CN205735589U - A kind of cleaning machine pendulous device - Google Patents
A kind of cleaning machine pendulous device Download PDFInfo
- Publication number
- CN205735589U CN205735589U CN201620634251.XU CN201620634251U CN205735589U CN 205735589 U CN205735589 U CN 205735589U CN 201620634251 U CN201620634251 U CN 201620634251U CN 205735589 U CN205735589 U CN 205735589U
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- CN
- China
- Prior art keywords
- connecting rod
- support
- rinse bath
- hanging basket
- utility
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- 238000004140 cleaning Methods 0.000 title claims abstract description 26
- 230000000875 corresponding Effects 0.000 claims abstract description 4
- 238000010276 construction Methods 0.000 abstract description 3
- 239000007921 spray Substances 0.000 description 16
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 15
- 229910052710 silicon Inorganic materials 0.000 description 15
- 239000010703 silicon Substances 0.000 description 15
- 210000004027 cells Anatomy 0.000 description 5
- 238000005520 cutting process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000000725 suspension Substances 0.000 description 4
- 210000002421 Cell Wall Anatomy 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000002604 ultrasonography Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000008187 granular material Substances 0.000 description 2
- 239000011435 rock Substances 0.000 description 2
- 230000003068 static Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 241000826860 Trapezium Species 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006011 modification reaction Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 201000009442 piebaldism Diseases 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Abstract
This utility model relates to a kind of cleaning machine pendulous device, including motor, eccentric, rinse bath, first support, second support, head rod, second connecting rod and the 3rd connecting rod, first support and the second support are separately positioned on rinse bath both sides, motor is arranged on outside rinse bath, and motor and the first support are positioned at rinse bath homonymy, eccentric is arranged on motor, and head rod is installed on eccentric, head rod is vertically arranged, and head rod end is fixed with the second connecting rod, 3rd connecting rod one end is arranged on the first support and is connected with the second connecting rod, the other end is arranged on the secondary support bracket, it is provided with multiple hanging basket in 3rd connecting rod, hanging basket is corresponding with rinse bath, this utility model simple in construction, easy to operate, and improve Wafer Cleaning quality.
Description
Technical field
This utility model relates to silicon chip processing unit (plant) technical field, particularly relates to a kind of cleaning machine pendulous device.
Background technology
It is known that the basis of modern information technologies and modern electronic technology is semiconductor technology, and semiconductor silicon is
Important semi-conducting material.Multi-line cutting machine has high production efficiency and piece rate with it, is widely used in major diameter and surpasses
The cutting field of thin silicon wafer.Multi-line cutting machine is after completing silicon chip cutting, and silicon chip must be carried out making silicon chip take off with glass plate
From entering next flow process, silicon chip and glass plate depart from this process to be carried out in prerinse degumming machine, existing skill
In art, it is common that be carried out by ultrasound wave, but the sheet hurdle being placed in rinse bath due to silicon chip is static, granule on sheet
Ultrasound wave is peeled off can not reach requirement, when artificially swinging up and down sheet hurdle, can improve, but efficiency is the lowest.
The patent of Authorization Notice No. CN 203854109 U: the spray groove of a kind of silicon rod slicing prerinse degumming machine, including
Cell body, cell body is internal is vallecular cavity, is vertically arranged with bracket in vallecular cavity, and bracket both sides are parallel to bracket and are provided with spray bar, spray
Bar is connected with the outlet of the water pump rinse-system of described prerinse degumming machine, it is characterised in that also include pendulous device, described
Pendulous device connects spray bar, and described spray bar can be rotatable around its axis, and described pendulous device drives described spray bar to turn round
Dynamic make the spray of uniform fluid flow on monocrystalline silicon piece, described spray bar under the driving of pendulous device from the horizontal by-45 °
～in the range of+45 °, carrying out back rotation, described spray bar is fixed on the cell wall in described spray groove cell body front by rotating shaft, turns
One end of axle is connected with described pendulous device after passing the cell wall in described spray groove cell body front, and described pendulous device includes electricity
Machine, eccentric, two pull bars and two swing arms, described eccentric is fixed on the output shaft of motor, eccentric has one convex
Axle, said two swing arm is separately fixed on the exposed junction of the cell wall that described rotating shaft passes described spray groove cell body front, described
Two pull bars are flexibly connected described protruding shaft and said two swing arm, this spray angles passing through constantly to adjust spray bar of this patent,
Make spray groove preferably silicon chip to be rinsed, prevent silicon chip from the problems such as oxidation, piebaldism occurring in follow-up flow process, moreover it is possible to
Effectively save spray-water, improve spray efficiency, but this patent structure is complicated, and cleaning efficiency is the lowest.
