CN209298077U - A kind of semiconductor grain piece flusher - Google Patents
A kind of semiconductor grain piece flusher Download PDFInfo
- Publication number
- CN209298077U CN209298077U CN201822271798.XU CN201822271798U CN209298077U CN 209298077 U CN209298077 U CN 209298077U CN 201822271798 U CN201822271798 U CN 201822271798U CN 209298077 U CN209298077 U CN 209298077U
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- China
- Prior art keywords
- cleaning storehouse
- rotatable platform
- rotating seat
- warehouse
- fixed
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Abstract
The utility model relates to a kind of semiconductor grain piece flushers, have rack；Cleaning storehouse is fixed in the rack；The cleaning storehouse includes warehouse and warehouse lid；The warehouse lid and warehouse cooperatively form the cleaning storehouse of sealing；The rotatable platform for driving it to rotate by driving motor is equipped in the cleaning storehouse；The edge of rotatable platform is equipped with the fixing clamp for fixing semiconductor crystal wafer；It is additionally provided in the cleaning storehouse for rinsing module and drying component；Outlet pipe is equipped in the cleaning storehouse；The rinsing module includes connection water inlet pipe and spray head corresponding with rotatable platform；The drying component includes connection air inlet pipe and gas blow pipe corresponding with rotatable platform.The utility model high degree of automation is good for the cleaning effect of semiconductor crystal wafer.
Description
Technical field
The utility model relates to the manufacturing equipment of semiconductor grain, in particular to a kind of semiconductor grain piece flusher.
Background technique
Need for semiconductor crystal wafer to be cut into an other device wafer or crystalline substance when production semiconductor subassembly or integrated circuit
Grain.In order to guarantee precision when cutting, need to carry out pad pasting to semiconductor crystal wafer, after dicing, semiconductor crystal wafer is in pad pasting
Viscosity under also ensure integrality.Semiconductor wafer surface after cutting can have certain clast.In order to guarantee semiconductor
The quality of crystal grain needs to clean the semiconductor crystal wafer after cutting.Traditional cleaning way is using flusher to rotation
Semiconductor crystal wafer in turning is rinsed, and passes through rotation drying.It is traditional but since pad pasting itself has certain viscosity
Cleaning way there are cleaning effects general, the low disadvantage of cleaning efficiency.
Utility model content
It is good that the purpose of the utility model is to provide a kind of flushing effects, and the high semiconductor grain piece of flush efficiency rinses dress
It sets.
Realizing the technical solution of the utility model aim is: the utility model has rack；It is fixed in the rack
Cleaning storehouse；The cleaning storehouse includes warehouse and warehouse lid；The warehouse lid and warehouse cooperatively form the cleaning storehouse of sealing；The cleaning storehouse
It is interior to be equipped with the rotatable platform for driving it to rotate by driving motor；The edge of rotatable platform is equipped with for fixing semiconductor crystal wafer
Fixing clamp；It is additionally provided in the cleaning storehouse for rinsing module and drying component；Outlet pipe is equipped in the cleaning storehouse；The punching
Washing component includes connection water inlet pipe and spray head corresponding with rotatable platform；The drying component include connection air inlet pipe and with rotation
The corresponding gas blow pipe of platform.
Catch basin is fixed in above-mentioned cleaning storehouse；The center of catch basin is arranged in the rotatable platform；The outlet pipe
It is connected to catch basin.
Above-mentioned rinsing module includes the first rotating seat rotated by motor driven；It is fixed on first rotating seat
Guide rod；Spray head is fixed on the guide rod；The drying component includes the second rotating seat rotated by motor driven；
Air inlet pipe is fixed on second rotating seat；The outlet side of air inlet pipe is communicated with the connection of the inlet end of gas blow pipe.
Above-mentioned first rotating seat and the second rotating seat are arranged at the outside of catch basin.
The utility model has the effect of positive: (1) the utility model can be half-and-half by rinsing module and drying component
Semiconductor wafer cleans cleaning automatically, and cleaning effect is good, and cleaning efficiency is high；
(2) the utility model can effectively be collected the water after cleaning, guarantee the clean and tidy of scene；
(3) rinsing module and drying component can further increase cleaning effect and clear with rotation work in the utility model
Wash efficiency.
Detailed description of the invention
In order to make the content of the utility model be easier to be clearly understood, below according to specific embodiment and combine attached
Figure, is described in further detail the utility model, wherein
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the top view of the utility model.
