CN112349344A - Fully-decoupled two-dimensional nano flexible motion platform - Google Patents
Fully-decoupled two-dimensional nano flexible motion platform Download PDFInfo
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- CN112349344A CN112349344A CN202011212701.3A CN202011212701A CN112349344A CN 112349344 A CN112349344 A CN 112349344A CN 202011212701 A CN202011212701 A CN 202011212701A CN 112349344 A CN112349344 A CN 112349344A
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Abstract
The invention discloses a fully decoupled two-dimensional nano flexible motion platform, which comprises: a base; a terminal platform; two X-direction secondary motion platforms and two Y-direction secondary motion platforms; two X-direction three-stage motion platforms and two Y-direction three-stage motion platforms; two X-direction double parallelogram leaf spring guides; two Y-direction double parallelogram leaf spring guides; four X-direction double-parallelogram plate spring decoupling parts; four Y-direction double-parallelogram plate spring decoupling parts; two X-direction three-fold plate spring guide parts; two Y-direction three-fold plate spring guide parts; four X-direction three-layer double-folded plate spring guide members; four Y-direction three-layer double-folded plate spring guide members; two square leaf springs are redundant restraints. The fully-decoupled two-dimensional nano flexible motion platform provided by the embodiment of the invention has the advantages of complete decoupling, high precision, low cost, convenience in installation and use and the like.
Description
Technical Field
The invention relates to the technical field of nanoscale displacement output, in particular to a fully-decoupled two-dimensional nano flexible motion platform.
Background
In the two-dimensional nanometer flexible motion platform in the related technology, the two-axis motion coupling error is large, the displacement output of a motor and the displacement measurement precision of a grating sensor are influenced, and particularly the precision of the two-dimensional nanometer flexible motion platform is influenced under the condition of large stroke.
Disclosure of Invention
The present invention is directed to solving at least one of the problems of the prior art. Therefore, the invention provides a fully decoupled two-dimensional nano flexible motion platform which has the advantages of complete decoupling, high precision, low cost, convenience in installation and use and the like.
In order to achieve the above object, according to an embodiment of the present invention, a two-dimensional nano flexible motion platform is provided, including: a base; the terminal platform is positioned on the inner side of the outer edge of the base; the X-direction secondary motion platforms and the Y-direction secondary motion platforms are oriented along the X direction and the Y direction; the three-stage motion platform comprises two X-direction three-stage motion platforms and two Y-direction three-stage motion platforms, wherein the two X-direction three-stage motion platforms are oriented along the X direction, and the two Y-direction three-stage motion platforms are oriented along the Y direction; the two X-direction double-parallelogram plate spring guide parts are respectively connected with the X-direction three-stage motion platform so as to enable the two X-direction three-stage motion platforms to move along the X direction, and each X-direction double-parallelogram plate spring guide part is connected with the base; the two Y-direction double-parallelogram plate spring guide parts are respectively connected with the Y-direction three-stage motion platform so as to enable the two Y-direction three-stage motion platforms to move along the Y direction, and each Y-direction double-parallelogram plate spring guide part is connected with the base; the four X-direction double-parallelogram plate spring decoupling pieces are respectively connected with two ends of two X-direction two-stage motion platforms, wherein the two X-direction double-parallelogram plate spring decoupling pieces are respectively connected with the two X-direction three-stage motion platforms, and the other two X-direction double-parallelogram plate spring decoupling pieces are respectively connected with two opposite side walls of the terminal platform; the four Y-direction double-parallelogram plate spring decoupling elements are respectively connected with two ends of the two Y-direction two-stage motion platforms, the two Y-direction double-parallelogram plate spring decoupling elements are respectively connected with the two Y-direction three-stage motion platforms, and the other two Y-direction double-parallelogram plate spring decoupling elements are respectively connected with two opposite side walls of the terminal platform; the two X-direction three-fold plate spring guide parts are respectively connected with the middle part of the X-direction secondary motion platform so as to enable the two X-direction secondary motion platforms to move along the X direction, and each X-direction three-fold plate spring guide part is connected with the base; the two Y-direction three-fold plate spring guide parts are respectively connected with the middle part of the Y-direction secondary motion platform so as to enable the two Y-direction secondary motion platforms to move along the Y direction, and each Y-direction three-fold plate spring guide part is connected with the base; the four X-direction three-layer double-folded plate spring guide members are respectively connected with two ends of the X-direction secondary motion platform so as to enable the two X-direction secondary motion platforms to move along the X direction, and each X-direction three-layer double-folded plate spring guide member is connected with the base; the four Y-direction three-layer double-folded plate spring guide members are respectively connected with two ends of the Y-direction secondary motion platform so as to enable the two Y-direction secondary motion platforms to move along the Y direction, and each Y-direction three-layer double-folded plate spring guide member is connected with the base; the terminal platform is connected with the base through the two square plate spring redundancy restraint pieces.
The two-dimensional nanometer flexible motion platform provided by the embodiment of the invention has the advantages of complete decoupling, high precision, low cost, convenience in installation and use and the like.
In addition, the two-dimensional nano flexible motion platform according to the above embodiment of the present invention may further have the following additional technical features:
according to an embodiment of the present invention, two of the X-direction double-parallelogram leaf spring guides are symmetrically arranged in the X direction, two of the Y-direction double-parallelogram leaf spring guides are symmetrically arranged in the Y direction, four of the X-direction double-parallelogram leaf spring decoupling members are symmetrically arranged in the X direction, four of the Y-direction double-parallelogram leaf spring decoupling members are symmetrically arranged in the Y direction, two of the X-direction triple-fold leaf spring guides are symmetrically arranged in the X direction, two of the Y-direction triple-fold leaf spring guides are symmetrically arranged in the Y direction, four of the X-direction triple-fold leaf spring guides are symmetrically arranged in the X direction, and four of the Y-direction triple-fold leaf spring guides are symmetrically arranged in the Y direction. Therefore, the consistency of the directional performance of the fully-decoupled two-dimensional nano flexible motion platform is improved.
Furthermore, each X-direction double-parallelogram plate spring guide comprises an X-direction double-parallelogram plate spring guide inner side plate spring and an X-direction double-parallelogram plate spring guide outer side plate spring, the two X-direction double-parallelogram plate spring guide inner side plate springs are respectively connected with two ends of the X-direction three-stage motion platform, the X-direction double-parallelogram plate spring guide outer side plate spring is positioned at the outer side of the X-direction double-parallelogram plate spring guide inner side plate spring and is connected with the base, and the X-direction double-parallelogram plate spring guide inner side plate spring and the X-direction double-parallelogram plate spring guide outer side plate spring are connected through rigid connecting pieces; every Y is to two parallelogram leaf spring guides including Y to the inboard leaf spring of two parallelogram leaf spring guides and Y to two parallelogram leaf spring guides outside leaf spring, two Y to the inboard leaf spring of two parallelogram leaf spring guides respectively with Y links to each other to tertiary motion platform's both ends, Y is to two parallelogram leaf spring guides outside leaf spring is located Y to the outside of the inboard leaf spring of two parallelogram leaf spring guides and all with the base links to each other, Y to the inboard leaf spring of two parallelogram leaf spring guides with Y links to each other through rigid connection spare to each other to two parallelogram leaf spring guides outside leaf spring. Therefore, flexible connection of the X-direction double-parallelogram plate spring guide part, the Y-direction double-parallelogram plate spring guide part, the X-direction three-stage motion platform, the Y-direction three-stage motion platform and the base can be realized.
Furthermore, each X-direction double-parallelogram plate spring decoupling member comprises an X-direction double-parallelogram plate spring decoupling member inner side plate spring and an X-direction double-parallelogram plate spring decoupling member outer side plate spring, the four X-direction double-parallelogram plate spring decoupling member inner side plate springs are respectively connected with two ends of two X-direction secondary motion platforms, the two X-direction double-parallelogram plate spring decoupling member outer side plate springs are respectively connected with two X-direction tertiary motion platforms, the other two X-direction double-parallelogram plate spring decoupling member outer side plate springs are respectively connected with two opposite side walls of the terminal platform, and the X-direction double-parallelogram plate spring decoupling member inner side plate spring and the X-direction double-parallelogram plate spring decoupling member outer side plate springs are connected through rigid connecting pieces; every Y includes Y to the inboard leaf spring of two parallelogram leaf spring decoupling zero and Y to two parallelogram leaf spring decoupling zero outsides leaf spring, four Y is respectively with two to the inboard leaf spring of two parallelogram leaf spring decoupling zero Y links to each other to the both ends of second grade motion platform, wherein two Y is respectively with two to two parallelogram leaf spring decoupling zero outsides leaf spring Y links to each other to tertiary motion platform, two in addition Y to two parallelogram leaf spring decoupling zero outsides leaf spring respectively with the both sides wall that the terminal platform is relative links to each other, Y to two parallelogram leaf spring decoupling zero inboards leaf spring with Y links to each other through rigid connection spare to two parallelogram leaf spring decoupling zero outsides leaf spring. Therefore, flexible connection of the X-direction double-parallelogram plate spring decoupling piece, the Y-direction double-parallelogram plate spring decoupling piece, the X-direction three-stage motion platform, the Y-direction three-stage motion platform, the X-direction two-stage motion platform, the Y-direction two-stage motion platform, the terminal platform and the base can be realized.
Furthermore, each X-direction three-layer double-folded plate spring guide comprises an X-direction three-layer double-folded plate spring guide fixing side plate spring and an X-direction three-layer double-folded plate spring guide moving side plate spring, the four X-direction three-layer double-folded plate spring guide moving side plate springs are respectively connected with two ends of the two X-direction two-stage moving platforms, the four X-direction three-layer double-folded plate spring guide fixing side plate springs are respectively connected with the base, and the X-direction three-layer double-folded plate spring guide fixing side plate springs and the X-direction three-layer double-folded plate spring guide moving side plate springs are connected through rigid connecting pieces; each Y-direction three-layer double-folded plate spring guide part comprises a Y-direction three-layer double-folded plate spring guide part fixed side plate spring and a Y-direction three-layer double-folded plate spring guide part moving side plate spring, the four Y-direction three-layer double-folded plate spring guide part moving side plate springs are respectively connected with two ends of the Y-direction two-stage moving platform, the four Y-direction three-layer double-folded plate spring guide part fixed side plate springs are respectively connected with the base, and the Y-direction three-layer double-folded plate spring guide part fixed side plate springs and the Y-direction three-layer double-folded plate spring guide part moving side plate springs are connected through rigid connecting pieces. Therefore, flexible connection of the X-direction three-layer double-folded plate spring guide part, the Y-direction three-layer double-folded plate spring guide part, the X-direction secondary motion platform, the Y-direction secondary motion platform and the base can be realized.
Further, the redundant restraint of square leaf spring includes the redundant restraint of the square leaf spring of upper strata and the redundant restraint of the square leaf spring of lower floor, and the redundant restraint of the square leaf spring of lower floor includes that two fixed bosss link to each other with the base, and the redundant restraint of the square leaf spring of lower floor is continuous with the redundant restraint of the square leaf spring of upper strata and the redundant restraint of the square leaf spring of lower floor respectively including moving the guide arm in the middle part of the redundant restraint of square leaf spring of lower floor, and the redundant restraint of the square leaf. This allows for a flexible connection of the square leaf spring redundant restraint, the terminal platform, and the base.
Further, the height of the X-direction three-layer double-folded leaf spring guide and the height of the Y-direction three-layer double-folded leaf spring guide in the vertical direction are lower than the height of the X-direction three-folded leaf spring guide and the height of the Y-direction three-folded leaf spring guide. This facilitates the X-direction three-layer double-folded leaf spring guide and the Y-direction three-layer double-folded leaf spring guide to escape from the X-direction double-parallelogram leaf spring decoupling member and the Y-direction double-parallelogram leaf spring decoupling member.
Optionally, the base comprises: a substrate; the eight first connecting bosses are arranged on the upper surface of the base plate at intervals, each plate spring at the fixed side of the guide part of the X-direction three-layer double-folded plate spring is respectively connected with the X-direction first connecting boss, and each plate spring at the fixed side of the guide part of the Y-direction three-layer double-folded plate spring is respectively connected with the Y-direction first connecting boss; the four second connecting bosses are arranged on the upper surface of the substrate at intervals, two ends of each X-direction three-fold plate spring guide are respectively connected with two adjacent second connecting bosses, and two ends of each Y-direction three-fold plate spring guide are respectively connected with two adjacent second connecting bosses; the plate springs on the inner sides of the X-direction double-parallelogram-shaped plate spring guide pieces are respectively connected with the X-direction two third connecting bosses, and the plate springs on the inner sides of the Y-direction double-parallelogram-shaped plate spring guide pieces are respectively connected with the Y-direction two third connecting bosses. This facilitates the attachment of the leaf spring to the base.
The invention has the following beneficial technical effects:
the invention provides a fully-decoupled two-dimensional nano flexible motion platform, which realizes the complete decoupling of an X-direction three-stage motion platform and a Y-direction three-stage motion platform by introducing four X-direction double-parallelogram plate spring decoupling parts and four Y-direction double-parallelogram plate spring decoupling parts, and improves the linear driving precision of a driver and the measuring precision of a portable grating sensor (the measuring method disclosed in patent ZL 201710455030.5). The nanometer flexible motion platform adopts three layers of double-folded plate spring guide parts, three-folded plate spring guide parts and double-parallelogram plate spring guide parts which are designed in a space double-layer mode to realize motion guide, the compactness of a space structure is improved, parasitic motion is effectively inhibited, nonlinear factors in a motion stroke are effectively avoided, and the realization of a two-dimensional nanometer flexible motion platform control system is facilitated. In addition, due to the introduction of the square plate spring redundancy restraint part, parasitic movement of the terminal platform along the vertical direction is effectively restrained, and the load capacity of the platform is increased.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
fig. 1 is a schematic structural diagram of a fully decoupled two-dimensional nano flexible motion platform according to an embodiment of the present invention.
FIG. 2 is a schematic diagram of a horizontal cross-sectional structure of a fully decoupled two-dimensional nano flexible motion platform according to an embodiment of the invention.
Fig. 3 is a schematic top view structure diagram of a fully decoupled two-dimensional nano flexible motion platform according to an embodiment of the present invention.
FIG. 4 is a schematic diagram of a vertical cross-sectional structure of a fully decoupled two-dimensional nano flexible motion platform according to an embodiment of the invention.
Fig. 5 is a schematic view of a deformation structure of the square plate spring redundancy restraint according to the embodiment of the present invention.
FIG. 6 is a schematic structural diagram of a fully decoupled two-dimensional nano flexible motion platform according to an embodiment of the invention.
Reference numerals: the device comprises a base 100, a terminal platform 200, an X-direction secondary motion platform 410, a Y-direction secondary motion platform 420, an X-direction tertiary motion platform 310, a Y-direction tertiary motion platform 320, an X-direction double-parallelogram plate spring guide 510, a Y-direction double-parallelogram plate spring guide 520, an X-direction double-parallelogram plate spring decoupling element 610, a Y-direction double-parallelogram plate spring decoupling element 620, an X-direction triple-folded plate spring guide 710, a Y-direction triple-folded plate spring guide 720, an X-direction triple-folded plate spring guide 810, a Y-direction triple-folded plate spring guide 820 and a square plate spring redundancy restraint element 900.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of illustrating the present invention and are not to be construed as limiting the present invention.
The fully decoupled two-dimensional nano flexible motion platform according to the embodiments of the present invention is described below with reference to the accompanying drawings.
As shown in fig. 1 to 4, a fully decoupled two-dimensional nano flexible motion platform according to an embodiment of the present invention includes a base 100, a terminal platform 200, an X-direction secondary motion platform 410, a Y-direction secondary motion platform 420, an X-direction tertiary motion platform 310, a Y-direction tertiary motion platform 320, an X-direction double parallelogram leaf spring guide 510, a Y-direction double parallelogram leaf spring guide 520, an X-direction double parallelogram leaf spring decoupling member 610, a Y-direction double parallelogram leaf spring decoupling member 620, an X-direction triple-fold leaf spring guide 710, a Y-direction triple-fold leaf spring guide 720, an X-direction triple-fold leaf spring guide 810, a Y-direction triple-fold leaf spring guide 820, and a square redundant leaf spring restraint 900 (X-direction and Y-direction are shown by arrows in fig. 1 to 2). It should be understood here that the directions X and Y are only for convenience of description and are not limited to the actual arrangement direction of the two-dimensional nano flexible motion platform 1.
The terminal platform 200 is located inside the outer edge of the base 100. The X-direction secondary motion stage 410 is oriented in the X-direction and the Y-direction secondary motion stage 420 is oriented in the Y-direction. The X-direction tertiary motion stage 310 is oriented in the X-direction and the Y-direction tertiary motion stage 320 is oriented in the Y-direction. The X-direction double-parallelogram plate spring guides 510 are respectively connected to the X-direction tertiary motion stage 310 to move the two X-direction tertiary motion stages 310 in the X-direction, and each X-direction double-parallelogram plate spring guide 510 is connected to the base 100. The Y-direction double-parallelogram leaf spring guides 520 are respectively connected to the Y-direction tertiary motion stage 320 to move the two Y-direction tertiary motion stages 320 in the Y-direction, and each Y-direction double-parallelogram leaf spring guide 520 is connected to the base 100. Four X-direction double-parallelogram plate spring decoupling members 610 are respectively connected to two ends of the X-direction secondary motion platform 410, wherein two X-direction double-parallelogram plate spring decoupling members 610 are respectively connected to the X-direction tertiary motion platform 310, and the other two X-direction double-parallelogram plate spring decoupling members 610 are respectively connected to two opposite side walls of the terminal platform 200. Four Y-direction double-parallelogram plate spring decoupling members 620 are respectively connected with two ends of the Y-direction two-stage motion platform 420, wherein two Y-direction double-parallelogram plate spring decoupling members 620 are respectively connected with the Y-direction three-stage motion platform 320, and the other two Y-direction double-parallelogram plate spring decoupling members 620 are respectively connected with two opposite side walls of the terminal platform 200. The X-direction triple-folding leaf spring guides 710 are respectively coupled to the middle portion of the X-direction secondary moving platform 410 to move the X-direction secondary moving platform 410 in the X-direction, and the X-direction triple-folding leaf spring guides 710 are coupled to the base 100. The Y-direction triple-fold leaf spring guides 720 are respectively coupled to the middle of the Y-direction secondary moving platform 420 to move the Y-direction secondary moving platform 420 in the Y-direction, and the Y-direction triple-fold leaf spring guides 720 are coupled to the base 100. The X-direction three-layer double-folded plate spring guide 810 is connected to both ends of the X-direction secondary moving platform 410 to move the X-direction secondary moving platform 410 in the X-direction, and the X-direction three-layer double-folded plate spring guide 810 is connected to the base 100. The Y-direction three-layer double-folded leaf spring guide 820 is connected to both ends of the Y-direction secondary moving platform 420 to move the Y-direction secondary moving platform 420 in the Y-direction, and the Y-direction three-layer double-folded leaf spring guide 820 is connected to the base 100. The terminal platform 200 is connected to the base 100 by a square leaf spring redundancy constraint 900.
According to an embodiment of the present invention, the X-direction double-parallelogram leaf spring guide 510 is symmetrically disposed in the X-direction, the Y-direction double-parallelogram leaf spring guide 520 is symmetrically disposed in the Y-direction, the X-direction double-parallelogram leaf spring decoupling member 610 is symmetrically disposed in the X-direction, the Y-direction double-parallelogram leaf spring decoupling member 620 is symmetrically disposed in the Y-direction, the X-direction three-folded leaf spring guide 710 is symmetrically disposed in the X-direction, the Y-direction three-folded leaf spring guide 720 is symmetrically disposed in the Y-direction, the X-direction three-layer double-folded leaf spring guide 810 is symmetrically disposed in the X-direction, and the Y-direction three-layer double-folded leaf spring guide 820 is symmetrically disposed in the Y-direction. Therefore, the consistency of all directional performances of the fully decoupled two-dimensional nano flexible motion platform is improved.
Further, each X-direction double-parallelogram leaf spring guide 510 includes an X-direction double-parallelogram leaf spring guide inside leaf spring and an X-direction double-parallelogram leaf spring guide outside leaf spring, the X-direction double-parallelogram leaf spring guide inside leaf springs are respectively connected to both ends of the X-direction three-stage motion platform 310, the X-direction double-parallelogram leaf spring guide outside leaf springs are located outside the X-direction double-parallelogram leaf spring guide inside leaf springs and are both connected to the base 100, and the X-direction double-parallelogram leaf spring guide inside leaf spring and the X-direction double-parallelogram leaf spring guide outside leaf springs are connected by a rigid connection member; each Y-direction double-parallelogram leaf spring guide 520 includes a Y-direction double-parallelogram leaf spring guide inner-side leaf spring and a Y-direction double-parallelogram leaf spring guide outer-side leaf spring, the Y-direction double-parallelogram leaf spring guide inner-side leaf springs are respectively connected with both ends of the Y-direction three-stage motion platform 320, the Y-direction double-parallelogram leaf spring guide outer-side leaf springs are located outside the Y-direction double-parallelogram leaf spring guide inner-side leaf springs and are both connected with the base 100, and the Y-direction double-parallelogram leaf spring guide inner-side leaf springs and the Y-direction double-parallelogram leaf spring guide outer-side leaf springs are connected through rigid connectors. Thus, flexible connection of the X-direction double-parallelogram plate spring guide 510, the Y-direction double-parallelogram plate spring guide 520, the X-direction three-stage motion platform 310, the Y-direction three-stage motion platform 320 and the base 100 can be realized.
Furthermore, each X-direction double-parallelogram plate spring decoupling member 610 comprises an X-direction double-parallelogram plate spring decoupling member inner-side plate spring and an X-direction double-parallelogram plate spring decoupling member outer-side plate spring, the X-direction double-parallelogram plate spring decoupling member inner-side plate spring is respectively connected with two ends of the X-direction secondary motion platform 410, the X-direction double-parallelogram plate spring decoupling member outer-side plate spring is respectively connected with the X-direction tertiary motion platform 310, the X-direction double-parallelogram plate spring decoupling member outer-side plate springs are respectively connected with two opposite side walls of the terminal platform 200, and the X-direction double-parallelogram plate spring decoupling member inner-side plate spring and the X-direction double-parallelogram plate spring decoupling member outer-side plate spring are connected through rigid connecting members; each Y-direction double-parallelogram plate spring decoupling piece 620 comprises a Y-direction double-parallelogram plate spring decoupling piece inner side plate spring and a Y-direction double-parallelogram plate spring decoupling piece outer side plate spring, the Y-direction double-parallelogram plate spring decoupling piece inner side plate spring is respectively connected with two ends of the Y-direction two-stage motion platform 420, the Y-direction double-parallelogram plate spring decoupling piece outer side plate spring is respectively connected with the Y-direction three-stage motion platform 320, in addition, the Y-direction double-parallelogram plate spring decoupling piece outer side plate spring is respectively connected with two opposite side walls of the terminal platform 200, and the Y-direction double-parallelogram plate spring decoupling piece inner side plate spring and the Y-direction double-parallelogram plate spring decoupling piece outer side plate spring are connected through rigid connecting pieces. This allows for flexible coupling of the X-direction double-parallelogram leaf spring decoupling 610, the Y-direction double-parallelogram leaf spring decoupling 620, the X-direction three-stage motion stage 310, the Y-direction three-stage motion stage 320, the X-direction two-stage motion stage 410, the Y-direction two-stage motion stage 420, the terminal stage 200, and the base 100.
Further, each of the X-direction three-layer double-folded plate spring guides 810 includes an X-direction three-layer double-folded plate spring guide fixing-side plate spring and an X-direction three-layer double-folded plate spring guide moving-side plate spring, the X-direction three-layer double-folded plate spring guide moving-side plate springs are respectively connected to both ends of the X-direction two-stage moving platform 410, the X-direction three-layer double-folded plate spring guide fixing-side plate spring is respectively connected to the base 100, and the X-direction three-layer double-folded plate spring guide fixing-side plate spring and the X-direction three-layer double-folded plate spring guide moving-side plate spring are connected by; each of the Y-direction three-layer double-folded plate spring guides 820 includes a Y-direction three-layer double-folded plate spring guide fixing-side plate spring and a Y-direction three-layer double-folded plate spring guide moving-side plate spring, the Y-direction three-layer double-folded plate spring guide moving-side plate spring is connected to both ends of the Y-direction two-stage moving platform 420, the Y-direction three-layer double-folded plate spring guide fixing-side plate spring is connected to the base 100, and the Y-direction three-layer double-folded plate spring guide fixing-side plate spring and the Y-direction three-layer double-folded plate spring guide moving-side plate spring are connected. Thus, flexible connection of the X-direction three-layer double-folded plate spring guide 810, the Y-direction three-layer double-folded plate spring guide 820, the X-direction secondary motion platform 410, the Y-direction secondary motion platform 420 and the base 100 can be realized.
Further, the redundant restraint of square leaf spring 900 includes the redundant restraint of the square leaf spring of upper strata and the redundant restraint of the square leaf spring of lower floor, and the redundant restraint of the square leaf spring of lower floor includes that two fixed bosss link to each other with base 100, and the redundant restraint of the square leaf spring 900 middle part of square leaf spring includes that the removal guide pole links to each other with the redundant restraint of the square leaf spring of upper strata and the redundant restraint of the square leaf spring of lower floor respectively, and the redundant restraint of the square leaf spring of upper strata includes that two bosss link to each other with terminal platform 200. This allows for a flexible connection of the square leaf spring redundancy restraint 900, the terminal platform 200, and the base 100. Fig. 5 shows a variant of the square leaf spring redundancy restraint 900.
Further, the height of the X-direction three-layer double-folded leaf spring guide 810 and the Y-direction three-layer double-folded leaf spring guide 820 in the vertical direction is lower than that of the X-direction three-folded leaf spring guide 710 and the Y-direction three-folded leaf spring guide 720. This facilitates the avoidance of the X-direction double-folded leaf spring guide 810 and the Y-direction double-folded leaf spring guide 820 from the X-direction double-parallelogram leaf spring decoupling member 610 and the Y-direction double-parallelogram leaf spring decoupling member 620.
Optionally, the base 100 comprises: a substrate; the eight first connecting bosses are arranged on the upper surface of the base plate at intervals, each X-direction three-layer double-folded plate spring guide fixing side plate spring is connected with the X-direction first connecting boss, and each Y-direction three-layer double-folded plate spring guide fixing side plate spring is connected with the Y-direction first connecting boss; the four second connecting bosses are arranged on the upper surface of the substrate at intervals, two ends of each X-direction three-fold plate spring guide 710 are connected with the adjacent second connecting bosses respectively, and two ends of each Y-direction three-fold plate spring guide 720 are connected with the adjacent second connecting bosses respectively; eight third connection bosss, eight third connection bosss set up at the upper surface interval of base plate, every X to two parallelogram leaf spring guide inboard leaf springs link to each other with X to the third connection boss respectively, every Y to two parallelogram leaf spring guide inboard leaf springs link to each other with Y to the third connection boss respectively. This may facilitate attachment of the leaf spring to the base 100.
The fully-decoupled two-dimensional nano flexible motion platform provided by the embodiment of the invention has the advantages of complete decoupling, high precision, low cost, convenience in use and the like. By adopting the measurement mode of the grating sensor as shown in fig. 6, the accurate measurement of the fully decoupled two-dimensional nano flexible motion platform can be realized.
Other configurations and operations of two-dimensional nano-flexible motion platforms according to embodiments of the present invention are known to those of ordinary skill in the art and will not be described in detail herein.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicate orientations or positional relationships based on those shown in the drawings, and are used merely for convenience of description and for simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be considered as limiting the present invention. Furthermore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; the two elements can be directly connected with each other or indirectly connected with each other through an intermediate medium, and the two elements can be communicated with each other. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
While embodiments of the invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.
Claims (8)
1. A fully decoupled two-dimensional nano flexible motion platform, comprising:
a base;
the terminal platform is positioned on the inner side of the outer edge of the base;
the X-direction secondary motion platforms and the Y-direction secondary motion platforms are oriented along the X direction and the Y direction;
the three-stage motion platform comprises two X-direction three-stage motion platforms and two Y-direction three-stage motion platforms, wherein the two X-direction three-stage motion platforms are oriented along the X direction, and the two Y-direction three-stage motion platforms are oriented along the Y direction;
the two X-direction double-parallelogram plate spring guide parts are respectively connected with the X-direction three-stage motion platform so as to enable the two X-direction three-stage motion platforms to move along the X direction, and each X-direction double-parallelogram plate spring guide part is connected with the base;
the two Y-direction double-parallelogram plate spring guide parts are respectively connected with the Y-direction three-stage motion platform so as to enable the two Y-direction three-stage motion platforms to move along the Y direction, and each Y-direction double-parallelogram plate spring guide part is connected with the base;
the four X-direction double-parallelogram plate spring decoupling pieces are respectively connected with two ends of the two X-direction two-stage motion platforms, the two X-direction double-parallelogram plate spring decoupling pieces are respectively connected with the two X-direction three-stage motion platforms, and the other two X-direction double-parallelogram plate spring decoupling pieces are respectively connected with two opposite side walls of the terminal platform;
the four Y-direction double-parallelogram plate spring decoupling pieces are respectively connected with two ends of the two Y-direction two-stage motion platforms, the two Y-direction double-parallelogram plate spring decoupling pieces are respectively connected with the two Y-direction three-stage motion platforms, and the other two Y-direction double-parallelogram plate spring decoupling pieces are respectively connected with two opposite side walls of the terminal platform;
the two X-direction three-fold plate spring guide parts are respectively connected with the middle part of the X-direction secondary motion platform so as to enable the two X-direction secondary motion platforms to move along the X direction, and each X-direction three-fold plate spring guide part is connected with the base;
the two Y-direction three-fold plate spring guide parts are respectively connected with the middle part of the Y-direction secondary motion platform so as to enable the two Y-direction secondary motion platforms to move along the Y direction, and each Y-direction three-fold plate spring guide part is connected with the base;
the four X-direction three-layer double-folded plate spring guide members are respectively connected with two ends of the X-direction secondary motion platform so as to enable the two X-direction secondary motion platforms to move along the X direction, and each X-direction three-layer double-folded plate spring guide member is connected with the base;
the four Y-direction three-layer double-folded plate spring guide members are respectively connected with two ends of the Y-direction secondary motion platform so as to enable the two Y-direction secondary motion platforms to move along the Y direction, and each Y-direction three-layer double-folded plate spring guide member is connected with the base;
the terminal platform is connected with the base through the square plate spring redundancy restraint piece.
2. The fully decoupled two-dimensional nano flexible motion platform according to claim 1, wherein two of the X-direction double-parallelogram plate spring guides are symmetrically arranged in an X direction, two of the Y-direction double-parallelogram plate spring guides are symmetrically arranged in a Y direction, four of the X-direction double-parallelogram plate spring decoupling members are symmetrically arranged in the X direction, four of the Y-direction double-parallelogram plate spring decoupling members are symmetrically arranged in the Y direction, two of the X-direction triple-fold plate spring guides are symmetrically arranged in the X direction, two of the Y-direction triple-fold plate spring guides are symmetrically arranged in the Y direction, four of the X-direction triple-fold plate spring guides are symmetrically arranged in the X direction, and four of the Y-direction triple-fold plate spring guides are symmetrically arranged in the Y direction.
3. The fully-decoupled two-dimensional nano flexible motion platform according to claim 1, characterized in that: each X-direction double-parallelogram plate spring guide part comprises an X-direction double-parallelogram plate spring guide part inner side plate spring and an X-direction double-parallelogram plate spring guide part outer side plate spring, the two X-direction double-parallelogram plate spring guide part inner side plate springs are respectively connected with two ends of the X-direction three-stage motion platform, the X-direction double-parallelogram plate spring guide part outer side plate spring is positioned on the outer side of the X-direction double-parallelogram plate spring guide part inner side plate spring and is connected with the base, and the X-direction double-parallelogram plate spring guide part inner side plate spring and the X-direction double-parallelogram plate spring guide part outer side plate spring are connected through rigid connecting pieces; every Y is to two parallelogram leaf spring guides including Y to the inboard leaf spring of two parallelogram leaf spring guides and Y to two parallelogram leaf spring guides outside leaf spring, two Y to the inboard leaf spring of two parallelogram leaf spring guides respectively with Y links to each other to tertiary motion platform's both ends, Y is to two parallelogram leaf spring guide outside leaf spring is located Y to the outside of the inboard leaf spring of two parallelogram leaf spring guides and all with the base links to each other, Y to the inboard leaf spring of two parallelogram leaf spring guides with Y links to each other through rigid connection spare to two parallelogram leaf spring guides outside leaf spring.
4. The fully-decoupled two-dimensional nano flexible motion platform according to claim 1, characterized in that: each X-direction double-parallelogram plate spring decoupling piece comprises an X-direction double-parallelogram plate spring decoupling piece inner side plate spring and an X-direction double-parallelogram plate spring decoupling piece outer side plate spring, the four X-direction double-parallelogram plate spring decoupling piece inner side plate springs are respectively connected with two ends of two X-direction secondary motion platforms, the two X-direction double-parallelogram plate spring decoupling piece outer side plate springs are respectively connected with two X-direction tertiary motion platforms, the other two X-direction double-parallelogram plate spring decoupling piece outer side plate springs are respectively connected with two opposite side walls of the terminal platform, and the X-direction double-parallelogram plate spring decoupling piece inner side plate spring and the X-direction double-parallelogram plate spring decoupling piece outer side plate springs are connected through rigid connecting pieces; every Y is to two parallelogram leaf spring decoupling zero including Y to two parallelogram leaf spring decoupling zero inboard leaf spring and Y to two parallelogram leaf spring decoupling zero outsides leaf spring, four Y is to two parallelogram leaf spring decoupling zero inboard leaf spring respectively with two Y links to each other to the both ends of second grade motion platform, wherein two Y is to two parallelogram leaf spring decoupling zero outsides leaf spring respectively with two Y links to each other to tertiary motion platform, two in addition Y to two parallelogram leaf spring decoupling zero outsides leaf spring respectively with the both sides wall that the terminal platform is relative links to each other, Y to two parallelogram leaf spring decoupling zero inboards leaf spring with Y links to each other through rigid connection spare to two parallelogram leaf spring decoupling zero outsides leaf spring.
5. The fully-decoupled two-dimensional nano flexible motion platform according to claim 1, characterized in that: each X-direction three-layer double-folded plate spring guide part comprises an X-direction three-layer double-folded plate spring guide part fixed side plate spring and an X-direction three-layer double-folded plate spring guide part moving side plate spring, the four X-direction three-layer double-folded plate spring guide part moving side plate springs are respectively connected with two ends of the two X-direction two-stage moving platforms, the four X-direction three-layer double-folded plate spring guide part fixed side plate springs are respectively connected with the base, and the X-direction three-layer double-folded plate spring guide part fixed side plate springs and the X-direction three-layer double-folded plate spring guide part moving side plate springs are connected through rigid connecting pieces; each Y-direction three-layer double-folded plate spring guide part comprises a Y-direction three-layer double-folded plate spring guide part fixed side plate spring and a Y-direction three-layer double-folded plate spring guide part moving side plate spring, the four Y-direction three-layer double-folded plate spring guide part moving side plate springs are respectively connected with two ends of the Y-direction two-stage moving platform, the four Y-direction three-layer double-folded plate spring guide part fixed side plate springs are respectively connected with the base, and the Y-direction three-layer double-folded plate spring guide part fixed side plate springs and the Y-direction three-layer double-folded plate spring guide part moving side plate springs are connected through rigid connecting pieces.
6. The fully-decoupled two-dimensional nano flexible motion platform according to claim 1, characterized in that: the square plate spring redundancy restraint part comprises an upper square plate spring redundancy restraint part and a lower square plate spring redundancy restraint part, the lower square plate spring redundancy restraint part comprises two fixed bosses connected with the base, the middle part of the square plate spring redundancy restraint part comprises a moving guide rod connected with the upper square plate spring redundancy restraint part and the lower square plate spring redundancy restraint part respectively, and the upper square plate spring redundancy restraint part comprises two bosses connected with the terminal platform.
7. The two-dimensional nano flexible motion platform according to claim 1, wherein the height of the X-direction three-layer double-folded leaf spring guide member and the Y-direction three-layer double-folded leaf spring guide member in the vertical direction is lower than that of the X-direction three-folded leaf spring guide member and the Y-direction three-folded leaf spring guide member.
8. The two-dimensional nano-flexible motion platform of claim 1, wherein the base comprises:
a substrate;
the eight first connecting bosses are arranged on the upper surface of the base plate at intervals, each plate spring at the fixed side of the guide part of the X-direction three-layer double-folded plate spring is connected with the X-direction first connecting boss respectively, and each plate spring at the fixed side of the guide part of the Y-direction three-layer double-folded plate spring is connected with the Y-direction first connecting boss respectively;
the four second connecting bosses are arranged on the upper surface of the substrate at intervals, two ends of each X-direction three-fold plate spring guide are respectively connected with two adjacent second connecting bosses, and two ends of each Y-direction three-fold plate spring guide are respectively connected with two adjacent second connecting bosses;
eight third connection bosss, eight the third is connected the boss and is in the upper surface interval of base plate sets up, every X is to two with X respectively to the inboard leaf spring of two parallelogram leaf spring guides the boss is connected to the third, every Y is to two with Y respectively to the inboard leaf spring of two parallelogram leaf spring guides the boss is connected to the third.
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