CN102706835A - Sensing chip of dual-detecting biochemical sensing detector and preparation method thereof - Google Patents
Sensing chip of dual-detecting biochemical sensing detector and preparation method thereof Download PDFInfo
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- CN102706835A CN102706835A CN2012101521948A CN201210152194A CN102706835A CN 102706835 A CN102706835 A CN 102706835A CN 2012101521948 A CN2012101521948 A CN 2012101521948A CN 201210152194 A CN201210152194 A CN 201210152194A CN 102706835 A CN102706835 A CN 102706835A
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
- G01N21/552—Attenuated total reflection
- G01N21/553—Attenuated total reflection and using surface plasmons
- G01N21/554—Attenuated total reflection and using surface plasmons detecting the surface plasmon resonance of nanostructured metals, e.g. localised surface plasmon resonance
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
- G01N21/658—Raman scattering enhancement Raman, e.g. surface plasmons
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Abstract
The invention discloses a sensing chip of a dual-detecting biochemical sensing detector and a preparation method thereof. The sensing chip comprises a sensing chip unit arranged in a K*L array, wherein the sensing chip unit comprises a substrate and an upper slice bonded with the substrate together; an inlet, an outlet and a microcavity which are formed in the upper slice to form a micro-flow channel; and nano particles arranged in an m*n array, which are formed on the substrate and located in the microcavity, wherein m, n, K and L are natural number. The sensing chip provided by the invention is a multi-unit and multi-array structure and combined with a micro-flow control technology to integrate a micro-flow control optical sensing system. With the adoption of a nano processing technique with low cost, the sensing chip can be processed on a large area; furthermore, the sensing chip is good in repeatability, simple in preparation method and few in required samples; the sensing chip can observe in real time, perform the parallel test of multiple channels and parameters and the tests of in-situ surface enhanced raman scattering (SERS) and localized surface plasmon resonance (LSPR).
Description
Technical field
The invention belongs to the biochemical sensitive detection range, relate to a kind of SERS of integrated micro-fluidic optics--two sensing chips of surveying the biochemical sensitive detector of-local surface plasma resonance and preparation method thereof.
Background technology
Big quantity research shows that the optical characteristics of metal nanoparticle is that constituent, spacing, size, shape and the local dielectric environment of local surface plasma resonance LSPR frequency and metal nanoparticle has closely-related the contact.So, as a kind of spectral analysis technique that development potentiality is arranged, all be used widely in various aspects such as physics, chemistry, medical science, environmental monitoring, public safeties based on the local surface plasma sensing chip.The pattern of metal Nano structure, size, changes in spacing LSPR optics is belonged to and SERS SERS enhancement effect all influential.In LSPR sensing testing and SERS test, each precious metal nanostructured can be carried out special sensing detection or identification with the analyte structure, and these characteristics make it can miniaturization, the multiparameter sensing.Particularly in the process of surveying unimolecule and metal nanoparticle surface combination, the variation of LSPR spectrum and SERS " fingerprint " spectrum is important means.When unimolecule combined with the metal surface, the analysis of LSPR spectrum change can be controlled; And this moment, the detectable identification molecule of SERS also obtains the orientation of metal surface absorbing molecules.The chip of same nanometer plasma body structure adopts the optical detection means of LSPR and SERS simultaneously; And combine with microflow control technique and to have formed novel micro-fluidic optical sensing chip; This technology is for having expanded the application of standard LSPR or SERS; This sensing chip based on " two " plasma structure has very big attractive force in the biochemistry detection based on fluid sample, will accelerate the research and development and the application of micro-fluidic optical sensing chip.
Yet; The preparation of metal Nano structure substrate is the prerequisite that obtains SERS enhancing signal and LSPR transducing signal; For with SERS and LSPR as a kind of routine, online analysis tool, it is strong and homogeneity good, be easy to preparation and storage, characteristics such as easy to use that prepared metal guiding principle rice structure should have the enhancing ability.Simultaneously, microfluid and metal Nano structure sensing unit are integrated in one, can realize that required sample is few, real-time monitored, the test of hyperchannel, multiparameter concurrent testing, in-situ SERS and LSPR.Current, the metal Nano structure job operation mainly contains following several kinds: beamwriter lithography (EBL), FIB (FIB), nanosphere photoetching (NSL), chemosynthesis, nano impression, chemical self assembly, LB film package technique, orderly templated deposition method etc.Though beamwriter lithography and FIB have high resolving power, repeated advantages of higher, its processing cost is high, consuming time, is not easy big face preparation.People such as the Van Duyne of Northwestern Univ USA utilize the nanosphere photoetching to prepare the metal Nano structure array in different structure cycle, and utilize this metal Nano structure array to carry out a large amount of local surface plasma resonance LSPR sensings and SERS SERS detection study.The photoetching of experiment proof nanosphere has low cost, high production, repeated advantages of higher, but poor repeatability.The chemistry self-assembly method makes nano particle arrange on the solid substrate surface, forms at the bottom of the SERS active group.Asking in this type substrate between the nano particle apart from bigger, so the SERS effect of substrate is more limited, poor controllability.Nano-imprinting method is a kind of good method, though some reports are arranged, all in the processing metal nanostructured, and microflow control technique is not introduced.It is thus clear that metal Nano structure of the prior art can't satisfy these needs, be badly in need of a kind of new type of metal nanostructured.
