CN207756164U - Biomedical detecting system based on nano impression micro flow chip - Google Patents
Biomedical detecting system based on nano impression micro flow chip Download PDFInfo
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- CN207756164U CN207756164U CN201721808849.7U CN201721808849U CN207756164U CN 207756164 U CN207756164 U CN 207756164U CN 201721808849 U CN201721808849 U CN 201721808849U CN 207756164 U CN207756164 U CN 207756164U
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Abstract
The utility model discloses the biomedical detecting systems based on nano impression micro flow chip, including micro-fluidic chip, SPR detection chips, mechanical clamp and annular LED light emitting array, the SPR detection chips are mainly combined by substrate, nano impression glue, chromium film and golden film from bottom to top；Be arranged in the micro-fluidic chip it is multigroup by 8 glue photoetching of SU and PDMS form a film in the way of make microchannel, the Loading channel and flow pass that microchannel is mainly connected to by S-shaped microchannel and both ends are constituted.This practicality uses microflow control technique, handles or manipulates minute fluid by the way that microchannel is arranged in the good sensor core on piece of nano impression, can use few reagent, the quick detection of multi-channel parallel is realized on small-sized chip.Detection chip is connect to composition detecting system with mechanical clamp with embedded device simultaneously, the information processing function of embedded device can easily be utilized to complete the detection process of automation.
Description
Technical field
The utility model is related to field of biological medicine, specifically the biomedical inspection based on nano impression micro flow chip
Examining system.
Background technology
With the development of contemporary science and technology, people's detection technique parallel to small-sized, quick, many kinds of substance requires more next
Higher, especially in biomedical sector, the faster detection mode of smaller can help people preferably to detect the body of oneself
Situation, in addition stay indoors can complete detection.And it is based on surface plasma body resonant vibration (Surface Plasmon
Resonance, SPR) sensor of technology then provides new thinking for the miniaturization of detection chip.SPR is light wave and metal
A kind of physical optics phenomenon caused by electron interaction, when light wave vector component and surface propagated along metal interface etc. from
When the vector component of daughter wave is equal, the two resonates, and energy is transferred to surface plasma, the major part of incident light from photon
Energy is absorbed by metal surface plasma wave so that the energy of reflected light is drastically reduced, and the intensity of reflected light detected can be substantially
Degree ground weakens, referred to as surface plasma body resonant vibration.Different from inspections such as traditional Western blot, fluorescence method, liquid chromatography
Survey technology, SPR detections have the advantages that it is fast and convenient, need not mark, and sensitivity is very high.The SPR detectors of early stage
Using prism structure, bulky.With the development of technology, occur with the spr sensor of metal grating diffraction coupled modes,
Its is small, simple in structure.But how at low cost the periodic nano-structure array of batch making Nano grade is applied to inspection
Integrated examining system is always a problem, and nanometer embossing then ideally solves the problems, such as this.Nano-imprint stamp is to use
Electron beam lithography is process, and can the pattern in template be carried out massive duplication by technological means.
But it is only that sensor chip miniaturization is still inadequate, large-scale parallel inspection how is completed on the chip of miniaturization
It is also a problem for needing to solve to survey.
Utility model content
The purpose of this utility model is to provide the biomedical detecting systems based on nano impression micro flow chip, to solve
The problems mentioned above in the background art.
To achieve the above object, the utility model provides the following technical solutions：
Biomedical detecting system based on nano impression micro flow chip, including micro-fluidic chip, SPR detection chips, machine
Tool fixture and annular LED light emitting array,
The SPR detection chips are mainly combined by substrate, nano impression glue, chromium film and golden film from bottom to top, wherein
Several periodic nanometer holes are opened up in golden film；
Be arranged in the micro-fluidic chip it is multigroup by the photoetching of SU-8 glue and PDMS form a film in the way of make microchannel, it is micro-
The Loading channel and flow pass that circulation road is mainly connected to by S-shaped microchannel and both ends are constituted, and wherein Loading channel includes using
In the Loading channel A and Loading channel B that add solution to be detected and detection reagent respectively, Loading channel A and Loading channel B are in
Y shapes are distributed；
The micro-fluidic chip have microchannel with spr sensor chip have periodic nanometer hole while pass through
Silica-bound obtains the detection chip that spr sensor chip and micro-fluidic chip are bonded to；The spr sensor chip
Embedded device is connected by mechanical clamp with the detection chip that micro-fluidic chip is bonded to.
