CN111138078A - Deposition apparatus and deposition system - Google Patents
Deposition apparatus and deposition system Download PDFInfo
- Publication number
- CN111138078A CN111138078A CN201811315456.1A CN201811315456A CN111138078A CN 111138078 A CN111138078 A CN 111138078A CN 201811315456 A CN201811315456 A CN 201811315456A CN 111138078 A CN111138078 A CN 111138078A
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- Prior art keywords
- cooling
- box body
- cooling pipe
- deposition
- deposition apparatus
- Prior art date
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- Pending
Links
- 230000008021 deposition Effects 0.000 title claims abstract description 37
- 238000001816 cooling Methods 0.000 claims abstract description 83
- 239000000110 cooling liquid Substances 0.000 claims abstract description 13
- 238000010438 heat treatment Methods 0.000 claims abstract description 12
- 239000013307 optical fiber Substances 0.000 claims abstract description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 41
- 238000004321 preservation Methods 0.000 claims description 14
- 230000005540 biological transmission Effects 0.000 claims description 11
- 238000005253 cladding Methods 0.000 claims description 9
- 229920000742 Cotton Polymers 0.000 claims description 3
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical group [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 239000003638 chemical reducing agent Substances 0.000 claims description 3
- 239000002131 composite material Substances 0.000 claims description 3
- 239000002912 waste gas Substances 0.000 claims description 3
- 238000007789 sealing Methods 0.000 abstract description 7
- 230000000694 effects Effects 0.000 abstract description 5
- 230000032683 aging Effects 0.000 abstract description 4
- 239000007789 gas Substances 0.000 description 4
- 238000005192 partition Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000007664 blowing Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Coating Apparatus (AREA)
Abstract
The invention provides a deposition device which comprises a box body, a lifting door arranged on the side surface of the box body and a heat treatment device arranged at the bottom of the box body, wherein the heat treatment device is used for hot processing of an optical fiber preform rod, the box body is provided with a first cooling pipe, the lifting door is provided with a second cooling pipe, and the first cooling pipe and the second cooling pipe are both used for circulating cooling liquid. The deposition equipment provided by the invention is simple in structure, the cooling pipes are arranged on the box body and the lifting door, and cooling liquid is introduced for cooling, so that components in the box body are not easy to damage, the failure rate is low, the lifting door is not easy to deform at high temperature, the aging phenomenon is avoided, and the sealing effect is ensured.
Description
Technical Field
The invention relates to the field of optical fiber preforms, in particular to deposition equipment and a deposition system.
Background
The optical fiber perform production equipment is mainly thermal processing heat treatment equipment, the heat generated by the equipment is large, and the environmental temperature is high. At present, equipment is sealed between metal partitions, but due to the fact that the temperature is high, components on the equipment are easy to damage due to high temperature, the temperature transmitted to the outer surface of the partitions is also high, heat conduction causes the deformation of sealing elements between the partitions, aging phenomena are easy to occur, gaps are generated at butt joints, the sealing effect cannot be achieved, heat is transmitted to the outer sides of the partitions to be large in heat dissipation, and certain influence is brought to the workshop environment.
Disclosure of Invention
In view of this, it is necessary to provide a deposition apparatus, in which the components in the box are not easily damaged and the sealing effect is good.
The invention provides a deposition device which comprises a box body, a lifting door arranged on the side surface of the box body and a heat treatment device arranged at the bottom of the box body, wherein the heat treatment device is used for hot processing of an optical fiber preform rod, the box body is provided with a first cooling pipe, the lifting door is provided with a second cooling pipe, and the first cooling pipe and the second cooling pipe are both used for circulating cooling liquid.
Furthermore, the deposition equipment further comprises an exhaust system, wherein the exhaust system comprises an air supply part, an exhaust part and an airflow plate, the air supply part is arranged on the side surface of the box body to supply air into the box body, the exhaust part is communicated with an external waste gas tower to exhaust heat inside the box body, the airflow plate is arranged inside the box body and positioned between the air supply part and the exhaust part, and the airflow plate is used for enabling the air supplied by the air supply part to be uniformly distributed inside the box body so as to be exhausted.
Further, the air supply part is a fan unit, and the air volume of the fan unit is 1000-8000 m3/min。
Furthermore, the first cooling pipe is arranged on the top plate of the box body, two side walls connected with the side face where the lifting door is arranged on the box body and the opposite side walls.
