CN207719159U - A kind of silicon wafer cleaner silicon chip cleaning device - Google Patents
A kind of silicon wafer cleaner silicon chip cleaning device Download PDFInfo
- Publication number
- CN207719159U CN207719159U CN201820047155.4U CN201820047155U CN207719159U CN 207719159 U CN207719159 U CN 207719159U CN 201820047155 U CN201820047155 U CN 201820047155U CN 207719159 U CN207719159 U CN 207719159U
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Abstract
The utility model is related to a kind of silicon wafer cleaner silicon chip cleaning devices.Only static cleaning showers silicon chip at this stage, but all silicon chips can not be completely covered in static state, thus cleaning performance is not fine, slice, thin piece can be caused not wash clean, while causing the waste of water resource.The utility model is related to a kind of silicon wafer cleaner silicon chip cleaning devices, wherein：Flower basket rack is installed in cleaning sink, the gaily decorated basket is placed on flower basket rack, cleaning sink both sides are mounted on throwing holder, and cylinder fixed block is secured by bolts on throwing holder, cylinder is installed, cylinder is flexibly connected by straight pin with cylinder fixed block in cylinder fixed block.The present apparatus uses completely new Wafer Cleaning structure, and all silicon chips can not only be completely covered, additionally it is possible to which cleaning silicon chip evenly ensures the removal of the residue on silicon chip, saves water resource, cleaning efficiency higher.
Description
Technical field
The utility model is related to silicon wafer cleaner technical field, especially a kind of silicon wafer cleaner silicon chip cleaning device.
Background technology
In Wafer Cleaning field, the industrial common cleaning method to cleaning silicon chip has ultrasonic cleaning, is bubbled clear
It washes and cleaning showers, the technique of wherein cleaning showers is relatively simple, at this stage only static cleaning showers silicon chip, but quiet
All silicon chips can not be completely covered in the state of state, thus cleaning performance is not fine, slice, thin piece can be caused not wash clean, simultaneously
Cause the waste of water resource.
Utility model content
The purpose of this utility model is to provide a kind of silicon wafer cleaner silicon chip cleaning device, above-mentioned to overcome the shortcomings of,
Using completely new Wafer Cleaning structure, all silicon chips can not only be completely covered, additionally it is possible to which cleaning silicon chip evenly ensures silicon
Water resource, cleaning efficiency higher are saved in the removal of the residue of on piece.
To solve the above-mentioned problems, the utility model is achieved through the following technical solutions：
A kind of silicon wafer cleaner silicon chip cleaning device, including cleaning sink, flower basket rack, the gaily decorated basket, throwing holder, injection spray
Mouth, cylinder, spray fixed block, bearing block, torsion shaft, the first overturning link block, stepper motor, distant bar axis, connects cylinder fixed block
Fishplate bar, big bottom plate, first connecting rod axis, second connecting rod axis, the first jet pipe, connecting rod, platter, bearing, the second overturning link block, the
Three overturning link blocks, the second jet pipe；Wherein：Flower basket rack is installed in cleaning sink, the gaily decorated basket, cleaning sink are placed on flower basket rack
Both sides are mounted on throwing holder, and cylinder fixed block is secured by bolts on throwing holder, and gas is equipped in cylinder fixed block
Cylinder, cylinder are flexibly connected by straight pin with cylinder fixed block, and cylinder is flexibly connected by straight pin with the first overturning link block,
First overturning link block is fixed on torsion shaft, and two spray fixed blocks are secured by bolts on throwing holder, two sprays
Fixed block is located at the both sides of cylinder, sprays and is equipped with bearing block on fixed block, and bearing is equipped in bearing block, and torsion shaft both ends are logical
It crosses bearing to be flexibly connected with bearing block, torsion shaft both ends are equipped with connecting plate simultaneously, and two connecting plates are connect with big bottom plate, outsole
Stepper motor is installed, the output shaft in stepper motor passes through big bottom plate and distant bar axis coaxially connected, distant bar axis and first on plate
Pitman shaft is flexibly connected, and the first connecting rod axis other end is flexibly connected by straight pin with the second overturning link block, and the second overturning connects
It connects block to be installed on big bottom plate and be flexibly connected with big bottom plate, the second overturning link block is connected by straight pin and second connecting rod axis
It connects, the second connecting rod axis other end overturns link block with third by straight pin and is flexibly connected, and third overturning link block is installed on greatly
It is flexibly connected on bottom plate and with big bottom plate, the first jet pipe, the is separately installed in the second overturning link block, third overturning link block
Two jet pipes are mounted on a number of injection nozzle on the first jet pipe, the second jet pipe, two connecting rods are equipped on big bottom plate,
The connecting rod other end is connect with platter, the first jet pipe, the second jet pipe the other end be flexibly connected with platter by bearing.
A kind of silicon wafer cleaner silicon chip cleaning device, wherein：The bearing uses deep groove ball bearing.
A kind of silicon wafer cleaner silicon chip cleaning device, wherein：The connecting rod uses 3030 aluminium section bars.