Utility model content
The purpose of this utility model is to provide a kind of cleaning machine pendulous device, solves in prior art and cleans device excessively
Complexity, on silicon chip, granule ultrasound wave peels off the technical problem not reaching requirement；
The technical scheme that this utility model solves above-mentioned technical problem is as follows:
A kind of cleaning machine pendulous device, including motor, eccentric, rinse bath, the first support, the second support, the first connection
Bar, the second connecting rod and the 3rd connecting rod, described first support and the second support are separately positioned on rinse bath both sides, described motor
Being arranged on outside rinse bath, and motor and the first support are positioned at rinse bath homonymy, described eccentric is arranged on motor, and eccentric
Being provided with head rod on wheel, described head rod is vertically arranged, and head rod end is fixed with the second connecting rod,
Described 3rd connecting rod one end is arranged on the first support and is connected with the second connecting rod, and the other end is arranged on the secondary support bracket,
Being provided with multiple hanging basket in described 3rd connecting rod, described hanging basket is corresponding with rinse bath；By driven by motor head rod,
Second connects and the motion of the 3rd connecting rod, thus realizes rocking of hanging basket.
On the basis of technique scheme, this utility model can also do and improve as follows:
Further, described 3rd connecting rod is vertical with the plane that head rod, the second connecting rod are formed；
Further, described first support, the second support are trapezoidal, use this step to provide the benefit that by the first support and
Second support ensure that stablizing of this utility model structure.
Further, being provided with bearing block in the middle part of described rinse bath, described bearing block is provided with bearing, the described 3rd connects
Bar passes described bearing, uses this step to provide the benefit that by bearing and the 3rd connecting rod can be facilitated to rotate, and will not send out
Raw mobile.
Further, described second connecting rod is provided with hook, is provided with described hanging basket below described hook, uses this step
Providing the benefit that facilitates hanging basket to rock by suspension hook, it is achieved ultrasonic waves for cleaning, improves product quality.
Further, described hanging basket is at least three, uses this step to provide the benefit that by multiple hanging baskets and realizes the most clearly
Wash.
This utility model is to facilitate product to carry out ultrasonic waves for cleaning, because being static when of cleaning, and such product matter
Measuring bad, impact uses；
This utility model includes motor and eccentric, is arranged on motor by eccentric, utilize motor as drive power,
Band movable eccentric wheel rotates；
This utility model is provided with head rod on eccentric, the characteristic rotated by eccentric, drives first even
Extension bar moves up and down；
This utility model also includes the second connecting rod, and head rod moves up and down, and just can drive the upper of the second connecting rod
Lower motion；
This utility model also includes that the 3rd connecting rod, the 3rd connecting rod are connected with the second connecting rod, and the 3rd connecting rod
On being separately mounted on first support volume the second support, now the second connecting rod moves up and down, and will drive the 3rd connecting rod
Rotation, in order to ensure stablizing of this utility model structure, can be at the connection end of the 3rd connecting rod and the second connecting rod, peace
Equipped with a bearing block and bearing, it is ensured that the direction of motion of the 3rd connecting rod；
This utility model is provided with rinse bath and hanging basket, and wherein hanging basket is mounted in the 3rd connecting rod, and hanging basket with
Rinse bath is corresponding, the rotation of such 3rd connecting rod, it becomes possible to drives rocking of hanging basket, thus improves the cleaning effect of silicon chip
Rate；
This utility model is provided with bearing block and bearing in the middle part of rinse bath, and the 3rd connecting rod is through described bearing,
This makes it possible to guarantee the stability of the 3rd connecting rod motion；
First support, the second support Design are trapezoidal by this utility model, utilize trapezoidal, it is ensured that stablizing of structure；
This utility model is provided with hook in the second connecting rod, lays hanging basket by hook, so facilitates hanging basket
Rock, it is achieved ultrasonic waves for cleaning, improve product quality；
Hanging basket in this utility model is at least three, so can improve work efficiency.