Furthermore, all be equipped with first heat preservation on the lateral wall of the box and the roof that first cooling tube was located, first heat preservation cladding is in on the first cooling tube, the cladding has the surrounding layer on the first heat preservation, the surrounding layer is used for fixing first heat preservation and carries out the banding to it.
Further, the first heat preservation layer is a composite silicate cotton plate, and the outer cladding layer is an aluminum skin.
Furthermore, the lifting door comprises a door body, the second cooling pipe is arranged on the periphery of the door body, and the second heat-insulating layer is coated on the second cooling pipe.
Furthermore, the lifting door further comprises a transmission mechanism, the transmission mechanism comprises a motor, a speed reducer, a transmission shaft, a chain wheel and a chain which are sequentially connected, and the chain is connected with the door body.
The utility model provides an adopt deposition equipment's deposition system, includes cooling system, cooling system is including holding pond, intake pump and wet return pump all set up in hold in the pond, intake pump and wet return pump equally divide respectively with first cooling tube and second cooling tube connect.
Furthermore, the cooling system further comprises a primary filter and a secondary filter, the primary filter divides the water containing pool into two parts, the water inlet pump and the water return pump are respectively arranged in the primary filter and the water return pump, one end of the secondary filter is connected with the water inlet pump, and the other end of the secondary filter is respectively connected with the first cooling pipe and the second cooling pipe.
Furthermore, the cooling system further comprises a cooling device, the cooling device is connected with the water containing pool, and the cooling device is used for reducing the temperature of the cooling liquid in the water containing pool.
The deposition equipment provided by the invention is simple in structure, the cooling pipes are arranged on the box body and the lifting door, and cooling liquid is introduced for cooling, so that components in the box body are not easy to damage, the failure rate is low, the lifting door is not easy to deform at high temperature, the aging phenomenon is avoided, and the sealing effect is ensured.
Drawings
Fig. 1 is a schematic structural diagram of a deposition apparatus according to an embodiment of the present invention.
Fig. 2 is a schematic structural view of the deposition apparatus shown in fig. 1 from another perspective.
Fig. 3 is a schematic structural diagram of a lift gate according to an embodiment of the present invention.
Fig. 4 is a schematic structural diagram of a cooling system according to an embodiment of the present invention.
Description of the main elements
The following detailed description will further illustrate the invention in conjunction with the above-described figures.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It will be understood that when an element is referred to as being "mounted on" another element, it can be directly on the other element or intervening elements may also be present. When a component is referred to as being "disposed on" another component, it can be directly on the other component or intervening components may also be present.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "or/and" includes any and all combinations of one or more of the associated listed items.
Referring to fig. 1, fig. 1 is a schematic structural view of a deposition apparatus 100 according to an embodiment of the present invention, the deposition apparatus 100 is used for heat-treating an optical fiber preform, the deposition apparatus 100 includes a box 10, an exhaust system 20, a lift gate 30, and a heat treatment apparatus 101, and the heat treatment apparatus 101 is used for heat-processing the preform. The exhaust system 20 and the lifting door 30 are both disposed on the box body 10.
Referring to fig. 2, the box 10 includes a plurality of side walls, a top plate 11 and a bottom plate 12, which are disposed opposite to each other, and the side walls, the top plate 11 and the bottom plate 12 form a substantially rectangular box 10. An opening (not shown) is formed on one of the side walls, and the lifting door 30 is disposed at the opening to control the opening and closing of the opening. The heat treatment equipment 101 is arranged on the bottom plate 12 of the box body 10. The top plate 11 of the box body 10, two side walls connected with the side surface where the lifting door 30 is located on the box body 10, and the opposite side walls are all provided with first cooling pipes 13, and the first cooling pipes 13 are distributed on the top plate 11 and the side walls in a serpentine shape. In this embodiment, the first cooling pipe 13 is a stainless steel pipe, the gap between the pipes of the first cooling pipe 13 is 20mm, the diameter of the first cooling pipe 13 is 20mm, and the thickness of the pipe wall is 3 mm. The first cooling pipe 13 is filled with a cooling liquid circulating therethrough. The side wall of the box body 10 provided with the first cooling pipe 13 and the top plate 11 are both provided with a first heat preservation layer 14, the first heat preservation layer 14 is coated on the first cooling pipe 13, the first heat preservation layer 14 is coated with an outer cladding layer 15, and the outer cladding layer 15 is used for fixing and sealing the edge of the first heat preservation layer 14. In the present embodiment, the first thermal insulation layer 14 is a composite silicate cotton plate with a thickness of 50 mm; the outer cladding 15 is an aluminum skin with a thickness of 1.5 mm.
The exhaust system 20 includes an air supply unit 21, an exhaust unit 22, and an airflow plate 23, the air supply unit 21 is provided on a side wall of the casing 10, and in the present embodiment, the air supply unit21 are provided on opposite side walls of the side wall where the lift gate 30 is located and at a position below the side wall. The air blowing unit 21 communicates with the outside and the inside of the case 10, and the air blowing unit 21 blows external air into the inside of the case 10. In the present embodiment, the air supply part 21 is a fan filter unit, and the air volume is 1000 to 8000m3And/min, the number of the air supply parts 21 is 3. The exhaust part 22 is disposed at a middle position of the top plate 11, one end of the exhaust part 22 communicates with the inside of the housing 10, and the other end communicates with an external exhaust gas tower (not shown), and the exhaust part 22 is used to send heat, gas, raw materials, and the like inside the housing 10 to the exhaust gas tower. In this embodiment, the exhaust portion 22 is an exhaust duct, the diameter of the exhaust duct is 100-400mm, the number of the exhaust ducts is 4, and the exhaust ducts are uniformly arranged in the middle of the top plate 11. The airflow plate 23 is disposed inside the chamber 10 and above the heat treatment apparatus 101 with respect to the bottom plate 12, and the airflow plate 23 is used for rectifying the external wind supplied from the wind supplying part 21 to be uniformly distributed so as to be supplied to the exhaust gas tower through the exhaust part 22.
Referring to fig. 2 and 3, the lift gate 30 includes a gate body 31, a transmission mechanism 32, a second cooling pipe 33, and a second insulating layer 34. The door body 31 is connected with the transmission mechanism 32, the transmission mechanism 32 comprises a motor 321, a speed reducer 322, a transmission shaft 323, a chain wheel 324 and a chain 325 which are connected in sequence, and the chain 325 is connected with the door body 31. The transmission mechanism 32 is used for controlling the door body 31 to do lifting motion. The second cooling pipe 33 is installed on the periphery of the door body, the second heat insulation layer 34 covers the second cooling pipe 33, and the second cooling pipe 33 is connected with a circulating cooling system to cool the lifting door 30.
The present invention also provides a deposition system including the deposition apparatus 100 and a cooling system 40.
Referring to fig. 4, the cooling system 40 includes a water tank 41 disposed outside the plant, a water inlet pump 42, a water return pump 43, a primary filter 44, a secondary filter 45, and a cooling device (not shown). The water holding tank 41 has a capacity of 200 cubic meters, and the water holding tank 41 is used for supplying the cooling liquid to the cooling system 40. The water inlet pump 42, the water return pump 43 and the primary filter 44 are all installed in the water containing tank 41, the water inlet pump 42 and the water return pump 43 are respectively arranged on two sides of the primary filter 44, one end of the secondary filter 45 is connected with the water inlet pump 42, the other end of the secondary filter is respectively connected with the first cooling pipe 13 and the second cooling pipe 33, and the primary filter 44 and the secondary filter 45 are used for filtering impurities in water to prevent pipeline blockage. One end of the water return pump 43 is connected to the water containing tank 41, and the other end is connected to the first cooling pipe 13 and the second cooling pipe 33, respectively. The cooling liquid in the first cooling pipe 13 flows into the water holding tank 41 through the water return pump 43, is filtered by the primary filter 44, and then flows into the first cooling pipe 13 through the water inlet pump 42 and the secondary filter 45, so as to circulate, and the second cooling pipe 33 also circulates by using the principle, which is not described herein. The cooling device is connected with the water containing tank 41, the cooling device is used for reducing the temperature of the cooling liquid in the water containing tank 41, and when the natural cooling efficiency of the water containing tank 41 is not enough, the cooling device can be started to accelerate the cooling efficiency.
When the deposition system is used, the lifting door 30 is firstly opened, the optical fiber preform to be heat-treated is placed in the box body 10, the lifting door 30 is closed, and the heat treatment equipment 101 is operated; starting the air supply part 21, starting air supply from the lower part of the box body 10 and uniformly entering the upper part of the box body 10 through the airflow plate 23; the heat in the box body is taken away through the air suction pipeline and the waste gas tower; meanwhile, water starts to flow through the cooling pipes on the box body 10 and the lifting door 30, the cooling liquid flows into the cooling pipes on the box body 10 and the lifting door 30 through the water inlet pump 42 and the secondary filter 45 to cool the box body 10, then flows into the water containing tank 41 through the water return pump 43, and is cooled and then brought into the cooling pipes on the box body 10 and the lifting door 30 through the primary filter 44, the water inlet pump 42 and the secondary filter 45, so as to circulate.
The deposition equipment provided by the invention is simple in structure, the cooling pipes are arranged on the box body and the lifting door, and cooling liquid is introduced for cooling, so that components in the box body are not easy to damage, the failure rate is low, the lifting door is not easy to deform at high temperature, the aging phenomenon is avoided, and the sealing effect is ensured.
It should be understood by those skilled in the art that the above embodiments are only for illustrating the present invention and are not to be used as a limitation of the present invention, and that suitable changes and modifications of the above embodiments are within the scope of the claimed invention as long as they are within the spirit and scope of the present invention.
Claims (11)
1. A deposition apparatus, characterized by: the deposition equipment comprises a box body, a lifting door arranged on the side face of the box body and heat treatment equipment arranged at the bottom of the box body, wherein the heat treatment equipment is used for hot processing of the optical fiber preform rod, a first cooling pipe is arranged on the box body, a second cooling pipe is arranged on the lifting door, and the first cooling pipe and the second cooling pipe are both used for circulating cooling liquid.
2. The deposition apparatus of claim 1, wherein: the deposition equipment further comprises an exhaust system, the exhaust system comprises an air supply part, an exhaust part and an airflow plate, the air supply part is arranged on the side face of the box body to supply air into the box body, the exhaust part is communicated with an external waste gas tower to exhaust heat inside the box body, the airflow plate is arranged inside the box body and located between the air supply part and the exhaust part, and the airflow plate is used for enabling the air supplied by the air supply part to be uniformly distributed inside the box body so as to be exhausted.
3. The deposition apparatus of claim 2, wherein: the air supply part is a fan unit, and the air quantity of the fan unit is 1000-8000 m3/min。
4. The deposition apparatus of claim 1, wherein: the first cooling pipe is arranged on the top plate of the box body, two side walls connected with the side face where the lifting door is located on the box body and the opposite side walls.
5. The deposition apparatus of claim 1, wherein: all be equipped with first heat preservation on the lateral wall of the box and the roof at first cooling tube place, first heat preservation cladding is in on the first cooling tube, the cladding has the surrounding layer on the first heat preservation, the surrounding layer is used for fixing first heat preservation and carries out the banding to it.
6. The deposition apparatus of claim 5, wherein: the first heat preservation layer is a composite silicate cotton plate, and the outer cladding layer is an aluminum skin.
7. The deposition apparatus of claim 1, wherein: the lifting door comprises a door body, the second cooling pipe is arranged on the periphery of the door body, and the second heat-insulating layer is coated on the second cooling pipe.
8. The deposition apparatus of claim 7, wherein: the lifting door further comprises a transmission mechanism, the transmission mechanism comprises a motor, a speed reducer, a transmission shaft, a chain wheel and a chain which are sequentially connected, and the chain is connected with the door body.
9. A deposition system using the deposition apparatus of any one of claims 1 to 8, wherein: including cooling system, cooling system is including holding pond, intake pump and return water pump all set up in hold in the pond, intake pump and return water pump equally divide respectively with first cooling tube and second cooling tube connect.
10. The deposition system of claim 9, wherein: the cooling system further comprises a primary filter and a secondary filter, the primary filter divides the water containing pool into two parts, the water inlet pump and the water return pump are respectively arranged in the primary filter and the water return pump, one end of the secondary filter is connected with the water inlet pump, and the other end of the secondary filter is respectively connected with the first cooling pipe and the second cooling pipe.
11. The deposition system of claim 9, wherein: the cooling system further comprises a cooling device, the cooling device is connected with the water containing pool, and the cooling device is used for reducing the temperature of the cooling liquid in the water containing pool.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811315456.1A CN111138078A (en) | 2018-11-06 | 2018-11-06 | Deposition apparatus and deposition system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811315456.1A CN111138078A (en) | 2018-11-06 | 2018-11-06 | Deposition apparatus and deposition system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111138078A true CN111138078A (en) | 2020-05-12 |
Family
ID=70515255
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811315456.1A Pending CN111138078A (en) | 2018-11-06 | 2018-11-06 | Deposition apparatus and deposition system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111138078A (en) |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02188435A (en) * | 1989-01-13 | 1990-07-24 | Tanabe Kakoki Kk | Quantitatively tapping device for molten rock wool |
| JPH02283632A (en) * | 1989-04-21 | 1990-11-21 | Fujikura Ltd | Deposition apparatus for fine glass particle |
| JP2000344530A (en) * | 1999-06-03 | 2000-12-12 | Shin Etsu Chem Co Ltd | Production of porous glass preform |
| CN201512560U (en) * | 2009-08-28 | 2010-06-23 | 祈标 | Car-type high-temperature gas thermal treatment stove |
| JP2013014468A (en) * | 2011-07-04 | 2013-01-24 | Sumitomo Electric Ind Ltd | Sintering apparatus and sintering method for glass preform |
| CN103739195A (en) * | 2013-12-25 | 2014-04-23 | 中天科技精密材料有限公司 | Water cooling system for large-size optical fiber preformed rod and water cooling method thereof |
| CN205948857U (en) * | 2016-07-08 | 2017-02-15 | 深圳坤易泰建材有限公司 | Reation kettle cooling system |
| CN106653661A (en) * | 2017-02-28 | 2017-05-10 | 北京北方华创微电子装备有限公司 | Process door cooling system and cooling method of thermal processing equipment |
| CN107540204A (en) * | 2017-10-18 | 2018-01-05 | 南京纬力创新能源科技有限公司 | A kind of preform production equipment with temperature adjusting and exhaust-gas treatment function |
| CN207525262U (en) * | 2017-12-07 | 2018-06-22 | 杨云 | A kind of Iron Works cooling body |
| CN209778654U (en) * | 2018-11-06 | 2019-12-13 | 中天科技精密材料有限公司 | Deposition apparatus and deposition system |
-
2018
- 2018-11-06 CN CN201811315456.1A patent/CN111138078A/en active Pending
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02188435A (en) * | 1989-01-13 | 1990-07-24 | Tanabe Kakoki Kk | Quantitatively tapping device for molten rock wool |
| JPH02283632A (en) * | 1989-04-21 | 1990-11-21 | Fujikura Ltd | Deposition apparatus for fine glass particle |
| JP2000344530A (en) * | 1999-06-03 | 2000-12-12 | Shin Etsu Chem Co Ltd | Production of porous glass preform |
| CN201512560U (en) * | 2009-08-28 | 2010-06-23 | 祈标 | Car-type high-temperature gas thermal treatment stove |
| JP2013014468A (en) * | 2011-07-04 | 2013-01-24 | Sumitomo Electric Ind Ltd | Sintering apparatus and sintering method for glass preform |
| CN103739195A (en) * | 2013-12-25 | 2014-04-23 | 中天科技精密材料有限公司 | Water cooling system for large-size optical fiber preformed rod and water cooling method thereof |
| CN205948857U (en) * | 2016-07-08 | 2017-02-15 | 深圳坤易泰建材有限公司 | Reation kettle cooling system |
| CN106653661A (en) * | 2017-02-28 | 2017-05-10 | 北京北方华创微电子装备有限公司 | Process door cooling system and cooling method of thermal processing equipment |
| CN107540204A (en) * | 2017-10-18 | 2018-01-05 | 南京纬力创新能源科技有限公司 | A kind of preform production equipment with temperature adjusting and exhaust-gas treatment function |
| CN207525262U (en) * | 2017-12-07 | 2018-06-22 | 杨云 | A kind of Iron Works cooling body |
| CN209778654U (en) * | 2018-11-06 | 2019-12-13 | 中天科技精密材料有限公司 | Deposition apparatus and deposition system |
Non-Patent Citations (2)
| Title |
|---|
| （日）松本俊次著；王成霞译: "《电弧炉炼钢技术及装备》", 31 May 1991, 上海科学技术文献出版社, pages: 153 - 155 * |
| 慕成斌等: "《通信光纤光缆制造设备及产业发展》", 31 July 2017, 同济大学出版社, pages: 78 * |
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