Specific embodiment
See that Fig. 1 and Fig. 2, the utility model have rack 1；Cleaning storehouse 2 is fixed in the rack 1；The cleaning storehouse 2
Including warehouse 21 and warehouse lid 22；The warehouse lid 22 cooperatively forms the cleaning storehouse 2 of sealing with warehouse 21；It is equipped in the cleaning storehouse 2
The rotatable platform 4 of its rotation is driven by driving motor 3；The edge of rotatable platform 4 is equipped with for fixing consolidating for semiconductor crystal wafer
Clamp 41；It is additionally provided in the cleaning storehouse 2 for rinsing module 5 and drying component 6；Outlet pipe 7 is equipped in the cleaning storehouse 2；
The rinsing module 5 include connection water inlet pipe and spray head 51 corresponding with rotatable platform 4, pass through motor driven rotate first
Rotating seat 52 and guide rod；Guide rod is fixed on first rotating seat 52；Spray head 51 is fixed on the guide rod；
The drying component 6 include connection air inlet pipe and gas blow pipe 61 corresponding with rotatable platform 4, rotated by motor driven the
Two rotating seats 62；Air inlet pipe is fixed on second rotating seat 62；The outlet side of air inlet pipe and the inlet end of gas blow pipe 61
Connection communicates.
Catch basin 8 is fixed in the cleaning storehouse 2；The center of catch basin 8 is arranged in the rotatable platform 4；It is described go out
Water pipe 7 is connected to catch basin 8.
First rotating seat 52 and the second rotating seat 62 are arranged at the outside of catch basin 8.
Particular embodiments described above has carried out into one the purpose of this utility model, technical scheme and beneficial effects
Step is described in detail, it should be understood that being not limited to this foregoing is merely specific embodiment of the utility model
Utility model, within the spirit and principle of the utility model, any modification, equivalent substitution, improvement and etc. done should all wrap
Containing being within the protection scope of the utility model.
Claims (4)
1. a kind of semiconductor grain piece flusher has rack (1)；Cleaning storehouse (2) are fixed on the rack (1)；Institute
Stating cleaning storehouse (2) includes warehouse (21) and warehouse lid (22)；The warehouse lid (22) and warehouse (21) cooperatively form the cleaning storehouse of sealing
(2)；It is characterized by: being equipped with the rotatable platform (4) for driving it to rotate by driving motor (3) in the cleaning storehouse (2)；Rotation
The edge of platform (4) is equipped with the fixing clamp (41) for fixing semiconductor crystal wafer；It is additionally provided in the cleaning storehouse (2) for rinsing
Component (5) and drying component (6)；Outlet pipe (7) are equipped in the cleaning storehouse (2)；The rinsing module (5) includes connection water inlet
Pipe and spray head corresponding with rotatable platform (4) (51)；The drying component (6) include connection air inlet pipe and with rotatable platform (4)
Corresponding gas blow pipe (61).
2. a kind of semiconductor grain piece flusher according to claim 1, it is characterised in that: in the cleaning storehouse (2)
It is fixed with catch basin (8)；Center of rotatable platform (4) setting in catch basin (8)；The outlet pipe (7) and catch basin
(8) it is connected to.
3. a kind of semiconductor grain piece flusher according to claim 2, it is characterised in that: the rinsing module (5)
Including the first rotating seat (52) rotated by motor driven；Guide rod is fixed on first rotating seat (52)；It is described
Spray head (51) are fixed on guide rod；Drying component (6) includes the second rotating seat (62) rotated by motor driven；
Air inlet pipe is fixed on second rotating seat (62)；The outlet side of air inlet pipe connect phase with the inlet end of gas blow pipe (61)
It is logical.
4. a kind of semiconductor grain piece flusher according to claim 3, it is characterised in that: first rotating seat
(52) and the second rotating seat (62) is arranged at the outsides of catch basin (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822271798.XU CN209298077U (en) | 2018-12-29 | 2018-12-29 | A kind of semiconductor grain piece flusher |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822271798.XU CN209298077U (en) | 2018-12-29 | 2018-12-29 | A kind of semiconductor grain piece flusher |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209298077U true CN209298077U (en) | 2019-08-23 |
Family
ID=67650226
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822271798.XU Active CN209298077U (en) | 2018-12-29 | 2018-12-29 | A kind of semiconductor grain piece flusher |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209298077U (en) |
-
2018
- 2018-12-29 CN CN201822271798.XU patent/CN209298077U/en active Active
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