As further program of the utility model：The mechanical clamp is for one in the both ends of fixedly embedded formula equipment
End is connected with detection chip mounting cylinder, and detection chip mounting cylinder and is open towards the one end open of the camera of embedded device
Annular LED light emitting array is fixedly mounted in inside；The side of the detection chip mounting cylinder opens up detection chip interface, detects core
Piece interface is arranged in parallel with annular LED light emitting array；The detection core that the spr sensor chip and micro-fluidic chip are bonded to
Piece is placed in the card slot of transparent material manufacture, and is inserted into detection chip interface, wherein micro-fluidic chip direction annular
LED light emitting arrays.
As further program of the utility model：The thickness of the chromium film is 20nm, and the thickness of golden film is 200nm.
As further program of the utility model：A diameter of 250nm in the periodic nanometer hole, period 500nm.
Compared with prior art, the utility model has the beneficial effects that：
This practicality uses nanometer embossing, can be realized and be mass produced with extremely low cost；It is examined using SPR effects
It surveys, there is very high sensitivity；Using microflow control technique, multigroup detection can be completed with few detection reagent；It is pressed from both sides using machinery
Detection chip and embedded device are combined into detecting system by tool, facilitate small and exquisite, expansion easy to disassemble；Embedded device can be
The common development board with camera, even our common smart mobile phones, greatly facilitate detection.
The detectable substance of this practicality, can be urine, saliva, blood of human body etc., can also be that other need to detect
Solution.Different processing should be done to sensor chip according to actual detection demand, to complete the detection of different material.
Wherein nanometer embossing is used to make sensor chip, has following advantage：
(1) essence of nanometer embossing is that the pattern in template is carried out to the technology of massive duplication by technological means,
Thus its is at low cost, volume production is fast, has very high practicability；
(2) spr sensor for using nanometer embossing to make, avoids the body of the spr sensor of conventional prism structure
Product drawback big, of high cost, can realize detection on minimum chip；
(3) operating procedure is simple, and the production process of chip, easy to produce and popularization can be completed in slightly training.
Microchannel is made by the way of the photoetching of SU-8 glue and PDMS film forming, is had the characteristics that：
(1) with traditional making micro-fluidic chip material --- compared with silicon, the translucency of SU-8 glue is more preferable, processing more hold
Easily；
(2) PDMS is at low cost, using simple, while having good bio-compatibility, translucency grade chemical inertness, especially
It is after hardening, there is good thermal stability, and be easy to be bonded with silicon chip.Therefore it is very suitable for making micro-fluidic core
Piece.
Description of the drawings
Fig. 1 is SPR detection chip structural schematic diagrams；
Fig. 2 is microfluidic chip structure schematic diagram；
Fig. 3 is complete detection chip structural schematic diagram after spr sensor chip and micro-fluidic chip bonding；
Fig. 4 is the configuration schematic diagram of the biomedical detecting system based on nano impression micro flow chip；
Fig. 5 is the schematic diagram of embedded device.
In figure:Substrate 1, nano impression glue 2, chromium film 3, golden film 4, micro-fluidic chip 5, Loading channel A6, Loading channel B7,
S-shaped microchannel 8, flow pass 9, SPR detection chips 10, mechanical clamp 11, annular LED light emitting array 12, spr sensor core
It is detection chip 13 that piece and micro-fluidic chip are bonded to, card slot 14, detection chip interface 15, embedded device 16, embedded
The camera 17 of equipment.
Specific implementation mode
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
The every other embodiment obtained, shall fall within the protection scope of the present invention.
In the utility model embodiment, it is bonded, then will be loaded with to be checked using micro-fluidic chip 5 and SPR detection chips 10
The detection chip 13 that the spr sensor chip and micro-fluidic chip of sample are bonded to is packed into fixture, and is irradiated using LED light
After the detection chip 13 that spr sensor chip and micro-fluidic chip are bonded to makes it generate SPR effects, and radiating light is transmitted
It is obtained to the camera 17 of embedded device by analyzing the reflected light received on optical detection dot matrix in camera
Go out the spectral information of reflected light, and by the information comparison of the spectral information of reflected light and database, obtains and waited in detection chip
The information of detectable substance, and finally show on the screen.
Refering to fig. 1, the SPR detection chips 10 mainly by substrate 1, nano impression glue 2, chromium film 3 and golden film 4 from bottom to top
It is combined, several periodic nanometer holes, a diameter of 250nm in periodic nanometer hole is wherein opened up in golden film 4, the period is
500nm。
Referring to Fig.2, multigroup the utilization photoetching of SU-8 glue and PDMS (dimethyl silicone polymer) are arranged in the micro-fluidic chip 5
The mode of film forming makes microchannel, and the Loading channel and outflow that microchannel is mainly connected to by S-shaped microchannel 8 and both ends lead to
Road 9 is constituted, and wherein Loading channel includes the Loading channel A6 and sample-adding for adding solution to be detected and detection reagent respectively
Channel B7, Loading channel A6 and Loading channel B7 are distributed in Y shapes.
Refering to Fig. 3, the micro-fluidic chip 5 has the one side of microchannel and spr sensor chip 10 to have periodic nanometer
The one side in hole obtains the detection chip 13 that spr sensor chip and micro-fluidic chip are bonded to by silica-bound.
Refering to Fig. 4, the one end of the mechanical clamp 11 in the both ends of fixedly embedded formula equipment 16 is connected with detection core
Piece mounting cylinder, detection chip mounting cylinder towards the camera 17 of embedded device one end open, and opening inner side be fixedly mounted
(i.e. LED lamp bead annular arrangement is in the structure of an annular base plate, and LED lamp bead is pacified by detection chip for annular LED light emitting array 12
Battery powered built in fitted tube)；The side of the detection chip mounting cylinder opens up detection chip interface 15, detection chip grafting
Mouth 15 is arranged in parallel with annular LED light emitting array 12, and in order to be irradiated in detection chip, inspection is then completed in detection chip
After survey, in the camera 17 of the optical signal transmission of reflection to embedded device (such as Fig. 5), is analyzed, obtained to be checked by software
Survey the information of substance；Above-mentioned embedded device is our common smart mobile phones, by mechanical clamp by detection chip and intelligence
The camera of mobile phone is connected.
The detection chip 13 that the spr sensor chip and micro-fluidic chip are bonded to is placed on the card of transparent material manufacture
It in slot 14, and is inserted into detection chip interface 15, wherein micro-fluidic chip 5 is towards annular LED light emitting array 12.
The specific detection process of biomedical detecting system based on nano impression micro flow chip is：Solution to be detected and
Detection reagent, will after being reacted in S-shaped microchannel 8 respectively with syringe by Loading channel A6 and Loading channel B7 injections
The detection chip 13 that spr sensor chip and micro-fluidic chip are bonded to is fixed to the detection core of mechanical clamp 11 by card slot 14
In piece interface 15.Annular LED light emitting array 12 is placed below detection chip, then fixture is clipped to the camera of smart mobile phone
On 17, the fixation of a whole set of detecting system is completed.The light that annular LED light emitting array is sent out is irradiated to detection chip as incident light
On, after chip surface generates SPR effects, reflected light is incident on intelligence by the blank parts among annular LED light emitting array
On the camera of mobile phone.Camera receive reflected light after, as the APP analyzing processings built in smart mobile phone, and in database
Data comparison obtains the information of tested substance.Reacted solution is flowed out by flow pass 9.
The specific make step of the spr sensor chip 10 is as follows：
(1) substrate cleaning and drying：The silicon chip of a piece of single-sided polishing and drying are cleaned, in 135 DEG C of vacuum drying chamber
It places 2-4 hours；
(2) spin coating nano impression glue：It is added dropwise on suitable nano impression glue to the processed silicon wafer polishing face of step (1),
Silicon chip is placed in sol evenning machine, about 2000 revs/min of rotating speed is set, when be about 20-40 second, make to be applied on silicon chip imprints glue
Thickness is 200nm；
(3) nano impression：There is the impression block of nano graph to be pressed in step (2) spin coating good photoresist table surface
It is heated from room temperature, then pressurizes, coining glue is made to be filled the cavity of IPS templates, until reaching equilibrium state by face；
(4) reaction and plasma etches：The mold of gained in step (3) reaction and plasma etching method is removed into nano impression
Glue；
(5) deposition of metal：It is thick that one layer of 20nm is successively deposited on the substrate obtained by step (4) with electron beam evaporation plating instrument
The golden film of chromium film and 200nm thickness, you can obtain structure as shown in Figure 1.
The specific make step of the micro-fluidic chip is as follows：
(1) substrate cleaning and drying：It cleans a piece of silicon chip and dries up, 5-10 points are then kept on 180 DEG C of hot baking pan
Clock；
(2) spin coating SU-8 photoresists：It is added dropwise on 2100 photoresists of suitable SU-8 to step (1) processed silicon chip, then
It is placed in sol evenning machine, 1500 revs/min of rotating speed is set, and duration 30 seconds, it is 200nm to make the thickness of the SU-8 glue applied on silicon chip；
(3) front baking：By the substrate of the SU-8 glue of spin coating in step (2) be put into successively 35 DEG C, 65 DEG C, on 95 DEG C of hot baking pan
Drying, the duration is respectively 5-10 minutes, 5-10 minutes, 10-20 minutes；
(4) it exposes：Substrate after step (3) is dried is put into litho machine, covers mask plate simultaneously uv-exposure 3 minutes；
(5) it dries afterwards：Substrate after step (4) uv-exposure is dried afterwards immediately, is put into 35 DEG C, 65 DEG C, 95 DEG C of heat successively
It is respectively dried on baking pan 5 minutes, 5 minutes, 30 minutes；
(6) develop：The substrate that step (5) is dried to completion afterwards is put into developer solution 15-20 minutes, what removing was not photo-etched
Glue；
(7) PDMS reverse moulds：It after the PDMS prepared stirrings are stood, is dried in vacuo 2 minutes, is slowly cast in step (6) system
On the SU-8 microfluid sense channels got ready, kept for two hours for 65 DEG C after de-bubble, you can obtain structure as shown in Figure 2.
After preparing spr sensor chip and micro-fluidic chip, layer of silicon dioxide is applied on spr sensor chip surface,
Micro-fluidic chip prepared by PDMS is bonded to together by silica and spr sensor chip, forms detection chip.Gained
Structure is as shown in Figure 3.
The software module of embedded device uses graphic interface, convenient for the user to operate.Software systems include three parts：
Database part, wherein there being the information of a variety of substances to be detected.Database can be expanded, can according to actual demand,
The substance detected to needs is tested, and result is stored in database；Optical detection dot matrix (is taken the photograph in spectrum analysis part
As the optical sensor in head) on the reflected light that receives analyzed, obtain the spectral information of reflected light；Data analysis portion
Point, by the information comparison of the spectral information of reflected light and database, obtain the information of the object to be detected in detection chip, and shielding
It is shown on curtain.
Although the utility model is described in detail with reference to the foregoing embodiments, those skilled in the art is come
Say, still can with technical scheme described in the above embodiments is modified, or to which part technical characteristic into
Row equivalent replacement, within the spirit and principle of the utility model, any modification, equivalent replacement, improvement and so on should all
It is included within the scope of protection of this utility model.
Claims (4)
1. the biomedical detecting system based on nano impression micro flow chip, it is characterised in that:Including micro-fluidic chip (5), SPR
Sensor chip (10), mechanical clamp (11) and annular LED light emitting array (12), the spr sensor chip (10) mainly by
Substrate (1), nano impression glue (2), chromium film (3) and golden film (4) are combined from bottom to top, are wherein opened up in golden film (4) several
A periodic nanometer hole；In the micro-fluidic chip (5) setting it is multigroup by the photoetching of SU-8 glue and PDMS form a film in the way of make
Microchannel, the Loading channel and flow pass (9) that microchannel is mainly connected to by S-shaped microchannel (8) and both ends are constituted,
Middle Loading channel includes the Loading channel A (6) and Loading channel B (7) for adding solution to be detected and detection reagent respectively,
Loading channel A (6) and Loading channel B (7) is distributed in Y shapes；The micro-fluidic chip (5) has the one side of microchannel to be passed with SPR
Sensor chip (10) has the one side in periodic nanometer hole by silica-bound, obtains spr sensor chip and micro-fluidic core
The detection chip (13) that piece is bonded to；The detection chip (13) that the spr sensor chip and micro-fluidic chip are bonded to passes through
Mechanical clamp (11) connects embedded device (16).
2. the biomedical detecting system according to claim 1 based on nano impression micro flow chip, which is characterized in that institute
It states mechanical clamp (11) and is connected with detection chip mounting cylinder for one end in the both ends of fixedly embedded formula equipment (16), detect core
Piece mounting cylinder towards the camera (17) of embedded device one end open, and opening inner side be fixedly mounted annular LED light-emitting array
It arranges (12)；The side of the detection chip mounting cylinder opens up detection chip interface (15), detection chip interface (15) and ring
Shape LED light emitting arrays (12) are arranged in parallel；The detection chip (13) that the spr sensor chip and micro-fluidic chip are bonded to is put
It sets in the card slot (14) that transparent material manufactures, and is inserted into detection chip interface (15), wherein micro-fluidic chip (5) court
To annular LED light emitting array (12).
3. the biomedical detecting system according to claim 1 based on nano impression micro flow chip, which is characterized in that institute
The thickness for stating chromium film (3) is 20nm, and the thickness of golden film (4) is 200nm.
4. the biomedical detecting system according to claim 1 based on nano impression micro flow chip, which is characterized in that institute
State a diameter of 250nm in periodic nanometer hole, period 500nm.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107930712A (en) * | 2017-12-22 | 2018-04-20 | 厦门百恩芯科技有限公司 | Biomedical detecting system based on nano impression micro flow chip and preparation method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107930712A (en) * | 2017-12-22 | 2018-04-20 | 厦门百恩芯科技有限公司 | Biomedical detecting system based on nano impression micro flow chip and preparation method thereof |
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