CN207883320U - A kind of two-dimentional mini positioning platform based on Piezoelectric Ceramic - Google Patents
A kind of two-dimentional mini positioning platform based on Piezoelectric Ceramic Download PDFInfo
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- CN207883320U CN207883320U CN201820818639.4U CN201820818639U CN207883320U CN 207883320 U CN207883320 U CN 207883320U CN 201820818639 U CN201820818639 U CN 201820818639U CN 207883320 U CN207883320 U CN 207883320U
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Abstract
The utility model discloses a kind of two-dimentional mini positioning platform based on Piezoelectric Ceramic, including having symmetrical transmission branch and motion platform composition, each branch that transmits includes a lever mechanism, two guiding mechanisms and two decoupling mechanisms, lever mechanism realizes the amplification of displacement level-one by fulcrum of straight circular flexible hinge, and displacement enlargement is passed into guiding mechanism by lever mechanism output end, guiding mechanism is made of two symmetrical composite and flexible beams, its composite and flexible beam is made of four flexible beams, decoupling mechanism is made of four straight flexible beams, pass through straight flexible beam deformation, reduce coupling displacement；Motion platform is designed to the structure of protrusion, and internal is hollow cylinder, and the face of the outside being connected with flexible beam four is plane, easily realizes the real-time monitoring and control of displacement sensor.The utility model is compact-sized, intrinsic frequency is high, decoupling performance is good, can be used for the fields such as micromechanics operation, medical machinery, Ultra-precision Turning, aerospace.
Description
Technical field
The utility model belongs to precision engineering field, and designed two-dimentional mini positioning platform can be used for micromechanics operation, doctor
Treat the fields such as machinery, Ultra-precision Turning, aerospace.
Background technology
With the development of nanotechnology, two-dimentional mini positioning platform is in micromechanics operation, medical machinery, Ultra-precision Turning, boat
The Disciplinary Frontiers such as empty space flight have obtained greatly development.In the research of micromechanics operation, large-scale integrated circuit can be made
Line width reaches submicron order.In the research of medical machinery, fine adjustment, separation that submicron order is carried out to cell may be implemented
And recombination.In Ultra-precision Turning field, the shape of accurately processing body and high quality can be obtained.Due to research field
It deepens continuously, the requirement to mini positioning platform is also gradually increased, it is desirable that its positioning accuracy is high, and stroke is big and fast response time, together
When in order to reduce influencing each other between both direction, improve positioning accuracy, it is desirable that decoupling performance is good.
Compliant mechanism is by the elastic deformation of flexible member, and then a kind of new structure of converting motion, power or energy, soft
Property mechanism have many advantages, such as that no friction, gapless, processing is simple and autokinesis is high, piezoelectric ceramic actuator has nanoscale
These advantages can be used for setting for two-dimentional mini positioning platform by the advantages that resolution ratio, small, fast response time and High power output
Meter.At home and abroad have a large amount of research, tool for the two-dimentional mini positioning platform structure design based on Piezoelectric Ceramic at present
The two-dimentional mini positioning platform of the representational two-dimentional mini positioning platform and parallel-connection structure for having a cascaded structure.Cascaded structure two dimension is micro-
Locating platform positioning accuracy height and decoupling are good, but the intrinsic frequency of both direction is different so that both direction response speed
Difference cannot reach simultaneously operating；The two-dimentional mini positioning platform intrinsic frequency of parallel-connection structure is high, fast response time, but two sides
To when moving simultaneously, one of direction can have an impact another direction, reduce positioning accuracy.
In conclusion it is more above-mentioned to solve the problems, such as, a kind of high, decoupling performance with intrinsic frequency need to be designed
Good, fast response time the two-dimentional mini positioning platform of parallel connection.
Invention content
Have fast response time, decoupling performance good the purpose of this utility model is that design is a kind of, the high base of intrinsic frequency
In the two-dimentional mini positioning platform of Piezoelectric Ceramic.
The technical solution adopted in the utility model is as follows：
Including have it is symmetrical transmit branch and motion platform composition, each branch that transmits includes a lever mechanism, two
A guiding mechanism and two decoupling mechanisms, lever mechanism realize that displacement level-one is amplified using straight circular flexible hinge as fulcrum, and will
Displacement enlargement passes to guiding mechanism by lever mechanism output end, and guiding mechanism is made of two symmetrical composite and flexible beams,
Composite and flexible beam is made of four flexible beams, and decoupling mechanism is made of four straight flexible beams, by straight flexible beam deformation, reduces coupling
Resultant displacement.
The motion platform of two-dimentional mini positioning platform is designed to bulge-structure, and internal is hollow cylinder, external and flexible
Four connected faces of beam are plane, as the face of displacement sensor monitoring, are easy to implement the real-time monitoring and control of displacement sensor
System.
The utility model compared with prior art, has the following advantages that and advantageous effect：
(1) the two-dimentional mini positioning platform of the utility model design, lever mechanism is using straight circular flexible hinge as fulcrum
Level-one displacement amplifying mechanism, can piezoelectric ceramics output displacement carry out level-one amplification；
(2) the two-dimentional mini positioning platform of the utility model design, guiding mechanism is by two symmetrical composite and flexible girder constructions
Composition, wherein composite and flexible beam is made of four flexible beams, decoupling mechanism use symmetrical four straight flexible beams, in this way with compared with
Big rigidity and high natural frequency reduces the coupling of both direction, improves positioning accuracy；
(3) the two-dimentional mini positioning platform of the utility model design, motion platform are designed to the protrusion knot as shown in Fig. 13
Structure, inside are hollow cylinder, and four faces being contacted with decoupling mechanism of outside are plane, as the face of displacement sensor,
It is easy to implement the real-time measurement and control of displacement sensor.