The beneficial effects of the utility model:
1. this utility model passes through driven by motor wobbler action, thus realizes the upper of head rod and the second connecting rod
Lower motion, thus realize the rotation of the 3rd connecting rod, thus realize rocking of hanging basket, it is achieved the ultrasonic waves for cleaning of product；
2. this utility model lays hanging basket by suspension hook, is so easy to workman and takes and put hanging basket, improves work efficiency；
3. this utility model is provided with bearing block and bearing, it is ensured that the stability of the 3rd connecting rod motion, Bu Huifa
Raw skew；
First support the most of the present utility model, the second support are trapezoidal, so may insure that the steady of this utility model structure
Qualitative；
5. in this utility model, hanging basket has multiple, so can be carried out multiple silicon chips simultaneously, and working (machining) efficiency is high；
6. this utility model simple in construction, easy to operate, and working (machining) efficiency is high.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of cleaning machine pendulous device described in this utility model specific embodiment；
Fig. 2 is the component structural schematic diagram of a kind of cleaning machine pendulous device described in this utility model specific embodiment；
In accompanying drawing, the list of parts representated by each label is as follows:
1, motor；
2, eccentric；
3, rinse bath；
4, the first support；
5, the second support；
6, head rod；
7, the second connecting rod；
8, the 3rd connecting rod；
9, hanging basket；
10, bearing block；
11, bearing.
Detailed description of the invention
Being described principle of the present utility model and feature below in conjunction with accompanying drawing, example is served only for explaining this practicality
Novel, it is not intended to limit scope of the present utility model.
This utility model passes through driven by motor wobbler action, thus realizes the upper and lower of head rod and the second connecting rod
Motion, thus realize the rotation of the 3rd connecting rod, thus realize rocking of hanging basket, it is achieved the ultrasonic waves for cleaning of product；This practicality
Novel lay hanging basket by suspension hook, be so easy to workman and take and put hanging basket, improve work efficiency；This utility model is provided with
Bearing block and bearing, it is ensured that the stability of the 3rd connecting rod motion, will not offset；First of the present utility model
Frame, the second support are trapezoidal, so may insure that the stability of this utility model structure；In this utility model, hanging basket has multiple,
So can be carried out multiple silicon chips, working (machining) efficiency is high simultaneously；This utility model simple in construction, easy to operate, and processing
Efficiency is high.
Embodiment:
A kind of cleaning machine pendulous device as shown in Figure 1, including motor 1 and eccentric 2, wherein eccentric 2 is mounted in
On motor 1, the rotation of eccentric 2 can be realized by motor 1；
As it is shown in figure 1, it also includes rinse bath the 3, first support 4 and the second support 5, wherein, the first support 4 and second
Frame 5 is to lay respectively at rinse bath 3 both sides, and described motor 1 is arranged on outside rinse bath 3, and motor 1 and the first support 4 are positioned at clearly
Washing trough 3 homonymy, is so easy to the stability of this utility model structure；
As it is shown in figure 1, it also includes head rod the 6, second connecting rod 7 and the 3rd connecting rod 8, on described eccentric 2
Being provided with head rod 6, described head rod 6 is vertically arranged, and head rod 6 end is fixed with the second connecting rod 7,
In use, utilize eccentric 2 to drive head rod 6 to move, thus drive the second connecting rod 7 to move up and down；
As it is shown in figure 1, described 3rd connecting rod 8 one end is arranged on the first support 4 and is connected, separately with the second connecting rod 7
One end is arranged on the second support 5, and described 3rd connecting rod 8 is provided with multiple hanging basket 9, and described hanging basket 9 is relative with rinse bath 3
Should, in use, by the first support 4 and the second support 5, it is ensured that the stability of the 3rd connecting rod 8, the second connecting rod 7
During up and down motion, can drive the rotation of the 3rd connecting rod 8, thus realize rocking of hanging basket 9, this utility model can also be by
The connection end of two connecting rods 7 and the 3rd connecting rod 8 is provided with bearing and bearing block, and convenient realization rotates；
As it is shown in figure 1, described 3rd connecting rod 8 is vertical, so with the plane that head rod the 6, second connecting rod 7 is formed
The 3rd connecting rod 8 is facilitated to rotate；
As in figure 2 it is shown, described first support the 4, second support 5 is trapezoidal, in use, trapezium structure is utilized to can ensure that
Stablizing of this utility model structure.
