sidewall of the casing 10, and in the present embodiment, the blowing unit 21 is disposed on an opposite sidewall of the sidewall where the lift door 30 is located and at a position below the sidewall. The air blowing unit 21 communicates with the outside and the inside of the case 10, and the air blowing unit 21 blows external air into the inside of the case 10. In the present embodiment, the air supply part 21 is a fan filter unit, and the air volume is 1000 to 8000m3And/min, the number of the air supply parts 21 is 3. The exhaust part 22 is disposed at a middle position of the top plate 11, one end of the exhaust part 22 communicates with the inside of the housing 10, and the other end communicates with an external exhaust gas tower (not shown), and the exhaust part 22 is used to send heat, gas, raw materials, and the like inside the housing 10 to the exhaust gas tower. In this embodiment, the exhaust portion 22 is an exhaust duct, the diameter of the exhaust duct is 100-400mm, the number of the exhaust ducts is 4, and the exhaust ducts are uniformly arranged in the middle of the top plate 11. The airflow plate 23 is disposed inside the chamber 10 and above the heat treatment apparatus 101 with respect to the bottom plate 12, and the airflow plate 23 is used for rectifying the external wind supplied from the wind supplying part 21 to be uniformly distributed so as to be supplied to the exhaust gas tower through the exhaust part 22.
Referring to fig. 2 and 3, the lift gate 30 includes a gate body 31, a transmission mechanism 32, a second cooling pipe 33, and a second insulating layer 34. The door body 31 is connected with the transmission mechanism 32, the transmission mechanism 32 comprises a motor 321, a speed reducer 322, a transmission shaft 323, a chain wheel 324 and a chain 325 which are connected in sequence, and the chain 325 is connected with the door body 31. The transmission mechanism 32 is used for controlling the door body 31 to do lifting motion. The second cooling pipe 33 is installed on the periphery of the door body, the second heat insulation layer 34 covers the second cooling pipe 33, and the second cooling pipe 33 is connected with a circulating cooling system to cool the lifting door 30.
The present invention also provides a deposition system comprising the deposition apparatus 100 and the cooling system 40.
Referring to fig. 4, the cooling system 40 includes a water tank 41 disposed outside the plant, a water inlet pump 42, a water return pump 43, a primary filter 44, a secondary filter 45, and a cooling device (not shown). The water holding tank 41 has a capacity of 200 cubic meters, and the water holding tank 41 is used for supplying the cooling liquid to the cooling system 40. The water inlet pump 42, the water return pump 43 and the primary filter 44 are all installed in the water containing tank 41, the water inlet pump 42 and the water return pump 43 are respectively arranged on two sides of the primary filter 44, one end of the secondary filter 45 is connected with the water inlet pump 42, the other end of the secondary filter is respectively connected with the first cooling pipe 13 and the second cooling pipe 33, and the primary filter 44 and the secondary filter 45 are used for filtering impurities in water to prevent pipeline blockage. One end of the water return pump 43 is connected to the water containing tank 41, and the other end is connected to the first cooling pipe 13 and the second cooling pipe 33, respectively. The cooling liquid in the first cooling pipe 13 flows into the water holding tank 41 through the water return pump 43, is filtered by the primary filter 44, and then flows into the first cooling pipe 13 through the water inlet pump 42 and the secondary filter 45, so as to circulate, and the second cooling pipe 33 also circulates by using the principle, which is not described herein. The cooling device is connected with the water containing tank 41, the cooling device is used for reducing the temperature of the cooling liquid in the water containing tank 41, and when the natural cooling efficiency of the water containing tank 41 is not enough, the cooling device can be started to accelerate the cooling efficiency.
When the deposition system is used, the lifting door 30 is firstly opened, the optical fiber preform to be heat-treated is placed in the box body 10, the lifting door 30 is closed, and the heat treatment equipment 101 is operated; starting the air supply part 21, starting air supply from the lower part of the box body 10 and uniformly entering the upper part of the box body 10 through the airflow plate 23; the heat in the box body is taken away through the air suction pipeline and the waste gas tower; meanwhile, water starts to flow through the cooling pipes on the box body 10 and the lifting door 30, the cooling liquid flows into the cooling pipes on the box body 10 and the lifting door 30 through the water inlet pump 42 and the secondary filter 45 to cool the box body 10, then flows into the water containing tank 41 through the water return pump 43, and is cooled and then brought into the cooling pipes on the box body 10 and the lifting door 30 through the primary filter 44, the water inlet pump 42 and the secondary filter 45, so as to circulate.
The utility model provides a deposition equipment simple structure through set up the cooling tube on box and overhead door, lets in the coolant liquid and cools off the temperature, and components and parts in the box are not fragile, and the fault rate is low, and overhead door non-deformable under high temperature avoids appearing ageing phenomenon, guarantees sealed effect.
It will be appreciated by those skilled in the art that the above embodiments are only for illustrating the present invention and are not to be taken as limiting the present invention, and that suitable modifications and variations of the above embodiments are within the scope of the invention as claimed.
Claims (11)
1. A deposition apparatus, characterized by: the deposition equipment comprises a box body, a lifting door arranged on the side face of the box body and heat treatment equipment arranged at the bottom of the box body, wherein the heat treatment equipment is used for hot processing of the optical fiber preform rod, a first cooling pipe is arranged on the box body, a second cooling pipe is arranged on the lifting door, and the first cooling pipe and the second cooling pipe are both used for circulating cooling liquid.