Description of the drawings
Fig. 1 is the structural schematic diagram of two-dimentional mini positioning platform；
Fig. 2 is the transmission branched structure schematic diagram of the directions two-dimentional mini positioning platform y driving；
Fig. 3 is the transmission branched structure schematic diagram of the directions two-dimentional mini positioning platform x driving；
In Fig. 1,1 indicates fixed pedestal, and 2 indicate to be oriented to flexible beam, and 3,5,6 indicate straight round flexible hinge respectively, and 4 indicate
Straight flexible beam, 7 indicate motion platform, and 8 indicate location hole, and 9 indicate piezoelectric ceramic actuator notch, and 10 indicate piezoelectric ceramics wiring
Hold groove；
In Fig. 2, the guiding mechanism of 11 and 14 directions expression y drivings, the lever mechanism of 12 directions expression y drivings, 13 and 15
Indicate the decoupling mechanism of the directions y driving；
In Fig. 3, the guiding mechanism of 16 and 18 directions expression x drivings, the decoupling mechanism of 17 and 20 directions expression x drivings, 19
Indicate the lever mechanism of the directions x driving.
Specific implementation mode
The utility model in order to better understand is below in conjunction with the accompanying drawings further described it.
According to the structural schematic diagram such as Fig. 1 two dimension mini positioning platforms, the utility model is main full symmetric by 2
Transmission branch and motion platform composition the transmission branch of the wherein directions y driving is carried out since structure is about axial symmetry
Elaborate embodiment, piezoelectric ceramic actuator notch applies displacement to piezoelectric ceramics at 9 in Fig. 1,3,5,6 it is straight round soft
Property hinge indicate the output end of lever mechanism 12 in Fig. 2, driving end and fulcrum respectively, pass through lever mechanism and realize input displacement
Level-one is amplified, then displacement enlargement is passed to the guiding mechanism 11 and 14 in Fig. 2 by the output end 3 of lever mechanism, is each led
It is made of to mechanism composite and flexible beam, increases the rigidity of two-dimentional mini positioning platform, improve response speed, then by guiding mechanism
Output displacement is passed into motion platform 7, when motion platform 7 is when the directions y move, the directions x can be made to generate coupling displacement, reduced
Positioning accuracy reduces the coupling in the directions x by the deformation for the decoupling mechanism 13 and 15 being made of straight flexible beam at this time in fig. 2
Displacement improves positioning accuracy.The transmission branch in another direction is driven with piezoelectric ceramics equally, realizes the directions platform x
Positioning, pass through decoupling mechanism and reduce the coupling displacement that y directions generate.
At bulge-structure, inside is designed to hollow cylinder for 7 global design of motion platform of two-dimentional mini positioning platform, external
Four faces contacted with straight flexible beam are plane, are convenient for displacement sensor monitor and control in real time when platform moves
System.Fixed pedestal 1 and location hole 8 are that mini positioning platform is fixed.
It is above-mentioned although specific embodiments of the present invention are described with reference to the accompanying drawings, but not to this practicality newly
The limitation of type protection domain, those skilled in the art should understand that, based on the technical solution of the present invention, ability
Field technique personnel would not require any inventive effort the various modifications or changes that can be made still in the protection of the utility model
Within the scope of.
Claims (1)
1. a kind of two-dimentional mini positioning platform based on Piezoelectric Ceramic, which is characterized in that including having symmetrical transmission branch
It is formed with a motion platform, each branch that transmits includes a lever mechanism, two guiding mechanisms and two decoupling mechanisms, thick stick
Linkage realizes the amplification of displacement level-one by fulcrum of straight circular flexible hinge, and displacement enlargement is passed by lever mechanism output end
Guiding mechanism is passed, guiding mechanism is made of two symmetrical composite and flexible beams, and composite and flexible beam is made of four flexible beams, solution
Coupling mechanism is made of four straight flexible beams, by straight flexible beam deformation, reduces coupling displacement；Motion platform is designed to raised knot
Structure, internal is hollow cylinder, and the face of the outside being connected with flexible beam four is plane, easily realizes the real-time prison of displacement sensor
It surveys and controls.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820818639.4U CN207883320U (en) | 2018-05-29 | 2018-05-29 | A kind of two-dimentional mini positioning platform based on Piezoelectric Ceramic |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820818639.4U CN207883320U (en) | 2018-05-29 | 2018-05-29 | A kind of two-dimentional mini positioning platform based on Piezoelectric Ceramic |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207883320U true CN207883320U (en) | 2018-09-18 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820818639.4U Expired - Fee Related CN207883320U (en) | 2018-05-29 | 2018-05-29 | A kind of two-dimentional mini positioning platform based on Piezoelectric Ceramic |
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| CN (1) | CN207883320U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112349344A (en) * | 2020-11-03 | 2021-02-09 | 清华大学 | Fully-decoupled two-dimensional nano flexible motion platform |
| CN113522709A (en) * | 2021-06-18 | 2021-10-22 | 天津大学 | Detachable two-dimensional ultrasonic vibration platform based on flexible hinge structure |
-
2018
- 2018-05-29 CN CN201820818639.4U patent/CN207883320U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112349344A (en) * | 2020-11-03 | 2021-02-09 | 清华大学 | Fully-decoupled two-dimensional nano flexible motion platform |
| CN112349344B (en) * | 2020-11-03 | 2021-07-06 | 清华大学 | Fully-decoupled two-dimensional nano flexible motion platform |
| CN113522709A (en) * | 2021-06-18 | 2021-10-22 | 天津大学 | Detachable two-dimensional ultrasonic vibration platform based on flexible hinge structure |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180918 Termination date: 20190529 |