The utility model has the advantage of：The completely new Wafer Cleaning structure of the present apparatus, can not only be completely covered all silicon
Piece, additionally it is possible to which cleaning silicon chip evenly ensures the removal of the residue on silicon chip, saves water resource, cleaning efficiency higher.
Description of the drawings
Fig. 1 is the overall structure diagram of the utility model.
Reference numeral：Cleaning sink 1, flower basket rack 2, the gaily decorated basket 3, throwing holder 4, injection nozzle 5, cylinder fixed block 6, cylinder
7, spray fixed block 8, bearing block 9, torsion shaft 10, first overturn link block 11, stepper motor 12, distant bar axis 13, connecting plate 14,
Big bottom plate 15, first connecting rod axis 16, second connecting rod axis 17, the first jet pipe 18, connecting rod 19, platter 20, bearing 21, second are overturn
Link block 22, third overturning link block 23, the second jet pipe 24.
Specific implementation mode
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
The every other embodiment obtained, shall fall within the protection scope of the present invention.
Embodiment 1, referring to Fig. 1, a kind of silicon wafer cleaner silicon chip cleaning device, including cleaning sink 1, flower basket rack 2,
The gaily decorated basket 3, throwing holder 4, injection nozzle 5, cylinder fixed block 6, cylinder 7, spray fixed block 8, bearing block 9, torsion shaft 10, first
Overturn link block 11, stepper motor 12, distant bar axis 13, connecting plate 14, big bottom plate 15, first connecting rod axis 16, second connecting rod axis 17,
First jet pipe 18, connecting rod 19, platter 20, bearing 21, second overturn link block 22, third overturning link block 23, the second jet pipe
24；Wherein：Flower basket rack 2 is installed in cleaning sink 1, the gaily decorated basket 3 is placed on flower basket rack 2,1 both sides of cleaning sink are mounted on throwing
Dynamic holder 4, cylinder fixed block 6 are secured by bolts on throwing holder 4, and cylinder 7 is equipped in cylinder fixed block 6, and cylinder 7 is logical
Straight pin to be crossed to be flexibly connected with cylinder fixed block 6, cylinder 7 is flexibly connected by straight pin with the first overturning link block 11, and first
Overturning link block 11 is fixed on torsion shaft 10, and two spray fixed blocks 8 are secured by bolts on throwing holder 4, two sprays
Leaching fixed block 8 is located at the both sides of cylinder 7, sprays and is equipped with bearing block 9 on fixed block 8, bearing 21 is equipped in bearing block 9, is turned over
10 both ends of shaft are flexibly connected by bearing 21 with bearing block 9, and 10 both ends of torsion shaft are equipped with connecting plate 14, two connections simultaneously
Plate 14 is connect with big bottom plate 15, and stepper motor 12 is equipped on big bottom plate 15, and the output shaft in stepper motor 12 passes through big bottom plate
15 is coaxially connected with distant bar axis 13, and distant bar axis 13 is flexibly connected with first connecting rod axis 16, and 16 other end of first connecting rod axis passes through circle
Pin is flexibly connected with the second overturning link block 22, and the second overturning link block 22 is installed on big bottom plate 15 and lives with big bottom plate 15
Dynamic connection, the second overturning link block 22 are connect by straight pin with second connecting rod axis 17, and 17 other end of second connecting rod axis passes through circle
Pin is flexibly connected with third overturning link block 23, and third overturning link block 23 is installed on big bottom plate 15 and lives with big bottom plate 15
Dynamic connection, the second overturning link block 22, third overturn in link block 23 and are separately installed with the first jet pipe 18, the second jet pipe 24, the
It is mounted on a number of injection nozzle 5 on one jet pipe 18, the second jet pipe 24, two connecting rods 19 are installed on big bottom plate 15,
19 other end of connecting rod is connect with platter 20, the first jet pipe 18, the second jet pipe 24 the other end pass through bearing 21 and platter
20 flexible connections.
Embodiment 2, a kind of silicon wafer cleaner silicon chip cleaning device, wherein：The bearing 21 uses deep groove ball bearing.Its
Remaining same embodiment 1.
Embodiment 3, a kind of silicon wafer cleaner silicon chip cleaning device, wherein：The connecting rod 19 uses 3030 aluminium section bars.Its
Remaining same embodiment 1.
Operation principle：
When needing to clean the silicon chip in the gaily decorated basket 3, start cylinder 7, the piston rod elongation in cylinder 7 drives the
One overturning link block 11 rotates up, and the first overturning link block 11 drives torsion shaft 10 to rotate, and torsion shaft 10 drives the first jet pipe
18, the second jet pipe 24 is rotated down, when the injection nozzle 5 on the first jet pipe 18, the second jet pipe 24 faces silicon chip, cylinder 7
Interior piston rod stops elongation, while the first jet pipe 18, the water inlet of the second jet pipe 24, starts stepper motor 12, stepper motor
12 drive distant bar axis 13 to rotate, and distant bar axis 13 is rotated by the driving of first connecting rod axis 16 second overturning link block 22, the second overturning
The rotation of link block 22 drives the rotation of the first jet pipe 18, the second overturning link block 22 to drive third overturning to connect by second connecting rod axis 17
The rotation of block 23 is connect, third overturns link block 23 and drives the rotation of the second jet pipe 24, and such first jet pipe 18, the second jet pipe 24 will be into
The synchronous swing of row, the water that injection nozzle 5 is gushed out will be penetrated with the state of both direction and cleaned on silicon chip.
Claims (3)
1. a kind of silicon wafer cleaner silicon chip cleaning device, including cleaning sink（1）, flower basket rack（2）, the gaily decorated basket（3）, throwing holder
（4）, injection nozzle（5）, cylinder fixed block（6）, cylinder（7）, spray fixed block（8）, bearing block（9）, torsion shaft（10）, first
Overturn link block（11）, stepper motor（12）, distant bar axis（13）, connecting plate（14）, big bottom plate（15）, first connecting rod axis（16）、
Second connecting rod axis（17）, the first jet pipe（18）, connecting rod（19）, platter（20）, bearing（21）, second overturning link block（22）、
Third overturns link block（23）, the second jet pipe（24）；It is characterized in that：Cleaning sink（1）Flower basket rack is inside installed（2）, the gaily decorated basket
Frame（2）On be placed with the gaily decorated basket（3）, cleaning sink（1）Both sides are mounted on throwing holder（4）, cylinder fixed block（6）Pass through bolt
It is fixed on throwing holder（4）On, cylinder fixed block（6）On cylinder is installed（7）, cylinder（7）It is fixed by straight pin and cylinder
Block（6）Flexible connection, cylinder（7）Pass through straight pin and the first overturning link block（11）Flexible connection, the first overturning link block
（11）It is fixed on torsion shaft（10）On, two spray fixed blocks（8）It is secured by bolts in throwing holder（4）On, two sprays
Fixed block（8）Positioned at cylinder（7）Both sides, spray fixed block（8）On bearing block is installed（9）, bearing block（9）Axis is inside installed
It holds（21）, torsion shaft（10）Both ends pass through bearing（21）With bearing block（9）Flexible connection, torsion shaft（10）Both ends are equipped with simultaneously
Connecting plate（14）, two connecting plates（14）With big bottom plate（15）Connection, big bottom plate（15）On stepper motor is installed（12）, stepping
Motor（12）Interior output shaft passes through big bottom plate（15）With distant bar axis（13）It is coaxially connected, distant bar axis（13）With first connecting rod axis
（16）Flexible connection, first connecting rod axis（16）The other end passes through straight pin and the second overturning link block（22）Flexible connection, second
Overturn link block（22）It is installed on big bottom plate（15）It is upper and with big bottom plate（15）Flexible connection, the second overturning link block（22）Pass through
Straight pin and second connecting rod axis（17）Connection, second connecting rod axis（17）The other end overturns link block by straight pin and third（23）
Flexible connection, third overturn link block（23）It is installed on big bottom plate（15）It is upper and with big bottom plate（15）Flexible connection, the second overturning
Link block（22）, third overturn link block（23）Inside it is separately installed with the first jet pipe（18）, the second jet pipe（24）, the first jet pipe
（18）, the second jet pipe（24）On be mounted on a number of injection nozzle（5）, big bottom plate（15）On two connecting rods are installed
（19）, connecting rod（19）The other end and platter（20）Connection, the first jet pipe（18）, the second jet pipe（24）The other end pass through axis
It holds（21）With platter（20）Flexible connection.
2. a kind of silicon wafer cleaner silicon chip cleaning device according to claim 1, it is characterised in that：The bearing（21）
Using deep groove ball bearing.
3. a kind of silicon wafer cleaner silicon chip cleaning device according to claim 1, it is characterised in that：The connecting rod（19）
Using 3030 aluminium section bars.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820047155.4U CN207719159U (en) | 2018-01-12 | 2018-01-12 | A kind of silicon wafer cleaner silicon chip cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820047155.4U CN207719159U (en) | 2018-01-12 | 2018-01-12 | A kind of silicon wafer cleaner silicon chip cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207719159U true CN207719159U (en) | 2018-08-10 |
Family
ID=63051532
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820047155.4U Expired - Fee Related CN207719159U (en) | 2018-01-12 | 2018-01-12 | A kind of silicon wafer cleaner silicon chip cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207719159U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021227478A1 (en) * | 2020-05-09 | 2021-11-18 | 苏州晶洲装备科技有限公司 | Photovoltaic trough machine and compatible design method for photovoltaic trough machine |
-
2018
- 2018-01-12 CN CN201820047155.4U patent/CN207719159U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021227478A1 (en) * | 2020-05-09 | 2021-11-18 | 苏州晶洲装备科技有限公司 | Photovoltaic trough machine and compatible design method for photovoltaic trough machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180810 Termination date: 20200112 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |