CN207709000U - A kind of mixed acid supply system - Google Patents
A kind of mixed acid supply system Download PDFInfo
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- CN207709000U CN207709000U CN201721747233.3U CN201721747233U CN207709000U CN 207709000 U CN207709000 U CN 207709000U CN 201721747233 U CN201721747233 U CN 201721747233U CN 207709000 U CN207709000 U CN 207709000U
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- pipeline
- mixed acid
- supply system
- host buffer
- acid supply
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Abstract
The utility model provides a kind of mixed acid supply system, belong to semiconductor applications, mixed acid supply system includes reaction chamber and host buffer tank, the front end of reaction chamber is connected to by the first pipeline with the liquid outlet of host buffer pot bottom, the rear end of reaction chamber is connected to by the second pipeline with the liquid inlet of host buffer tank top, one end of third pipeline is located at the first test point for being preset in host buffer pot bottom, the other end and the first pipeline connection, on first densimeter third pipeline, the both ends of the 5th pipeline are located at second the second densimeter of pipeline connection on the 5th pipeline respectively.The beneficial effects of the utility model：It need not be manually placed into measurement module when replacing grinding pad, improve wafer back side dressing efficiency, improve the thickness measure efficiency of grinding pad.
Description
Technical field
The utility model is related to technical field of semiconductors more particularly to a kind of mixed acid supply systems.
Background technology
In wafer cleaning and etching process, the mixed acid of various various concentration proportionings can be used.For finished product mixed acid
Supply system, need to carry out high-precision control to the concentration of the active ingredient of mixed acid, to realize the highly stable of technique
Property.As shown in Figure 1, in current cleaning and etching machine, the supply system of finished product mixed acid is all to use host buffer tank 1
(buffer Tank) realizes balance of the mixed acid by the concentration before and after reaction chamber to the cycle of reaction chamber (chamber), and
By densimeter, (front-end and back-end of reaction chamber are connected to by chemical pipeline 2 with host buffer tank 1 respectively, in the front end of reaction chamber
Chemical pipeline 2 into reaction chamber is equipped with above-mentioned densimeter 5) detecting value supplements to feed back host buffer tank 1 according to parameter setting
The function of acid solution reaches the stabilization of process requirements mixed acid items concentration, and first time surge tank 3 and second of surge tank 4 be used for
Acid is mended into host buffer tank 1.
Currently, in the mixed acid supply system of cleaning and etching machine, every concentration is higher than by anti-in A point mixed acid
Every concentration in C point mixed acid is answered after chamber, the point part individual event concentration can be higher after B points supplement single acid solution, the acid solution of supplement
Rate is different and diffusion difference can cause arrival A point individual event concentration higher.
The frequency for mending acid be set according to the concentration of detecting A points, but the length and width difference of host buffer tank and
By the position difference of the point C points and detecting point A points of reaction chamber reflux host buffer tank, cause real in A point concentration and host buffer tank
Border concentration having time difference and concentration difference.For the etch process that concentration requirement is stringent, the mixed acid on the surface wafer (wafer) is dense
If degree mixes uneven and mending acid actually has delay to influence significantly the rate of etch of wafer surface position and new and old acid.Finally
The technology stability of product is caused to be deteriorated.
Utility model content
For problems of the prior art, the utility model provides a kind of mixed acid supply system.
The utility model adopts the following technical solution：
A kind of mixed acid supply system, the mixed acid supply system include the first pipeline, the second pipeline, third pipeline,
At least one 4th pipeline, reaction chamber, host buffer tank, at least one secondary surge tank and densimeter；
The front end of the reaction chamber is connected to by first pipeline with the liquid outlet of the host buffer pot bottom, described anti-
The rear end of chamber is answered to be connected to the liquid inlet of the host buffer tank top by second pipeline, the benefit of the host buffer tank top
Liquid mouth is connected to by the 4th pipeline with the supply opening at the top of the secondary surge tank, and each 4th pipeline corresponds to one respectively
Unique surge tank, is each respectively equipped with flow control valve on the 4th pipeline；
One end of the third pipeline, which is located at, is preset in the first test point of the host buffer pot bottom, the other end with it is described
First pipeline connection, first densimeter are arranged on the third pipeline；The mixed acid supply system further includes：
5th pipeline, the both ends of the 5th pipeline respectively with second pipeline connection；
Second densimeter, second densimeter are located on the 5th pipeline.
Preferably, the quantity of the 4th pipeline is two, and the host buffer tank passes through two the 4th pipelines and two
Supply opening connection at the top of a secondary surge tank.
Preferably, the mixed acid supply system further includes：
Stirring motor, the stirring motor are arranged in the bottom of the host buffer tank.
Preferably, the first test point A is located at the liquid outlet.
Preferably, the host buffer tank top is also preset with third test point C, and the third test point enters liquid described in
At mouthful, one first spacing is preset between first test point and the third test point.
Preferably, the host buffer pot bottom is also preset with the second test point B, and one end of the 4th pipeline is described in
Fluid infusion extends to second test point, and one second spacing is preset between first test point and second test point.
The beneficial effects of the utility model：Mixed acid is detected by installing densimeter additional respectively in reaction chamber front-end and back-end
By the concentration variation before and after reaction chamber, is adjusted for sour speed by flow control valve according to the variation of its concentration, mixed acid is made to pass through
Cross concentration before and after reaction chamber evenly, mixing velocity is faster；Meanwhile the acid solution supplemented in host buffer tank being made to be mixed with original rapidly
It closes acid solution to be uniformly mixed, avoids locally the excessively high phenomenon of single kind acid strength occurring, improve new and old mix acid liquor mixing
Stability of concentration afterwards, to improve the stability of product.
Description of the drawings
Fig. 1 is the structural schematic diagram of mixed acid supply system in the prior art；
Fig. 2 is the structural schematic diagram of mixed acid supply system in a kind of preferred embodiment of the utility model.
Specific implementation mode
It should be noted that in the absence of conflict, following technical proposals can be combined with each other between technical characteristic.
Specific embodiment of the present utility model is further described below in conjunction with the accompanying drawings：
As shown in Fig. 2, a kind of mixed acid supply system, the mixed acid supply system include the first pipeline, the second pipeline,
Third pipeline, at least one 4th pipeline, reaction chamber, host buffer tank, at least one secondary surge tank and densimeter；
The front end of the reaction chamber is connected to by first pipeline with the liquid outlet of the host buffer pot bottom, described anti-
The rear end of chamber is answered to be connected to the liquid inlet of the host buffer tank top by second pipeline, the benefit of the host buffer tank top
Liquid mouth is connected to by the 4th pipeline with the supply opening at the top of the secondary surge tank, and each 4th pipeline corresponds to one respectively
Unique surge tank, is each respectively equipped with flow control valve on the 4th pipeline；
One end of the third pipeline, which is located at, is preset in the first test point of the host buffer pot bottom, the other end with it is described
First pipeline connection, first densimeter are arranged on the third pipeline；It is characterized in that, the mixed acid supply system
Further include：
5th pipeline, the both ends of the 5th pipeline respectively with second pipeline connection；
Second densimeter, second densimeter are located on the 5th pipeline.
In the present embodiment, mixed acid is detected by reaction by installing densimeter additional respectively in reaction chamber front-end and back-end
Concentration variation before and after chamber makes mixed acid pass through reaction chamber by flow control valve adjustment according to the variation of its concentration for sour speed
Evenly, mixing velocity is faster for front and back concentration；Meanwhile keeping the acid solution supplemented in host buffer tank mixed with original mix acid liquor rapidly
It closes uniformly, avoids locally the excessively high phenomenon of single kind acid strength occurring, improve the mixed concentration of new and old mix acid liquor
Stability, to improve the stability of product.
In preferred embodiment, the quantity of the 4th pipeline is two, and the host buffer tank passes through two the described 4th
Pipeline is connected to the supply opening at the top of two secondary surge tanks.
In the present embodiment, the quantity of the 4th pipeline and time surge tank can be adjusted according to actual needs, as shown in the figure
A kind of embodiment only in practical application.
In preferred embodiment, the mixed acid supply system further includes：
Stirring motor, the stirring motor are arranged in the bottom of the host buffer tank.
In preferred embodiment, the first test point A is located at the liquid outlet.
In preferred embodiment, the host buffer tank top is also preset with third test point C, third test point C
At the liquid inlet, one first spacing is preset between the first test point A and the third test point C.
In preferred embodiment, the host buffer pot bottom is also preset with the second test point B, one end of the 4th pipeline
The second test point C is extended to by the fluid infusion, is preset between the first test point A and the second test point B
One second spacing.
In the present embodiment, on original chemicals supply line, chemical pipeline transformation is carried out, by reaction chamber
One concentration detecting point of installation on the pipeline of host buffer tank is returned afterwards, the second densimeter is installed additional in the concentration detecting point, by comparing A
Each individual event acid strength of point and C points, which changes, to be supplemented the frequency of acid solution controlling each individual event of host buffer tank and reaches in processing procedure to mixed
The sour accurate balance in particular range concentration is closed, by dense in reaction chamber front-end and back-end the first densimeter of installation and second respectively
Degree meter, to realize detecting of the mixed acid by the concentration variation before and after reaction chamber.
The stirring motor of an adjustable rotating speed is installed additional in host buffer pot bottom, and the concentration by comparing A points and C points changes
It the sour frequency of different benefit is set and controls the rotational frequency of host buffer pot bottom stirring motor, to realize individual event acid strength
Quick diffusion velocity in host buffer tank and uniform and melting concn balance.
By description and accompanying drawings, the exemplary embodiments of the specific structure of specific implementation mode are given, it is new based on this practicality
Type spirit, can also make other conversions.Although above-mentioned utility model proposes existing preferred embodiment, however, these contents
It is not intended as limiting to.
For a person skilled in the art, after reading above description, various changes and modifications undoubtedly will be evident.
Therefore, appended claims should regard whole variations and modifications of the true intention and range that cover the utility model as.
The range and content of any and all equivalences in Claims scope are all considered as still belonging to the intention and model of the utility model
In enclosing.
Claims (9)
1. a kind of mixed acid supply system, the mixed acid supply system includes the first pipeline, the second pipeline, third pipeline, extremely
Few 4th pipeline, reaction chamber, host buffer tank, at least one secondary surge tank and the first densimeter；
The front end of the reaction chamber is connected to by first pipeline with the liquid outlet of the host buffer pot bottom, the reaction chamber
Rear end be connected to the liquid inlet of the host buffer tank top by second pipeline, the fluid infusion of the host buffer tank top
It is connected to the supply opening at the top of the secondary surge tank by the 4th pipeline, it is unique that each 4th pipeline corresponds to one respectively
Secondary surge tank, be respectively equipped with flow control valve on each 4th pipeline；
One end of the third pipeline is located at the first test point for being preset in the host buffer pot bottom, the other end and described first
Pipeline connection, first densimeter are arranged on the third pipeline；It is characterized in that, the mixed acid supply system is also wrapped
It includes：
5th pipeline, the both ends of the 5th pipeline respectively with second pipeline connection；
Second densimeter, second densimeter are located on the 5th pipeline.
2. mixed acid supply system according to claim 1, which is characterized in that the quantity of the 4th pipeline is two,
The host buffer tank is connected to by two the 4th pipelines with the supply opening at the top of two secondary surge tanks.
3. mixed acid supply system according to claim 1, which is characterized in that the mixed acid supply system further includes：
Stirring motor, the stirring motor are arranged in the bottom of the host buffer tank.
4. mixed acid supply system according to claim 1, which is characterized in that first test point goes out liquid described in
At mouthful.
5. mixed acid supply system according to claim 4, which is characterized in that the host buffer tank top is also preset with
Three test points, the third test point are located at the liquid inlet, pre- between first test point and the third test point
If one first spacing.
6. mixed acid supply system according to claim 4, which is characterized in that the host buffer pot bottom is also preset with
One end of two test points, the 4th pipeline extends to second test point, first test point by the fluid infusion
One second spacing is preset between second test point.
7. mixed acid supply system according to claim 1, which is characterized in that first pipeline is equipped with the first liquid
Delivery pump.
8. mixed acid supply system according to claim 1, which is characterized in that be respectively equipped on each 4th pipeline
Second liquid delivery pump.
9. mixed acid supply system according to claim 1, which is characterized in that each secondary surge tank is dynamic by connecting
Force system, the dynamical system add supplement acid solution into each secondary surge tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721747233.3U CN207709000U (en) | 2017-12-14 | 2017-12-14 | A kind of mixed acid supply system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721747233.3U CN207709000U (en) | 2017-12-14 | 2017-12-14 | A kind of mixed acid supply system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207709000U true CN207709000U (en) | 2018-08-10 |
Family
ID=63055804
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721747233.3U Active CN207709000U (en) | 2017-12-14 | 2017-12-14 | A kind of mixed acid supply system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207709000U (en) |
-
2017
- 2017-12-14 CN CN201721747233.3U patent/CN207709000U/en active Active
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