2. The deposition apparatus of claim 1, wherein: the deposition equipment further comprises an exhaust system, the exhaust system comprises an air supply part, an exhaust part and an airflow plate, the air supply part is arranged on the side face of the box body to supply air into the box body, the exhaust part is communicated with an external waste gas tower to exhaust heat inside the box body, the airflow plate is arranged inside the box body and located between the air supply part and the exhaust part, and the airflow plate is used for enabling the air supplied by the air supply part to be uniformly distributed inside the box body so as to be exhausted.
3. The deposition apparatus of claim 2, wherein: the air supply part is a fan unit, and the air quantity of the fan unit is 1000-8000 m3/min。
4. The deposition apparatus of claim 1, wherein: the first cooling pipe is arranged on the top plate of the box body, two side walls connected with the side face where the lifting door is located on the box body and the opposite side walls.
5. The deposition apparatus of claim 1, wherein: all be equipped with first heat preservation on the lateral wall of the box and the roof at first cooling tube place, first heat preservation cladding is in on the first cooling tube, the cladding has the surrounding layer on the first heat preservation, the surrounding layer is used for fixing first heat preservation and carries out the banding to it.
6. The deposition apparatus of claim 5, wherein: the first heat preservation layer is a composite silicate cotton plate, and the outer cladding layer is an aluminum skin.
7. The deposition apparatus of claim 1, wherein: the lifting door comprises a door body and a second heat insulation layer, the second cooling pipe is arranged on the periphery of the door body, and the second heat insulation layer is coated on the second cooling pipe.
8. The deposition apparatus of claim 7, wherein: the lifting door further comprises a transmission mechanism, the transmission mechanism comprises a motor, a speed reducer, a transmission shaft, a chain wheel and a chain which are sequentially connected, and the chain is connected with the door body.
9. A deposition system using the deposition apparatus of any one of claims 1 to 8, wherein: including cooling system, cooling system is including holding pond, intake pump and return water pump all set up in hold in the pond, intake pump and return water pump equally divide respectively with first cooling tube and second cooling tube connect.
10. The deposition system of claim 9, wherein: the cooling system further comprises a primary filter and a secondary filter, the primary filter divides the water containing pool into two parts, the water inlet pump and the water return pump are respectively arranged in the primary filter and the water return pump, one end of the secondary filter is connected with the water inlet pump, and the other end of the secondary filter is respectively connected with the first cooling pipe and the second cooling pipe.
11. The deposition system of claim 9, wherein: the cooling system further comprises a cooling device, the cooling device is connected with the water containing pool, and the cooling device is used for reducing the temperature of the cooling liquid in the water containing pool.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821829905.XU CN209778654U (en) | 2018-11-06 | 2018-11-06 | Deposition apparatus and deposition system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821829905.XU CN209778654U (en) | 2018-11-06 | 2018-11-06 | Deposition apparatus and deposition system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209778654U true CN209778654U (en) | 2019-12-13 |
Family
ID=68787164
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821829905.XU Active CN209778654U (en) | 2018-11-06 | 2018-11-06 | Deposition apparatus and deposition system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209778654U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111138078A (en) * | 2018-11-06 | 2020-05-12 | 中天科技精密材料有限公司 | Deposition apparatus and deposition system |
-
2018
- 2018-11-06 CN CN201821829905.XU patent/CN209778654U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111138078A (en) * | 2018-11-06 | 2020-05-12 | 中天科技精密材料有限公司 | Deposition apparatus and deposition system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN209778654U (en) | Deposition apparatus and deposition system | |
| CN205245840U (en) | Chemical engineering hot air cooler | |
| CN201495264U (en) | Cooling device for continuous copper strip bright annealing furnace | |
| CN104967023A (en) | Energy saving superposition power distribution cabinet | |
| CN105960146B (en) | A kind of Internet Server cooling device | |
| CN102847391B (en) | Air curtain machine having function of discharging waste at inner side and supplying clean air at outer side | |
| CN111138078A (en) | Deposition apparatus and deposition system | |
| CN111926383A (en) | Novel energy-saving semiconductor graphite thermal field | |
| CN209002293U (en) | A kind of sluice gate station control cabinet | |
| CN206042637U (en) | Dc -to -ac converter heat abstractor of dustproof function in area | |
| CN207113401U (en) | A kind of plant and equipment heat centralized collection processing system | |
| CN207021108U (en) | A kind of transformer oil purifier | |
| CN216793441U (en) | Low-voltage transformer with novel heat insulation structure | |
| CN210663899U (en) | High temperature furnace capable of quickly cooling | |
| CN203120365U (en) | Water-cooled cabinet system of high-power-density equipment | |
| CN210647803U (en) | Aluminum alloy section processing cooling device | |
| CN207560499U (en) | A kind of power panel processes radiator | |
| CN203272025U (en) | Ultra-large type wind generating set cooling system | |
| CN208026022U (en) | Convection current Split clean baking oven | |
| CN202738357U (en) | Novel warehouse-type container data center | |
| CN112996343A (en) | Cabinet body heat sink and rack | |
| CN214014877U (en) | Energy-saving SVG water-air cooling self-circulation system | |
| CN215825570U (en) | Intelligent temperature control device of building engineering | |
| CN208269717U (en) | A kind of defroster of backflow-type closed tower tray pipe | |
| CN203731775U (en) | Refrigeration equipment with laterally arranged refrigerating unit |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |