CN207818539U - A kind of chemicals treatment structure in the case of equipment fault - Google Patents
A kind of chemicals treatment structure in the case of equipment fault Download PDFInfo
- Publication number
- CN207818539U CN207818539U CN201820295562.7U CN201820295562U CN207818539U CN 207818539 U CN207818539 U CN 207818539U CN 201820295562 U CN201820295562 U CN 201820295562U CN 207818539 U CN207818539 U CN 207818539U
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- China
- Prior art keywords
- groove body
- pneumatic diaphragm
- equipment fault
- medicament
- major trough
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Fluid-Driven Valves (AREA)
- Reciprocating Pumps (AREA)
Abstract
The utility model discloses the chemicals treatment structures in the case of a kind of photovoltaic industry Wafer Cleaning equipment fault, mainly by major trough groove body 001, secondary slot groove body 002, change liquid pneumatic diaphragm valve 003, pneumatic diaphragm pump 004, pneumatic diaphragm pump 005 and form；The chemicals treatment structure of the utility model can solve the problems, such as that the cleaning equipment under the prior art can not take out the gaily decorated basket in pharmacy slot in time when breaking down and discharge medicament causes a large amount of medicaments to waste; silicon chip and medicament can be effectively protected, reduction brings that the production cost increases because of equipment fault.
Description
Technical field
The utility model is related to the chemicals treatment structures in the case of a kind of equipment fault, more particularly to a kind of photovoltaic industry
Chemicals treatment structure in the case of Wafer Cleaning equipment fault.
Background technology
Solar cell is rapidly developed as the reproducible eco-friendly power source of clean environment firendly, the development of cleaning machine technology
Level is also being continuously improved；But cleaning equipment during continuous use it is possible that failure, when equipment breaks down,
The gaily decorated basket in pharmacy slot does not take out in time again, and silicon chip is positioned over overlong time in medicament, will damage silicon chip, while causing again
The pollution of medicament, greatly waste of resource；This requires silicon that can timely in treatment agent slot when equipment breaks down
Piece；The chemicals treatment structure of the utility model can reduce the wasting of resources under this fault condition to the greatest extent.
Currently, cleaning equipment in the market can only lift the gaily decorated basket in pharmacy slot when in face of this equipment fault to not having
Have in the sink of medicament, but this operation in equipment oepration at full load it is difficult to ensure that the gaily decorated basket in each pharmacy slot
Vacant sink can be found, and when mechanical arm failure, the gaily decorated basket cannot manually take out at all；It is asked in face of this equipment fault
Topic, common way be will there is the medicament direct emission in the pharmacy slot of the gaily decorated basket to fall, although it is this operation can ensure it is all
Silicon chip is all not in damage phenomenon, but but can cause greatly to waste to medicament, the medicament direct emission of high concentration
No small burden can be caused to wastewater treatment.
Chemicals treatment structure in the case of a kind of equipment fault provided by the utility model, it is main in the case where solving the prior art
Cleaning equipment can not in time be taken out to the gaily decorated basket in pharmacy slot when breaking down and discharge medicament causes to waste a large amount of medicaments
Problem.
Utility model content
In order to overcome the above-mentioned deficiencies of the prior art, the utility model provides at the medicament in the case of a kind of equipment fault
Structure is managed, more particularly to the chemicals treatment structure in the case of a kind of photovoltaic industry Wafer Cleaning equipment fault.
Technical solution is used by the utility model solves its technical problem：Using the processing side of the mutual liquid storage of major-minor slot
Formula.
Compared with prior art, the utility model has the beneficial effects that：The cleaning equipment that can be solved under the prior art exists
Can not the gaily decorated basket in pharmacy slot be taken out and be discharged in time the problem of medicament causes to waste a large amount of medicaments when failure, protect in time
Silicon chip and medicament are protected, the extraneoas loss brought by equipment fault is reduced.
Description of the drawings
Fig. 1 is the general structure schematic diagram of the utility model；
Specific implementation mode
With reference to specific embodiment, elaborate to the content of the utility model.
A kind of chemicals treatment structure in the case of equipment fault, including major trough groove body 001, secondary slot groove body 002, change liquid gas
Dynamic diaphragm valve 003, pneumatic diaphragm pump 004, pneumatic diaphragm pump 005.
001 back-plane design of major trough groove body is to be tilted a certain angle, in order to being completely exhausted out for medicament.Cell wall lowest point is provided with
Hole is used in combination pipeline to be connected with liquid pneumatic diaphragm valve 003 is changed；Cell wall middle and upper part is provided with hole, to connect pneumatic diaphragm pump；Secondary slot
Groove body back-plane design is to be tilted a certain angle, convenient for being completely exhausted out for medicament；Secondary slot groove body 002 is bigger than 001 volume of major trough groove body
10, convenient for accommodating the medicament in major trough groove body 001 completely；Liquid is changed to be controlled by master console with pneumatic diaphragm valve 003, when
When there is equipment fault, operation master console related command, which can be opened, in time changes liquid pneumatic diaphragm valve 003, major trough groove body
Medicament in 001 will be flowed into time in secondary slot groove body 002；When equipment fault solves, operation master console related command is
Pneumatic diaphragm pump 004 can be opened, the medicament in secondary slot groove body 002 is pumped back in major trough groove body 001, equipment continues to run with；When
When equipment completion operation needs to change liquid, controllable master console related command will change liquid with pneumatic diaphragm valve 003 and drain gas
Dynamic diaphragm valve 005 opens simultaneously and can clear waste liquid.
Above example is only the exemplary embodiment of the utility model, is not used in limitation the utility model, each module it
Between combination be considered as the scope of protection of the utility model, the specific protection domain of the utility model has appended claims limit
It is fixed；Those skilled in the art can in the essential scope of the utility model, to the utility model make various modifications or
Equivalent replacement, this modification or equivalent replacement also should be regarded as falling within the protection scope of the present utility model.
Claims (6)
1. the chemicals treatment structure in the case of a kind of equipment fault, more particularly to a kind of photovoltaic industry Wafer Cleaning equipment fault
In the case of chemicals treatment structure, including major trough groove body (001), secondary slot groove body (002), change liquid pneumatic diaphragm valve (003), gas
Dynamic diaphragm pump (004), drain are with pneumatic diaphragm valve (005)；It is primarily characterized in that：When the failure of Wafer Cleaning equipment causes
The gaily decorated basket can not carry out next processing step in each slot on time when, to prevent in pharmacy slot, silicon chip and medicament reaction time are long to lead
Silicon chip damage is caused, liquid pneumatic diaphragm valve (003) opening can will be changed by equipment master console, makes the medicine in major trough groove body (001)
Agent flows into secondary slot groove body (002), waits for again being opened pneumatic diaphragm pump (004) by master console after equipment obstacle management,
Medicament in secondary slot groove body (002) is evacuated in major trough groove body (001).
2. the chemicals treatment structure in the case of a kind of equipment fault according to claim 1, major trough groove body (001) feature exists
In：Groove body bottom plate has certain angle of inclination, convenient for being completely exhausted out for medicament；Cell wall lowest point is provided with hole, and pipeline is used in combination and changes
Liquid is connected with pneumatic diaphragm valve (003)；Cell wall middle and upper part is provided with hole, to connect pneumatic diaphragm pump.
3. the chemicals treatment structure in the case of a kind of equipment fault according to claim 1, secondary slot groove body (002) feature exists
In：Groove body bottom plate is tilted a certain angle, convenient for being completely exhausted out for medicament；Secondary slot groove body (002) is bigger than major trough groove body (001) volume
10, convenient for accommodating the medicament in major trough groove body (001) completely；Secondary slot groove body could be designed without according to equipment inner space
Same shape, and it is positioned over major trough groove body (001) bottom.
4. the chemicals treatment structure in the case of a kind of equipment fault according to claim 1, changes liquid pneumatic diaphragm valve
(003) it is characterized in that：Controlled by master console, when there is equipment fault operate master console can open change liquid with pneumatically every
Film valve (003), the medicament in major trough groove body (001) can be flowed into time in secondary slot groove body (002).
5. the chemicals treatment structure in the case of a kind of equipment fault according to claim 1, pneumatic diaphragm pump (004) feature
It is：It is controlled by master console, when equipment fault solves, operation master console can open pneumatic diaphragm pump (004), will be secondary
Medicament in slot groove body (002) is pumped back in major trough groove body (001).
6. the chemicals treatment structure in the case of a kind of equipment fault according to claim 1, drain pneumatic diaphragm valve
(005) it is characterized in that：It is controlled by master console, when equipment carries out changing liquid, liquid pneumatic diaphragm valve is changed by master console control
(003) it is opened simultaneously and waste liquid can be cleared with pneumatic diaphragm valve (005) with drain.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820295562.7U CN207818539U (en) | 2018-03-04 | 2018-03-04 | A kind of chemicals treatment structure in the case of equipment fault |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820295562.7U CN207818539U (en) | 2018-03-04 | 2018-03-04 | A kind of chemicals treatment structure in the case of equipment fault |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207818539U true CN207818539U (en) | 2018-09-04 |
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ID=63321244
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820295562.7U Active CN207818539U (en) | 2018-03-04 | 2018-03-04 | A kind of chemicals treatment structure in the case of equipment fault |
Country Status (1)
| Country | Link |
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| CN (1) | CN207818539U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110534458A (en) * | 2019-08-08 | 2019-12-03 | 长江存储科技有限责任公司 | Cleaning equipment and its cleaning method |
-
2018
- 2018-03-04 CN CN201820295562.7U patent/CN207818539U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110534458A (en) * | 2019-08-08 | 2019-12-03 | 长江存储科技有限责任公司 | Cleaning equipment and its cleaning method |
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