Summary of the invention
In order to solve the deficiency in traditional single measuring technology LSPR or the SERS technology; Utilize local surface plasma resonance LSRP technology, microflow control technique and micro-nano process technology; Realize high sensitivity, exempt from the nano-array bio-chemical detector of mark, the present invention proposes the sensing chip of a kind of new type of metal nanostructured-two detection biochemical sensitive detectors.
One object of the present invention is to provide a kind of two sensing chip of surveying the biochemical sensitive detector.
Sensing chip of the present invention comprises the sensing chip unit of K*L display, and the sensing chip unit comprises: substrate and be bonded together with it last slice; Constitute import, outlet and the microcavity of microchannel in being formed on slice; Be formed on the substrate and be in the nano particle of the m*n array in the microcavity; Wherein, m, n, K and L are natural number.
The range of size of sensing chip unit is between tens microns to several microns.To between the hundreds of nanometer, the spacing range between the nano particle arrives between the hundreds of nanometer in tens nanometers the range of size of nano particle in tens nanometers.
Nano particle is precious metal particles such as gold or silver, is shaped as a kind of in sphere, elliposoidal, nano-seam and the nano-pore.The material of substrate is a kind of in the transparent materials such as K9 glass, quartz glass, dimethione PDMS, polymetylmethacrylate, polystyrene PS.Last slice material is dimethione PDMS or polymetylmethacrylate.
To between tens microlitres, its shape can be sphere or cube to the volume range of microcavity at several microlitres.The width range of microchannel is between 10 microns to 200 microns, and depth range is between 50 microns to 200 microns.
Another object of the present invention provides the preparation method of a kind of sensing chip unit.
The preparation method of a kind of sensing chip of the present invention unit may further comprise the steps:
1) transparent substrate is provided;
2) nano particle of formation m*n array on substrate, m and n are natural number;
3) with photoetching method processing last slice, form the microchannel that constitutes by import, outlet and microcavity within it;
4) be in the same place with substrate bonding last slice, form sensor chip unit.
The sensing chip unit of K*L display constitutes sensing chip.
Wherein, in step 2) in, form nano particle through methods such as beamwriter lithography, nano impression, chemosynthesis, electron beam evaporation, interference lithography, nanometer masks.
Sensor chip of the present invention is applied in two biochemical sensitive detectors of surveying, and can be implemented in the combination that realizes LSPR and SERS analytical technology in the same substrate.Two biochemical sensitive detector of surveying of the present invention comprises: light-source system, light path orthopedic systems, sensing chip, three-dimensional control system, surface-enhanced Raman SERS detection system, local surface plasma resonance LSPR detection system; And auto injection control system; Wherein, sensing chip is installed on the three-dimensional control system; The auto injection control system is to the sensing chip injected sample; By light-source system laser or white light source are provided; Impinge perpendicularly on sensing chip through the light path orthopedic systems; Get into the SERS detection system through the sensing chip laser light reflected, and carry out corresponding SERS data processing and analysis; Get into the LSPR detection system from the white light of sensing chip projection, and carry out corresponding LSPR data processing and analysis.
Sensor chip of the present invention can be connected with the auto injection control system, through the auto injection control system to the sensing chip injected sample.The auto injection control system comprises the above syringe pump of two-way, can parameter be set sequencing, thereby realizes sample is accurately controlled.
Sensing chip of the present invention adopts LSPR and two kinds of optical detection means of SERS simultaneously; And combine with microflow control technique and to have formed novel micro-fluidic optical sensing chip; This technology is for having expanded the application of traditional LSPR or SERS; This sensing chip based on the double plasma structure has very big attractive force in the biochemistry detection based on fluid sample, will accelerate the research and development and the application of micro-fluidic optical sensor-based system.Utilize two kinds of complement mode test sample of LSPR and SERS, in same substrate, realize the combination of LSPR and SERS analytical technology.
Advantage of the present invention:
Sensing chip of the present invention is multiple-unit, array structure, combines with microflow control technique, realizes the integrated of micro-fluidic optical sensor-based system.This sensing chip adopts nanofabrication technique cheaply, can realize large tracts of land processing; And favorable repeatability, preparation method are simple, can realize that required sample is few, real-time monitored, the test of hyperchannel, multiparameter concurrent testing, in-situ SERS and LSPR.
Description of drawings
Fig. 1 is the structural representation of sensing chip of the present invention;
Fig. 2 (a) to (e) prepares the process flow diagram of an embodiment of substrate for preparation in accordance with the present invention;
Fig. 3 (a) to (e) prepares the process flow diagram of last slice a embodiment for preparation in accordance with the present invention;
Fig. 4 is two structural representations of surveying the biochemical sensitive detector for sensing chip of the present invention is applied in;
Fig. 5 is the structural drawing of the nano particle that the employing nano impression processes in the embodiments of the invention;
Fig. 6 is the structural drawing of the mould of the microchannel of the SU-8 plastic structure that adopts in the embodiments of the invention.
Embodiment
Below in conjunction with accompanying drawing, specific embodiments of the invention is done further to describe in detail.
As shown in Figure 1, sensing chip of the present invention comprises the sensing chip unit of K*L display, and the sensing chip unit comprises: substrate 31 and be bonded together with it last slice 32; Be formed on 32 interior import, outlet 33 and a microcavity 34 that constitute microchannel; Be formed on the substrate and be in the nano particle 35 of the m*n array in the microcavity; Wherein, m, n, K and L are natural number.
As shown in Figure 4, two biochemical sensitive detectors of surveying of the present invention comprise: light-source system 1, light path orthopedic systems 2, sensing chip 3, three-dimensional control system 4, surface-enhanced Raman SERS detection system 5, local surface plasma resonance LSPR detection system 6; And auto injection control system 7; Wherein, sensing chip 3 is installed on the three-dimensional control system 4; Auto injection control system 7 is to sensing chip 3 injected sample; By light-source system 1 laser or white light source are provided; Impinge perpendicularly on sensing chip 3 through light path orthopedic systems 2; Get into SERS detection system 5 through sensing chip 3 laser light reflected, and carry out corresponding SERS data processing and analysis; Get into LSPR detection system 6 from the white light of sensing chip 3 transmissions, and carry out corresponding LSPR data processing and analysis.
The preparation method's of the sensing chip unit of sensing chip process flow diagram respectively as shown in Figures 2 and 3, the sensing chip unit comprise microchannel, nano particle 35, substrate 31 and be bonded together with it last slice 32.Utilize micro-nano process technology on different substrates, to process nano particle, utilize soft lithography in last, to process microchannel again, at last with substrate and last slice be integrated in one, form the sensing chip unit.
Through an embodiment, specify enforcement of the present invention below.
The method that the method for employing nano impression prepares the sensing chip unit may further comprise the steps:
1) provide piezoid as 31 ends of transparent lining;
2) nano particle 35 of formation m*n array on substrate:
A) after handling piezoid 31 totally, spin coating nano impression glue 02,120 degrees centigrade were dried by the fire 60 seconds down on hot plate,
Shown in Fig. 2 (a);
B) dimethione PDMS nano impression formboard 03 impression, and exposure, curing are shown in Fig. 2 (b);
C) peel off impression formboard 03, remove bed die, shown in Fig. 2 (c);
D) sputter precious metal is shown in Fig. 2 (d);
E) remove photoresist, form the nano particle 35 of m*n array, shown in Fig. 2 (e), m and n are natural number;
3) with photoetching method processing last slice, form the microchannel that constitutes by import, outlet and microcavity within it:
A), get rid of SU-8 glue, planarization, preceding baking in the silicon chip front through preceding, shown in Fig. 3 (a) at the SU-8 glue 06 of upper surface spin coating 80 micron thick of silicon 05;
B) photoetching, back baking, development, post bake, the mould of the microchannel of formation SU-8 plastic structure is shown in Fig. 3 (b);
C) coat release agent at the die surface of the microchannel of SU-8 plastic structure; The mixed that PDMS and its hardening agent are pressed 10:1; And fully stir; Remove the bubble among the PDMS with vacuum pump, bubble-free PDMS 07 is all watered on the mould of the microchannel of SU-8 plastic structure, and leave standstill planarization; In 80 degree baking ovens, toasted 30 minutes to 1 hour then, shown in Fig. 3 (c);
D) PDMS that solidifies is peeled off the silicon structure mould, and be cut into big or small identical with the substrate of sensing chip, and punching forms import and exports 33 on the microcavity 34 of corresponding microchannel, shown in Fig. 3 (d);
4) be in the same place with substrate bonding last slice, form sensor chip unit, shown in Fig. 3 (e).
Fig. 5 is the structural drawing of the nano particle that the employing nano impression processes in the present embodiment; Fig. 6 is the structural drawing of the mould of the microchannel of the SU-8 plastic structure that adopts in the present embodiment.
It should be noted that at last; The purpose of publicizing and implementing mode is to help further to understand the present invention; But it will be appreciated by those skilled in the art that: in the spirit and scope that do not break away from the present invention and appended claim, various replacements and to revise all be possible.Therefore, the present invention should not be limited to the disclosed content of embodiment, and the scope that the present invention requires to protect is as the criterion with the scope that claims define.
Claims (10)
1. a sensing chip is characterized in that, said sensing chip comprises the sensing chip unit of K*L display, and the sensing chip unit comprises: substrate (31) and last slice (32) that are bonded together with it; Be formed on the import, outlet (33) and the microcavity (34) that constitute microchannel in slice (32); Be formed on the substrate and be in the nano particle (35) of the m*n array in the microcavity; Wherein, m, n, K and L are natural number.
2. sensing chip as claimed in claim 1 is characterized in that, the range of size of said sensing chip unit is between tens microns to several microns.
3. sensing chip as claimed in claim 1 is characterized in that, between the hundreds of nanometer, the spacing range between the nano particle arrives between the hundreds of nanometer in tens nanometers the range of size of said nano particle in tens nanometers.
4. sensing chip as claimed in claim 1 is characterized in that said nano particle is precious metal particles such as gold or silver, is shaped as a kind of in sphere, elliposoidal, nano slit and the nano-pore.
5. sensing chip as claimed in claim 1 is characterized in that, the material of said substrate is a kind of in the transparent materials such as K9 glass, quartz glass, dimethione PDMS, polymetylmethacrylate, polystyrene PS.
6. sensing chip as claimed in claim 1 is characterized in that, said last slice material is dimethione PDMS or polymetylmethacrylate.
7. sensing chip as claimed in claim 1 is characterized in that, between tens microlitres, its shape can be sphere or cube to the volume range of said microcavity at several microlitres.
8. sensing chip as claimed in claim 7 is characterized in that, between 10 microns to 200 microns, depth range is between 50 microns to 200 microns at the width range of said microchannel.
9. the preparation method of a sensing chip unit is characterized in that, the preparation method of said sensing chip unit may further comprise the steps:
1) transparent substrate is provided;
2) nano particle of formation m*n array on substrate, m and n are natural number;
3) with photoetching method processing last slice, form the microchannel that constitutes by import, outlet and microcavity within it;
4) be in the same place with substrate bonding last slice, form sensor chip unit.
10. preparation method as claimed in claim 9 is characterized in that, in step 2) in, nano particle formed through methods such as beamwriter lithography, nano impression, chemosynthesis, electron beam evaporation, interference lithography, nanometer masks.
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Cited By (15)
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| CN102928909A (en) * | 2012-10-29 | 2013-02-13 | 浙江大学 | Surface plasmon-based phase retarder |
| CN103163104A (en) * | 2013-03-15 | 2013-06-19 | 中国科学院半导体研究所 | Periodic-array local plasma resonance sensor |
| CN103267742A (en) * | 2013-04-19 | 2013-08-28 | 中国科学院半导体研究所 | Structure of coupled local surface plasma and waveguide mode |
| CN104777161A (en) * | 2015-03-27 | 2015-07-15 | 北京大学 | Immobilized microcapsule detection array, and processing method and application thereof |
| WO2016101697A1 (en) * | 2014-12-26 | 2016-06-30 | 江苏物联网研究发展中心 | Microfluidics surface enhanced raman scattering transparent device structure and preparation method thereof |
| CN107478613A (en) * | 2017-08-02 | 2017-12-15 | 杭州晶百检测技术有限公司 | A kind of preparation method of a variety of drug testing chips based on SPR |
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| CN108700522A (en) * | 2017-12-27 | 2018-10-23 | 深圳达闼科技控股有限公司 | Method, apparatus, chip and detection device for substance detection |
| CN109939751A (en) * | 2017-12-21 | 2019-06-28 | 东莞东阳光科研发有限公司 | A kind of micro-fluidic chip of whole blood test, detection device and its detection method |
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| CN110244050A (en) * | 2019-06-11 | 2019-09-17 | 中央民族大学 | A kind of cell cracking original position optical sensing detection chip and its preparation and application |
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| CN111766222A (en) * | 2020-07-24 | 2020-10-13 | 江苏致微光电技术有限责任公司 | LSPR sensor based on flexible substrate and preparation method and application thereof |
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| CN114184597A (en) * | 2021-12-14 | 2022-03-15 | 西南交通大学 | Preparation method of microfluidic SERS chip based on scratch-induced selective etching |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1666099A (en) * | 2002-07-10 | 2005-09-07 | E2V技术英国有限公司 | Molecular detector arrangement |
| CN101627336A (en) * | 2007-03-22 | 2010-01-13 | E.I.内穆尔杜邦公司 | Method to form a pattern of functional material on a substrate using a stamp having a surface modifying material |
| KR20100015035A (en) * | 2008-08-04 | 2010-02-12 | 한양대학교 산학협력단 | A portable surface-enhanced raman scattering sensor integrated with a lab-on-a-chip for highly sensitive trace analysis |
| CN102411060A (en) * | 2011-12-06 | 2012-04-11 | 东南大学 | Microfluidic chip with high-aspect-ratio micro-fluidic channel and fabrication method thereof |
-
2012
- 2012-05-14 CN CN2012101521948A patent/CN102706835A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1666099A (en) * | 2002-07-10 | 2005-09-07 | E2V技术英国有限公司 | Molecular detector arrangement |
| CN101627336A (en) * | 2007-03-22 | 2010-01-13 | E.I.内穆尔杜邦公司 | Method to form a pattern of functional material on a substrate using a stamp having a surface modifying material |
| KR20100015035A (en) * | 2008-08-04 | 2010-02-12 | 한양대학교 산학협력단 | A portable surface-enhanced raman scattering sensor integrated with a lab-on-a-chip for highly sensitive trace analysis |
| CN102411060A (en) * | 2011-12-06 | 2012-04-11 | 东南大学 | Microfluidic chip with high-aspect-ratio micro-fluidic channel and fabrication method thereof |
Non-Patent Citations (1)
| Title |
|---|
| ZHAOXIN GENG,ET AL: "A route to apply Ag nanoparticle array integrated with microfluidic for surface enhanced Raman scattering", 《SENSORS AND ACTUATORS A: PHYSICAL》 * |
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| CN103163104A (en) * | 2013-03-15 | 2013-06-19 | 中国科学院半导体研究所 | Periodic-array local plasma resonance sensor |
| CN103267742A (en) * | 2013-04-19 | 2013-08-28 | 中国科学院半导体研究所 | Structure of coupled local surface plasma and waveguide mode |
| WO2016101697A1 (en) * | 2014-12-26 | 2016-06-30 | 江苏物联网研究发展中心 | Microfluidics surface enhanced raman scattering transparent device structure and preparation method thereof |
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| CN108496072A (en) * | 2016-04-22 | 2018-09-04 | 惠普发展公司，有限责任合伙企业 | SERS sensor devices with passivating film |
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| CN108700522A (en) * | 2017-12-27 | 2018-10-23 | 深圳达闼科技控股有限公司 | Method, apparatus, chip and detection device for substance detection |
| CN112334229A (en) * | 2018-06-14 | 2021-02-05 | 康宁股份有限公司 | Patterned microfluidic devices and methods of making the same |
| WO2020093802A1 (en) * | 2018-11-06 | 2020-05-14 | 京东方科技集团股份有限公司 | Microfluidic channel structure and manufacturing method thereof, and microfluidic detection device and detection method thereof |
| US11219894B2 (en) | 2018-11-06 | 2022-01-11 | Boe Technology Group Co., Ltd. | Microfluidic channel structure and fabrication method thereof, microfluidic detecting device and detecting method thereof |
| CN110057890A (en) * | 2019-03-26 | 2019-07-26 | 中国科学院苏州生物医学工程技术研究所 | A kind of hemostasis examination chip and electrochemical sensor |
| CN110057890B (en) * | 2019-03-26 | 2021-07-30 | 中国科学院苏州生物医学工程技术研究所 | Blood coagulation detection chip and electrochemical sensor |
| CN110244050A (en) * | 2019-06-11 | 2019-09-17 | 中央民族大学 | A kind of cell cracking original position optical sensing detection chip and its preparation and application |
| CN111766222A (en) * | 2020-07-24 | 2020-10-13 | 江苏致微光电技术有限责任公司 | LSPR sensor based on flexible substrate and preparation method and application thereof |
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| CN114184597A (en) * | 2021-12-14 | 2022-03-15 | 西南交通大学 | Preparation method of microfluidic SERS chip based on scratch-induced selective etching |
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