CN101667608A - System and method for automatically and circularly complementing crystalline-silicon solar cell texture etch solution - Google Patents

System and method for automatically and circularly complementing crystalline-silicon solar cell texture etch solution Download PDF

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Publication number
CN101667608A
CN101667608A CN200910196690A CN200910196690A CN101667608A CN 101667608 A CN101667608 A CN 101667608A CN 200910196690 A CN200910196690 A CN 200910196690A CN 200910196690 A CN200910196690 A CN 200910196690A CN 101667608 A CN101667608 A CN 101667608A
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liquid
soup
liquid level
reserve tank
tank
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CN101667608B (en
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严俊
李敏
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Hongge semiconductor equipment (Shanghai) Co.,Ltd.
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Shanghai Xintong Semiconductor Equipment Co Ltd
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Abstract

The invention relates to a system and a method for automatically and circularly complementing a texture-etching solution of a crystalline-silicon solar cell. A liquid conveying pipeline (1) is connected with a liquid storage box (2); the liquid storage box (2), a pump (5), at least three reaction troughs (8) and the liquid storage box (2) are sequentially connected so as to form a circular loop; the liquid storage box (2) is connected with the reaction troughs (8) sequentially by the pump (5), a manual valve (6), an automatic valve (7) and a flow meter (9); the liquid storage box (2) and the reaction troughs (8) are internally provided with a heating system and a liquid level sensor (10); and the liquid storage box (2) is connected with a solution dosing box (11) by the manual valve (6) and the automatic valve (7). In the invention, all reaction troughs are connected by the liquid storage box to form one reaction trough with large volume, the influence of the reaction consumption and the reaction heat on the concentration and temperature of the solution is reduced, the uniformity of the solution is improved, and the changing rate of the concentration is effectively reduced when complementing the solution.

Description

The Automatic Cycle fluid infusion system and the method for crystal silicon solar cell sheet Woolen-making liquid
Technical field
The invention belongs to the crystal silicon solar cell sheet production technical field, particularly relate to a kind of Automatic Cycle fluid infusion system and method for crystal silicon solar cell sheet Woolen-making liquid.
Background technology
In the crystal silicon solar cell sheet production process, need to adopt the technology of making herbs into wool, its principle forms textured shape for utilizing mixed chemical soup and silicon chip to be reflected at silicon chip surface.Whether the concentration of mixed liquor and temperature evenly directly influence the effect of making herbs into wool, thereby influence the superiority-inferiority of battery sheet.
At present, keep Woolen-making liquid concentration and the uniform common method of temperature that following 2 kinds of modes are arranged:
1, bubbling+reactive tank heating+manually fluid infusion
2, circulation+reactive tank heating+manually fluid infusion in the groove
The mode of bubbling is by pipeline the high pressure clean gas evenly to be transported to cell body inside, utilizes gas flow to come agitated liquid, and mixed liquor is also flowed, thereby reaches the uniform purpose of concentration.
In the groove mode of circulation be by pump as power by the liquid flow in the reactive tank, the general at present mode that adopts reaction cell body inside to do circulation.
Find that in practice this dual mode is general to the concentration and the temperature homogeneity control effect of making herbs into wool mixed liquor, liquor strength is inequality between each cell body, can't realize the good control to automatic liquid supply, and automaticity is not high.
Summary of the invention
Technical problem to be solved by this invention provides a kind of concentration and temperature homogeneity that improves the making herbs into wool mixed liquor, improves process conditions, thereby improves the Automatic Cycle fluid infusion system and the method for the quality crystal silicon solar cell sheet Woolen-making liquid of battery sheet.
The technical solution adopted for the present invention to solve the technical problems is: the Automatic Cycle fluid infusion system that a kind of crystal silicon solar cell sheet Woolen-making liquid is provided, comprise infusion pipeline, liquid reserve tank and reactive tank, described infusion pipeline links to each other with liquid reserve tank, liquid reserve tank, pump, at least 3 reactive tanks, liquid reserve tank links to each other successively and forms circulation circuit, described liquid reserve tank passes through pump successively, manually-operated gate, automatic valve and flowmeter link to each other with reactive tank, all there are heating system and liquid level sensor in described liquid reserve tank and reactive tank inside, and described liquid reserve tank links to each other with the quantitative case of automatic valve and soup by manually-operated gate.
Automatic valve and flowmeter are arranged in the described infusion pipeline, and its number is corresponding with the soup kind in the liquid formula.
Described heating system comprises heater, temperature sensor and thermostat, and heater is a stainless steel, and the surface has corrosion resistance after treatment.
Described reactive tank material is stainless steel or PVDF or PP, cell body volume 100-120L, and groove inner liquid medicine control temperature is a value between 75-85 ℃, and groove internal heater power is 4KW, and reactive tank has low liquid level, two liquid level point of high liquid level.
Described liquid reserve tank material is stainless steel or PVDF or PP, tank-volumes 350-500L, case inner liquid medicine control temperature is a value or high 1-2 a ℃ between 75-85 ℃, case internal heater maximum power 80KW, liquid reserve tank are free liquid level, low liquid level, the low liquid level of work, the high liquid level of working, five liquid level point of high liquid level.
The quantitative box lumber matter of described soup is stainless steel or PVDF or PP, cell body volume 45L, and case inner liquid medicine temperature is a room temperature, quantitatively case has low liquid level, work liquid level, three liquid level point of high liquid level.
Described pump is big flow corrosion-and high-temp-resistant pump, and rate of discharge and lift satisfy the interior liquid of at least 3 reactive tanks of per minute displacement at least once; Described manually-operated gate and automatic valve are corrosion-and high-temp-resistant manual diaphragm valve and automatic diaphragm valve.
A kind of method of using the Automatic Cycle fluid infusion system of the described a kind of crystal silicon solar cell sheet Woolen-making liquid of claim 1 comprises the following steps:
(1) DIW and various soup inject according to soup preparation needs in system from infusion pipeline toward liquid reserve tank;
(2) open each valve in the circulation line, start pump work, soup by liquid reserve tank->pump->reactive tank->liquid reserve tank, form circulation circuit, realize liquid proportion, mixing and supply;
(3) whether flowmeter is monitored each reactive tank flow and is met the demands in the circulation line, guarantees that the reactive tank soup is even; During the normal circulation process, open the heater of reactive tank and liquid reserve tank,, utilize the process point of thermostat control reacting liquid temperature at needs with the reactant liquor heat temperature raising;
(4) after the reactive tank inner liquid medicine consumes, the soup in the quantitative slot is supplemented to reservoir, and the magnitude of recruitment of soup is equivalent to this soup loss amount in the groove, and the fluid infusion frequency is by the time or by batch controlling.
Beneficial effect
One, liquor strength good uniformity: each reactive tank liquor strength is all identical in this method, the high conformity after the crystal silicon solar cell sheet making herbs into wool;
Two, soup fluid infusion change rate of concentration is low: this method herb liquid total measurement (volume) is 6-8 a times of single reactive tank volume, and when replenishing the soup of same volume, the change rate of concentration of this method is the 1/6-1/8 of existing liquid replenishing method;
Three, the fluid temperature rate of change is low: this method herb liquid total measurement (volume) is 2-3 a times of reactive tank total measurement (volume), produces the influence of reaction heat to fluid temperature in same period, and the rate of temperature change of this method is the 1/2-1/3 of existing liquid replenishing method;
Four, automaticity height: add the automatic liquid supply function in this method, replenish soup automatically as required at regular time and quantity, enhance productivity.
Description of drawings
Fig. 1 is a structural scheme of mechanism of the present invention.
Embodiment
Below in conjunction with specific embodiment, further set forth the present invention.Should be understood that these embodiment only to be used to the present invention is described and be not used in and limit the scope of the invention.Should be understood that in addition those skilled in the art can make various changes or modifications the present invention after the content of having read the present invention's instruction, these equivalent form of values fall within the application's appended claims institute restricted portion equally.
As shown in Figure 1, system's chief component of the inventive method has: reactive tank 8, liquid reserve tank 2, the quantitative case 11 of soup, pump 5, valve, heating system, flowmeter 9, liquid level gauge 10 and pipe-line system.Described reactive tank 8 materials are stainless steel or PVDF or PP, cell body volume 100-120L, groove inner liquid medicine control temperature be between 75-85 ℃ certain a bit, groove internal heater power is 4KW, reactive tank 8 has low liquid level, two liquid level point of high liquid level; Described liquid reserve tank 2 materials are consistent with reactive tank, tank-volumes 350-500L, satisfy a plurality of reactive tanks of disposable supply simultaneously, case inner liquid medicine control temperature is consistent with reactive tank or high 1-2 ℃, case internal heater maximum power 80KW, liquid reserve tank 2 are free liquid level, low liquid level, the low liquid level of work, the high liquid level of working, five liquid level point of high liquid level; Described quantitative case 11 materials are consistent with reactive tank, and cell body volume 45L satisfies the maximum desired volume of single fluid infusion, and case inner liquid medicine temperature is a room temperature, and quantitatively case has low liquid level, work liquid level, three liquid level point of high liquid level; Described pump 5 is big flow corrosion-and high-temp-resistant pump, and rate of discharge and lift satisfy per minute and replace the interior liquid of a plurality of reactive tanks at least once; Described valve is corrosion-and high-temp-resistant manual diaphragm valve and automatic diaphragm valve; Described heating system comprises heater, temperature sensor and thermostat, and heater is a stainless steel, and the surface is through special processing, has the corrosion resistance characteristic, temperature sensor is used to detect fluid temperature, and thermostat is used to control fluid temperature, satisfies 1 ℃ of temperature-controlled precision; The device whether described flowmeter 9 meets the demands for the signal piping flow has the input/output signal function; Whether normally described liquid level gauge 10 has the abnormal alarm function for detecting each cell body, casing liquid level device; Described pipe-line system is to satisfy the duct arrangement of soup circulation, automatic liquid supply function, and difference is adjusted accordingly according to demand.
A certain amount of DIW, 1# soup, 2# soup, 3# soup inject from infusion pipeline toward liquid reserve tank respectively according to soup preparation needs in system ... .., open each valve in the circulation line then, start pump work, soup by liquid reserve tank->pump->reactive tank->liquid reserve tank, form circulation circuit, realize liquid proportion, mixing, functions of physical supply.Whether flowmeter is monitored each reactive tank flow and is met the demands in the circulation line, guarantees that the reactive tank soup is even.During the normal circulation process, open the heater of reactive tank and liquid reserve tank,, utilize the process point of thermostat control reacting liquid temperature at needs with the reactant liquor heat temperature raising.After the reactive tank inner liquid medicine consumed, the soup in the quantitative slot was supplemented to reservoir, and the magnitude of recruitment of soup is equivalent to this soup loss amount in the groove, and the fluid infusion frequency is by the time or by batch controlling.
The present invention couples together each reactive tank by liquid reserve tank, be equivalent to form the reactive tank of a big volume, thereby reduce reaction consumes and reaction heating influence to liquor strength and fluid temperature, improve the uniformity of soup, and the rate of change of concentration when effectively having reduced fluid infusion, make the reaction consistency better.

Claims (8)

1. the Automatic Cycle fluid infusion system of a crystal silicon solar cell sheet Woolen-making liquid, comprise infusion pipeline (1), liquid reserve tank (2) and reactive tank (8), it is characterized in that: described infusion pipeline (1) links to each other with liquid reserve tank (2), liquid reserve tank (2), pump (5), at least 3 reactive tanks (8), liquid reserve tank (2) links to each other successively and forms circulation circuit, described liquid reserve tank (2) is successively by pump (5), manually-operated gate (6), automatic valve (7) and flowmeter (9) link to each other with reactive tank (8), described liquid reserve tank (2), all there are heating system and liquid level sensor (10) in reactive tank (8) and the quantitative case of soup (11) inside, and described liquid reserve tank (2) links to each other with the quantitative case of soup (11) with automatic valve (7) by manually-operated gate (6).
2. the Automatic Cycle fluid infusion system of a kind of crystal silicon solar cell sheet Woolen-making liquid according to claim 1, it is characterized in that: automatic valve (7) and flowmeter (9) are arranged in the described infusion pipeline (1), and its number is corresponding with the soup kind in the liquid formula.
3. the Automatic Cycle fluid infusion system of a kind of crystal silicon solar cell sheet Woolen-making liquid according to claim 1 is characterized in that: described heating system comprises heater (3), temperature sensor (4) and thermostat, and heater (3) is a stainless steel.
4. the Automatic Cycle fluid infusion system of a kind of crystal silicon solar cell sheet Woolen-making liquid according to claim 1, it is characterized in that: described reactive tank (8) material is stainless steel or PVDF or PP, cell body volume 100-120L, groove inner liquid medicine control temperature is a value between 75-85 ℃, groove internal heater maximum power 4KW, reactive tank has low liquid level, two liquid level point of high liquid level.
5. the Automatic Cycle fluid infusion system of a kind of crystal silicon solar cell sheet Woolen-making liquid according to claim 1, it is characterized in that: described liquid reserve tank (2) material is stainless steel or PVDF or PP, tank-volumes 350-500L, case inner liquid medicine control temperature is a value or high 1-2 a ℃ between 75-85 ℃, case internal heater maximum power 80KW, liquid reserve tank are free liquid level, low liquid level, the low liquid level of work, the high liquid level of working, five liquid level point of high liquid level.
6. the Automatic Cycle fluid infusion system of a kind of crystal silicon solar cell sheet Woolen-making liquid according to claim 1, it is characterized in that: the quantitative case of described soup (11) material is stainless steel or PVDF or PP, cell body volume 45L, case inner liquid medicine temperature is a room temperature, and quantitatively case has low liquid level, work liquid level, three liquid level point of high liquid level.
7. the Automatic Cycle fluid infusion system of a kind of crystal silicon solar cell sheet Woolen-making liquid according to claim 1, it is characterized in that: described pump (5) is big flow corrosion-and high-temp-resistant pump, and rate of discharge and lift satisfy the interior liquid of at least 3 reactive tanks of per minute displacement at least once; Described manually-operated gate and automatic valve are corrosion-and high-temp-resistant manual diaphragm valve and automatic diaphragm valve.
8. a method of using the Automatic Cycle fluid infusion system of the described a kind of crystal silicon solar cell sheet Woolen-making liquid of claim 1 comprises the following steps:
(1) DIW and various soup inject according to soup preparation needs in system from infusion pipeline toward liquid reserve tank;
(2) open each valve in the circulation line, start pump work, soup by liquid reserve tank->pump->reactive tank->liquid reserve tank, form circulation circuit, realize liquid proportion, mixing and supply;
(3) whether flowmeter is monitored each reactive tank flow and is met the demands in the circulation line, guarantees that the reactive tank soup is even; During the normal circulation process, open the heater of reactive tank and liquid reserve tank,, utilize thermostat control reacting liquid temperature to be controlled at the process point that needs the reactant liquor heat temperature raising;
(4) after the reactive tank inner liquid medicine consumes, the soup in the quantitative slot is supplemented to reservoir, and the magnitude of recruitment of soup is equivalent to this soup loss amount in the groove, and the fluid infusion frequency is by the time or by batch controlling.
CN2009101966901A 2009-09-29 2009-09-29 System and method for automatically and circularly complementing crystalline-silicon solar cell texture etch solution Active CN101667608B (en)

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Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102082202A (en) * 2010-11-29 2011-06-01 常州亿晶光电科技有限公司 Mechanically-agitating type liquid-replenishing device for wool-making groove
CN102082203A (en) * 2010-11-29 2011-06-01 常州亿晶光电科技有限公司 Bubbling and stirring type liquid-replenishing device with texturing tank
CN102082201A (en) * 2010-11-29 2011-06-01 常州亿晶光电科技有限公司 Isocyatic chemical reagent supplementing device
CN102569499A (en) * 2010-12-23 2012-07-11 无锡尚德太阳能电力有限公司 Etching system and etching method
CN102737732A (en) * 2011-04-06 2012-10-17 Smc株式会社 Cyclically liquid feeding apparatus
CN103838176A (en) * 2014-03-11 2014-06-04 苏州润阳光伏科技有限公司 Multifunctional additive automatic liquid supplementing device
CN103985791A (en) * 2014-06-04 2014-08-13 江苏汇景薄膜科技有限公司 Fully-automatic soaking-type transparent conducting film wool making device
CN104291256A (en) * 2014-09-29 2015-01-21 浙江长华汽车零部件有限公司 Solution replenishing device
CN105470170A (en) * 2015-11-23 2016-04-06 百力达太阳能股份有限公司 System of making uniform texturing-groove chemical groove liquid temperature
CN107190327A (en) * 2017-06-28 2017-09-22 通威太阳能(合肥)有限公司 It is a kind of to improve the method for wool-weaving machine fluid infusion uniformity
CN107968134A (en) * 2017-11-09 2018-04-27 常州捷佳创精密机械有限公司 A kind of liquid add-on system and method
CN111850537A (en) * 2020-07-17 2020-10-30 肇庆宏旺金属实业有限公司 Temperature control method applied to whole roll of stainless steel strip for black titanium plating
US12090457B2 (en) 2021-07-09 2024-09-17 Changxin Memory Technologies, Inc. Mixing apparatus

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102082202A (en) * 2010-11-29 2011-06-01 常州亿晶光电科技有限公司 Mechanically-agitating type liquid-replenishing device for wool-making groove
CN102082203A (en) * 2010-11-29 2011-06-01 常州亿晶光电科技有限公司 Bubbling and stirring type liquid-replenishing device with texturing tank
CN102082201A (en) * 2010-11-29 2011-06-01 常州亿晶光电科技有限公司 Isocyatic chemical reagent supplementing device
CN102569499A (en) * 2010-12-23 2012-07-11 无锡尚德太阳能电力有限公司 Etching system and etching method
TWI461660B (en) * 2011-04-06 2014-11-21 Smc Corp Liquid circulation supply device
CN102737732B (en) * 2011-04-06 2014-10-22 Smc株式会社 Cyclically liquid feeding apparatus
CN102737732A (en) * 2011-04-06 2012-10-17 Smc株式会社 Cyclically liquid feeding apparatus
CN103838176A (en) * 2014-03-11 2014-06-04 苏州润阳光伏科技有限公司 Multifunctional additive automatic liquid supplementing device
CN103985791A (en) * 2014-06-04 2014-08-13 江苏汇景薄膜科技有限公司 Fully-automatic soaking-type transparent conducting film wool making device
CN104291256A (en) * 2014-09-29 2015-01-21 浙江长华汽车零部件有限公司 Solution replenishing device
CN105470170A (en) * 2015-11-23 2016-04-06 百力达太阳能股份有限公司 System of making uniform texturing-groove chemical groove liquid temperature
CN105470170B (en) * 2015-11-23 2018-05-25 百力达太阳能股份有限公司 Make the uniform system of texturing slot chemistry tank liquor temperature
CN107190327A (en) * 2017-06-28 2017-09-22 通威太阳能(合肥)有限公司 It is a kind of to improve the method for wool-weaving machine fluid infusion uniformity
CN107968134A (en) * 2017-11-09 2018-04-27 常州捷佳创精密机械有限公司 A kind of liquid add-on system and method
CN111850537A (en) * 2020-07-17 2020-10-30 肇庆宏旺金属实业有限公司 Temperature control method applied to whole roll of stainless steel strip for black titanium plating
CN111850537B (en) * 2020-07-17 2022-08-16 肇庆宏旺金属实业有限公司 Temperature control method applied to whole roll of stainless steel strip for black titanium plating
US12090457B2 (en) 2021-07-09 2024-09-17 Changxin Memory Technologies, Inc. Mixing apparatus

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