As it is shown in figure 1, be provided with bearing block 10 in the middle part of described rinse bath 3, described bearing block 10 is provided with bearing 11, institute
State the 3rd connecting rod 8 and pass described bearing 11, in use, the 3rd connecting rod 8 can be facilitated to rotate by bearing 11, and not
Can be moved.
As it is shown in figure 1, be provided with hook 12 in described second connecting rod 7, below described hook 12, it is provided with described hanging basket
9, in use, facilitated the taking and placing of hanging basket 9 by suspension hook, it is achieved ultrasonic waves for cleaning, improve product quality.
As it is shown in figure 1, described hanging basket 9 at least three, multiple hanging baskets realize cleaning simultaneously, improve efficiency.
The foregoing is only preferred embodiment of the present utility model, not in order to limit this utility model, all in this practicality
Within novel spirit and principle, any modification, equivalent substitution and improvement etc. made, should be included in guarantor of the present utility model
Within the scope of protecting.
Claims (6)
1. a cleaning machine pendulous device, it is characterised in that include motor, eccentric, rinse bath, the first support, the second support,
Head rod, the second connecting rod and the 3rd connecting rod, described first support and the second support be separately positioned on rinse bath both sides,
Described motor is arranged on outside rinse bath, and motor and the first support are positioned at rinse bath homonymy, and described eccentric is arranged on motor
On, and head rod is installed on eccentric, described head rod is vertically arranged, and head rod end is fixed with
Two connecting rods, described 3rd connecting rod one end is arranged on the first support and is connected with the second connecting rod, and the other end is arranged on
On two supports, described 3rd connecting rod being provided with multiple hanging basket, described hanging basket is corresponding with rinse bath.
A kind of cleaning machine pendulous device the most according to claim 1, it is characterised in that described 3rd connecting rod is with first even
The plane that extension bar, the second connecting rod are formed is vertical.
A kind of cleaning machine pendulous device the most according to claim 2, it is characterised in that described first support, the second support
For trapezoidal.
A kind of cleaning machine pendulous device the most according to claim 3, it is characterised in that be provided with axle in the middle part of described rinse bath
Bearing, described bearing block is provided with bearing, and described 3rd connecting rod passes described bearing.
A kind of cleaning machine pendulous device the most according to claim 4, it is characterised in that be provided with in described second connecting rod
Hook, is provided with described hanging basket below described hook.
6. according to the arbitrary described a kind of cleaning machine pendulous device of claim 1-5, it is characterised in that described hanging basket is at least three
Individual.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620634251.XU CN205735589U (en) | 2016-06-23 | 2016-06-23 | A kind of cleaning machine pendulous device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620634251.XU CN205735589U (en) | 2016-06-23 | 2016-06-23 | A kind of cleaning machine pendulous device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205735589U true CN205735589U (en) | 2016-11-30 |
Family
ID=57384346
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620634251.XU Active CN205735589U (en) | 2016-06-23 | 2016-06-23 | A kind of cleaning machine pendulous device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205735589U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106799596A (en) * | 2017-02-17 | 2017-06-06 | 佛山市欧艺钢金属制品有限公司 | A kind of coiled material production equipment |
| CN113182306A (en) * | 2021-03-25 | 2021-07-30 | 华芯半导体研究院(北京)有限公司 | Chip cleaning device and cleaning method |
-
2016
- 2016-06-23 CN CN201620634251.XU patent/CN205735589U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106799596A (en) * | 2017-02-17 | 2017-06-06 | 佛山市欧艺钢金属制品有限公司 | A kind of coiled material production equipment |
| CN106799596B (en) * | 2017-02-17 | 2019-03-05 | 佛山市欧艺钢数控设备有限公司 | A kind of coiled material production equipment |
| CN113182306A (en) * | 2021-03-25 | 2021-07-30 | 华芯半导体研究院(北京)有限公司 | Chip cleaning device and cleaning method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |