CN207877846U - A kind of heat evaporating device of the anti-droplets partition board of band - Google Patents
A kind of heat evaporating device of the anti-droplets partition board of band Download PDFInfo
- Publication number
- CN207877846U CN207877846U CN201721736339.3U CN201721736339U CN207877846U CN 207877846 U CN207877846 U CN 207877846U CN 201721736339 U CN201721736339 U CN 201721736339U CN 207877846 U CN207877846 U CN 207877846U
- Authority
- CN
- China
- Prior art keywords
- partition board
- partition
- crucible
- jet pipe
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
A kind of heat evaporating device of the anti-droplets partition board of band, including：Evaporate material；Crucible, the crucibles evaporation material to be heated；Jet pipe, the jet pipe are communicated with the top port of crucible；At least two partition boards, the partition board be platy structure, and by material removal formed allow steam by through-hole；The difference partition board is vertically spaced apart in crucible internal walls, and above evaporation material, and the through-hole of the difference partition board does not overlap in the projection of horizontal plane.In thermal evaporation coating process, multiple partition boards with through-hole can pass through steam, but since the projection in the horizontal direction of each partition board is not overlapped, thus stop most of splash drop, spraying liquid is effectively reduced to drip to up to coated surface, the thickness evenness and chemical constituent consistency for improving Coating Materials, improve the yields of coating process.
Description
Technical field
The utility model is related to vacuum thermal evaporation plated film fields, and in particular to a kind of thermal evaporation of the anti-droplets partition board of band
Device.
Background technology
Evaporation coating is one of the technology of vacuum PVD plated film.Evaporation coating equipment is generally divided into vacuum chamber
Body, vacuum acquiring system, thermal evaporation system, electric-control system are constituted.Thermal evaporation system is by container for evaporation (evaporator crucible, evaporation boat
Deng), resistance heater or other heating devices, heat shield system, heating temperature-control system composition.Technical process is：Evaporation is former
Material is placed in crucible, makes coating raw material that solid-liquid-gas phase transition process occur using heating in vacuum environment, and evaporation raw material is heated
Boil-off gas is generated after to fusing or boil-off gas is directly generated by solid-state with the pattern of distilling, and boil-off gas sinks in vacuum cavity
Product forms thin-film material in substrate surface.Simple substance membrane can be formed by evaporation technology, can also be formed by chemically reacting
Compound film.In production practice, evaporation source and line evaporation source etc. are divided into according to the structure of thermal evaporation sources.
Linear thermal evaporation sources are usually used in continuous production type filming equipment and are compared with dotted thermal evaporation sources, have plated film area
Greatly, the high advantage of high uniformity, stock utilization, but linear evaporation source is complicated, generally comprise crucible, crucible heater,
Jet pipe, jet pipe heater, heat shield structure, nozzle etc..Its working principle is that evaporation source material is heated in crucible, produced
Raw boil-off gas after jet pipe water conservancy diversion from nozzle from spray, wherein jet pipe and nozzle are also required to heat, and avoid boil-off gas
It condenses again.In real process, the boil-off gas that material internal generates can carry during material surface is evaporated in effusion
Go out certain drop, big drop evaporates material surface or be adhered to crucible internal walls, but the small liquid in part because gravity can fall back
Drop can escape after jet pipe from nozzle with boil-off gas, and be deposited on substrate, and droplet can be with boil-off gas by spray
Guan Houcong nozzles escape and are referred to as droplets the phenomenon that being deposited on substrate, lead to the thickness and chemical group of thin-film material part
Divide exception, influences the thickness evenness and chemical constituent consistency of thin-film material, lead to the generation of plated film waste product.
This purpose of utility model is to solve the problems, such as above-mentioned droplets, using the anti-droplets partition board of thermal evaporation sources, is used
In stopping that spraying liquid is dripped to up to jet pipe in crucible, and keep boil-off gas normal through.
Invention content
A kind of heat evaporating device of the anti-droplets partition board of band, including：
Evaporate material；
Crucible, the crucibles evaporation material to be heated；
Jet pipe, the jet pipe are communicated with the top port of crucible；
At least two partition boards, the partition board be platy structure, and by material removal formed allow steam by through-hole；
The different partition boards are vertically spaced apart in crucible internal walls, and above evaporation material, and the difference partition boards lead to
Hole does not overlap in the projection of horizontal plane, to stop that splash drop moves along a straight line to jet pipe.
Preferably, the outer wall of the partition board is fitted closely and is contacted with the crucible internal walls, and shape is identical.
Preferably, baffle interval device being set between the different partition boards, the baffle interval device is cyclic structure, and
Outer wall fits closely contact with the crucible internal walls and shape is identical.
Preferably, the level cross-sectionn of the partition board outer wall is ellipse or quadrangle.
Preferably, the level cross-sectionn of the partition board outer wall is circle.
Preferably, the partition board is using sintering, mechanical processing or increasing material manufacturing.
Preferably, the separator material is copper, gold, silver, tantalum, molybdenum, tungsten, graphite, quartz, aluminium oxide, carbon fiber, boron nitride
Or silicon carbide.
Preferably, the partition board has 2, is first partition and second partition respectively, there are two in being in for each partition board tool
The fan-shaped pylone of the symmetrical an angle of 90 degrees of the heart, the second partition are rotated by 90 ° relative to the first partition and set in the horizontal direction
It sets.
Preferably, the fan-shaped pylone of an angle of 90 degrees replaces with rectangle.
Preferably, the partition board has 3, is first partition, second partition and third partition board respectively, each partition board has
The fan-shaped pylone at two 60 degree of angles being centrosymmetric, the second partition is relative to first partition up time in the horizontal direction
Needle rotates 60 degree of settings.The third partition board rotates clockwise 60 degree of settings in the horizontal direction relative to the second partition.
Compared with prior art, the utility model has the beneficial effects that：In thermal evaporation coating process, multilayer has through-hole
Partition board can pass through steam, but since the projection in the horizontal direction of each partition board is not overlapped, thus stop most of splash
Drop effectively reduces spraying liquid and drips to the thickness evenness for improving Coating Materials up to coated surface and chemical constituent consistency, carries
The yields of high coating process.
Description of the drawings
Fig. 1 is the utility model diaphragm structure schematic diagram；
Fig. 2 is the diagrammatic cross-section of the utility model a pair of partition board mounting structure；
Fig. 3 is the utility model occupation mode schematic diagram；
Wherein 1- partition boards, 11- first partitions, 12 second partitions, 2- baffle interval devices, 3- through-holes, 4- crucibles, 5- sprays
Pipe, 6- nozzles, 7- evaporate material, and the steam and droplets mixing object, 9- drops that 8- evaporation materials generate after being heated are hindered by partition board
Enter the steam of jet pipe after gear.
Specific implementation mode
The heat evaporating device of the anti-droplets partition board of band provided by the present invention is made further in detail below in conjunction with the accompanying drawings
Most explaination.
To achieve the above object, the utility model provides the following technical solutions：
As shown in Figure 1, a kind of heat evaporating device of the anti-droplets partition board of band, including evaporation material, crucible, jet pipe and more
A partition board, the crucibles evaporation material to be heated；The jet pipe is communicated with the top port of crucible；The partition board
Crucible internal walls are placed on, and above evaporation material, it is preferable that place partition board, the partition board close at jet pipe in crucible
For platy structure, and formed by material removal allow steam by through-hole；The difference partition board, which is vertically spaced, to be put
It sets in crucible internal walls, and above evaporation material, the through-hole of the difference partition board does not overlap in the projection of horizontal plane, with
Stop the partition board that splash drop linear motion passes through top.
Using the different motion characteristic of drop and steam, steam can be flowed along any channel, but the quality of drop compared with
Greatly, in short time and shorter path, gravity and steam are limited on the influence of the movement locus of drop, and most of drop tends to edge
Straight line or collimation line tracking movement, the design principle of partition board is blocking drop straight line path, to stop that most of drop is logical
It crosses, and then coated surface can not be reached by spout, and steam can pass through along the through-hole of partition board.
The outer wall of the partition board is fitted closely and is contacted with the crucible internal walls, and shape is identical.The partition board outer wall
Level cross-sectionn is round, ellipse or quadrangle.
It is described difference partition board between be arranged baffle interval device, the baffle interval device be cyclic structure, and it is described every
The outer wall of plate escapement fits closely contact with the crucible internal walls and shape is identical.
One specific embodiment is first partition 11 and second partition 12 respectively as shown in Fig. 2, the partition board has 2,
There are two the fan-shaped pylone for an angle of 90 degrees being centrosymmetric, the second partition exists each partition board tool relative to the first partition
Horizontal direction is rotated by 90 ° setting.The level cross-sectionn of partition board outer wall is circular.Between first partition 11 and second partition 12
Baffle interval device 2 is set.
In another specific embodiment, the partition board has 2, is first partition 11 and second partition 12 respectively, each
There are two the rectangle being centrosymmetric, the second partition rotates partition board tool in the horizontal direction relative to the first partition
90 degree of settings.The level cross-sectionn of partition board outer wall is square.Baffle interval is set between first partition 11 and second partition 12
Device 2.
In another specific embodiment, the partition board has 3, is first partition, second partition and third partition board respectively,
There are two the fan-shaped pylone at 60 degree of angles being centrosymmetric, the second partition exists each partition board tool relative to the first partition
Horizontal direction rotates clockwise 60 degree of settings.The third partition board rotates clockwise in the horizontal direction relative to the second partition
60 degree of settings.
According to its different processing of separator material using modes such as sintering, mechanical processing, increasing material manufacturings, material selection needs
Thermal conductivity, heat resistance, chemical stability, vacuum applicability, matched coefficients of thermal expansion and workability are considered, as heat conduction is good
Metallic copper, gold, silver, tantalum, molybdenum, tungsten etc. or nonmetallic materials graphite, quartz, aluminium oxide, carbon fiber, boron nitride, silicon carbide
Deng.
If necessary to the effect for reinforcing stopping drop, the structure of multiple partition boards, but the partition board group that blocking effect is good can be used
Credit union influences the throughput of steam, and then influences evaporation rate, needs the means for combining other raising evaporation rates, for example increase
The size of crucible and jet pipe, offer evaporating temperature etc., offset the influence that partition board passes through efficiency to steam.In being total to for gravity and steam
Under same-action, the actual motion track of drop is complex, and part droplet may not also be moved according to straight path, and partition board is simultaneously
It cannot stop all drops.
The operation principle of the utility model is：When using partition board, by multiple baffle combinations be put into evaporator crucible close to spray
The outer wall in the region of pipe, partition board is bonded and is in close contact with crucible internal walls, and the material in crucible forms steam by thermal evaporation, evaporation
Drop may be carried when the steam effusion of material internal, forms the mixture of steam and drop, steam can be along any channel
Flowing, but the quality of drop is larger, and in short time and shorter path, gravity and steam have the influence of the movement locus of drop
Limit, most of drop tend to move along straight line or collimation line tracking, and the non-material removal part of partition board can stop drop
Straight line path, to stop that most of drop passes through, and steam can pass through along the gap between the through-hole of different partition boards.
It although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
Understanding without departing from the principles and spirit of the present invention can carry out these embodiments a variety of variations, modification, replace
And modification, the scope of the present invention is defined by the appended.
Claims (10)
1. a kind of heat evaporating device of the anti-droplets partition board of band, it is characterised in that：
Including：
Evaporate material；
Crucible, the crucibles evaporation material to be heated；
Jet pipe, the jet pipe are communicated with the top port of crucible；
At least two partition boards, the partition board be platy structure, and by material removal formed allow steam by through-hole；It is different
The partition board is vertically spaced apart in crucible internal walls, and above evaporation material, and the through-hole of the difference partition board exists
The projection of horizontal plane does not overlap.
2. device as described in claim 1, it is characterised in that：The outer wall of the partition board is fitted closely with the crucible internal walls and is connect
It touches and shape is identical.
3. device as described in claim 1, it is characterised in that：Baffle interval device is set between the difference partition board, it is described
Baffle interval device is cyclic structure, and outer wall fits closely contact with the crucible internal walls and shape is identical.
4. device as described in claim 1, it is characterised in that：The level cross-sectionn of the partition board outer wall is ellipse or four sides
Shape.
5. device as claimed in claim 4, it is characterised in that：The level cross-sectionn of the partition board outer wall is circle.
6. device as described in claim 1, it is characterised in that：The partition board is using sintering, mechanical processing or increasing material manufacturing.
7. device as described in claim 1, it is characterised in that：The separator material be copper, gold, silver, tantalum, molybdenum, tungsten, graphite,
Quartz, aluminium oxide, carbon fiber, boron nitride or silicon carbide.
8. device as described in any one of claim 1 to 7, it is characterised in that：The partition board have 2, be respectively first every
Plate and second partition, each partition board tool there are two the fan-shaped pylone for an angle of 90 degrees being centrosymmetric, the second partition relative to
The first partition is rotated by 90 ° setting in the horizontal direction.
9. device as claimed in claim 8, it is characterised in that：The fan-shaped pylone of an angle of 90 degrees replaces with rectangle.
10. device as described in any one of claim 1 to 7, it is characterised in that：The partition board have 3, be respectively first every
Plate, second partition and third partition board, each partition board tool there are two the fan-shaped pylone at 60 degree of angles being centrosymmetric, described second every
Plate rotates clockwise 60 degree of settings in the horizontal direction relative to the first partition, the third partition board relative to described second every
Plate rotates clockwise 60 degree of settings in the horizontal direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721736339.3U CN207877846U (en) | 2017-12-13 | 2017-12-13 | A kind of heat evaporating device of the anti-droplets partition board of band |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721736339.3U CN207877846U (en) | 2017-12-13 | 2017-12-13 | A kind of heat evaporating device of the anti-droplets partition board of band |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207877846U true CN207877846U (en) | 2018-09-18 |
Family
ID=63501489
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721736339.3U Active CN207877846U (en) | 2017-12-13 | 2017-12-13 | A kind of heat evaporating device of the anti-droplets partition board of band |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207877846U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113088891A (en) * | 2021-03-09 | 2021-07-09 | 中国电子科技集团公司第十一研究所 | Indium evaporation boat |
-
2017
- 2017-12-13 CN CN201721736339.3U patent/CN207877846U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113088891A (en) * | 2021-03-09 | 2021-07-09 | 中国电子科技集团公司第十一研究所 | Indium evaporation boat |
| CN113088891B (en) * | 2021-03-09 | 2023-03-03 | 中国电子科技集团公司第十一研究所 | Indium evaporation boat |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN208136329U (en) | A kind of heat evaporating device of the anti-droplets grid of band | |
| CN201751427U (en) | Linear evaporation source | |
| BRPI0615695A2 (en) | film forming apparatus and method for film forming | |
| KR20200042961A (en) | Turbulent spiral multi-zone precursor vaporizer | |
| BR112013014566B1 (en) | linear evaporation source and method for coating substrates | |
| CN104099571A (en) | Evaporation source component, film deposition device and film deposition method | |
| CN207877846U (en) | A kind of heat evaporating device of the anti-droplets partition board of band | |
| JP6656261B2 (en) | Apparatus for depositing vaporized material, distribution pipe, vacuum deposition chamber, and method for depositing vaporized material | |
| KR101518545B1 (en) | Apparatus for Coating Graphene Film Using Cold Spray | |
| CN106835028A (en) | A kind of vapor deposition source, evaporation coating device and evaporation coating method | |
| CN105874095A (en) | Depositing arrangement, deposition apparatus and methods of operation thereof | |
| WO2018077388A1 (en) | Measurement assembly for measuring a deposition rate, evaporation source, deposition apparatus, and method therefor | |
| KR102082193B1 (en) | Measuring assembly for measuring deposition rate and method therefor | |
| CN104404452B (en) | A kind of sample cell structure of vacuum coating system | |
| CN114481038B (en) | Evaporation crucible and evaporation system | |
| CN108677148B (en) | Evaporation source and evaporation device | |
| CN214843074U (en) | Easy cooling probe structure of vacuum evaporation machine | |
| KR101620638B1 (en) | Apparatus for measuring evaporation rate of deposition source | |
| CN205999473U (en) | Evaporated device and the part flow arrangement being installed in evaporated device | |
| KR101451483B1 (en) | Electro Plating Device | |
| TWI458546B (en) | Chemical bath deposition (cbd) apparatus | |
| TWI623052B (en) | Fluid uniform device | |
| CN108004510B (en) | Crucible and evaporation equipment | |
| CN109689926A (en) | Evaporation coating device | |
| JP2003160856A (en) | Vapor deposition apparatus, thin-film forming method and display device using them |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |